CN100582752C - Foreign matter checking method for transparent thin-film - Google Patents

Foreign matter checking method for transparent thin-film Download PDF

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Publication number
CN100582752C
CN100582752C CN200410055732A CN200410055732A CN100582752C CN 100582752 C CN100582752 C CN 100582752C CN 200410055732 A CN200410055732 A CN 200410055732A CN 200410055732 A CN200410055732 A CN 200410055732A CN 100582752 C CN100582752 C CN 100582752C
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CN
China
Prior art keywords
foreign matter
area
clarity films
film
ratio
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Expired - Fee Related
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CN200410055732A
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Chinese (zh)
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CN1580749A (en
Inventor
筱塚淳彦
本多聪
出口修央
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Sumitomo Chemical Co Ltd
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Sumitomo Chemical Co Ltd
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Priority to JP204497/03 priority Critical
Priority to JP204497/2003 priority
Priority to JP2003204497A priority patent/JP4396160B2/en
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of CN1580749A publication Critical patent/CN1580749A/en
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Publication of CN100582752C publication Critical patent/CN100582752C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties

Abstract

Provided is a foreign object inspection method for a transparent film to accurately and rapidly determine whether the transparent film is good or bad by removing foreign objects deposited on a surface of the transparent film and then detecting the number of foreign objects therewithin. According to this method, the transparent film is moved between two polarizing plates arranged in cross nicols between a light source and a camera, light transmitted from the light source is photographed by the camera, and the foreign objects within the transparent film are inspected by processing an image thus obtained. The method is characterized in that removal treatment of foreign objects deposited on the surface of the transparent film is performed based on the shape of the foreign objects and on the signal intensity of the foreign objects, and then the number of foreign objects therewithin is detected to determine whether the transparent film is good or bad.

