CN201913647U - Robot arm mechanism - Google Patents
Robot arm mechanism Download PDFInfo
- Publication number
- CN201913647U CN201913647U CN2010206727290U CN201020672729U CN201913647U CN 201913647 U CN201913647 U CN 201913647U CN 2010206727290 U CN2010206727290 U CN 2010206727290U CN 201020672729 U CN201020672729 U CN 201020672729U CN 201913647 U CN201913647 U CN 201913647U
- Authority
- CN
- China
- Prior art keywords
- arm
- big
- forearm
- arms
- driving shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The utility model relates to a robot arm mechanism, which belongs to the technical field of industrial robots. The robot arm mechanism comprises a driving unit and two arm components, wherein both the two arm components comprise big arms, small arms and end effectors; synchronous pulleys are arranged in the big arms and the small arms respectively; the big arms of the two arm components are coaxially arranged; telescopic driving shafts of the big arms of the two arm components are connected with belt wheels in the big arms of the two arm components; casings of the two big arms are connected with rotary driving shafts of the two big arms to form a four-shaft coaxial structure; and the four driving shafts are connected with respective independent driving mechanisms in the driving unit respectively. The rotary driving shafts and the telescopic driving shafts of the two arm components are independent, arranged in a vertically crossed manner and make rotating motion and radial telescopic motion in two different rotating planes around the common rotating shaft, so as to form the arm mechanism with four freedoms, and when one arm is used for taking and placing wafers at a station, the other arm can rotate to the other station for preparation work of taking and placing wafers within the range without being disturbed, so that the working efficiency is improved.
Description
Technical field
The invention belongs to the industrial robot technical field, particularly relate to a kind of robot arm mechanism.
Background technology
Be used for the small scale robot of semiconductor devices carrying, must can adapt to high-cleanness, high and the narrow and small environment for use in space, satisfy simultaneously simple and compact for structure, the rigidity of structure is high, motion flexibility and reliability, repetitive positioning accuracy height and the high requirement of reliability.In order to increase work efficiency, usually two groups of mechanical arms are installed on the same revolving dial, after one group of arm was got sheet, another group arm can film releasing.Gyration between two arms is by same drive shaft.Its arm is finished after a station picks and places sheet, need be turned back to another station, goes to finish the sheet work that picks and places of another station, and efficient is low.
The modal both hands arm transfer robot that is used for clean environment mainly contains both arms drive concertina type robot and the public driving concertina type of both arms robot both at home and abroad at present.Stretching of the former every group of arm respectively needs 1 driver, the public driver of the revolution of every group of arm, thus need 3 drivers altogether, flexible public 1 driver of two groups of arms of the latter, a public revolution driver altogether need 2 drivers.The patent US5765444 of Kensington Laboratories application has announced the arm mechanism that a kind of both arms drive is flexible.The patent US5857826 of Japan Daikin company adopts a kind of both arms public machine driven people that stretches, and its arm segment in height is divided into two-layer, promptly big arm and forearm.Public drive link and auxiliary connecting rod are between big arm and forearm.In order to give the motion spacing of public drive link and auxiliary connecting rod, the necessary attenuate of the segment thickness of big arm and forearm causes the rigidity of big forearm to reduce.The patent WO 2008/124108 of Hosek Martin application proposes to adopt the Watt six-bar mechanism to realize two groups of SCARA (Selective Compliance Assembly Robot Arm, select the compliance arm that puts together machines) extension and contraction control of arm, the big arm rotating shaft of the public drive link of its isosceles triangle and scara arm has tangible overlapping region.For avoiding movement interference, public drive link and auxiliary connecting rod can only be installed in the big arm of scara arm top, are to save the space, require the thickness of public drive link and auxiliary connecting rod to be no more than the thickness of forearm usually, cause rigidity to reduce.
