CN100501296C - 背板 - Google Patents
背板 Download PDFInfo
- Publication number
- CN100501296C CN100501296C CNB2006100885405A CN200610088540A CN100501296C CN 100501296 C CN100501296 C CN 100501296C CN B2006100885405 A CNB2006100885405 A CN B2006100885405A CN 200610088540 A CN200610088540 A CN 200610088540A CN 100501296 C CN100501296 C CN 100501296C
- Authority
- CN
- China
- Prior art keywords
- backboard
- lid
- groove
- protuberance
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005166685A JP4852897B2 (ja) | 2005-06-07 | 2005-06-07 | 冷却板 |
JP2005166685 | 2005-06-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1880907A CN1880907A (zh) | 2006-12-20 |
CN100501296C true CN100501296C (zh) | 2009-06-17 |
Family
ID=37492994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100885405A Expired - Fee Related CN100501296C (zh) | 2005-06-07 | 2006-06-02 | 背板 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20060272802A1 (zh) |
JP (1) | JP4852897B2 (zh) |
CN (1) | CN100501296C (zh) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7431195B2 (en) * | 2003-09-26 | 2008-10-07 | Praxair S.T. Technology, Inc. | Method for centering a sputter target onto a backing plate and the assembly thereof |
JP2008254047A (ja) * | 2007-04-06 | 2008-10-23 | Mitsubishi Heavy Ind Ltd | 熱交換板およびその製造方法 |
DE102007026248A1 (de) * | 2007-06-04 | 2008-12-11 | Oerlikon Mechatronics Ag | Kühlplatte |
JP5533215B2 (ja) * | 2010-05-10 | 2014-06-25 | 富士通株式会社 | 冷却ジャケット及びそれを備えた電子機器 |
KR101140014B1 (ko) | 2010-06-24 | 2012-05-02 | 하이디스 테크놀로지 주식회사 | 타겟용 백플레이트 |
CN102148545A (zh) * | 2011-04-22 | 2011-08-10 | 天津市松正电动汽车技术股份有限公司 | 一种大流量水冷电机机壳及其制造工艺 |
CN104416253B (zh) * | 2013-09-02 | 2016-08-31 | 宁波江丰电子材料股份有限公司 | 背板的形成方法和背板 |
CN103906417A (zh) * | 2014-04-11 | 2014-07-02 | 黄山谷捷散热科技有限公司 | 水冷散热器 |
CN104684368A (zh) * | 2015-04-01 | 2015-06-03 | 昆山固德利金属制品有限公司 | 一种水冷散热器 |
KR102116923B1 (ko) | 2015-07-10 | 2020-05-29 | 스미또모 가가꾸 가부시키가이샤 | 백킹플레이트, 스퍼터링 타깃 및 그것들의 제조방법 |
KR20200036065A (ko) * | 2016-03-30 | 2020-04-06 | 케이힌 람테크 가부시키가이샤 | 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법 |
JP6948832B2 (ja) * | 2017-05-22 | 2021-10-13 | 株式会社Uacj鋳鍛 | 真空装置用伝熱板及びその製造方法 |
CN108118296A (zh) * | 2017-12-08 | 2018-06-05 | 北京创昱科技有限公司 | 一种冷却板 |
CN207987325U (zh) * | 2018-02-28 | 2018-10-19 | 北京铂阳顶荣光伏科技有限公司 | 一种冷却系统 |
US20190373768A1 (en) * | 2018-05-31 | 2019-12-05 | Hanon Systems | Electronics cold plate |
US20220013342A1 (en) * | 2018-11-21 | 2022-01-13 | Sumitomo Chemical Company, Limited | Backing plate, sputtering target, and production methods therefor |
KR102281481B1 (ko) * | 2019-07-02 | 2021-07-23 | 세메스 주식회사 | 기판냉각플레이트 및 그것의 제조방법 |
CN110670030A (zh) * | 2019-09-29 | 2020-01-10 | 洛阳丰联科绑定技术有限公司 | 一种ito拼接型靶材的粘结方法 |
JP6801911B2 (ja) * | 2020-09-07 | 2020-12-16 | 京浜ラムテック株式会社 | バッキングプレートおよびその製造方法 |
DE102021002532A1 (de) | 2021-05-14 | 2022-11-17 | Mercedes-Benz Group AG | Bauteil zum Temperieren wenigstens einer Komponente eines Kraftfahrzeugs sowie Verfahren zum Herstellen eines solchen Bauteils |
JP2023008266A (ja) * | 2021-07-05 | 2023-01-19 | 株式会社デンソー | ケースおよび電気装置 |
CN113957395B (zh) * | 2021-10-20 | 2024-01-30 | 宁波江丰电子材料股份有限公司 | 一种多水道背板、多水道背板组件及焊接方法 |
