CN104037114B - Wafer automatic clamping and placing manipulator - Google Patents
Wafer automatic clamping and placing manipulator Download PDFInfo
- Publication number
- CN104037114B CN104037114B CN201310070328.6A CN201310070328A CN104037114B CN 104037114 B CN104037114 B CN 104037114B CN 201310070328 A CN201310070328 A CN 201310070328A CN 104037114 B CN104037114 B CN 104037114B
- Authority
- CN
- China
- Prior art keywords
- driving device
- vertical lift
- horizontal
- plate
- horizontal stretching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Abstract
The invention discloses a kind of wafer automatic clamping and placing manipulators,Mechanical arm linear reciprocation can be slidingly positioned on horizontal stretching positioning plate in the horizontal plane,Horizontal stretching positioning plate can be around the rotational positioning of vertical direction axis on vertical lift plate,Vertical lift plate can vertically straight line lifting be positioned on pedestal,The horizontal stretching driving device,It rotates horizontally driving device and vertical lift driving device respectively drives mechanical arm,Horizontal stretching positioning plate and vertical lift plate action,And the mechanical arm is equipped at least one sucker,Controller difference controlled level stretching, extension driving device,Rotate horizontally driving device,It is vertically moved up or down the vacuum suction device action of driving device and sucker,Wafer quickly can be put into or taken out wafer cassette by the present invention,Automatic control,Without human assistance,It is fast to pick and place speed,Access position is accurate.
Description
Technical field
The present invention relates to a kind of manipulator, more particularly to a kind of wafer automatic clamping and placing manipulator.
Background technology
In the production of wafer single side striping, wafer striping processing method places wafer operation, work efficiency to be manually manual
It is very low, increase larger human cost to company, while also there are some accident potential for manual work.
The content of the invention
In order to overcome drawbacks described above, the present invention provides a kind of wafer automatic clamping and placing manipulator, the wafer automatic clamping and placing machines
Tool hand makes wafer be picked and placeed automatically to carry out striping action to designated position and realize automated job, and its to pick and place wafer speed fast,
Access position is accurate.
The present invention in order to solve its technical problem used by technical solution be：A kind of wafer automatic clamping and placing manipulator, bag
It includes the substrate being fixedly installed on wafer striping equipment rack, horizontal stretching driving device, rotate horizontally driving device, vertical liter
Drop driving device, horizontal stretching positioning plate, vertical lift plate, mechanical arm and controller, mechanical arm can be in the horizontal plane
Linear reciprocation is slidingly positioned on horizontal stretching positioning plate, horizontal stretching positioning plate can around the rotational positioning of vertical direction axis in
Be vertically moved up or down on plate, vertical lift plate can vertically straight line lifting be positioned on substrate, horizontal stretching driving dress
It puts, rotate horizontally driving device and is vertically moved up or down driving device and respectively drive mechanical arm, horizontal stretching positioning plate and vertical liter
Plate action is dropped, and the mechanical arm is equipped at least one sucker, controller difference controlled level stretching, extension driving device, level
The vacuum suction device action of rotating driving device, vertical lift driving device and sucker.
As a further improvement on the present invention, the horizontal stretching positioning plate can around the rotational positioning of vertical direction axis in
Vertical lift plate on structure be：It can be around vertical direction equipped with horizontal rotation positioning seat and horizontal rotation shaft, horizontal rotation shaft
Axis rotary insertion is arranged in positioning seat, is rotated horizontally positioning seat and is fixedly mounted on vertical lift plate, rotates horizontally driving device and drive
Dynamic horizontal rotation shaft rotates, and horizontal stretching positioning plate is fixed on horizontal rotation shaft upper end.
As a further improvement on the present invention, it is described vertical lift plate can vertically straight line lifting be positioned at substrate
On structure be：Vertical lift locating rack is additionally provided with, the vertical lift locating rack is fixed on substrate, vertical lifting locating rack
On can rotate equipped with a screw, screw is axially vertically placed, and engaging sleeve is equipped with a nut on screw, the nut with
Vertical lift plate is connected, vertical lift driving device driving screw rotation.
As a further improvement on the present invention, vertical guide sleeve is additionally provided on the vertical lift locating rack, is vertically moved up or down plate
Line slideway is equipped with, the line slideway slip is inserted in guide sleeve.
