CN1578595A - Image forming device - Google Patents

Image forming device Download PDF

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Publication number
CN1578595A
CN1578595A CNA2004100621520A CN200410062152A CN1578595A CN 1578595 A CN1578595 A CN 1578595A CN A2004100621520 A CNA2004100621520 A CN A2004100621520A CN 200410062152 A CN200410062152 A CN 200410062152A CN 1578595 A CN1578595 A CN 1578595A
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CN
China
Prior art keywords
objective table
mentioned
table member
image processing
processing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004100621520A
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Chinese (zh)
Inventor
福井隆史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of CN1578595A publication Critical patent/CN1578595A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Accessory Devices And Overall Control Thereof (AREA)

Abstract

Provided is an image forming device. The image forming device forms images on recording media(200) while loading the recording media(200) onto stage members(20,30) at a loading position and passing the stage members(20,30) through an image forming section(100), and thereafter, removing the image-formed recording media(200) from the stage members(20,30) at a removal position. Two traveling bodies(40,60) which move from the loading position to the removal position, are detachably provided in parallel and the stage members(20,30) are mounted to each traveling bodies(40,60) so as to protrude from the traveling bodies(40,60). Further, an avoiding unit is installed to avoid interference between the stage members(20,30) when passed each other.

Description

Image processing system
Technical field
The present invention relates to light beam that a kind of utilization modulated according to image information etc., the description region in the recording mediums such as printed circuit board is exposed, thereby in this description region, form the image processing systems such as exposure device of image.
Background technology
In the past, for example as the laser explosure device that is used on printed circuit board etc., forming the image processing system of wiring pattern, its structure is to carry on the usefulness objective table member load (below be sometimes referred to as " loadings ") as the printed circuit board of image exposure object, this objective table member is moved along the speed of sub scanning direction with regulation, on one side on the read-out position of regulation, take the registration holes (alignment mark) on four jiaos that are arranged at the printed circuit board that is loaded on the objective table member with ccd video camera.Then,, coordinate transform is carried out in the rendered object zone of describing in the coordinate system, carried out localization process thus image information according to by this position of taking the printed circuit board of determining.
Then, again on the exposure position of regulation, utilize and to have modulated according to image information and make it to be partial to laser beam to main scanning direction with polygonal mirror, the photonasty coating that is formed on the printed circuit board is scanned, exposes, and finish exposure-processed thus based on image information, promptly the image (latent image) that forms corresponding to wiring pattern is gone up in the regulation zone (description region) in printed circuit board.Also have, take off the printed circuit board that (below be sometimes referred to as " unloading ") is formed with image (latent image) from the objective table member, and the objective table member reset movement (moving horizontally) that is removed printed circuit board is to initial position, enter the operation (for example, can refer to Patent Document 1) that next printed circuit board is exposed.
[patent documentation 1] spy opens the 2000-338432 communique
But, in the laser explosure device of this mode, finish successively following operation promptly take off from the objective table member operation that finishes the printed circuit board (unloading) that exposes, with objective table member reset movement to the operation of initial position, to the objective table member load the operation of (loading) unexposed printed circuit board, the objective table member is moved to read-out position operation during in, can't carry out exposure-processed to printed circuit board.That is, to jump over above-mentioned operation part and intermittently carrying out of the exposure-processed of printed circuit board, so it is relatively poor to make efficient.Therefore, improve manufacturing efficient is the problem that needs solution always.
Summary of the invention
Therefore, the purpose of this invention is to provide a kind of image processing system, recording medium is moved along the landline of regulation, the image formation processing of image can be carried out on this recording medium, forming with high efficiency on one side, thereby the manufacturing efficient that is formed with the record images medium can be improved.
In order to achieve the above object, the present invention's 1 image processing system, it is image processing system as described below, promptly on the " loaded " position behind objective table member loaded recording medium, make this objective table member pass through image forming portion on one side, on this recording medium, form image on one side, and take off from this objective table member at extracting position and to be formed with the record images medium, it is characterized in that, can be set side by side with to clutch two moving bodys that move to above-mentioned extracting position by above-mentioned " loaded " position, above-mentioned objective table member is installed on each moving body, and make its outer stretching in outside this moving body, be provided with the avoidance mechanism that makes the mutually noninterfere when staggered of this objective table member simultaneously.
In the present invention's 1 image processing system, can be set side by side with to clutch two moving bodys that the " loaded " position by recording medium moves to extracting position, and outwardly directed objective table member is installed on each moving body.Also have, when the objective table member is staggered, utilize avoidance mechanism can make it mutually noninterfere.Therefore, for example loaded recording medium on the objective table member and by " loaded " position to extracting position move during in (on recording medium, form image during), another objective table member that has taken off recording medium can be moved to " loaded " position by extracting position, and can be on this another objective table member loaded recording medium.That is, form to handle, thereby move back and forth on same with an objective table member of image processing system in the past and the structure that forms image is compared, can significantly improve image and form the efficient of handling owing to can carry out image continuously.
