CN100482038C - Exposure unit - Google Patents
Exposure unit Download PDFInfo
- Publication number
- CN100482038C CN100482038C CNB2005100783252A CN200510078325A CN100482038C CN 100482038 C CN100482038 C CN 100482038C CN B2005100783252 A CNB2005100783252 A CN B2005100783252A CN 200510078325 A CN200510078325 A CN 200510078325A CN 100482038 C CN100482038 C CN 100482038C
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- CN
- China
- Prior art keywords
- mentioned
- base plate
- belt base
- photomask
- reel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7038—Alignment for proximity or contact printer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/7035—Proximity or contact printers
Abstract
The objective of the invention is to provide products of uniform quality, by eliminating harmful effects by the sagging of a belt-like substrate by self weight in exposure and aligning the belt-like substrate and photomasks to high dimensional accuracy. In an exposure device, a belt-like substrate 1 is exposed for each predetermined length region while intermittently sending the belt-like substrate 1 along its longitudinal direction. The flexible belt-like substrate 1 having sensitive material stuck surfaces to be exposed is moved by a drive unit 19 between a feeding reel 14 and a take-up reel 15. A vertical path, in which the belt-like substrate 1 becomes a vertical state is formed between the feeding reel 14 and the take-up reel 15. An exposure section is located in the vertical path. The exposure section has photomasks 21, 22. Patterns drawn in the photomasks 21, 22 are transferred to the surfaces of the belt-like substrate 1 to be exposed by the lights from light sources.
Description
Technical field
The present invention relates to a kind of via photomask to the substrate irradiates light, and will particularly relate to a kind of exposure device that is used to make the flexible belt base plate exposure that is attached with photosensitive material at the exposure device of the graph transfer printing of being drawn on the photomask to the substrate.
Background technology
Well-known a kind of exposure device, this exposure device is wound into coiling cylindraceous with between the reel flexible belt base plate being wound into extraction cylindraceous with reel with this belt base plate, along the length direction of belt base plate intermittently give belt base plate on one side, on one side every the length areas of regulation this belt base plate that exposes.On at least one face of belt base plate, form the plane of exposure that is attached with photosensitive material.By photomask to the plane of exposure irradiates light, will be to substrate at the such graph transfer printing of for example circuit of being drawn on the photomask.In existing exposure device, belt base plate exposes under level.
In above-mentioned existing exposure device, the belt base plate of level exists because of the crooked downwards tendency of deadweight.This bending can bring big problem when exposing.To length direction indexing transfer belt base plate and when making the relative belt base plate of photomask carry out position alignment, or the photomask mutual alignment does not contact and the two formation gap between belt base plate and photomask on time.But, when carrying out position alignment, owing to need to read in a CCD camera simultaneously the position alignment mark of the mutual both sides' formation of belt base plate and photomask or photomask, so, just need make above-mentioned gap become narrow distance within the depth of focus of CCD camera.For this reason, for exposure portion, though belt base plate is applied the big pulling force of length direction and the bending of the belt base plate that causes because of deadweight is reduced, but because of the big pulling force of its length direction causes belt base plate to extend to length direction, compare with the state of no pulling force, will produce the variation of size.Owing under this state, carry out position alignment, therefore just be difficult to provide belt substrate and photomask are carried out high precision position aligning and the uniform product of quality.
Another problem in the existing exposure device is adhering to of dust.On the belt base plate of level, adhere to dust easily.When under the plane of exposure of belt base plate has adhered to the state of dust, directly it being exposed, just cause ill-exposed easily.In addition, on the speculum of photomask that disposes below the belt base plate and light source, also accumulate the dust that falls from belt base plate easily.This dust that accumulates will become the main cause that produces many ill-exposed products.
Summary of the invention
In order to solve above-mentioned existing problem, according to the present invention, provide a kind of on one side at the exposure device that is used for intermittently giving belt base plate on one side, every the length areas of stipulating this belt base plate being exposed along the length direction of belt base plate, comprising:
At least the flexible belt base plate that single face is had the plane of exposure that has adhered to photosensitive material is rolled into extraction reel cylindraceous;
Be used for being wound into above-mentioned belt base plate cylindric and separating the coiling reel that the distance of regulation is provided with reel from above-mentioned extraction;
Be used for intermittently giving the drive unit of above-mentioned belt base plate with reel to reeling with reel from above-mentioned extraction;
That be provided with between with reel with reel and above-mentioned coiling in above-mentioned extraction and have can be near to or in contact with the exposure portion of at least one photomask of above-mentioned plane of exposure; And
Be used for the graph transfer printing that will draw on the above-mentioned photomask light source to the above-mentioned plane of exposure of above-mentioned belt base plate,
Form vertical-path that above-mentioned belt base plate become plumbness with reel and above-mentioned coiling between with reel in above-mentioned extraction,
At above-mentioned vertical-path above-mentioned exposure portion is set.