Description

The foreign matter checking method of clarity films
Technical field
The present invention relates to the inspection method of the foreign matter of clarity films.Specifically, after the removal that relates to the foreign matter that carries out the clarity films surface attachment is handled, detect the foreign matter checking method that the foreign matter number is judged the quality of clarity films.
Background technology
Foreign matter in the clarity films of the clarity films, particularly optical applications of polycarbonate film, polymethacrylate film, polyethylene terephthalate film, polyvinyl alcohol film, triacetylcellulose film, polyolefin film, norborene series thin film etc. becomes problem.
These clarity films can be separately or lamination use.These films or laminate film often are processed into the state of single face stickup protective film at least after manufacturing.
It is indispensable that the foreign matter of clarity films becomes the inspection of product defect.Check and for example adopt following method, that is, 2 Polarizers are in the cross Nicols mode, it is the state configuration of their polarizing axis direction quadrature, the clarity films of checking is configured between 2 Polarizers, from light source irradiation light, observes the method for the picture that sees through light by gamma camera.
The clarity films of checking is the occasion of protective film adhesion Polarizer, and with respect to the Polarizer of checking usefulness, the protective film that will check adhesion Polarizer carries out with the cross Nicols state configuration.The light that sees through the protective film adhesion Polarizer that will check is examined with Polarizer and interdicts fully, but the Polarizer that will check is observed as if there being foreign matter etc. then can form light by checking with Polarizer one side, thereby can carry out inspection of foreign substance.The Polarizer that the foreign matter of opposition side will be checked by upset can be checked too.
(for example, with reference to patent documentation 1 (the 1st page of 12-17 is capable) and patent documentation 2 (the 4th page of 15-21 is capable).)。
[patent documentation 1]
The spy opens 2000-206327 communique (paragraph [0002])
[patent documentation 2]
Does the spy open 2001-349839 communique (paragraph [0012], paragraph [0013])?
The method that the clarity films that configuration will be checked between 2 Polarizers of this cross Nicols configuration carries out is good method, but the foreign matter that can not declare the inside of the clarity films that maybe check still is the foreign matter of surface attachment.
Static takes place in clarity films when contact, friction and the protective film pasted are peeled off etc., dust is adhered on the surface easily.
When checking the foreign matter of clarity films, remove even carry out the dust of surface attachment, also can't fully remove, influenced precision.
The purpose of this invention is to provide the foreign matter that to remove the clarity films surface attachment, detect the foreign matter number, high precision and judge the foreign matter checking method of clarity films of the quality of clarity films rapidly.
The present inventor is in order to solve relevant issues, foreign matter checking method to clarity films has carried out careful research, found that: in general, in the environment purification or non-environment purification of handling optical material, the foreign matter that is shaped as flat or lousiness shape or the big relatively foreign matter that detect, it often not the foreign matter that clarity films that the inside of clarity films exists produces, aspect ratio by setting the foreign matter shape or area liken to and are determinating reference, or setting threshold is judged in the signal intensity of image, can behind the foreign matter of removing the clarity films surface attachment, detect the foreign matter number and come high precision to judge the quality of clarity films rapidly, realize the present invention.
Promptly, the present invention is a kind of foreign matter checking method of clarity films, between light source and gamma camera, clarity films is moved between with 2 Polarizers of cross Nicols form configuration, take the light that sees through this film from light source with gamma camera, by the foreign matter in its image processing inspection clarity films, it is characterized in that, after the removal of carrying out the foreign matter of clarity films surface attachment according to the signal intensity of the shape of foreign matter and foreign matter is handled, detect the foreign matter number, judge the quality of clarity films.
Description of drawings
Fig. 1 is the mode chart of method of the inspection of foreign substance of clarity films.
Fig. 2 is the figure that expression detects the image example of foreign matter.
Fig. 3 is the key diagram of method of the shape of regulation foreign matter.
Fig. 4 is the illustration figure that shows above the foreign matter of the signal intensity of high strength threshold value (threshold value 2).
Fig. 5 is the illustration figure that shows the foreign matter of the signal intensity more than not enough high strength threshold value (threshold value 2) and the low-intensity threshold value (threshold value 1).
[explanation of symbol]
1: Polarizer
2: Polarizer
3: clarity films
10: light source
20: gamma camera
30: image-processing system
Embodiment
Fig. 1 is the mode chart of method of the inspection of foreign substance of expression clarity films.Configuration 2 Polarizers (1,2) between light source (10) and the gamma camera (20), the clarity films (3) that configuration therebetween will be checked.Here, 2 Polarizers are with mutually orthogonal Nicol, and promptly their polarizing axis direction becomes mutually orthogonal state configuration.Picture intelligence from gamma camera is handled by image-processing system (30), detects foreign matter and outputs to display.In addition, when the clarity films that check was Polarizer, above-mentioned 2 Polarizers only disposed one of them.