In addition, the present invention's 2 image processing system is characterised in that, the present invention 1 described in image processing system in, above-mentioned avoidance mechanism be make above-mentioned objective table member near or away from the travel mechanism of image forming portion.
In the present invention's 2 image processing system, avoid mechanism and be can make the objective table member near or away from the travel mechanism of image forming portion.Therefore, when two mutual clutches of moving body, be objective table member when intermeshing, make an objective table member, make another objective table member away from image forming portion, to avoid another objective table member of an objective table component interference near image forming portion.
In addition, the present invention's 3 image processing system is characterised in that, 1 or the present invention of the present invention 2 described in image processing system in, regulate the amount of movement of above-mentioned objective table member, make the recording surface of recording medium and the distance between the image forming portion keep certain value, and irrelevant with the thickness of recording medium.
In the present invention's 3 image processing system, owing to can regulate the amount of movement of above-mentioned objective table member, so in each different recording medium of thickness, do not need to carry out the focus adjustment that purpose is to change the position of image forming portion with respect to this recording surface.
In addition, the present invention's 4 image processing system is characterised in that, in any one described image processing system, above-mentioned " loaded " position and above-mentioned extracting position is set in roughly the same position in the present invention's 1-3.
In the present invention's 4 image processing system, owing to " loaded " position and extracting position are set, so can save the space aspect the image processing system being provided with in roughly the same position.In addition, when recording medium being loaded on the objective table member, has effect very easily with manual mode.
In addition, the image processing system in the present invention's 5 is characterised in that to possess: the image forming portion that is used for forming image on recording medium; Load aforementioned recording medium and it is delivered to two objective table members of above-mentioned image forming portion with being used to; And be arranged on above-mentioned each objective table member and form the position and take out from above-mentioned objective table member between the extracting position of aforementioned recording medium, two moving structures that the loading table top of above-mentioned each objective table member is moved with roughly the same orbital cycle at the image that aforementioned recording medium is loaded into " loaded " position on the above-mentioned objective table member, form by above-mentioned image forming portion; And above-mentioned each moving structure has the mobile guide rail of using respectively.
In the present invention's 5 image processing system, because having respectively to move, two moving structures that move with roughly the same orbital cycle to the loading table top of each objective table member of major general use guide rail, so each objective table member can be stablized and mobile exactly.
In addition, the present invention's 6 image processing system is characterised in that in the image processing system described in the present invention 5, to have the control section of above-mentioned two moving structures of independent control.
In the present invention's 6 image processing system, owing to have the control section of two moving structures of independent control, so even a side breaks down, the opposing party can be not influenced yet.That is, even, the opposing party is worked, so can continue on recording medium, to form image because a side breaks down.
In addition, the present invention's 7 image processing system is characterised in that, the present invention 5 or 6 described in image processing system in, above-mentioned two objective table members and above-mentioned two moving structures are configured to face one another respectively title.
In the present invention's 7 image processing system, because two objective table members and two moving structures are configured to face one another respectively title, so in entire image forms device, about the balance of (Width) good, thereby move with can making the objective table component stability.
In addition, the present invention's 8 image processing system is characterised in that, the present invention 5 to 7 in any one described image processing system, above-mentioned moving structure has makes parallel movable part that above-mentioned objective table member moves along the direction parallel with its loading table top and the vertical moving part that the above-mentioned objective table member edge direction vertical with its loading table top moved.
In the present invention's 8 image processing system, because having, moving structure make above-mentioned objective table member along the direction parallel parallel movable part that moves and the vertical moving part that above-mentioned objective table member is moved along the direction vertical with its loading table top, so can support the objective table member well with its loading table top.
Also have, the present invention's 9 image processing system is characterised in that, the present invention 8 in the record image processing system in, be set up in parallel each above-mentioned parallel movable part of above-mentioned moving structure, and above-mentioned objective table member when being configured to above-mentioned loading table top and observing from overlooking direction with two above-mentioned parallel movable part overlaids.
In the present invention's 9 image processing system, owing to be set up in parallel each above-mentioned parallel movable part of above-mentioned moving structure, and above-mentioned objective table member is configured to above-mentioned loading table top when observing from overlooking direction and two above-mentioned parallel movable part overlaids, thereby makes image processing system self miniaturization.That is, make and save the space aspect the image processing system being provided with.
As mentioned above, in a word according to the present invention, while can carry out making recording medium to move the image formation processing that forms image for this recording medium with high efficiency.Therefore, can improve it and make efficient.
Description of drawings
Fig. 1 be expression among the present invention laser explosure device and the schematic perspective view of loading machine and unloader.