Above-mentioned vertical-path is arranged to vertically extend along the moving direction of above-mentioned belt base plate.
The a pair of photomask of configuration in above-mentioned exposure portion, and respectively in the face of the above-mentioned plane of exposure on two surfaces of above-mentioned belt base plate,
This a pair of photomask has the position alignment mark in position respect to one another,
Can also comprise: be used to read this position alignment at least one CCD camera with mark, and be used for according to the above-mentioned position alignment that reads by this CCD camera with the data of mark, make at least one photomask of above-mentioned photomask in its plane, move the travel mechanism that carries out position alignment to X, Y, θ direction.
In order to make the position alignment of above-mentioned belt base plate and above-mentioned photomask, the position alignment mark that can aim at mark position with the position alignment on being arranged on above-mentioned photomask can formed on the above-mentioned belt base plate.
The above-mentioned position alignment mark that forms on the above-mentioned belt base plate also can be substituted by the lateral edges of above-mentioned belt base plate.
According to exposure device of the present invention, owing to can expose at the vertical-path that belt base plate becomes plumbness, so can not produce the bending of the belt base plate that causes because of deadweight.Therefore, be not used to reduce crooked big pulling force, so the change in size that causes with regard to the extension that can not be attended by belt base plate and having problems owing to do not need belt base plate applied.
In addition, the belt base plate that becomes plumbness in vertical-path is owing to just can keep sufficient flatness by pulling force seldom, so can access the collimation good with respect to photomask, its result has just improved position alignment precision between the two.
And the belt base plate of plumbness more is difficult to adhere to dust than the belt base plate of level.And structurally, because the speculum of photomask and light source also can be provided with plumbness, so it is caused ill-exposed just can to significantly reduce the dust that adheres to or accumulate on the speculum of belt base plate, photomask and light source.
In addition and since from the light of light source be not by vertical direction but undertaken by horizontal direction luminous, so in equipment, just can easily guarantee the light path grown.When using long light path,, therefore just improved image resolution ratio because the optical quality of directional light is improved, thus just can be more realistically with the graph transfer printing drawn on the photomask to belt base plate.
As a result, according to the present invention,, just can obtain than existing higher quality and productivity about the exposure of belt base plate.
Description of drawings
Fig. 1 is the concise and to the point longitdinal cross-section diagram of an embodiment of expression exposure device of the present invention.
Fig. 2 is the sketch that becomes the relative position of the belt base plate of plumbness and photomask in the expression exposure portion, and Fig. 2 is the figure that the direction of the arrow mark A from Fig. 1 is observed.
Among the figure: 1-belt base plate, 3-photomask framework, 4-containment member, 5-travel mechanism, 6-substrate plate, 7-CCD camera, 8-travel mechanism, 9-travel mechanism, 10-directional light, 11-speculum, 12-cylinder, 13-cylinder, 14-extract out and use reel, 15-reel and use reel, 16-deflector roll, 17-deflector roll, 18-substrate, 19-transmission driven roller, 20-workbench, 21-photomask, 22-photomask, 23-photomask position alignment mark, the position alignment mark of 24-belt base plate, 25-exposure area, 26-basket, 27-deflector roll, 28-deflector roll, 29-deflector roll, 30-deflector roll, 31-speculum, U1-photomask unit, U2-photomask unit, P-spacing.
Embodiment
Fig. 1 is the concise and to the point longitdinal cross-section diagram of an embodiment of expression exposure device of the present invention.Exposure device comprises: substrate 18 and the framework 26 that is arranged in this substrate 18.Extraction reel 14 is set in the right part of substrate 18.Flexible belt base plate 1 is wound into cylinder 12 shapes in extracting out with reel 14.On the other hand, coiling reel 15 is set in the left part of substrate 18.
With reel 14 with between reeling with reel 15 transmission driven roller 19 is set in extraction.Transmission driven roller 19 will twist in to extract out with the belt base plate on the reel 14 1 and extract out off and on every the length of regulation.Enter vertical-path from extracting the belt base plate of extracting out with reel 14 1 out through deflector roll 16,17,27,28, become plumbness.The zone that belt base plate 1 becomes plumbness is an exposure portion.Under plumbness, the belt base plate 1 by exposure portion is through deflector roll 29,30 and transmit driven roller 19 be wound into cylinder 13 shapes on reeling with reel 15.Indexing transfer along the length direction of such belt base plate 1 is to be undertaken by the transmission driven roller 19 as drive unit.