As a further improvement on the present invention, the mechanical arm linear reciprocation can be slidingly positioned in water in the horizontal plane
Structure on flattened exhibition positioning plate is：It can in the same direction be slided equipped with a horizontal stretching with mechanical arm on horizontal stretching positioning plate
Platform, the horizontal stretching driving device are fixed on the horizontal stretching platform, and horizontal stretching driving device all has output for both ends
The twin shaft motor of axis, the output shaft at the twin shaft motor both ends are respectively equipped with a gear and a drive pulley, horizontal stretching
Be installed on positioning plate one along mechanical arm glide direction rack, the gear and the rack engaged transmission, horizontal stretching platform
Negative pulley wheel is equipped with, is additionally provided with belt, the belt sleeve is arranged on the outside of active and passive belt pulley, and belt and mechanical arm
Stop connects.
As a further improvement on the present invention, the vacuum suction device on the sucker is vacuum generator.
As a further improvement on the present invention, the horizontal rotation driving device and vertical lift driving device are horse
It reaches.
The beneficial effects of the invention are as follows：The present invention realizes that manipulator horizontal stretching, rotation and lifting are dynamic by motor rotation
Make, then held by the suction nozzle on mechanical arm do after wafer specify pick and place, carrying acts；The manipulator mechanism can be quick
Wafer is put into or taken out wafer cassette, automatic control without human assistance, picks and places that speed is fast, and access position is accurate.
Description of the drawings
Fig. 1 is the front view of the present invention；
Fig. 2 is the top view of the present invention；
Fig. 3 is the left view of the present invention；
Fig. 4 is the right view of the present invention；
Fig. 5 is the longitudinal lifting structure principle schematic of the present invention；
Fig. 6 is the first stereogram of the present invention；
Fig. 7 is the second stereogram of the present invention；
Fig. 8 is the use state diagram of the present invention.
Specific embodiment
Embodiment：A kind of wafer automatic clamping and placing manipulator, including the substrate being fixedly installed on wafer striping equipment rack
1st, horizontal stretching driving device 2, rotate horizontally driving device 3, be vertical lift driving device 4, horizontal stretching positioning plate 5, vertical
Lifter plate 9, mechanical arm 10 and controller, mechanical arm 10 linear reciprocation can be slidingly positioned in horizontal stretching in the horizontal plane
On positioning plate 5, horizontal stretching positioning plate 5 can be vertically moved up or down plate around the rotational positioning of vertical direction axis on vertical lift plate 9
9 can vertically straight line lifting be positioned on substrate, the horizontal stretching driving device 2 rotates horizontally driving device 3 and
Vertical lift driving device 4 respectively drives mechanical arm 10, horizontal stretching positioning plate 5 and vertical lift plate 9 and acts, and the machine
Tool arm 10 is equipped at least one sucker 11, and controller difference controlled level stretching, extension driving device 2 rotates horizontally driving device
3rd, the vacuum suction device action of driving device 4 and sucker 11 is vertically moved up or down, manipulator is mounted on wafer striping equipment rack
One side is rotated by driving manipulator arm 10, lifted, stretched, and then sucker 11 is driven to hold wafer into wafer cassette and retreat
Wafer is taken out, wafer carrying is then placed on other setting positions；Opposite mechanical arm 10 can also be from other setting positions
It puts and gets wafer, be then placed in the wafer cassette specified；Which achieves the actions that mechanical arm 10 carries wafer, carry
Speed is fast, and carrying position is accurate, does not damage wafer.
The horizontal stretching positioning plate 5 can around the rotational positioning of vertical direction axis in vertical lift plate 9 on structure be：
Equipped with positioning seat 6 and horizontal rotation shaft 7 is rotated horizontally, horizontal rotation shaft can be arranged on positioning seat around vertical direction axis rotary insertion
In, it rotates horizontally positioning seat and is fixedly mounted on vertical lift plate 9, rotate horizontally driving device 3 and horizontal rotation shaft is driven to rotate,
Horizontal stretching positioning plate 5 is fixed on horizontal rotation shaft upper end, and band is transferred in horizontal rotation positioning seat inward turning by horizontal rotation shaft
Dynamic horizontal stretching positioning plate 5 rotates, and then realizes the spinning movement of mechanical arm 10, naturally it is also possible to directly in vertical lift plate
Set motor that horizontal stretching positioning plate 5 is driven to rotate on 9.