Fig. 2 is the schematic perspective view of the structure of the laser explosure device among expression the present invention.
Fig. 3 is that the major part master of the structure of the laser explosure device among expression the present invention looks schematic diagram.
Fig. 4 is the signal ideograph of the operation of the laser explosure device among expression the present invention.
Fig. 5 is the key diagram of the productive temp (tact) of the laser explosure device among expression the present invention.
Fig. 6 is the signal ideograph of another operation of the laser explosure device among expression the present invention.
Fig. 7 is the schematic perspective view of expression photohead.
Fig. 8 (A) is illustrated in the key diagram that the zone is finished in the exposure that forms on the baseplate material, (B) is the key diagram that expression is carried out the arrangement of exposed areas by photohead.
Fig. 9 is the partial enlarged drawing of the structure of expression digital micromirror device (DMD).
Figure 10 (A) is the key diagram that is used to illustrate the operation of DMD, (B) is the key diagram that is used to illustrate the operation of DMD.
Figure 11 (A) is the schematic top plan view of the scan line of the exposing light beam when representing not to be obliquely installed DMD, (B) is the schematic top plan view of the scan line of the exposing light beam of expression when being obliquely installed DMD.
Figure 12 is the schematic perspective view of the structure of expression photohead.
Figure 13 (A) is the schematic cross-section of the sub scanning direction that forms along optical axis of expression photohead structure, (B) is the schematic side view of (A).
Figure 14 (A) is the schematic perspective view of the structure of expression fiber alignment light source, (B) is the partial enlarged drawing of (A), (C) is the key diagram of the arrangement of luminous point in the expression Laser emission part, (D) is the key diagram of the arrangement of luminous point in the expression Laser emission part.
Figure 15 is the key diagram of the structure of expression multimode fiber.
Figure 16 is the schematic top plan view of the structure of expression complex wave LASER Light Source.
Figure 17 is the schematic top plan view of the structure of expression laser module.
Figure 18 is the schematic side view of the structure of expression laser module.
Figure 19 is that the master of the structure of expression laser module looks schematic diagram.
Among the figure,
10 laser explosure devices (image processing system)
20,30 objective table members
22,32 objective table main bodys
22A, 32A loading surface (loading table top)
24,34 guide wall
26,36 guide rails
40,60 straight line moving bodys (moving structure)
42,62 base plates (parallel movable part)
44,64 guide wall (vertical moving part)
46,66 guide rails
54,74 guide rails
80 loading machines
90 unloaders
100 photoheads (image forming portion)
182 ccd video cameras
200 baseplate materials (recording medium)
202 are exposed face (recording surface)
204 description regions
Embodiment
Below, explain embodiments of the present invention with reference to the accompanying drawings.Fig. 1 is laser explosure device and the loading machine of supplying substrate material and the schematic perspective view of the unloader of discharging baseplate material of expression as an example of the image processing system among the present invention, and Fig. 2 is the schematic perspective view of laser explosure device.Laser explosure device 10 among the present invention is carried laminal baseplate material 200 as the printed circuit board material with the speed of regulation, expose with the laser beam B of having modulated according to image information simultaneously, thereby on this baseplate material 200, form image (latent image) corresponding to wiring pattern.
At this, for convenience of description, the direction that the arrow X with Fig. 1 is represented is as " throughput direction " of baseplate material 200, and is that benchmark is represented " upstream " and " downstream " with it.In addition, with " reset direction " of its rightabout as baseplate material 200.In addition, represent the direction vertical, and be considered as " Width " in the laser explosure device 10 with arrow X with arrow Y.
[summary of exposure device]
The summary of the laser explosure device 10 among the present invention at first, is described.As shown in Fig. 1, Fig. 2, laser explosure device 10 possess two the surface (above) go up absorption and keep baseplate material 200 and the side view of the specific thickness that moves to throughput direction is roughly the objective table member of " L " word shape.These two objective table members 20,30 have same structure, but for convenience of explanation, and what be positioned at the left side on throughput direction is defined as objective table member 20, and what be positioned at the right side is defined as objective table member 30.In addition, be called baseplate material 200A being adsorbed the baseplate material 200 that remains on the objective table member 20 sometimes, describe being adsorbed the baseplate material 200B etc. that is called that remains on the objective table member 30.
Each objective table member 20,30 difference lifting suspension strut freely is on the straight line moving body 40,60 as moving structure, each straight line moving body 40,60 is supported for adjacent to each other, make objective table member 20,30 be positioned at the inboard simultaneously, and can move to the throughput direction and the direction that resets.Therefore, when each straight line moving body 40,60 interlocks, to be positioned at inboard objective table member 20,30 mutually noninterferes in order making, for example can to carry out lifting moving respectively, make an objective table member 20 position up, another objective table member 30 is at lower position.Promptly, each objective table member 20,30 moves to throughput direction the position up, and will adsorb baseplate material 200 exposures that keep thereon, after this baseplate material 200 is removed, move to the direction that resets at lower position, reset into original initial position (loading the " loaded " position of baseplate material 200).