The workbench 20 that uses in the time of the joint operation of carrying out belt base plate 1 etc. also can being set in the path of belt base plate 1 midway, and being used to is removed the adhesive roll of the dust on belt base plate 1 surface.And the swing preventing device that preferably will be used for belt base plate 1 is arranged on reel 15 and deflector roll are used in extraction with reel 14, coiling at least one.
At least the one side of belt base plate 1 is for being attached with the plane of exposure of photosensitive material.In exposure portion corresponding to the position configuration photomask unit U1 or the U2 of plane of exposure.In illustrated embodiment, on two surfaces, form plane of exposure.Therefore, in exposure portion, the belt base plate 1 that clips plumbness is at both sides configuration photomask unit U1 and photomask unit U2.Photomask 21,22 in the face of the plane of exposure of belt base plate 1 is set respectively in photomask unit U1 and photomask unit U2.On photomask 21,22, draw for example such figure of circuit is arranged, at the opposition side of photomask 21,22 and belt base plate 1, configuration will be from the light of the light source (not shown) of the paper inside that the is positioned at Fig. 1 speculum 11,31 to the direction channeling conduct of belt base plate 1., shine on the plane of exposure of belt base plate 1 by speculum 11,31 from the light 10 of light source by photomask 21,22, thus with graph transfer printing on belt base plate 1.Preferably: light 10 is directional lights, and also preferred: the exposure portion of containing speculum 11 is covered by framework 26.
The mechanism (not shown) that is used near reaching away from the opposing party is installed at least one photomask unit of photomask unit U1, U2.Photomask 21 comprises the substrate plate 6 of frame-like.In substrate plate 6, be equipped with and keep photomask 21,22 and possess making photomask 21,22 framework 3 to the travel mechanism 5 that X, Y, θ direction move in its plane.At least towards the peripheral part on the surface of a side of belt base plate 1 annular seal member 4 is set at framework 3.Annular seal member 4 can make under photomask unit U1, the approximating situation of U2 when exposure, forms the seal cavity that is made of the framework 3 that comprises belt base plate 1, containment member 4 and photomask 21,22.By to reducing pressure in this seal cavity, belt base plate 1 and photomask 21,22 are closely bonded mutually.
Be provided at least one photomask unit of photomask unit U1, U2 and make photomask 21,22 each other or the CCD camera 7 that uses when each photomask and belt base plate position alignment.Camera 7 can move by X, Y direction in the plane parallel with the face of photomask by the moving structure 8,9 that is installed in framework 3.
The exposure method that uses exposure device of the present invention is described with reference to Fig. 2.Fig. 2 is the sketch that is illustrated in the relative position of the belt base plate 1 that becomes plumbness in the vertical-path of exposure portion and photomask 21,22, is the figure that the direction of the arrow mark A from Fig. 1 is observed.Belt base plate 1 is exposed every the zone 25 of the specific length of representing with double dot dash line.Therefore, transmitting length P that driven roller 19 will comprise the length in this zone 25 is made as spacing and transmits belt base plate 1 off and on.Transmit in belt base plate 1 process, as shown in Figure 1, photomask unit U1, U2 are in going-back position, have just formed predetermined gap between photomask 21,22 and belt base plate 1.
When the position that is transmitted in regulation of belt base plate 1 stopped, at least one photomask unit just can be near another photomask unit among photomask unit U1, the U2.Its result, photomask 21,22 is near the zone 25 of relative belt base plate, the state that the in-position is aimed at.In the position of facing photomask 21,22 respectively position alignment mark 23,23 is set.Position alignment is positioned at outside the belt base plate 1 with mark 23,23.Utilize CCD camera 7 to read position alignment with the position of mark 23,23, make according to the data that read out that at least one photomask moves by X, Y, θ direction in the photomask 21,22, carry out the position alignment of photomask 21 and 22.
On belt base plate 1, exist: position alignment is arranged with mark 24 with there is not the situation of position alignment usefulness mark on it.Has position alignment with under the situation of mark 24 at belt base plate 1, also can utilize CCD camera 7, that reads photomask 21,22 simultaneously uses the position of the position alignment of mark (not shown) and belt base plate 1 with mark at facing position to the position alignment of the position setting of mutatis mutandis mark 24, carries out the position alignment of photomask 21,22 and belt base plate 1 according to the data that read.
