CN100580906C - 制造薄膜晶体管基板的方法 - Google Patents

制造薄膜晶体管基板的方法 Download PDF

Info

Publication number
CN100580906C
CN100580906C CN200610099446A CN200610099446A CN100580906C CN 100580906 C CN100580906 C CN 100580906C CN 200610099446 A CN200610099446 A CN 200610099446A CN 200610099446 A CN200610099446 A CN 200610099446A CN 100580906 C CN100580906 C CN 100580906C
Authority
CN
China
Prior art keywords
layer
organic layer
passivation layer
electrode
sunk part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200610099446A
Other languages
English (en)
Chinese (zh)
Other versions
CN1901158A (zh
Inventor
曹义植
金彰洙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Display Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of CN1901158A publication Critical patent/CN1901158A/zh
Application granted granted Critical
Publication of CN100580906C publication Critical patent/CN100580906C/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/451—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by the compositions or shapes of the interlayer dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/481—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs integrated with passive devices, e.g. auxiliary capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Formation Of Insulating Films (AREA)
CN200610099446A 2005-07-22 2006-07-20 制造薄膜晶体管基板的方法 Active CN100580906C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050066908 2005-07-22
KR1020050066908A KR20070012081A (ko) 2005-07-22 2005-07-22 박막 트랜지스터 기판의 제조 방법

Publications (2)

Publication Number Publication Date
CN1901158A CN1901158A (zh) 2007-01-24
CN100580906C true CN100580906C (zh) 2010-01-13

Family

ID=37656983

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200610099446A Active CN100580906C (zh) 2005-07-22 2006-07-20 制造薄膜晶体管基板的方法

Country Status (5)

Country Link
US (1) US7351618B2 (enExample)
JP (1) JP2007034285A (enExample)
KR (1) KR20070012081A (enExample)
CN (1) CN100580906C (enExample)
TW (1) TW200705677A (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080001937A1 (en) * 2006-06-09 2008-01-03 Samsung Electronics Co., Ltd. Display substrate having colorable organic layer interposed between pixel electrode and tft layer, plus method of manufacturing the same and display device having the same
KR101377456B1 (ko) * 2007-02-07 2014-03-25 삼성디스플레이 주식회사 표시 기판, 이의 제조 방법 및 이를 갖는 표시 장치
US8786793B2 (en) * 2007-07-27 2014-07-22 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
KR100899426B1 (ko) * 2007-09-14 2009-05-27 삼성모바일디스플레이주식회사 유기 전계 발광표시장치 제조방법
JP5377940B2 (ja) * 2007-12-03 2013-12-25 株式会社半導体エネルギー研究所 半導体装置
KR101414043B1 (ko) * 2007-12-04 2014-07-21 삼성디스플레이 주식회사 박막 트랜지스터 기판
EP2073255B1 (en) * 2007-12-21 2016-08-10 Semiconductor Energy Laboratory Co., Ltd. Diode and display device comprising the diode
TWI396909B (zh) * 2008-05-09 2013-05-21 Innolux Corp 液晶顯示面板及其製造方法
KR101627728B1 (ko) * 2008-12-30 2016-06-08 삼성디스플레이 주식회사 박막 트랜지스터 기판 및 그 제조 방법
CN103258726B (zh) 2013-03-25 2016-01-06 北京京东方光电科技有限公司 薄膜表面平坦化的方法、阵列基板及其制备方法和显示装置
CN107636823A (zh) * 2016-07-25 2018-01-26 深圳市柔宇科技有限公司 阵列基板的制造方法
KR102820896B1 (ko) * 2019-10-07 2025-06-17 삼성디스플레이 주식회사 표시 장치 및 이의 제조방법
CN110943093A (zh) * 2019-11-28 2020-03-31 深圳市华星光电半导体显示技术有限公司 有机发光基板及其制备方法、有机发光显示面板
KR20210101485A (ko) 2020-02-10 2021-08-19 잣향기푸른숲농업회사법인(주) 잣나무 추출물을 함유하는 구강 내 위생증진용 조성물 및 이의 제조방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100262402B1 (ko) * 1997-04-18 2000-08-01 김영환 박막 트랜지스터 액정표시소자 및 그의 제조방법
JP3436487B2 (ja) * 1998-05-18 2003-08-11 シャープ株式会社 アクティブマトリクス基板の製造方法
US6380559B1 (en) * 1999-06-03 2002-04-30 Samsung Electronics Co., Ltd. Thin film transistor array substrate for a liquid crystal display
JP2001168190A (ja) * 1999-12-08 2001-06-22 Mitsubishi Electric Corp 半導体装置、液晶表示装置、半導体装置の製造方法および液晶表示装置の製造方法
KR20020002089A (ko) * 2000-06-29 2002-01-09 주식회사 현대 디스플레이 테크놀로지 고개구율 액정 표시 소자의 제조방법
KR100456137B1 (ko) * 2001-07-07 2004-11-08 엘지.필립스 엘시디 주식회사 액정표시장치의 어레이 기판 및 그의 제조방법
JP3977099B2 (ja) * 2002-02-25 2007-09-19 株式会社アドバンスト・ディスプレイ 液晶表示装置及びその製造方法
JP2004212933A (ja) * 2002-12-31 2004-07-29 Lg Phillips Lcd Co Ltd 液晶表示装置及びアレイ基板の製造方法