Straight line moving body 40,60 is supported on the pedestal 12 with transportable state, uprightly is provided with pair of sidewalls 14 in the throughput direction both sides of this pedestal 12.Also have, on the top of this sidewall 14, broad ways is set up the sideboard 18 that is useful on the ccd video camera 182 that composing images position detecting device 180 is installed.Then be separated by sidewall 14 tops in downstream of predetermined distance of this sideboard 18, broad ways is set up and is useful on the sideboard 16 that a plurality of photoheads 100 are installed.
Photohead 100 is fixed on the sideboard 16 with downward state, so that can be to baseplate material 200 illuminating laser beam B by this sideboard 16, ccd video camera 182 also is in the state that is provided with down, and freely broad ways moves back and forth, and detects the alignment mark of usefulness (diagram is omitted) so that can take the position (description region) of the baseplate material 200 by this sideboard 18.
Therefore, these laser explosure device 10 main following operations.At first, baseplate material 200A is loaded on the loading surface 22A of objective table member 20 by loading machine (substrate feedway) 80.Then, carry, simultaneously, take alignment mark, detect its position (description region), again according to this testing result, with the description region of photohead 100 exposure regulations with ccd video camera 182 with the state that absorption remains on this loading surface 22A.Behind the end exposure, take off baseplate material (printed circuit board) 200A from objective table member 20 with unloader (substrate withdrawing device) 90.
On the other hand, at this moment, objective table member 30 is carried next baseplate material 200B down with the state that absorption remains on the loading surface 32A, begins exposure by carry out position probing with ccd video camera 182.Promptly, the objective table member 30 that has before unloaded baseplate material (printed circuit board) the baseplate material 200A on the objective table member 20 expose during, restored by the below of this objective table member 20 and to have moved to initial position (" loaded " position), and load next baseplate material 200B, proceed to the operation of carrying out position probing with ccd video camera 182.
Like this, in the laser explosure device 10, it is mobile to circulate alternately by each objective table member 20,30, can carry out the exposure of baseplate material 200 incessantly, thus can improve photohead 100 running rate, be the manufacturing efficient of printed circuit board.Be the summary of laser explosure device 10 above, the structure to each several part is elaborated below.
[structure of photohead]
At first, according to Fig. 7 to Figure 19 the structure of photohead 100 is elaborated.As mentioned above, photohead 100 is vertically set on the top of the sideboard 16 on the Width that is set up in laser explosure device 10, when being adsorbed the baseplate material that transports that remains on the objective table member 20 200 by the exposure position under it, the face that is exposed 202 with respect to this baseplate material 200, shine the laser beam B of having modulated according to image information from the top, expose, thereby be exposed the image (latent image) that forms on the face 202 corresponding to the wiring pattern of printed circuit board at it.
Here, the upper part of baseplate material 200 is for being exposed face 202, and it is for being the photonasty coating of film like by the photosensitive material film forming, be exposed form latent image (image) on the face 202 after, by accepting predetermined process such as etching, just can form wiring pattern corresponding to latent image.Also have, the photonasty coating is by making its dry solidification behind the aqueous photosensitive material of coating on the baseplate material 200, perhaps lamination in advance film forming be that the photosensitive material of film like forms.
As shown in Fig. 7, Fig. 8, photohead 100 constitutes with the roughly rectangular arrangement a plurality of (for example 14) of the capable n row of m (for example 3 row, 5 row), and among the figure, because of being subjected to the wide influence of baseplate material 200, disposes 4 photoheads 100 at the 3rd row.Also have, when expression is arranged in each photohead of the capable n row of m, be recited as photohead 100 below Mn
The exposure region 102 that is formed by photohead 100 is the rectangular shape of minor face on sub scanning direction.Therefore, by move (by photohead 100 relatively to sub scanning direction move) of objective table member 20, form banded exposure successively at each photohead 100 on the scanning area 204 of the face that is exposed 202 in baseplate material 200 and finish zone 206 to throughput direction.Also have, below, when representing the exposure region 102 that produces by each photohead 100 that is arranged in the capable n row of m, be recited as exposure region 102 Mn
In addition, as shown in Figure 8, when photohead 100 of each row that wire arranges is set respectively along orientation with its predetermined distance that staggers (natural several times on the long limit of exposure region, be 2 times in the present embodiment) so that finishing zone 206, banded exposure arranging with the direction (main scanning direction) of sub scanning direction quadrature very close to each otherly.Therefore, at the 1st exposure region 102 of going 11With exposure region 102 12Between the part that can not expose can be by the exposure region 102 of the 2nd row 21Exposure region 102 with the 3rd row 31Expose.
