CN100577874C - 硬质耐磨的氮化铝基涂层 - Google Patents

硬质耐磨的氮化铝基涂层 Download PDF

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Publication number
CN100577874C
CN100577874C CN200580011763A CN200580011763A CN100577874C CN 100577874 C CN100577874 C CN 100577874C CN 200580011763 A CN200580011763 A CN 200580011763A CN 200580011763 A CN200580011763 A CN 200580011763A CN 100577874 C CN100577874 C CN 100577874C
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CN
China
Prior art keywords
coating
aluminum nitride
nitride based
metal
metal dopant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN200580011763A
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English (en)
Chinese (zh)
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CN1942605A (zh
Inventor
奥利弗·科代特
莫伊米尔·伊列克
马库斯·莫斯泰因
米哈尔·西玛
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Pivot AS
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Pivot AS
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Publication of CN1942605A publication Critical patent/CN1942605A/zh
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Drilling Tools (AREA)
CN200580011763A 2004-04-19 2005-04-18 硬质耐磨的氮化铝基涂层 Expired - Fee Related CN100577874C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04405241.3 2004-04-19
EP04405241 2004-04-19

Publications (2)

Publication Number Publication Date
CN1942605A CN1942605A (zh) 2007-04-04
CN100577874C true CN100577874C (zh) 2010-01-06

Family

ID=34966976

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200580011763A Expired - Fee Related CN100577874C (zh) 2004-04-19 2005-04-18 硬质耐磨的氮化铝基涂层

Country Status (7)

Country Link
US (1) US7704611B2 (enExample)
EP (1) EP1749118B1 (enExample)
JP (1) JP5209960B2 (enExample)
KR (1) KR101089528B1 (enExample)
CN (1) CN100577874C (enExample)
CA (1) CA2562402C (enExample)
WO (1) WO2005100635A1 (enExample)

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JP5192642B2 (ja) * 2005-11-11 2013-05-08 三菱重工業株式会社 表面被覆部材及びその製造方法ならびに工具及び工作装置
JP5096715B2 (ja) * 2006-09-21 2012-12-12 株式会社神戸製鋼所 硬質皮膜および硬質皮膜被覆工具
KR101257375B1 (ko) * 2007-02-22 2013-04-23 미츠비시 쥬고교 가부시키가이샤 표면 피막 부재 및 그 제조 방법 그리고 절삭 공구 및 공작 기계
IL191822A0 (en) * 2007-06-25 2009-02-11 Sulzer Metaplas Gmbh Layer system for the formation of a surface layer on a surface of a substrate and also are vaporization source for the manufacture of a layer system
EP2351870B1 (de) * 2007-06-25 2018-08-08 Oerlikon Surface Solutions AG, Pfäffikon Schichtsystem zur Bildung einer Oberflächenschicht auf einer Oberfläche eines Substrats
EP2042261A3 (en) * 2007-09-26 2015-02-18 Sandvik Intellectual Property AB Method of making a coated cutting tool
DE102008019891A1 (de) * 2008-04-21 2009-10-22 Mtu Aero Engines Gmbh Erosionsschutzbeschichtung
ES2774167T3 (es) * 2008-09-02 2020-07-17 Oerlikon Surface Solutions Ag Pfaeffikon Dispositivo de revestimiento para el revestimiento de un sustrato, así como un procedimiento para el revestimiento de un sustrato
KR101608495B1 (ko) 2009-12-11 2016-04-01 삼성전자주식회사 데이터 스트림 처리 장치 및 방법
CN102387676A (zh) * 2010-08-31 2012-03-21 鸿富锦精密工业（深圳）有限公司 壳体及其制作方法
CN102586732A (zh) * 2011-01-17 2012-07-18 鸿富锦精密工业（深圳）有限公司 具有硬质涂层的被覆件及其制备方法
CN102586731A (zh) * 2011-01-17 2012-07-18 鸿富锦精密工业（深圳）有限公司 具有硬质涂层的被覆件及其制备方法
US8574728B2 (en) 2011-03-15 2013-11-05 Kennametal Inc. Aluminum oxynitride coated article and method of making the same
EP2521159A1 (en) * 2011-05-06 2012-11-07 Pivot a.s. Glow discharge apparatus and method with lateral rotating arc cathodes
JP5559131B2 (ja) * 2011-11-22 2014-07-23 株式会社神戸製鋼所 硬質皮膜および硬質皮膜被覆工具
EP2823080A1 (en) 2012-03-07 2015-01-14 Seco Tools AB A body with a metal based nitride layer and a method for coating the body
JP5417649B2 (ja) * 2012-05-08 2014-02-19 住友電工ハードメタル株式会社 表面被覆切削工具
US9126273B2 (en) 2012-12-17 2015-09-08 Kennametal Inc Tool for the cutting machining of workpieces and process for coating substrate bodies
US9017809B2 (en) 2013-01-25 2015-04-28 Kennametal Inc. Coatings for cutting tools
US9138864B2 (en) 2013-01-25 2015-09-22 Kennametal Inc. Green colored refractory coatings for cutting tools
JP5764171B2 (ja) * 2013-08-07 2015-08-12 株式会社神戸製鋼所 導電性薄膜
US9427808B2 (en) 2013-08-30 2016-08-30 Kennametal Inc. Refractory coatings for cutting tools
JP6284726B2 (ja) * 2013-09-11 2018-02-28 太陽誘電株式会社 窒化アルミニウム膜の成膜方法、弾性波デバイスの製造方法、及び窒化アルミニウム膜の製造装置
DE102013018007A1 (de) * 2013-11-29 2015-06-03 Oerlikon Trading Ag, Trübbach Verfahren zur Verbesserung des Gegenkörperverschleisses im tribologischen Kontakt
CN104060230B (zh) * 2014-04-25 2017-06-06 湛江师范学院 一种TiZrAlSiON纳米复合超硬涂层刀具及其制备方法
WO2022016283A1 (en) * 2020-07-22 2022-01-27 National Research Council Of Canada Coated substrates and methods for the preparation thereof
DE102021106674A1 (de) * 2021-03-18 2022-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein AlN-basierte Hartstoffschicht auf Körpern aus Metall, Hartmetall, Cermet oder Keramik und Verfahren zu deren Herstellung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5580653A (en) * 1994-05-13 1996-12-03 Kabushiki Kaisha Kobe Seiko Sho Hard coating having excellent wear resistance properties, and hard coating coated member
US6274249B1 (en) * 1997-09-12 2001-08-14 Unaxis Balzers Aktiengesellschaft Tool with tool body and protective layer system
EP1219723A3 (en) * 2000-12-28 2002-09-04 Kabushiki Kaisha Kobe Seiko Sho Hard film for cutting tools