Select to see through the axial polarisation component of polarisation of Polarizer (1) from the light of light source (10), if no foreign matter, the light that then sees through clarity films is by Polarizer (2) prevention in the clarity films (3), and the shooting image of gamma camera presents dead color.If there is the different foreign matter of phase differential with the normal part of periphery, then the polarized condition of this part changes in the clarity films, and the light that sees through clarity films is occurring light (bright spot) by Polarizer (2) in dark shooting image.
Inspection object of the present invention so long as clarity films get final product, be not particularly limited, for example, polycarbonate film, polymethacrylate film, polyethylene terephthalate film, polyvinyl alcohol film, triacetylcellulose film, polyolefin film, norborene series thin film etc.
Gamma camera adopts common CCD gamma camera, and the picture intelligence of taking acquisition utilizes computer system to carry out image processing in image-processing system and detects foreign matter.
Fig. 2 represents to detect the image example of foreign matter.Among the figure, (A) being foreign matter in the clarity films, (B) being the raw-silk waste shape foreign matter that clarity films adheres to, (C) is the bigger foreign matter example that clarity films adheres to.
Foreign matter in the clarity films is the material that is caused by raw material, or the insolubles that is generated by the composition that constitutes film in the clarity films manufacturing, or the outside material of bringing into etc.
Though depend on the resolution of the CCD gamma camera of employing; but when replacing CCD gamma camera inspection foreign matter with microscope, but the foreign matter that is comprised in the high Precision Detection transparent membrane, but sensing range is narrow; check and all take time very much, can not say so and to check the good method of a plurality of samples rapidly.
The foreign matter of Fig. 2 (B), (C) does not almost observe with microscopic examination clarity films inside the time, and can wait by the clarity films after the cleaning detection and reduce, and therefore thinks the foreign matter of the surface attachment of clarity films.
Among the present invention, at first differentiate the foreign matter of the surface attachment of clarity films according to foreign matter shape and signal intensity.
Raw-silk waste shape and elongated foreign matter are the foreign matters of the surface attachment of clarity films.They are generally the moving direction with respect to film, the short-and-medium component of length component of the length component of the foreign matter of parallel direction and vertical direction and the ratio of long component are below setting value, or the length component of the length component of the area of foreign matter and the foreign matter of parallel direction and vertical direction multiplies each other the ratio of the area of trying to achieve below setting value, or the area of foreign matter and maximum length with foreign matter are that the ratio of cornerwise foursquare area is below setting value, or the area of foreign matter and maximum length with foreign matter be the ratio of area of circle of diameter below setting value, detected as the foreign matter that satisfies one of these conditions.
Fig. 3 is the figure of this situation of explanation.Foreign matter is the elongated oval shape, (A) in white arrow represent the moving direction of film, the length representation in components of the foreign matter of parallel direction is X, the length representation in components of vertical direction is Y.Along with the degree that the moving direction with respect to the film of foreign matter tilts, the size of the length component of parallel direction and the length component of vertical direction changes.Among the present invention, short component and the foreign matter of ratio below setting value of long component are judged to be the foreign matter of surface attachment.In addition, Fig. 2 (B) expression foreign matter situation parallel with the moving direction of film.
This setting value depend on film kind, adhere to the foreign matter of environment, when adopting triacetylcellulose film, be taken as approximately 0.2~0.4 usually, preferably be taken as approximately 0.3, then can carry out high precision and judge.
In addition, the length component of the area of foreign matter and the foreign matter of parallel direction and the length component of vertical direction multiply each other the ratio of the area of trying to achieve below setting value, or the area of foreign matter and maximum length with foreign matter be the ratio of cornerwise foursquare area below setting value, or the area of foreign matter and maximum length with foreign matter are the foreign matter that the foreign matter of ratio below setting value of area of the circle of diameter is judged to be the clarity films surface attachment.
(A) of Fig. 3 is the multiply each other key diagram of ratio of the area XY that tries to achieve of the length component Y of the length component X of area and the foreign matter of parallel direction of foreign matter and vertical direction.(B) of Fig. 3 is the area of foreign matter and maximum length with foreign matter is the key diagram of the ratio of cornerwise foursquare area.(C) of Fig. 3 is the area of foreign matter and maximum length with foreign matter is the key diagram of ratio of area of the circle of diameter.
Setting value depends on the film kind, adheres to the foreign matter of environment, when adopting triacetylcellulose film, usually, the multiply each other setting value of ratio of the area of trying to achieve of the length component of the area of foreign matter and the foreign matter of parallel direction and the length component of vertical direction is about 0.2~0.4, be preferably about 0.3, the area of foreign matter and maximum length with foreign matter are that the setting value of the ratio of cornerwise foursquare area is about 0.2~0.4, be preferably about 0.3, the area of foreign matter and maximum length with foreign matter are that the setting value of ratio of area of the circle of diameter is about 0.1~0.3, are preferably about 0.2.
Usually, obtain to pixel or pixel clusters picture intelligence one by one, obtain each length easily, obtain area easily by the shared number of picture elements of foreign matter by the shared length of pixel.