As shown in Figure 9, each photohead 100 11～100 MmHas digital micromirror device (hereinafter referred to as " DMD ") 106 as the spatial optical modulation element of the light beam of on each pixel, modulating incident according to image information.As shown in the figure, DMD106 is on sram cell (memory cell) 108, by arranging a plurality of (for example 600 * 800) tiny mirror (hereinafter referred to as " minitype reflector ") 110 that constitute pixel (pixel) and make it the integrated reflector apparatus that forms with clathrate, on the surface of minitype reflector 110, evaporation has the high material of aluminium isoreflectance, so that reflectivity reaches more than 90%.Also have, support each minitype reflector 110 with the pillar that comprises hinge and Y-piece (yoke) (diagram is omitted).
Therefore, if write digital signal on the sram cell 108 of DMD106, then the minitype reflector 110 with shore supports is the center with the diagonal, tilts in the scope of ± α ° (for example ± 10 °) with respect to the base portion side that is provided with DMD106.That is,, the light that is incident in DMD106 can be reflected to the incline direction of minitype reflector 110 respectively by control the gradient of the minitype reflector 110 of DMD106 according to picture signal.Also have, Figure 10 (A) expression minitype reflector 110 is in inclination+α ° state of ON state, and Figure 10 (B) expression minitype reflector 110 is in inclination-α ° state of OFF state.In addition, on the direction of minitype reflector 110 folded light beams of using the OFF state, be provided with absorber of light (diagram is omitted).
In addition, as mentioned above, DMD106 is listed in Width by the minitype reflector of arranging a plurality of (for example 800) minitype reflector 110 at length direction and forming and arranges a plurality of groups (for example 600 groups) and constitute, and make it to tilt a little when being provided with, so that the limit of its Width (minor face) forms predetermined angular θ (for example 1 °-5 °) with sub scanning direction.Figure 11 (A) is illustrated in the track while scan of the reverberation picture (exposing beam) 104 that is produced by each minitype reflector 110 when DMD106 is tilted, the track while scan of the reverberation picture (exposing beam) 104 when Figure 11 (B) expression makes DMD106 inclination predetermined angular θ.Hence one can see that, if DMD106 is tilted, then because the spacing P2 of the track while scan (scan line) of the exposing beam that produces by each minitype reflector 110 can be when DMD106 be tilted the spacing P1 of scan line narrow, thereby can improve definition significantly.
Also have, repeat exposure (multiple-exposure) on the same scan line, thereby can control the small quantity of exposure position, can realize the exposure of high precision because available different minitype reflector is listed in.Therefore, can be by the exposure position control of small quantity, the section of not having connects the tie point between a plurality of photoheads 100 that are arranged in main scanning direction poorly.And because the tilt angle theta of DMD106 is very small, institute is so that the wide W of scanning during the DMD106 inclination 2The wide W of scanning when DMD106 is tilted 1Roughly the same.In addition, with the direction of sub scanning direction quadrature on the zigzag of the predetermined distance that staggers each minitype reflector row is set, and replace mode that DMD106 is tilted with this, can certainly obtain same effect.
In addition, on the control device (diagram is omitted) of drive controlling photohead 100, not shown Image Information Processing part and mirror drive control section are housed.In the Image Information Processing part, according to the image information of being imported, each photohead 100 is sent the control signal that is used for each minitype reflector 110 in the zone that drive controlling DMD106 needs to control by the controller (diagram is omitted) of control laser explosure device 10 integral body corresponding to wiring pattern.Then,,, each photohead 100 is controlled, made the angle of each minitype reflector 110 of DMD106 be in ON state or OFF state according to the control signal that partly generates in Image Information Processing at the mirror drive control section.
In addition, as shown in figure 12, light incident side at DMD106 is disposed with: the laser that the ejecting end part (luminous point) with optical fiber is lined up 1 row along the direction corresponding with the length direction of exposure region 102 penetrate part 114 fiber alignment light source 112, proofread and correct the laser that penetrates by fiber alignment light source 112 and make the lens combination 120 of its optically focused on DMD106 and seen through the speculum 116 of the laser of lens combination 120 to the DMD106 reflection.Then,, dispose, so that DMD106 and be exposed face 202 and become conjugate relation lens combination 122,124 by the imaging on the face that is exposed 202 of baseplate material 200 of DMD106 laser light reflected in the light reflection side of DMD106.
As shown in figure 13, lens combination 120 by: will be from the photochemical a pair of compound lens 126 of the laser parallel that fiber alignment light source 112 penetrates, constitute in order to make by the become a pair of compound lens of evenly proofreading and correct 128 and the collector lens 118 of laser focusing on DMD106 that will proofread and correct light quantity distribution of the light quantity distribution of parallel photochemical laser.Compound lens 128 has following function, promptly with respect to the orientation of laser ejecting end, at part extensible beam near lens axis, shrink light beam in part away from optical axis, and with the direction of this orientation quadrature, light is directly passed through, therefore can proofread and correct, so that light quantity distribution becomes even to laser.