Also Published As

Publication number Publication date
US7351618B2 (en) 2008-04-01
CN1901158A (zh) 2007-01-24
US20070020825A1 (en) 2007-01-25
TW200705677A (en) 2007-02-01
KR20070012081A (ko) 2007-01-25
JP2007034285A (ja) 2007-02-08

Similar Documents

Publication Publication Date Title
US7636135B2 (en) TFT-LCD array substrate and method for manufacturing the same
US8049218B2 (en) TFT LCD array substrate and manufacturing method thereof
JP4837649B2 (ja) 薄膜トランジスタ液晶ディスプレイ画素構造及びその製造方法
US6555409B2 (en) Method for fabricating a thin film transistor array substrate for liquid crystal display
US6509614B1 (en) TFT-LCD formed with four masking steps
US8294153B2 (en) TFT-LCD pixel unit and method for manufacturing the same
KR101636998B1 (ko) 박막 트랜지스터 및 그 제조 방법
US7687330B2 (en) TFT-LCD pixel structure and manufacturing method thereof
CN100517729C (zh) 薄膜晶体管衬底及其制造方法
US20100117088A1 (en) Thin film transistor substrate and method of manufacturing the same
CN100580906C (zh) 制造薄膜晶体管基板的方法
US20050221546A1 (en) Thin film transistor array panel and manufacturing method thereof
KR100640211B1 (ko) 액정표시장치의 제조방법
US6274400B1 (en) Tri-layer process for forming TFT matrix of LCD with reduced masking steps
KR100606449B1 (ko) 액정표시소자 제조방법
US6387740B1 (en) Tri-layer process for forming TFT matrix of LCD with reduced masking steps
KR20080033590A (ko) 박막 트랜지스터 기판의 제조 방법
KR20060133818A (ko) 광 마스크와 박막 트랜지스터 기판의 제조 방법 및 그에의해 제조된 박막 트랜지스터 기판
KR100656910B1 (ko) 박막 트랜지스터 기판 및 그 제조 방법
KR100476048B1 (ko) 박막 트랜지스터 액정표시소자의 제조방법
KR100729768B1 (ko) 박막 트랜지스터 기판 및 그 제조 방법
KR20070072187A (ko) 하프-톤 마스크를 이용한 박막 트랜지스터 액정표시장치의제조방법

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: SAMSUNG DISPLAY CO., LTD.

Free format text: FORMER OWNER: SAMSUNG ELECTRONICS CO., LTD.

Effective date: 20130104

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20130104

Address after: Gyeonggi Do, South Korea

Patentee after: Samsung Display Co., Ltd.

Address before: Gyeonggi Do, South Korea

Patentee before: Samsung Electronics Co., Ltd.