CN115198238A (zh) * | 2022-07-20 | 2022-10-18 | 宁波江丰电子材料股份有限公司 | 一种靶材背板及其制造方法 |
JP7457760B2 (ja) | 2022-07-29 | 2024-03-28 | 株式会社Uacj鋳鍛 | 伝熱板 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1671647A (en) * | 1924-08-30 | 1928-05-29 | Macallen Company | Press platen or the like |
US1539887A (en) * | 1924-10-23 | 1925-06-02 | Williams Foundry & Machine Com | Platen |
US3524497A (en) * | 1968-04-04 | 1970-08-18 | Ibm | Heat transfer in a liquid cooling system |
JPS63293865A (ja) * | 1987-05-26 | 1988-11-30 | Nec Corp | 水冷ジャケット構造 |
ATE126931T1 (de) * | 1989-06-05 | 1995-09-15 | Balzers Hochvakuum | Verfahren zum kühlen von targets sowie kühleinrichtung für targets. |
JP2724033B2 (ja) * | 1990-07-11 | 1998-03-09 | 株式会社日立製作所 | 半導体モジユール |
US5239200A (en) * | 1991-08-21 | 1993-08-24 | International Business Machines Corporation | Apparatus for cooling integrated circuit chips |
WO1997025741A1 (de) * | 1996-01-04 | 1997-07-17 | Daimler-Benz Aktiengesellschaft | Kühlkörper mit zapfen |
US6302192B1 (en) * | 1999-05-12 | 2001-10-16 | Thermal Corp. | Integrated circuit heat pipe heat spreader with through mounting holes |
JP3518434B2 (ja) * | 1999-08-11 | 2004-04-12 | 株式会社日立製作所 | マルチチップモジュールの冷却装置 |
US6679316B1 (en) * | 2000-10-02 | 2004-01-20 | The United States Of America As Represented By The Secretary Of The Air Force | Passive thermal spreader and method |
JP3818084B2 (ja) * | 2000-12-22 | 2006-09-06 | 日立電線株式会社 | 冷却板とその製造方法及びスパッタリングターゲットとその製造方法 |
JP2002220661A (ja) * | 2001-01-29 | 2002-08-09 | Sharp Corp | スパッタリング装置に用いられるバッキングプレートおよびスパッタリング方法 |
JP4385533B2 (ja) * | 2001-03-02 | 2009-12-16 | 日本軽金属株式会社 | ヒートプレートの製造方法 |
JP3946018B2 (ja) * | 2001-09-18 | 2007-07-18 | 株式会社日立製作所 | 液冷却式回路装置 |
TW200503608A (en) * | 2003-07-15 | 2005-01-16 | Ind Tech Res Inst | Cooling plate having vortices generator |
US20050077030A1 (en) * | 2003-10-08 | 2005-04-14 | Shwin-Chung Wong | Transport line with grooved microchannels for two-phase heat dissipation on devices |
US6943444B2 (en) * | 2003-10-30 | 2005-09-13 | International Business Machines Corporation | Cooling of surface temperature of a device |
WO2005088714A1 (en) * | 2004-03-08 | 2005-09-22 | Remmele Engineering, Inc. | Cold plate and method of making the same |
-
2005
- 2005-06-07 JP JP2005166685A patent/JP4852897B2/ja not_active Expired - Fee Related
-
2006
- 2006-04-07 US US11/399,466 patent/US20060272802A1/en not_active Abandoned
- 2006-06-02 CN CNB2006100885405A patent/CN100501296C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4852897B2 (ja) | 2012-01-11 |
JP2006342367A (ja) | 2006-12-21 |
US20060272802A1 (en) | 2006-12-07 |
CN1880907A (zh) | 2006-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SH COPPER INDUSTRY CO., LTD. Free format text: FORMER OWNER: HITACHI CABLE CO., LTD. Effective date: 20130808 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130808 Address after: Ibaraki Patentee after: Sh Copper Products Co Ltd Address before: Tokyo, Japan, Japan Patentee before: Hitachi Cable Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090617 Termination date: 20160602 |