In addition, as shown in Figure 14 (A), fiber alignment light source 112 has a plurality of (for example 6) laser module 130 on each laser module 130, is connecting an end of multimode fiber 132.On the other end of multimode fiber 132, connecting the optical fiber 134 of the identical and cladding diameter of core diameter and multimode fiber 132 less than multimode fiber 132, as shown in Figure 14 (C), the ejecting end part (luminous point) of optical fiber 134 is listed as along lining up 1 with the main scanning direction of sub scanning direction quadrature, and constitutes laser ejaculation part 114 thus.Also have, as shown in Figure 14 (D), also the ejecting end part (luminous point) of optical fiber 134 can be lined up 2 row along main scanning direction.
As shown in Figure 14 (B), the ejecting end of optical fiber 134 part is fixed by two supporting bracket 136 clampings of surfacing.In addition, at the light emitting side of optical fiber 134, in order to protect the top of optical fiber 134, and be provided with transparent protective plates 138 such as glass.Protective plate 138 both can be arranged to make the top of itself and optical fiber 134 to connect airtight, and also can be arranged to come with it the top of hermetic fiber 134.The ejecting end part optical density height of optical fiber 134, dust suction easily, deterioration, but by protective plate 138 is set, can prevent dust attached on the top, can delay deterioration simultaneously.
In addition, as shown in Figure 14 (B), for the ejecting end of the optical fiber that cladding diameter is little 134 is arranged as 1 row very close to each otherly, stacked multimode fiber 132 between two adjacent multimode fibers 132 of the big part of cladding diameter, and the ejecting end of the optical fiber 134 that is connected with stacked multimode fiber 132 is clipped in be connected between the ejecting end of two optical fiber 134 of two adjacent multimode fibers 132 of the big part of cladding diameter.This can realize by the following method: at the head portion of the laser emitting side of the big multimode fiber 132 of cladding diameter, the coaxial little optical fiber 134 of cladding diameter in conjunction with long 1-30cm, for example with the incident end face thermal welding of optical fiber 134 on the ejaculation end face of multimode fiber 132, coincide both central shafts this moment.
Also have, as multimode fiber 132 and optical fiber 134, can use any in ladder refractive index type optical fiber, graded-index type optical fiber, the compound optical fiber, and as shown in Figure 15, the diameter of the core 134A of optical fiber 134 is identical with the diameter of the core 132A of multimode fiber 132.That is, cladding diameter in the optical fiber 134=60 μ m, core diameter=25 μ m, and cladding diameter in the multimode fiber 132=125 μ m, core diameter=25 μ m.Also have, the transmittance of the incident end face coating of multimode fiber 132 is more than 99.5%.
In addition, though do not illustrate, but also can be short in length and optical fiber that cladding diameter is big on the little optical fiber of thermal welding cladding diameter and after forming short size optical fiber, it being combined on the ejecting end of multimode fiber 132 by lasso (ferrule) and light binding post etc.To lack size optical fiber (optical fiber that cladding diameter is little) with light binding post etc. and can be combined on the multimode fiber 132 with adhering to or break away from if make as described above, then when the little optical fiber of cladding diameter during by breakage, the replacing of this part will become easily, thereby can be reduced in needed cost in the maintenance of photohead 100.Also have, sometimes optical fiber 134 is called the ejaculation top of multimode fiber 132 below.
Laser module 130 is made of complex wave LASER Light Source (fiber light source) as shown in Figure 16.This complex wave LASER Light Source is fixed on the horizontal multimode of a plurality of (for example 7) sheet on the heat block 140 or UV based semiconductor laser device LD1, LD2, LD3, LD4, LD5, LD6, the LD7 of single mode by arrangement; With the parallel light tube lens 142,144,146,148,150,152,154 of being arranged to correspond respectively to UV based semiconductor laser device LD1～LD7; A collector lens 156; Form with a multimode fiber 132.That is, constitute light-gathering optics, constitute the complex wave optical system by this light-gathering optics and multimode fiber 132 by parallel light tube lens 142～154 and collector lens 156.
Therefore, in photohead 100, each laser beam B 1, B2, B3, B4, B5, B6, the B7 that are penetrated with the diverging light state by each UV based semiconductor laser device LD1～LD7 of the complex wave LASER Light Source that constitutes fiber alignment light source 112 at first carry out parallel photochemical through corresponding parallel light tube lens 142～154.Then, by parallel photochemical laser beam B 1-B7 by collector lens 156 optically focused, thereby converge on the incident end of the core 132A of multimode fiber 132.
Laser beam B 1～the B7 of incident end that converges on the core 132A of multimode fiber 132 incides this core 132A and transmits in optical fiber, thus by compound be 1 laser beam B.UV based semiconductor laser device LD1～LD7 oscillation wavelength is all identical with maximum power, if at this moment coupling efficiency is for example 85%, when then each power of UV based semiconductor laser device LD1～LD7 is 30mW, can obtain the complex wave laser beam B that power is about 180mW (=30mW * 0.85 * 7).
Like this, the optical fiber 134 that is connected by the ejecting end with multimode fiber 132 can penetrate the complex wave laser beam B, but for example as shown in Figure 12, Figure 14 (C), when 6 optical fiber 134 penetrate in the part 114 for (luminous point of high brightness is lined up 1 row along the main scanning direction) laser with rectangular arrangement, its power can become the high power of about 1W (=180mW * 6).Also have, the number that constitutes the UV based semiconductor laser device of complex wave LASER Light Source is not limited to 7.
In addition, as shown in Figure 17, Figure 18, aforesaid complex wave LASER Light Source (UV based semiconductor laser device) and other optical element are housed in the assembly (package) 160 of case shape of top opening together.Assembly 160 has the module cover 162 that can stop up its opening, sealing gas is injected in the processing back bleeding, and with the opening of module cover 162 closing assemblies 160, thereby in the enclosure space (seal cavity) that forms by assembly 160 and module cover 162, above-mentioned complex wave LASER Light Source is hermetically sealed.
On the bottom surface of assembly 160, be fixed with base plate 164, at this above end 164, heat block 140 be installed, support the collector lens frame 158 of collector lens 156 and support the optical fibre frame 166 of the incident end of multimode fiber 132.The ejecting end part of multimode fiber 132 is introduced to outside the assembly 160 by the opening on the metope that is formed on assembly 160.
In addition, parallel light tube lens mount 168 is installed on the side of heat block 140, thus supports parallel light pipe lens 142-154.On the cross wall face of assembly 160, be formed with opening, provide the wiring 170 of drive current to be introduced to outside the assembly 160 to UV based semiconductor laser device LD1-LD7 by this opening.Also have, in Figure 17, Figure 18, complicated for fear of figure in a plurality of UV based semiconductor laser devices, only marked symbol to UV based semiconductor laser device LD7, and in a plurality of parallel light tube lens, only parallel light tube lens 154 marked symbol.
In addition, figure 19 illustrates the front shape of the mounting portion of parallel light tube lens 142-154.Each parallel light tube lens 142-154 forms the shape that the zone that comprises the optical axis with aspheric round lens is sheared with parallel flat elongated ground.The parallel light tube lens 142-154 of this elongated shape can be by obtaining resin or optical glass die forming.Also have, parallel light tube lens 142-154 is connected airtight in the orientation that is arranged on luminous point, and orientation (left and right directions of the figure) quadrature of the luminous point of its length direction and UV based semiconductor laser device LD1-LD7.
Also have, as UV based semiconductor laser device LD1-LD7, spendable is the laser that has active layer that luminous width is 2 μ m and be respectively each laser beam B 1-B7 of emission under 10 °, 30 ° the situation at the extended corner of the direction of the direction parallel with active layer, quadrature.These UV based semiconductor laser devices LD1-LD7 is configured to luminous point and is arranged as 1 row on the direction parallel with active layer.Therefore, by each luminous point emitted laser bundle B1-B7, to be incident in each parallel light tube lens 142-154 of elongated shape under the consistent state of the big direction that direction is consistent with length direction, expanded-angle is little of expanded-angle and Width (with the direction of length direction quadrature).
In addition, collector lens 156 forms, the zone that will comprise optical axis with aspheric round lens with parallel flat elongated cut, thereby the orientation of parallel light tube lens 142-154 be long on the horizontal direction, with the direction of its quadrature on short shape.This collector lens 156 also can obtain by the die forming with resin or optical glass.
[structure of picture position checkout gear]
Below, picture position checkout gear 180 is described.As mentioned above, picture position checkout gear 180 is included on the sideboard 18 on the Width that is erected at laser explosure device 10, ccd video camera of installing along this Width freedom of movement ground 182 and not shown positioning control part.In the ccd video camera 182, have two-dimensional CCD as capturing element, the extremely short photoflash lamp of 1 fluorescent lifetime of the light source when having simultaneously as shooting, and the photo sensitivity that is subjected to of each CCD element is configured to only can take when this photoflash lamp is luminous.Positioning control part is to handling from the picture signal of ccd video camera 182, and to the positional information of above-mentioned controller output corresponding to the position of the alignment mark of taking by ccd video camera 182.
