CN108073044A - The double-faced exposure method and device of a kind of flexible material - Google Patents
The double-faced exposure method and device of a kind of flexible material Download PDFInfo
- Publication number
- CN108073044A CN108073044A CN201610973545.XA CN201610973545A CN108073044A CN 108073044 A CN108073044 A CN 108073044A CN 201610973545 A CN201610973545 A CN 201610973545A CN 108073044 A CN108073044 A CN 108073044A
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- flexible material
- exposure
- strip
- roller
- double
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention relates to laser explosure technologies, and in particular to the double-faced exposure method and device of a kind of flexible material.More ancillary method is needed to the exposure of flexible material at present, while can not accomplish continuous exposure and two-sided while expose.The present invention provides a kind of double-faced exposure method and device of flexible material, the present invention is tightened after using multipair winding up roller, flexibility is batched, the flexible material tightened between two windings up roller can provide a stable exposure plane, an exposure device is disposed respectively on the both sides of the exposure plane of this stabilization, winding up roller, which rotates, drives flexible material to move ahead, flexible material it is forward during, exposure sources work, can operation continuously be exposed to the upper and lower surface of flexible material.There are one active focus modules for installation in the optical system of exposure sources, it is ensured that the surface of photohead and flexible material is equidistant, it is ensured that exposure quality.The present invention can greatly improve the exposure efficiency of flexible material compared with the prior art.
Description
Technical field
The present invention relates to laser explosure technologies, and in particular to the double-faced exposure method and device of a kind of flexible material.
Background technology
At present, in laser explosure technical field, it is necessary to which the flexible material being exposed includes flexible glass, copper coin etc.；This
A little flexible materials can not be exposed due to not possessing the structural rigidity of rigid material according to the Exposure mode of rigid material.Cause
This is directed to such material, general in the prior art to be exposed processing using following methods：
（1）Using rigid border, flexible material is tightened in inside rigid border, is then exposed processing again；
（2）Strong flexible material, which is close on one piece of rigid bottom plate, to be exposed.
Above-mentioned Exposure mode can auxiliary flexible material overcome and be easily deformed or the defects of warpage, be allowed to be suitble to existing
Technical conditions under implement exposing operation.But there are still following shortcomings：
（1）It needs to carry out substrate to flexible material before exposure or taut frame, process is cumbersome；
（2）Longer flexible material can not continuously be exposed；
（3）For requiring the flexible material of double-sided exposure, implement the difficulty bigger of exposure.
The content of the invention
It is an object of the invention to provide the double-faced exposure method and device of a kind of flexible material, compared with the prior art,
Using this method exposure efficiency can be improved to the two-sided carry out continuous exposure of flexible material.
In order to reach above-mentioned technical purpose, the present invention provides a kind of double-faced exposure method of flexible material, includes following step
Suddenly：
（1）Strip-shaped flexible material is tightened between multiple windings up roller；
（2）The tight strip-shaped flexible material between winding up roller is both provided with exposure device above two sides；
（3）Winding up roller, which rotates, drives strip-shaped flexible material movement, in motion process, step（2）Described in exposure device to banding
Flexible material is exposed.
Preferably, step（2）In exposure device strip-shaped flexible material is completely covered using multiple exposure point successions
The width of material.
Preferably, step（2）In exposure device swept using single exposure point along the width of strip-shaped flexible material
Retouch the mode of covering.
Preferably, step（2）In surface of the exposure device always with strip-shaped flexible material be kept fixed distance.
Preferably, step（3）The motion mode of middle strip-shaped flexible material is uniform motion；
Preferably, step（3）The mode of step motion is taken in the movement of middle strip-shaped flexible material.
The present invention also provides a kind of flexible material double-side exposure device, technical solution is as follows：A kind of flexible material is double
Face exposure device, including exposure device, the exposure device by optical system, scanning platform, light-source system, communication module,
Computer, data processing module composition, optical system and light-source system are mounted on scanning platform, computer and communication module,
Scanning platform, data processing module are respectively connected with；Light-source system is connected with communication module；Optical system and communication module phase
Connection；Optical system is made of digital micro-mirror device, imaging system；Further include winding up roller, winding up roller driving motor, driving motor installation
On winding up roller；The top for the strip-shaped flexible material upper and lower surface tightened between two windings up roller is installed by one exposure device respectively；Institute
An active focus module is also equipped in the imaging system stated.
The technical effects of the invention are that：Since flexible material can crimp, stretch tight after using winding up roller, flexible material is batched
Tightly, the flexible material tightened between two windings up roller can provide a stable exposure plane, in the exposure plane of this stabilization
Both sides dispose an exposure device respectively, winding up roller, which rotates, drives flexible material to move ahead, flexible material it is forward during, exposure
Equipment works, and continuously can be exposed operation to the upper and lower surface of flexible material.In the optical system of exposure sources
There are one active focus modules for installation, it is ensured that the surface of photohead and flexible material is equidistant, it is ensured that exposure quality.The present invention
Compared with the prior art, the exposure efficiency of flexible material can be greatly improved.
Description of the drawings：
Fig. 1 is a kind of structural schematic block diagram of flexible material double-side exposure device in the present invention；
Fig. 2 is the structure diagram of an embodiment of the present invention；
Fig. 3 is the structure diagram of another embodiment of the present invention.
Specific embodiment：
The specific embodiment of the present invention is described in detail with reference to embodiments.
Embodiment 1：
1 and attached drawing 2 referring to the drawings,
（1）Strip-shaped flexible material is tightened between winding up roller 100 by first choice；
（2）Exposure device 300 is separately mounted to step（1）In above the two sides of strip-shaped flexible material mentioned.With reference to attached
Fig. 2, there are one light-source system 330 and an optical systems 310 for installation on the scanning platform 320 of exposure device 300.Referring to the drawings
1, exposure device 300 further includes communication module 340, computer 350, data processing module 360；Computer 350 and communication module
340th, scanning platform 320, data processing module 360 are respectively connected with；Light-source system 330 is connected with communication module 340；Optics
System 310 is connected with communication module 340；Optical system 310 is made of digital micro-mirror device 311, imaging system 312, imaging
An active focus module 313 is also equipped in system 312.Active focus module 313 may insure exposure device 300 and banding
The surface of flexible material is equidistant；
（3）Driving motor 200 drive winding up roller 100, winding up roller 100 rotate drive strip-shaped flexible material advance forward a stepping away from
From；Computer 350 is also connected with driving motor 200, and computer 350 controls the optical system 310 on scanning platform 320 at this time
A scanning motion along strip-shaped flexible material width direction is done, after the completion of scanning, winding up roller 100 drives strip-shaped flexible material
Material is advanced forward a step distance again, and and then optical system 310 tries again scanning.It is so repeated, can realize
Continual scan exposure is done to the two-sided of flexible material.
Embodiment 2：
1 and attached drawing 3 referring to the drawings,
（1）Strip-shaped flexible material is tightened between winding up roller 100 by first choice；
（2）Exposure device 300 is separately mounted to step（1）In above the two sides of strip-shaped flexible material mentioned.With reference to attached
Fig. 3 is equipped with multiple light sources system 330 and multiple optical systems 310 on the scanning platform 320 of exposure device 300.These optics
System 310 completely covers the width of strip-shaped flexible material.Referring to the drawings 1, exposure device 300 further includes communication module
340th, computer 350, data processing module 360；Computer 350 and communication module 340, scanning platform 320, data processing module
360 are respectively connected with；Light-source system 330 is connected with communication module 340；Optical system 310 is connected with communication module 340；
Optical system 310 is made of digital micro-mirror device 311, imaging system 312, and an active is also equipped in imaging system 312 and is gathered
Burnt module 313.Active focus module 313 may insure that exposure device 300 and the surface of strip-shaped flexible material are equidistant；
（3）Driving motor 200 drives winding up roller 100, and winding up roller 100, which rotates, drives strip-shaped flexible material at the uniform velocity to advance forward；Computer
350 are also connected with driving motor 200, and computer 350 controls the optical system 310 on scanning platform 320 to work at this time, and same
When control driving motor 200 keep it is suitable at the uniform velocity；Strip-shaped flexible material is in the case where multiple optical systems 310 are completely covered
It at the uniform velocity moves ahead, the continuous exposure of strip-shaped flexible material positive and negative is completed while traveling.
It should be appreciated that above-mentioned fact Example is merely to illustrate and explain the present invention, it is not intended to limit the invention.It is all
The embodiment drawn based on the principle of the invention is within protection scope of the present invention.
Claims (7)
1. a kind of double-faced exposure method of flexible material, it is characterised in that comprise the steps of：
（1）Strip-shaped flexible material is tightened between multiple windings up roller；
（2）The tight strip-shaped flexible material between winding up roller is both provided with exposure device above two sides；
（3）Winding up roller, which rotates, drives strip-shaped flexible material movement, in motion process, step（2）Described in exposure device to banding
Flexible material is exposed.
2. a kind of double-faced exposure method of flexible material according to claim 1, it is characterised in that：The step（2）
In exposure device the width of strip-shaped flexible material is completely covered in a manner that multiple exposure points are connected.
3. a kind of double-faced exposure method of flexible material according to claim 1, it is characterised in that：The step（2）
In exposure device using single exposure point along strip-shaped flexible material width scanning covering by the way of.
4. a kind of double-faced exposure method of flexible material according to claim 1, it is characterised in that：The step（2）
In surface of the exposure device always with strip-shaped flexible material be kept fixed distance.
5. a kind of double-faced exposure method of flexible material according to claim 2, it is characterised in that：The step（3）
The motion mode of middle strip-shaped flexible material is uniform motion.
6. a kind of double-faced exposure method of flexible material according to claim 3, it is characterised in that：The step（3）
The mode of step motion is taken in the movement of middle strip-shaped flexible material.
7. a kind of flexible material double-side exposure device, including exposure device（300）, the exposure device（300）By optical system
System（310）, scanning platform（320）, light-source system（330）, communication module（340）, computer（350）, data processing module
（360）Composition, optical system（310）And light-source system（330）Mounted on scanning platform（320）On, computer（350）With communication
Module（340）, scanning platform（320）, data processing module（360）It is respectively connected with；The light-source system（330）With communication
Module（340）It is connected；The optical system（310）With communication module（340）It is connected；The optical system（310）
By digital micro-mirror device（311）, imaging system（312）Composition；It is characterized in that：Further include winding up roller（100）, driving motor
（200）, driving motor（200）Mounted on winding up roller（100）On, two windings up roller（100）Between the strip-shaped flexible material both sides tightened
One exposure device is installed respectively above face（300）；The imaging system（312）On be also equipped with an active focus module
（313）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610973545.XA CN108073044A (en) | 2016-11-07 | 2016-11-07 | The double-faced exposure method and device of a kind of flexible material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610973545.XA CN108073044A (en) | 2016-11-07 | 2016-11-07 | The double-faced exposure method and device of a kind of flexible material |
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| Publication Number | Publication Date |
|---|---|
| CN108073044A true CN108073044A (en) | 2018-05-25 |
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| CN201610973545.XA Pending CN108073044A (en) | 2016-11-07 | 2016-11-07 | The double-faced exposure method and device of a kind of flexible material |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019652A1 (en) * | 2018-07-26 | 2020-01-30 | 中山新诺科技股份有限公司 | High-efficiency double-table-board double-sided digitization exposure system and working procedure |
| CN111640726A (en) * | 2020-07-24 | 2020-09-08 | 山东新恒汇电子科技有限公司 | Laser exposure process for lead frame |
| CN111752109A (en) * | 2020-07-21 | 2020-10-09 | 杭州新诺微电子有限公司 | Substrate exposure device and method for roll-to-roll double-sided digital photoetching |
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| CN1703137A (en) * | 2004-05-13 | 2005-11-30 | 三荣技研股份有限公司 | Exposure unit |
| US20060066715A1 (en) * | 2004-09-29 | 2006-03-30 | Fuji Photo Film Co., Ltd. | Image forming apparatus |
| JP2006276398A (en) * | 2005-03-29 | 2006-10-12 | Nsk Ltd | Exposure device |
| CN101408737A (en) * | 2008-11-13 | 2009-04-15 | 深圳市大族激光科技股份有限公司 | Platform-type exposure image detection device and detection method thereof |
-
2016
- 2016-11-07 CN CN201610973545.XA patent/CN108073044A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1703137A (en) * | 2004-05-13 | 2005-11-30 | 三荣技研股份有限公司 | Exposure unit |
| US20060066715A1 (en) * | 2004-09-29 | 2006-03-30 | Fuji Photo Film Co., Ltd. | Image forming apparatus |
| JP2006276398A (en) * | 2005-03-29 | 2006-10-12 | Nsk Ltd | Exposure device |
| CN101408737A (en) * | 2008-11-13 | 2009-04-15 | 深圳市大族激光科技股份有限公司 | Platform-type exposure image detection device and detection method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019652A1 (en) * | 2018-07-26 | 2020-01-30 | 中山新诺科技股份有限公司 | High-efficiency double-table-board double-sided digitization exposure system and working procedure |
| CN111752109A (en) * | 2020-07-21 | 2020-10-09 | 杭州新诺微电子有限公司 | Substrate exposure device and method for roll-to-roll double-sided digital photoetching |
| CN111640726A (en) * | 2020-07-24 | 2020-09-08 | 山东新恒汇电子科技有限公司 | Laser exposure process for lead frame |
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Application publication date: 20180525 |
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