Summary of the invention
At the technical problem of above-mentioned existence, the object of the present invention is to provide a kind of robot arm mechanism, can adapt to the narrow and small environment for use in space, satisfy simple and compact for structure, motion flexibility and reliability simultaneously.
To achieve these goals, technical scheme of the present invention is as follows:
The present invention includes driver element and two arm assemblies, described two arm assemblies include big arm, forearm and end effector, in big arm and forearm, be equipped with synchronous pulley, the coaxial setting of big arm of described two arm assemblies, its big arm telescopic propeller shaft is connected with belt wheel in its big arm respectively, two big arm shells are connected with its rotary drive shaft respectively, form four coaxial configurations, four driving shafts respectively with driver element in separately independent driving mechanisms be connected.
Described two arm assemblies are arranged crosswise up and down, and promptly in the vertical direction is followed successively by: first arm, second largest arm, first forearm, second forearm, first end effector, second end effector.Described two arm assemblies all become U type structure between first arm and first forearm, second largest arm and second forearm on original duty vertical direction, two U type notches intersect stacked relatively.
The present invention has following advantage:
1. two arm assembly revolutions of the present invention, telescopic drive are separately independently, arranged crosswise up and down, do gyration and radial expansion motion at two different plane of rotations around common axis of rotation respectively, form the arm mechanism that the present invention has four frees degree, simplified drive mechanism, passed through to reduce unreliable parts, improved reliability, reduce production costs.
The present invention therein arm carry out a station pick and place sheet in, another arm can return back to another station in the scope that it is not interfered, prepare to pick and place sheet work, has improved operating efficiency greatly.In the big arm of two arm assemblies and forearm, synchronous belt drive mechanism are set, set corresponding gear ratio, and two end effectors are stacked up and down, realize the expanding-contracting action of both arms assembly, motion flexibly, reliable.
3. practical: the present invention can adapt to the narrow and small high-cleanness, high environment for use in space, satisfy simultaneously simple and compact for structure, the rigidity of structure is high, motion flexibility and reliability, repetitive positioning accuracy height and the high requirement of reliability.Be applicable to the semiconductor devices carrying, also be applicable to industry and occasion that other need small scale robot.
Description of drawings
Fig. 1 is the perspective view of the embodiment of the invention 1.
Fig. 2 is a planar structure schematic diagram of the present invention.
Fig. 3 is local interior's structural representation of arm assembly of the present invention.
Fig. 4 is a work schematic diagram of the present invention.
Fig. 5 is in the opposing parallel position for the present invention's two arms, two arm contraction state schematic diagrames.
Fig. 6 is in the opposing parallel position for the present invention's two arms, an arm deployed condition schematic diagram.
Fig. 7 is in relative limit turned position one for the present invention's two arms, the retracted mode schematic diagram.
Fig. 8 stretches out view for the present invention's two arms are in relative limit turned position one, one arm.
Fig. 9 is in relative limit turned position two for the present invention's two arms, the retracted mode schematic diagram.
Figure 10 stretches out view for the present invention's two arms are in relative limit turned position two, one arms.
Among the figure: 1. driver element, 2. first arm, 3. first forearm, 4. first end effector, 5. second largest arm, 6. second forearm, 7. second end effector, 8. first belt wheel 9. first is with, 10. second belt wheel synchronously, 11. the 3rd belt wheel, 12. second are with synchronously, 13. four-tapes wheel, 14. first arm telescopic propeller shaft, 15. first revolution of arm driving shafts, 16. second largest arm telescopic propeller shafts, 17. second largest revolution of arm driving shaft, 18. wafers, I, II, III, IV are respectively station.
The specific embodiment
Below in conjunction with drawings and Examples the present invention is described in further detail.