The vertical lift plate 9 can the structure that is positioned on substrate of straight line lifting be vertically：It is additionally provided with vertical
Locating rack 8 is lifted, the vertical lift locating rack is fixed on substrate 1, can be rotated equipped with one on vertical lifting locating rack
Bar, screw are axially vertically placed, and engaging sleeve is equipped with a nut on screw, and the nut is connected with vertical lift plate 9, hangs down
Straight lifting drive 4 drives screw rotation, and the vertical lifting of leading screw and nut mechanism realization vertical lift plate 9 is driven by motor
Action, stable transmission, position is accurate, can also be by 12 rack structure of transmission belt or gear, also in addition to such structure
Or slider-crank mechanism is realized, is all the equivalent substitution that those skilled in the art are readily conceivable that according to this patent.
Vertical guide sleeve is additionally provided on the vertical lift locating rack, vertical lift plate 9 is equipped with line slideway, the straight line
Guide rail slip is inserted in guide sleeve, is played and is vertically directed position-limiting action.
The mechanical arm 10 linear reciprocation can be slidingly positioned in the structure on horizontal stretching positioning plate 5 in the horizontal plane
For：It can in the same direction be slided with mechanical arm 10 on horizontal stretching positioning plate 5 and be equipped with a horizontal stretching platform, the horizontal stretching driving
Device 2 is fixed on the horizontal stretching platform, and horizontal stretching driving device 2 all has the twin shaft motor of output shaft, this pair for both ends
The output shaft at axis motor both ends is respectively equipped with a gear 12 and a drive pulley 13, fixed on horizontal stretching positioning plate 5
Have one along 10 glide direction of mechanical arm rack, the gear 12 and the rack engaged transmission, horizontal stretching platform is equipped with quilt
Dynamic belt pulley is additionally provided with belt 14, and the belt 14 is sheathed on the outside of active and passive belt pulley, and belt 14 and mechanical arm 10
Stop connects, which can move twice gear by driving manipulator arm 10 in 12 one perimeter locations of swing offset of gear
The displacement of 12 perimeters；10 horizontal stretching amount of mechanical arm can be by more in the case where motor torsional moment and mechanism size allow
The drive pulley 13 different from 12 diameter of gear is changed to change, private space is small, and producing cost is low, and translational speed is fast.
Vacuum suction device on the sucker 11 is vacuum generator.
The horizontal rotation driving device 3 and vertical lift driving device 4 are motor.
Claims (6)
1. a kind of wafer automatic clamping and placing manipulator, it is characterised in that：Including the base being fixedly installed on wafer striping equipment rack
Plate (1), horizontal stretching driving device (2), horizontal rotation driving device (3), vertical lift driving device (4), horizontal stretching are fixed
Position plate (5), vertical lift plate (9), mechanical arm (10) and controller, mechanical arm (10) being capable of linear reciprocations in the horizontal plane
It is slidingly positioned on horizontal stretching positioning plate (5), horizontal stretching positioning plate (5) can be around the rotational positioning of vertical direction axis in vertical
On straight lifter plate (9), vertical lift plate (9) can vertically straight line lifting be positioned on substrate, the horizontal stretching drives
It moves device (2), horizontal rotation driving device (3) and vertical lift driving device (4) respectively drives mechanical arm (10), level is stretched
It opens up positioning plate (5) and vertical lift plate (9) acts, and the mechanical arm (10) is equipped at least one sucker (11), control
Device difference controlled level stretching, extension driving device (2) rotates horizontally driving device (3), vertical lift driving device (4) and sucker
(11) vacuum suction device action, the mechanical arm (10) linear reciprocation can be slidingly positioned in level and stretch in the horizontal plane
Structure in exhibition positioning plate (5) is：It can in the same direction be slided with mechanical arm (10) on horizontal stretching positioning plate (5) and be equipped with a level
Extending table, the horizontal stretching driving device (2) are fixed on the horizontal stretching platform, and horizontal stretching driving device (2) is both ends
All there is the twin shaft motor of output shaft, the output shaft at the twin shaft motor both ends is respectively equipped with a gear (12) and an active skin
Belt wheel (13), be installed on horizontal stretching positioning plate (5) one along mechanical arm (10) glide direction rack, the gear (12)
With rack engaged transmission, horizontal stretching platform is equipped with negative pulley wheel, is additionally provided with belt (14), the belt (14) is sheathed on
On the outside of active and passive belt pulley, and belt (14) is connected with mechanical arm (10) stop.