And among the present invention, high strength threshold value and low-intensity threshold value are set in signal intensity, the strength signal of not enough low-intensity threshold value is thought the deviation of baseband signal, and the foreign matter that shows above the signal of high strength threshold value is removed processing as the foreign matter of clarity films surface attachment.
The rub-out signal that the deviation of baseband signal causes is by low-intensity threshold value (threshold value 1) deletion, shows the foreign matter that is judged to be the clarity films surface attachment above the foreign matter of the signal of high strength threshold value (threshold value 2).(Fig. 4)
Then, detected representation goes out foreign matter (Fig. 5) number of the signal intensity more than not enough high strength threshold value (threshold value 2) and the low-intensity threshold value (threshold value 1), judges the quality of clarity films.
The setting value of foreign matter number of quality of judging clarity films is different because of the kind of clarity films, purposes etc.In addition, also different because of the size of foreign matter, set the setting value of a foreign matter size at least, this value size is up and down set the setting value of number.
When triacetyl cellulose is used in Polarizer (paste make Polarizer on polariscopic two sides), because the influence of big foreign matter is big, therefore, usually the foreign matter size with about 90 μ m as setting value, in every square metre of film size, the above foreign matter of size 90 μ m is in 1500, and the foreign matter of less than 90 μ m is in 2000 the time, and decidable is a non-defective unit.
Static takes place in clarity films when contact, friction and the protective film pasted are peeled off etc., dust is adhered on the surface easily.Thereby, may adhere to foreign matter during the sample of clarity films that making will be carried out inspection of foreign substance, or may under with the foreign matter situation of adhering to, check.To adhere to foreign matter to carry out the high precision inspection in order removing as far as possible, sample thin film to be cleaned to remove dust adhere to.
Particularly, will in distilled water, clean, remove the attachment on surface, and the TAC film of cleaning be inserted to clean not have in distilled water adhere between 2 glass plates of foreign matter clamping clarity films when removing bubble with the clarity films that prescribed level cuts out.The glass plate of clamping is taken out from water, and with the sealing of water tolerance adhesive tape, glass surface is removed moisture with the rag wiping, as the inspection sample on every side.Owing to carry out in water, thereby static does not take place, to compare charging property low for the surface of glass plate and resin film in addition, thereby, can clean and remove foreign matter and prevent to adhere to again subsequently foreign matter.
[embodiment]
Below, illustrate in greater detail the present invention by embodiment, but the invention is not restricted to these embodiment.
Embodiment 1
Carry out the inspection of foreign substance of triacetylcellulose film (TAC film).
The TAC film that cuts out with 25 * 17cm (sample number into spectrum: A-1) in distilled water, clean, remove the attachment on surface.The TAC film of cleaning in distilled water, inserts clean nothing adhere to 2 glass plates of foreign matter (between 30 * 20cm), clamping TAC film when removing bubble.The clamping glass plate takes out from water, on every side with the sealing of water tolerance adhesive tape.Glass surface is removed moisture with the rag wiping, produces the sample of checking with the TAC film.
As Fig. 1, between light source (10) and the gamma camera (20), 2 Polarizers (1,2) dispose the above-mentioned inspection TAC film of making (3) therebetween with the configuration of cross Nicols form.Employing transmits lamp as light source, 55mm macro lens 5000 pixel rows gamma cameras as gamma camera with the metal halide (メ タ Ha ラ) of 180W.
(12 * 7cm) carried out inspection of foreign substance to examination scope when sample was moved with 3m/min.Picture intelligence from gamma camera is handled in image-processing system (30).
Moving direction with respect to film, the short-and-medium component of length component of the length component of the foreign matter of parallel direction and vertical direction and the ratio of long component are below 0.3, or the length component of the length component of the area of foreign matter and the foreign matter of parallel direction and vertical direction multiplies each other the ratio of the area of trying to achieve below 0.3, or the area of foreign matter and maximum length with foreign matter are that the ratio of cornerwise foursquare area is below 0.3, or the area of foreign matter and maximum length with foreign matter be the ratio of area of circle of diameter at the foreign matter below 0.2, the foreign matter that adheres to as film surface and removing.In addition, in fact, do not meet the foreign matter of this condition.
Then, high strength threshold value and low-intensity threshold value are set in signal intensity, the foreign matter that shows above the signal of high strength threshold value is removed as the foreign matter of clarity films surface attachment.Thereby the foreign matter number of removing is 13 (1550 every square metre).
And, to showing the foreign matter of not enough high strength threshold value and the signal intensity more than the low-intensity threshold value, during the number of number more than detected magnitude 90 μ and less than 90 μ m, be 13 (1550 every square metre) more than the 90 μ m, less than 90 μ m are 31 (3690 every square metre).
Other samples of TAC film carry out inspection of foreign substance too.The result is as shown in table 1.
[table 1]
[effect of invention]
The method according to this invention is examined by the foreign matter of removing the clarity films surface attachment Survey the foreign matter number, but high accuracy and judge rapidly the quality of clarity films can shorten and find out The time of foreign matter occurrence cause, and prevent from unnecessarily producing defective products.

