CN1851892A - Vacuum mechanical-arm - Google Patents
Vacuum mechanical-arm Download PDFInfo
- Publication number
- CN1851892A CN1851892A CN 200510126404 CN200510126404A CN1851892A CN 1851892 A CN1851892 A CN 1851892A CN 200510126404 CN200510126404 CN 200510126404 CN 200510126404 A CN200510126404 A CN 200510126404A CN 1851892 A CN1851892 A CN 1851892A
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- CN
- China
- Prior art keywords
- arm
- fixed
- vacuum mechanical
- wafer
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005101264046A CN100388457C (en) | 2005-12-08 | 2005-12-08 | Vacuum mechanical-arm |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005101264046A CN100388457C (en) | 2005-12-08 | 2005-12-08 | Vacuum mechanical-arm |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1851892A true CN1851892A (en) | 2006-10-25 |
CN100388457C CN100388457C (en) | 2008-05-14 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101264046A Active CN100388457C (en) | 2005-12-08 | 2005-12-08 | Vacuum mechanical-arm |
Country Status (1)
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CN (1) | CN100388457C (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101383319B (en) * | 2007-09-06 | 2011-03-30 | 细美事有限公司 | End effector and robot for transferring a substrate having the same |
CN102085658A (en) * | 2009-12-07 | 2011-06-08 | 株式会社安川电机 | Horizontal multi-joint robot and transportation apparatus including the same |
CN102481690A (en) * | 2009-08-26 | 2012-05-30 | 日本电产三协株式会社 | Industrial robot |
CN102560406A (en) * | 2010-12-24 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Physical vapor deposition (PVD) device and method for processing wafers by adopting same |
CN103227084A (en) * | 2013-04-10 | 2013-07-31 | 天通吉成机器技术有限公司 | Film spool conveying system of plasma etcher |
WO2017024758A1 (en) * | 2015-08-07 | 2017-02-16 | 京东方科技集团股份有限公司 | Crucible replacement device |
CN110744733A (en) * | 2019-09-25 | 2020-02-04 | 林金雄 | Wafer scribing machine with PLC built-in octagon chip based on conveying optimization |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5830272A (en) * | 1995-11-07 | 1998-11-03 | Sputtered Films, Inc. | System for and method of providing a controlled deposition on wafers |
US6126381A (en) * | 1997-04-01 | 2000-10-03 | Kensington Laboratories, Inc. | Unitary specimen prealigner and continuously rotatable four link robot arm mechanism |
JP2001035837A (en) * | 1999-07-19 | 2001-02-09 | Matsushita Electric Ind Co Ltd | Dry etch treatment device and treatment method of substrate |
JP2003022417A (en) * | 2001-07-10 | 2003-01-24 | Sharp Corp | Character string recognition device |
JP3804780B2 (en) * | 2002-04-25 | 2006-08-02 | ナブテスコ株式会社 | Robot arm and robot |
EP1684951B1 (en) * | 2003-11-10 | 2014-05-07 | Brooks Automation, Inc. | System for handling workpieces in a vacuum-based semiconductor handling system |
-
2005
- 2005-12-08 CN CNB2005101264046A patent/CN100388457C/en active Active
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101383319B (en) * | 2007-09-06 | 2011-03-30 | 细美事有限公司 | End effector and robot for transferring a substrate having the same |
CN102481690A (en) * | 2009-08-26 | 2012-05-30 | 日本电产三协株式会社 | Industrial robot |
CN102481690B (en) * | 2009-08-26 | 2015-04-01 | 日本电产三协株式会社 | Industrial robot |
CN102085658A (en) * | 2009-12-07 | 2011-06-08 | 株式会社安川电机 | Horizontal multi-joint robot and transportation apparatus including the same |
CN102560406A (en) * | 2010-12-24 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Physical vapor deposition (PVD) device and method for processing wafers by adopting same |
CN102560406B (en) * | 2010-12-24 | 2013-10-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Physical vapor deposition (PVD) device and method for processing wafers by adopting same |
CN103227084A (en) * | 2013-04-10 | 2013-07-31 | 天通吉成机器技术有限公司 | Film spool conveying system of plasma etcher |
CN103227084B (en) * | 2013-04-10 | 2016-01-06 | 天通吉成机器技术有限公司 | A kind of biography sheet system of plasma etching machine |
WO2017024758A1 (en) * | 2015-08-07 | 2017-02-16 | 京东方科技集团股份有限公司 | Crucible replacement device |
CN110744733A (en) * | 2019-09-25 | 2020-02-04 | 林金雄 | Wafer scribing machine with PLC built-in octagon chip based on conveying optimization |
Also Published As
Publication number | Publication date |
---|---|
CN100388457C (en) | 2008-05-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: BEIFANG MICROELECTRONIC BASE EQUIPMENT PROCES RESE Free format text: FORMER OWNER: BEIJING YUANHE ELECTRONIC TECHNOLOGY CO., LTD. Effective date: 20110311 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100016 NO. 1, JIUXIANQIAO EAST ROAD, CHAOYANG DISTRICT, BEIJING TO: 100015 NO. 1, JIUXIANQIAO EAST ROAD, CHAOYANG DISTRICT, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20110311 Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: Beijing Yuanhe Electronic Technology Co., Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |