CN100533445C - 集成电路选择性缩放 - Google Patents

集成电路选择性缩放 Download PDF

Info

Publication number
CN100533445C
CN100533445C CNB2005800351986A CN200580035198A CN100533445C CN 100533445 C CN100533445 C CN 100533445C CN B2005800351986 A CNB2005800351986 A CN B2005800351986A CN 200580035198 A CN200580035198 A CN 200580035198A CN 100533445 C CN100533445 C CN 100533445C
Authority
CN
China
Prior art keywords
convergent
divergent
design
problem object
production information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005800351986A
Other languages
English (en)
Chinese (zh)
Other versions
CN101040285A (zh
Inventor
F-L·亨格
J·D·希伯勒
K·W·麦卡伦
R·R·纳拉扬
S·L·鲁尼恩
R·F·沃克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Core Usa Second LLC
GlobalFoundries Inc
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of CN101040285A publication Critical patent/CN101040285A/zh
Application granted granted Critical
Publication of CN100533445C publication Critical patent/CN100533445C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/30Circuit design
    • G06F30/39Circuit design at the physical level

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • Geometry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
CNB2005800351986A 2004-10-15 2005-10-14 集成电路选择性缩放 Expired - Fee Related CN100533445C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/711,959 2004-10-15
US10/711,959 US7363601B2 (en) 2004-10-15 2004-10-15 Integrated circuit selective scaling

Publications (2)

Publication Number Publication Date
CN101040285A CN101040285A (zh) 2007-09-19
CN100533445C true CN100533445C (zh) 2009-08-26

Family

ID=36182266

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800351986A Expired - Fee Related CN100533445C (zh) 2004-10-15 2005-10-14 集成电路选择性缩放

Country Status (7)

Country Link
US (2) US7363601B2 (enExample)
EP (1) EP1805674A4 (enExample)
JP (1) JP4511598B2 (enExample)
KR (1) KR100962859B1 (enExample)
CN (1) CN100533445C (enExample)
TW (1) TWI353537B (enExample)
WO (1) WO2006044730A2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7448012B1 (en) 2004-04-21 2008-11-04 Qi-De Qian Methods and system for improving integrated circuit layout
US7363601B2 (en) * 2004-10-15 2008-04-22 International Business Machines Corporation Integrated circuit selective scaling
US7499307B2 (en) * 2005-06-24 2009-03-03 Mosys, Inc. Scalable embedded DRAM array
US7784015B2 (en) * 2005-07-05 2010-08-24 Texas Instruments Incorporated Method for generating a mask layout and constructing an integrated circuit
US20070143234A1 (en) * 2005-12-16 2007-06-21 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system for intelligent model-based optical proximity correction (OPC)
US7584440B2 (en) * 2006-10-12 2009-09-01 Cadence Design Systems, Inc. Method and system for tuning a circuit
US7783995B2 (en) * 2007-03-08 2010-08-24 International Business Machines Corporation System and method for circuit design scaling
US7568173B2 (en) * 2007-06-14 2009-07-28 International Business Machines Corporation Independent migration of hierarchical designs with methods of finding and fixing opens during migration
US8042070B2 (en) 2007-10-23 2011-10-18 International Business Machines Corporation Methods and system for analysis and management of parametric yield
US8671367B2 (en) * 2008-06-25 2014-03-11 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit design in optical shrink technology node
US8051401B2 (en) * 2008-10-15 2011-11-01 Arm Limited Post-routing power supply modification for an integrated circuit
US8656332B2 (en) * 2009-02-26 2014-02-18 International Business Machines Corporation Automated critical area allocation in a physical synthesized hierarchical design
US8375349B2 (en) 2009-09-02 2013-02-12 Taiwan Semiconductor Manufacturing Company, Ltd. Method for constant power density scaling
US20110233674A1 (en) * 2010-03-29 2011-09-29 International Business Machines Corporation Design Structure For Dense Layout of Semiconductor Devices
US8539389B2 (en) * 2010-09-27 2013-09-17 Teseda Corporation Correlation of device manufacturing defect data with device electrical test data
US9495503B2 (en) 2011-04-06 2016-11-15 Qualcomm Incorporated Method and apparatus to enable a selective push process during manufacturing to improve performance of a selected circuit of an integrated circuit
US9939488B2 (en) 2011-08-31 2018-04-10 Teseda Corporation Field triage of EOS failures in semiconductor devices
US8907697B2 (en) 2011-08-31 2014-12-09 Teseda Corporation Electrical characterization for a semiconductor device pin
US8631375B2 (en) 2012-04-10 2014-01-14 International Business Machines Corporation Via selection in integrated circuit design
US8627247B1 (en) * 2012-07-11 2014-01-07 International Business Machines Corporation Systems and methods for fixing pin mismatch in layout migration
GB2507754A (en) 2012-11-07 2014-05-14 Ibm Circuit topology scaling rule
US9292649B2 (en) 2013-11-18 2016-03-22 Taiwan Semiconductor Manufacturing Co., Ltd. Different scaling ratio in FEOL / MOL/ BEOL
KR102214028B1 (ko) * 2014-09-22 2021-02-09 삼성전자주식회사 가변구조형 스케일러를 포함하는 애플리케이션 프로세서와 이를 포함하는 장치들
CN112255882A (zh) * 2020-10-23 2021-01-22 泉芯集成电路制造(济南)有限公司 集成电路版图微缩方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1102508A (zh) * 1993-06-21 1995-05-10 松下电子工业株式会社 半导体集成电路的布图设计方法
CN1369114A (zh) * 1999-06-21 2002-09-11 蒂莫西·詹姆斯·里甘 修改集成电路的方法
CN1449071A (zh) * 2002-03-30 2003-10-15 罗伯特·博施有限公司 测量装置、储能模件和电气器具
CN1479206A (zh) * 2002-08-26 2004-03-03 英业达股份有限公司 布图设计的实时检错调整系统及其方法
CN1523660A (zh) * 2003-02-17 2004-08-25 上海芯华微电子有限公司 集成电路设计的双向技术系统

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5406497A (en) * 1990-09-05 1995-04-11 Vlsi Technology, Inc. Methods of operating cell libraries and of realizing large scale integrated circuits using a programmed compiler including a cell library
US5625568A (en) * 1993-12-22 1997-04-29 Vlsi Technology, Inc. Method and apparatus for compacting integrated circuits with standard cell architectures
US5880967A (en) * 1995-05-01 1999-03-09 Synopsys, Inc. Minimization of circuit delay and power through transistor sizing
US6226560B1 (en) * 1996-03-04 2001-05-01 International Business Machines Corporation Method and apparatus for optimizing the path of a physical wire
US5936868A (en) * 1997-03-06 1999-08-10 Harris Corporation Method for converting an integrated circuit design for an upgraded process
US6222533B1 (en) 1997-08-25 2001-04-24 I2 Technologies, Inc. System and process having a universal adapter framework and providing a global user interface and global messaging bus
US6507807B1 (en) * 1999-08-13 2003-01-14 Hewlett-Packard Company Method and apparatus for determining which branch of a network of an integrated circuit has the largest total effective RC delay
US6543036B1 (en) * 1999-11-30 2003-04-01 Synopsys, Inc. Non-linear, gain-based modeling of circuit delay for an electronic design automation system
GB9929084D0 (en) * 1999-12-08 2000-02-02 Regan Timothy J Modification of integrated circuits
US6889370B1 (en) * 2000-06-20 2005-05-03 Unisys Corporation Method and apparatus for selecting and aligning cells using a placement tool
US6507930B1 (en) * 2000-06-30 2003-01-14 International Business Machines Corporation Method and system for improving yield of semiconductor integrated circuits
US6684379B2 (en) * 2000-10-18 2004-01-27 Chipworks Design analysis workstation for analyzing integrated circuits
US8165928B2 (en) 2000-12-07 2012-04-24 Savi Technology, Inc. Managing events within supply chain networks
US6584598B2 (en) * 2001-02-16 2003-06-24 Silicon Metrics Corporation Apparatus for optimized constraint characterization with degradation options and associated methods
JP2003031661A (ja) * 2001-07-16 2003-01-31 Mitsubishi Electric Corp 半導体集積回路の配線間隔決定装置、自動配置配線装置、自動配置配線装置のためのルール作成装置、半導体集積回路の配線間隔決定方法、自動配置配線方法および自動配置配線方法のためのルール作成方法。
US6813753B2 (en) * 2002-04-16 2004-11-02 Micron Technology, Inc. Method of determining library parameters using timing surface planarity
US6880133B2 (en) * 2002-05-15 2005-04-12 Sonics, Inc. Method and apparatus for optimizing distributed multiplexed bus interconnects
JP2004031676A (ja) * 2002-06-26 2004-01-29 Nec Yamagata Ltd ロジック製品の不良回路ブロック解析方法
US6871332B2 (en) * 2002-07-23 2005-03-22 Sun Microsystems, Inc. Structure and method for separating geometries in a design layout into multi-wide object classes
US6832360B2 (en) * 2002-09-30 2004-12-14 Sun Microsystems, Inc. Pure fill via area extraction in a multi-wide object class design layout
US6895568B2 (en) * 2002-09-30 2005-05-17 Sun Microsystems, Inc. Correction of spacing violations between pure fill via areas in a multi-wide object class design layout
EP1467294A3 (en) * 2003-04-04 2005-06-01 Interuniversitair Microelektronica Centrum Vzw Design method for electronic systems using library of hardware components with performance parameters and cost functions
US6986109B2 (en) * 2003-05-15 2006-01-10 International Business Machines Corporation Practical method for hierarchical-preserving layout optimization of integrated circuit layout
US7001830B2 (en) * 2003-09-02 2006-02-21 Advanced Micro Devices, Inc System and method of pattern recognition and metrology structure for an X-initiative layout design
US6961920B2 (en) * 2003-09-18 2005-11-01 International Business Machines Corporation Method for interlayer and yield based optical proximity correction
US7055114B2 (en) * 2003-10-08 2006-05-30 Hewlett-Packard Development Company, L.P. Systems and processes for asymmetrically shrinking a VLSI layout
US7117456B2 (en) * 2003-12-03 2006-10-03 International Business Machines Corporation Circuit area minimization using scaling
US20050229130A1 (en) * 2004-04-07 2005-10-13 Aprio Technologies, Inc. Method and apparatus for selective, incremental, reconfigurable and reusable semiconductor manufacturing resolution-enhancements
US20050257178A1 (en) * 2004-05-14 2005-11-17 Daems Walter Pol M Method and apparatus for designing electronic circuits
US7363601B2 (en) * 2004-10-15 2008-04-22 International Business Machines Corporation Integrated circuit selective scaling

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1102508A (zh) * 1993-06-21 1995-05-10 松下电子工业株式会社 半导体集成电路的布图设计方法
CN1369114A (zh) * 1999-06-21 2002-09-11 蒂莫西·詹姆斯·里甘 修改集成电路的方法
CN1449071A (zh) * 2002-03-30 2003-10-15 罗伯特·博施有限公司 测量装置、储能模件和电气器具
CN1479206A (zh) * 2002-08-26 2004-03-03 英业达股份有限公司 布图设计的实时检错调整系统及其方法
CN1523660A (zh) * 2003-02-17 2004-08-25 上海芯华微电子有限公司 集成电路设计的双向技术系统

Also Published As

Publication number Publication date
KR100962859B1 (ko) 2010-06-09
JP2008517467A (ja) 2008-05-22
CN101040285A (zh) 2007-09-19
TWI353537B (en) 2011-12-01
KR20070063020A (ko) 2007-06-18
JP4511598B2 (ja) 2010-07-28
EP1805674A2 (en) 2007-07-11
US7363601B2 (en) 2008-04-22
WO2006044730A2 (en) 2006-04-27
US7882463B2 (en) 2011-02-01
EP1805674A4 (en) 2010-08-04
US20060085768A1 (en) 2006-04-20
WO2006044730A3 (en) 2006-08-17
TW200627213A (en) 2006-08-01
US20080148210A1 (en) 2008-06-19

Similar Documents

Publication Publication Date Title
CN100533445C (zh) 集成电路选择性缩放
US8156450B2 (en) Method and system for mask optimization
US5936868A (en) Method for converting an integrated circuit design for an upgraded process
US8407630B1 (en) Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing
CN101520810B (zh) 多次曝光图案分解系统和方法
US6792593B2 (en) Pattern correction method, apparatus, and program
US8302052B2 (en) Methods, systems, and computer program product for implementing hotspot detection, repair, and optimization of an electronic circuit design
JP4333770B2 (ja) マスクパターン作成プログラム、半導体製造方法、マスクパターン作成方法および半導体設計プログラム
US20140040850A1 (en) Manufacturability
JP2006512767A (ja) 歩留まり改善
US20030177467A1 (en) Opc mask manufacturing method, opc mask, and chip
CN1764913B (zh) 工艺性设计
US7665048B2 (en) Method and system for inspection optimization in design and production of integrated circuits
US6507944B1 (en) Data processing method and apparatus, reticle mask, exposing method and apparatus, and recording medium
US20090144686A1 (en) Method and apparatus for monitoring marginal layout design rules
US20110265047A1 (en) Mask data processing method for optimizing hierarchical structure
US7216325B2 (en) Semiconductor device, routing method and manufacturing method of semiconductor device
US20080148194A1 (en) Method and system for process optimization
JP5671357B2 (ja) リソグラフィ検証装置およびリソグラフィシミュレーションプログラム
JP2006058413A (ja) マスクの形成方法
US6493865B2 (en) Method of producing masks for fabricating semiconductor structures
US20060048088A1 (en) Computer automated design method, program for executing an application on a computer automated design system, and semiconductor integrated circuit
US10083833B1 (en) Integration fill technique
US7539964B2 (en) Cell placement taking into account consumed current amount
US20240411973A1 (en) Circuit layout checking method and circuit layout checking system

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20171108

Address after: Grand Cayman, Cayman Islands

Patentee after: GLOBALFOUNDRIES INC.

Address before: American New York

Patentee before: Core USA second LLC

Effective date of registration: 20171108

Address after: American New York

Patentee after: Core USA second LLC

Address before: New York grams of Armand

Patentee before: International Business Machines Corp.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090826

Termination date: 20191014