Claims (4)

1. the foreign matter checking method of a clarity films, between light source and gamma camera, clarity films is moved between with 2 Polarizers of cross Nicols form configuration, take the light that sees through this film from light source with gamma camera, by the foreign matter in its image processing inspection clarity films, it is characterized in that
After the removal of carrying out the foreign matter of clarity films surface attachment according to the signal intensity of the shape of foreign matter and foreign matter is handled, detect the foreign matter number, judge the quality of clarity films,
Carrying out the removal of the foreign matter of clarity films surface attachment according to the shape of foreign matter and handle, is that the foreign matter that satisfies one of following condition is removed processing as the foreign matter of clarity films surface attachment:
(1) with respect to the moving direction of film, the short-and-medium component of length component of the length component of the foreign matter of parallel direction and vertical direction and the ratio of long component are below setting value;
(2) the length component of the length component of the area of foreign matter and the foreign matter of parallel direction and vertical direction multiplies each other the ratio of the area of trying to achieve below setting value;
(3) area of foreign matter and maximum length with foreign matter are that the ratio of cornerwise foursquare area is below setting value;
(4) area of foreign matter and maximum length with foreign matter be the ratio of area of circle of diameter below setting value,
Carry out the removal of the foreign matter of clarity films surface attachment handles according to the signal intensity of foreign matter, be that high strength threshold value and low-intensity threshold value are set in signal intensity, with the strength signal of not enough low-intensity threshold value deviation as baseband signal, with showing, remove processing above the foreign matter of the signal of high strength threshold value foreign matter as the clarity films surface attachment.
2. the described foreign matter checking method of claim 1 is characterized in that,
The foreign matter number of the size that setting value is above is judged to be non-defective unit in setting value with interior clarity films with the foreign matter number of the size of interior and not enough setting value in setting value.
3. the described foreign matter checking method of claim 1 is characterized in that,
Clarity films is a triacetylcellulose film, moving direction with respect to film, the short-and-medium component of length component of the length component of the foreign matter of parallel direction and vertical direction is 0.2~0.4 with the ratio of long component, or the multiply each other ratio of the area of trying to achieve of the length component of the length component of the area of foreign matter and the foreign matter of parallel direction and vertical direction is 0.2~0.4, or the area of foreign matter and maximum length with foreign matter be that the ratio of cornerwise foursquare area is 0.2~0.4, or the area of foreign matter and maximum length with foreign matter are that the ratio of area of the circle of diameter is 0.1~0.3.
4. the described foreign matter checking method of claim 2 is characterized in that,
Clarity films is a triacetylcellulose film, and the foreign matter number of the above size of 90 μ m is judged to be non-defective unit at 2000 with interior clarity films 1500 foreign matter numbers with the size of interior and less than 90 μ m in every square metre of film size.
CN200410055732A 2003-07-31 2004-07-29 Foreign matter checking method for transparent thin-film Expired - Fee Related CN100582752C (en)

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JP204497/03 2003-07-31
JP204497/2003 2003-07-31
JP2003204497A JP4396160B2 (en) 2003-07-31 2003-07-31 Foreign film inspection method for transparent film

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