Embodiment: as shown in Figure 1-Figure 3, this example comprises driver element 1 and two arm assemblies, described two arm assemblies include big arm, forearm and end effector, in big arm and forearm, be equipped with synchronous pulley, the coaxial setting of big arm of described two arm assemblies, its big arm telescopic propeller shaft is connected with belt wheel in its big arm respectively, two big arm shells are connected with its rotary drive shaft respectively, form four coaxial configurations, four driving shafts respectively with driver element 1 in separately independent driving mechanisms be connected, the described independent driving mechanisms separately of this example is a drive motors.Specifically as shown in Figure 3, with second largest arm is example: second largest arm telescopic propeller shaft is installed in first belt wheel 8, second belt wheel 10 is coaxial fixing with the 3rd belt wheel 11 in second forearm 6, second end effector 7 is fixed on the four-tape wheel 13, and first, second is synchronously with on 9,12 belt wheels that place respectively in the second largest arm 5 and second forearm 6.
As shown in Figure 2, for avoiding interfering, described two arm assemblies are arranged crosswise up and down, and promptly in the vertical direction is followed successively by: first arm 2, second largest arm 5, first forearm 3, second forearm 6, first end effector 4, second end effector 7.On original duty vertical direction, all become U type structure between first arm and first forearm, second largest arm and second forearm, two U type notches intersect stacked relatively.The influence that interfered mutually in the space by two arm assemblies, the relative gyration of two arms are not 360 degree, fix one of them arm assembly, and the revolution of another arm assembly then can be limited in certain scope.
As Fig. 3-shown in Figure 10, this routine course of work is as follows:
The revolution action of two arm assemblies: as shown in Figure 3, driving first or second largest revolution of arm driving shaft 15,17, realize the gyration of first, second arm, the telescopic propeller shaft 14,16 of driving first or second largest arm, with second arm is example, second largest arm telescopic propeller shaft 16 drives first belt wheel 8 and rotates, drive with its second belt wheel 10 that is connected synchronously, with second belt wheel, 10 coaxial the 3rd belt wheels 11 that are connected, take turns and second end effector 7 with the four-tape of the 3rd belt wheel 11 rotation synchronously, finish stretching motion, realize picking and placeing wafer 18.
This arm mechanism is commonly used between a plurality of stations (six shown in Figure 4, can be more) the conveyance wafer, from station I conveyance to station II is the most frequently used action of arm, the action of conveyance wafer needs arm at first the end effector of arm to be turned back to the position, dead ahead of target station I, pass through the below of its stretching motion even wafer then, hoistable platform driving end effector by the driver element place upwards holds up wafer again, circular depressed on the end effector is avoided the landing of wafer, arm withdrawal then, the sheet of getting of finishing wafer moves, be turned back to again on the target station 2, finish the film releasing action by the stretching out of arm and the landing of hoistable platform.
Among the present invention, when under the driving of first end effector at driver element target station I being carried, second end effector can (this scope can freely return back to target station III simultaneously with reference to figure 7-Figure 10) within the specific limits, treat first end effector finish get sheet action after, second end effector can not delayed (promptly not needing to carry out gyration again) finish second wafer get the sheet action.
Claims (3)
1. robot arm mechanism, comprise driver element and two arm assemblies, described two arm assemblies include big arm, forearm and end effector, in big arm and forearm, be equipped with synchronous pulley, it is characterized in that: the coaxial setting of big arm of described two arm assemblies, its big arm telescopic propeller shaft is connected with belt wheel in its big arm respectively, two big arm shells are connected with its rotary drive shaft respectively, form four coaxial configurations, four driving shafts respectively with driver element in separately independent driving mechanisms be connected.
2. robot arm mechanism according to claim 1, it is characterized in that: described two arm assemblies are arranged crosswise up and down, and promptly in the vertical direction is followed successively by: first arm, second largest arm, first forearm, second forearm, first end effector, second end effector.