There is not position alignment on the belt base plate 1 with under the situation of mark 24, the position alignment of the photomask 21,22 that also can utilize CCD camera 7 to read the lateral edges of belt base plate 1 and be provided with in the position in the face of lateral edges is used the position of mark (not shown), carries out the position alignment of belt base plate 1 and photomask 21,22 according to both sides' relativeness.In the case, the lateral edges with belt base plate 1 replaces position alignment mark 24.
If end photomask 21,22 reaches the position alignment between photomask 21,22 and the belt base plate 1 to each other, then further make photomask unit U1, U2 approaching, form the confined space that constitutes by the framework 3 that comprises belt base plate 1, containment member 4 and photomask 21,22.By utilizing decompressor (not shown) that this confined space is reduced pressure, photomask 21,22 and belt base plate 1 are closely bonded each other.
Then, Jie will be shone on the zone 25 of belt base plate 1 by photomask 21,22 from the light 10 of light source by speculum 11,31.Thus, with the graph transfer printing drawn on the photomask 21,22 to the zone 25 of belt base plate 1.
Have, light 10 also can shine two surfaces of belt base plate 1 simultaneously, also can shine by single face again.
After single exposure finishes, remove the decompression state of confined space, photomask unit U1, U2 are separated, as shown in Figure 1, between photomask 21,22 and belt base plate 1, form predetermined gap.After, carry out exposure work repeatedly with length P indexing transfer belt base plate 1.
Have again, in illustrated embodiment,, also can move from top to bottom though belt base plate 1 moves in vertical-path from bottom to top.
Claims (7)
1, a kind of exposure device, its be used for along the length direction of belt base plate intermittently give belt base plate on one side, on one side every the length areas of regulation this belt base plate that exposes, it is characterized in that,
Comprise:
At least the above-mentioned belt base plate that single face is had the flexibility of the plane of exposure that has adhered to photosensitive material is rolled into extraction reel cylindraceous;
Be used for being wound into above-mentioned belt base plate cylindric and separating the coiling reel that the distance of regulation is provided with reel from above-mentioned extraction;
Be used for intermittently giving the drive unit of above-mentioned belt base plate with reel to reeling with reel from above-mentioned extraction;
That be provided with between with reel with reel and above-mentioned coiling in above-mentioned extraction and have can be near to or in contact with the exposure portion of at least one photomask of above-mentioned plane of exposure; And
Be used for the graph transfer printing that will draw on the above-mentioned photomask light source to the above-mentioned plane of exposure of above-mentioned belt base plate,
Form vertical-path that above-mentioned belt base plate become plumbness with reel and above-mentioned coiling between with reel in above-mentioned extraction,
At above-mentioned vertical-path above-mentioned exposure portion is set.
2, exposure device according to claim 1 is characterized in that: above-mentioned vertical-path is arranged to the moving direction vertical extent along above-mentioned belt base plate.
3, exposure device according to claim 1 and 2 is characterized in that:
Dispose a pair of photomask in above-mentioned exposure portion, and this a pair of photomask is respectively in the face of the above-mentioned plane of exposure on two surfaces of above-mentioned belt base plate;
This a pair of photomask has the position alignment mark in position respect to one another;
Exposure device also comprises: be used to read at least one the CCD camera of this position alignment with mark, and be used for making at least one photomask of above-mentioned photomask move the travel mechanism that carries out position alignment to X, Y, θ direction according to the above-mentioned position alignment that is read by this CCD camera in its plane with the data of mark.
4, exposure device according to claim 1 and 2, it is characterized in that: in order to carry out the position alignment of above-mentioned belt base plate and above-mentioned photomask, forming the position alignment mark that to aim at mark position with the position alignment that on above-mentioned photomask, is provided with on the above-mentioned belt base plate.
5, exposure device according to claim 3, it is characterized in that: in order to carry out the position alignment of above-mentioned belt base plate and above-mentioned photomask, forming the position alignment mark that to aim at mark position with the position alignment that on above-mentioned photomask, is provided with on the above-mentioned belt base plate.
6, exposure device according to claim 4 is characterized in that: the above-mentioned position alignment that will form on above-mentioned belt base plate is replaced by the lateral edges of above-mentioned belt base plate with mark.
7, exposure device according to claim 5 is characterized in that: the above-mentioned position alignment that will form on above-mentioned belt base plate is replaced by the lateral edges of above-mentioned belt base plate with mark.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004143587A JP2005326550A (en) | 2004-05-13 | 2004-05-13 | Exposure device |
| JP2004143587 | 2004-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1703137A CN1703137A (en) | 2005-11-30 |
| CN100482038C true CN100482038C (en) | 2009-04-22 |
Family
ID=35472967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100783252A Active CN100482038C (en) | 2004-05-13 | 2005-05-12 | Exposure unit |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005326550A (en) |
| KR (1) | KR20060047768A (en) |
| CN (1) | CN100482038C (en) |
| TW (1) | TWI382276B (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006301170A (en) * | 2005-04-19 | 2006-11-02 | Fujikura Ltd | Exposing device and method therefor |
| JP4845746B2 (en) * | 2006-06-20 | 2011-12-28 | 株式会社オーク製作所 | Transport device |
| US7961299B2 (en) | 2007-11-08 | 2011-06-14 | Orc Manufacturing Co., Ltd. | Transfer device |
| US8023105B2 (en) | 2007-11-19 | 2011-09-20 | Orc Manufacturing Co., Ltd. | Compact projection exposure device and associated exposure process performed by the device for exposing film-shaped tape to form circuit patterns |
| JP5180624B2 (en) * | 2008-03-10 | 2013-04-10 | 東レエンジニアリング株式会社 | Method and apparatus for exposing strip-shaped workpiece |
| JP5451175B2 (en) * | 2009-05-15 | 2014-03-26 | サンエー技研株式会社 | Exposure equipment |
| EP2729427A1 (en) * | 2011-07-06 | 2014-05-14 | Renishaw PLC | Method of manufacture and apparatus therefor |
| CN102402131A (en) * | 2011-11-11 | 2012-04-04 | 深南电路有限公司 | Exposure system |
| JP6149214B2 (en) * | 2013-03-26 | 2017-06-21 | サンエー技研株式会社 | Exposure apparatus and exposure method |
| CN103246177B (en) * | 2013-05-03 | 2015-06-03 | 中山新诺科技有限公司 | Continuous mask-free photoetching method for flexible panel and device for method |
| KR101510156B1 (en) * | 2014-11-10 | 2015-04-08 | (주)프리테크 | light exposure apparatus for manufacturing lead frame |
| CN107077080B (en) * | 2015-01-15 | 2019-04-26 | 株式会社村田制作所 | Exposure device |
| CN105467779A (en) * | 2016-01-04 | 2016-04-06 | 京东方科技集团股份有限公司 | Exposure machine and exposure method |
| CN108073044A (en) * | 2016-11-07 | 2018-05-25 | 俞庆平 | The double-faced exposure method and device of a kind of flexible material |
| CN106773552B (en) * | 2017-02-04 | 2019-01-22 | 深圳市优盛科技有限公司 | Without the real-time micro-nano stamp system of exposure mask |
| JP7323267B2 (en) * | 2017-11-30 | 2023-08-08 | 株式会社アドテックエンジニアリング | Double-sided exposure device |
| JP7234426B2 (en) * | 2017-11-30 | 2023-03-07 | 株式会社アドテックエンジニアリング | Mask pairs and double-sided exposure equipment |
| CN109661113B (en) * | 2018-12-29 | 2020-06-26 | 苏州群策科技有限公司 | Preparation method and device of ultrathin embedded circuit board |
| CN115627443A (en) * | 2020-11-18 | 2023-01-20 | 匠博先进材料科技(广州)有限公司 | Vapor deposition mask, vapor deposition module, vapor deposition device, display device, and method and device for manufacturing display device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5288729A (en) * | 1989-10-07 | 1994-02-22 | Kabushiki Kaisha Toshiba | Exposing method and apparatus |
| JP2001272791A (en) * | 2000-03-24 | 2001-10-05 | Think Laboratory Co Ltd | Continuous manufacturing method for flexible printed circuit board |
-
2004
- 2004-05-13 JP JP2004143587A patent/JP2005326550A/en active Pending
-
2005
- 2005-05-11 TW TW094115240A patent/TWI382276B/en active
- 2005-05-11 KR KR1020050039299A patent/KR20060047768A/en not_active Application Discontinuation
- 2005-05-12 CN CNB2005100783252A patent/CN100482038C/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TW200540563A (en) | 2005-12-16 |
| JP2005326550A (en) | 2005-11-24 |
| KR20060047768A (en) | 2006-05-18 |
| TWI382276B (en) | 2013-01-11 |
| CN1703137A (en) | 2005-11-30 |
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