2. wafer automatic clamping and placing manipulator according to claim 1, it is characterised in that：The horizontal stretching positioning plate (5)
Can be in the structure on vertical lift plate (9) around the rotational positioning of vertical direction axis：Equipped with horizontal rotation positioning seat (6) and water
Flat rotation axis (7), horizontal rotation shaft can be arranged on around vertical direction axis rotary insertion in positioning seat, are rotated horizontally positioning seat and are fixed peace
On vertical lift plate (9), rotate horizontally driving device (3) and horizontal rotation shaft is driven to rotate, horizontal stretching positioning plate (5) is solid
Due to horizontal rotation shaft upper end.
3. wafer automatic clamping and placing manipulator according to claim 1, it is characterised in that：The vertical lift plate (9) can
Vertically the structure that is positioned on substrate of straight line lifting is：Vertical lift locating rack (8) is additionally provided with, the vertical lift is fixed
Position frame is fixed on substrate (1), can be rotated on vertical lifting locating rack equipped with a screw, screw is axially vertically put
It puts, engaging sleeve is equipped with a nut on screw, and the nut is connected with vertical lift plate (9), and vertical lift driving device (4) drives
Screw rotates.
4. wafer automatic clamping and placing manipulator according to claim 3, it is characterised in that：On the vertical lift locating rack also
Equipped with vertical guide sleeve, vertical lift plate (9) is equipped with line slideway, and the line slideway slip is inserted in guide sleeve.
5. wafer automatic clamping and placing manipulator according to claim 1, it is characterised in that：Vacuum on the sucker (11) is inhaled
Leading-in device is vacuum generator.
6. wafer automatic clamping and placing manipulator according to claim 1, it is characterised in that：The horizontal rotation driving device
(3) and vertical lift driving device (4) is motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310070328.6A CN104037114B (en) | 2013-03-06 | 2013-03-06 | Wafer automatic clamping and placing manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310070328.6A CN104037114B (en) | 2013-03-06 | 2013-03-06 | Wafer automatic clamping and placing manipulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104037114A CN104037114A (en) | 2014-09-10 |
| CN104037114B true CN104037114B (en) | 2018-05-18 |
Family
ID=51467835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310070328.6A Expired - Fee Related CN104037114B (en) | 2013-03-06 | 2013-03-06 | Wafer automatic clamping and placing manipulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104037114B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111354668B (en) * | 2018-12-24 | 2023-09-29 | 上海微电子装备（集团）股份有限公司 | Silicon wafer transmission system and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101045294A (en) * | 2006-03-29 | 2007-10-03 | 旺矽科技股份有限公司 | Multi-direction type grab |
| CN101383313A (en) * | 2008-10-24 | 2009-03-11 | 陈百捷 | Manipulator for fetching and delivering silicon chip |
| CN101409245A (en) * | 2008-11-20 | 2009-04-15 | 陈百捷 | Automatic control silicon chip check system |
| CN102064127A (en) * | 2010-10-11 | 2011-05-18 | 北京自动化技术研究院 | Mechanical hand for fetching and delivering silicon wafers |
| CN203218245U (en) * | 2013-03-06 | 2013-09-25 | 昆山富利瑞电子科技有限公司 | Mechanical hand capable of automatically taking and placing wafer |
-
2013
- 2013-03-06 CN CN201310070328.6A patent/CN104037114B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101045294A (en) * | 2006-03-29 | 2007-10-03 | 旺矽科技股份有限公司 | Multi-direction type grab |
| CN101383313A (en) * | 2008-10-24 | 2009-03-11 | 陈百捷 | Manipulator for fetching and delivering silicon chip |
| CN101409245A (en) * | 2008-11-20 | 2009-04-15 | 陈百捷 | Automatic control silicon chip check system |
| CN102064127A (en) * | 2010-10-11 | 2011-05-18 | 北京自动化技术研究院 | Mechanical hand for fetching and delivering silicon wafers |
| CN203218245U (en) * | 2013-03-06 | 2013-09-25 | 昆山富利瑞电子科技有限公司 | Mechanical hand capable of automatically taking and placing wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104037114A (en) | 2014-09-10 |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180518 |
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| CF01 | Termination of patent right due to non-payment of annual fee |