3. robot arm mechanism according to claim 1, it is characterized in that: described two arm assemblies are on original duty vertical direction, all become U type structure between first arm and first forearm, second largest arm and second forearm, two U type notches intersect stacked relatively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206727290U CN201913647U (en) | 2010-12-21 | 2010-12-21 | Robot arm mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206727290U CN201913647U (en) | 2010-12-21 | 2010-12-21 | Robot arm mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201913647U true CN201913647U (en) | 2011-08-03 |
Family
ID=44413461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206727290U Expired - Lifetime CN201913647U (en) | 2010-12-21 | 2010-12-21 | Robot arm mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201913647U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102554910A (en) * | 2010-12-21 | 2012-07-11 | 沈阳新松机器人自动化股份有限公司 | Arm mechanism of robot |
| CN105702607A (en) * | 2016-03-17 | 2016-06-22 | 东方晶源微电子科技（北京）有限公司 | Mechanical arm and inspection system |
| CN114940361A (en) * | 2022-06-21 | 2022-08-26 | 合肥维信诺科技有限公司 | Support device and control system |
-
2010
- 2010-12-21 CN CN2010206727290U patent/CN201913647U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102554910A (en) * | 2010-12-21 | 2012-07-11 | 沈阳新松机器人自动化股份有限公司 | Arm mechanism of robot |
| CN105702607A (en) * | 2016-03-17 | 2016-06-22 | 东方晶源微电子科技（北京）有限公司 | Mechanical arm and inspection system |
| WO2017156820A1 (en) * | 2016-03-17 | 2017-09-21 | Dongfang Jingyuan Electron Limited | Cable drive robot mechanism for exchanging samples |
| CN105702607B (en) * | 2016-03-17 | 2018-09-25 | 东方晶源微电子科技（北京）有限公司 | Mechanical arm and inspection system |
| CN114940361A (en) * | 2022-06-21 | 2022-08-26 | 合肥维信诺科技有限公司 | Support device and control system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102554910A (en) | Arm mechanism of robot | |
| CN102476383B (en) | Planar articulated robot arm mechanism | |
| CN203003891U (en) | Economical selective compliance assembly robot arm (SCARA) robot | |
| CN104071580B (en) | Five axis bridge glass stacking machine people | |
| CN201881384U (en) | Arm mechanism of planar multi-joint robot | |
| CN204209684U (en) | The high speed SCARA robot that full fixed electrical machinery drives | |
| CN104723332B (en) | A kind of direct-drive type may be reversed wafer transfer robot | |
| CN105750437A (en) | Automatic manipulator | |
| CN206185864U (en) | Can supply to carry automatic robot of article | |
| CN105026115A (en) | Robot having arm with unequal link lengths | |
| CN105522563A (en) | Multi-joint robot | |
| CN102528793A (en) | End effector overturnable mechanism for carrying plate-shaped workpiece | |
| CN107097245A (en) | A kind of single motor for adapting to any handgrip position drives the mechanism of many handgrips | |
| CN201913647U (en) | Robot arm mechanism | |
| CN102064127A (en) | Mechanical hand for fetching and delivering silicon wafers | |
| CN104827488A (en) | Vertical position driving mechanism of four-freedom-degree high-speed conveying robot | |
| JP6277672B2 (en) | robot | |
| CN103811385B (en) | A kind of manipulator mechanism for transporting wafer | |
| CN104786211A (en) | Six-freedom-degree industrial robot with ball screw pairs | |
| CN201877413U (en) | Mechanical arm for fetching silicon wafer | |
| CN104723324A (en) | Four-degree-of-freedom electric multi-joint mechanical arm | |
| CN206140499U (en) | SCARA robot | |
| CN104425309B (en) | Film magazine loading attachment loads chamber, Transmission system and semiconductor processing equipment | |
| CN106625591A (en) | Five-degrees-of-freedom parallel mechanism achieving three-degrees-of-freedom translational motion and two-degrees-of-freedom rotational motion | |
| CN202948907U (en) | Substrate transmission robot arm |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110803 |
|
| CX01 | Expiry of patent term |