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* Cited by examiner, † Cited by third party
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SK287369B6 (sk) * 1997-09-12 2010-08-09 Oerlikon Trading Ag, Tr�Bbach Nástroj s telesom nástroja a s vrstvovým systémom a spôsob výroby tohto nástroja
CZ296094B6 (cs) 2000-12-18 2006-01-11 Shm, S. R. O. Zarízení pro odparování materiálu k povlakování predmetu
JP4112834B2 (ja) * 2000-12-28 2008-07-02 株式会社神戸製鋼所 切削工具用硬質皮膜を形成するためのターゲット
JP3695396B2 (ja) * 2002-01-11 2005-09-14 三菱マテリアル神戸ツールズ株式会社 難削材の高速切削ですぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
JP3632667B2 (ja) 2002-02-01 2005-03-23 三菱マテリアル神戸ツールズ株式会社 難削材の高速切削ですぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
PT1357577E (pt) 2002-04-22 2008-04-22 Pivot A S Revestimento a arco com cátodos rotativos
WO2005040448A1 (ja) 2003-10-27 2005-05-06 Mitsubishi Heavy Industries, Ltd. 耐高温酸化に優れた高耐摩耗性・高硬度皮膜及びこれを適用した歯切工作機械の工具又は金型

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5580653A (en) * 1994-05-13 1996-12-03 Kabushiki Kaisha Kobe Seiko Sho Hard coating having excellent wear resistance properties, and hard coating coated member
US6274249B1 (en) * 1997-09-12 2001-08-14 Unaxis Balzers Aktiengesellschaft Tool with tool body and protective layer system
EP1219723A3 (en) * 2000-12-28 2002-09-04 Kabushiki Kaisha Kobe Seiko Sho Hard film for cutting tools

Also Published As

Publication number Publication date
EP1749118A1 (en) 2007-02-07
KR20070012416A (ko) 2007-01-25
WO2005100635A1 (en) 2005-10-27
US20080318069A1 (en) 2008-12-25
JP5209960B2 (ja) 2013-06-12
KR101089528B1 (ko) 2011-12-05
JP2007532783A (ja) 2007-11-15
EP1749118B1 (en) 2014-04-09
CA2562402C (en) 2011-10-11
CA2562402A1 (en) 2005-10-27
CN1942605A (zh) 2007-04-04
US7704611B2 (en) 2010-04-27

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Granted publication date: 20100106

Termination date: 20170418