In addition, ccd video camera 182 is supported on the frame 184 with downward state, and the guide plate 186 that is set in parallel in the bottom of sideboard 18 can support movably this 184.Therefore, ccd video camera 182 can move back and forth at Width along this guide plate 186, thus the zones of different that can take baseplate material 200.That is, ccd video camera 182 can be regulated its position according to being formed on position as the alignment mark on the baseplate material 200 of reference object etc.Also have, ccd video camera 182 is not limited to illustrated 1, also can be provided with many and be fixed on the suitable location.
On the other hand, on the face that is exposed 202 of baseplate material 200, preestablish the description region 204 that can form, and on four jiaos, be formed with the alignment mark corresponding (diagram is omitted) with this description region 204 corresponding to the latent image of wiring pattern.Then, when being adsorbed the baseplate material 200 that remains on the objective table member 20 and transport with the speed of regulation by the camera site (read-out position) under the ccd video camera 182, make photoflash lamp luminous with official hour, by receiving the reflection of light light that sends by this photoflash lamp, take the coverage that comprises the alignment mark in the baseplate material 200 respectively.
By circular through hole or concave portions are set on the face that is exposed 202 of baseplate material 200, form alignment mark, thus, can detect the position (description region) of the baseplate material 200 on the objective table member 20.Also have, alignment mark can not be through hole or concave portions also, can utilize be pre-formed on the face that is exposed 202 of baseplate material 200 as the flange of wiring pattern etc.
[structure of objective table member and cycling mechanism]
Below, according to Fig. 1 to Fig. 5 the structure of objective table member 20,30 and cycling mechanism thereof is elaborated. Objective table member 20,30 become the objective table main body 22,32 of plane loading surface 22A, the 32A that are used for mounting substrate material 200 by top (surface) and on the top, the outside of this objective table main body 22,32 upward the upright guide wall that is provided with 24,34 of one constitute, and form the vertical direction side longer and see roughly the shape that is " L " word than horizontal direction.
In addition, on two ends, the outside of guide wall 24,34, be equipped with pair of guide rails 26,36, be formed with along the vertical direction on this guide rail and run through total length and cross sectional shape roughly is down the gathering sill of " recessed " shape.In addition, the inside of objective table main body 22,32 is hollow structure, and is equipped with a plurality of aperture 22B, 32B that are used for by the air suction usefulness of negative-pressure adsorption baseplate material 200 on loading surface 22A, 32A.Thereby, on objective table member 20,30, also connecting the cable bearer with power line or air duct (ケ one Block Le ベ ア) (diagram is omitted) that is used to produce negative pressure.
Promptly, when objective table member 20,30 has the vacuum pump equal vacuum generating means (diagram is omitted) of air suction usefulness, just become and have the cable bearer that this vacuum generating device drives the power line of usefulness, and when not having vacuum generating device, just become the cable bearer of (diagram is omitted) air duct that is connected that has the vacuum pump equal vacuum generating means established with other.Also have, can follow moving of objective table member 20,30, preferably form by flexible flexible pipe etc. in order to make this cable bearer.In addition, because the straight line moving body 40,60 of integrated support objective table member 20,30 just moves back and forth along the throughput direction and the direction that resets at grade, so the mounting structure for the cable bearer of objective table member 20,30 is simpler, also can not cause inconvenience such as this cable bearer winding.
Straight line moving body 40,60 by base plate 42,62 and the outboard end of this base plate 42,62 upward the upright guide wall 44,64 that is provided with of one form the vertical-direction length side longer than horizontal direction roughly be " L " word shape, and on two ends in the inboard of this guide wall 44,64, run through total length along the vertical direction and give prominence to and be provided with pair of guide rails 46,66.So, be entrenched on this guide rail 46,66 with the state that can slide by making gathering sill, make 20, the 30 one suspension struts of objective table member on straight line moving body 40,60.
In addition, between guide rail 46,66, be arranged with snap bolt 48,68 in parallel, on an end (for example end portion) of this snap bolt 48,68, be equipped with can positive and negative rotation snap bolt 48,68 engine (diagram is omitted).On the other hand, between the guide rail 26,36 of guide wall 24,34, one is equipped with the cylindrical component 28,38 that inside has ridge along the vertical direction, and snap bolt 48,68 is inserted on this cylindrical component 28,38 with the state that screws togather.Therefore, the positive and negative rotation by engine (diagram omit) drives, and can make guide wall 24,34, to be objective table member 20,30 freely carry out lifting moving along the guide rail 46,66 of guide wall 44,64.
In addition, near four jiaos below base plate 42,62, one is equipped with track 52,72, be formed with the cross section at this track upper edge throughput direction and be roughly the gathering sill of " recessed " shape, and this gathering sill is entrenched in the state that can slide on the pair of guide rails 54,74 above the tabular pedestal 12 that is based in specific thickness.As shown in the figure, the adjacent two groups of guide rails 54,74 that are provided with on the assigned position on the pedestal 12, and it roughly is provided on the total length side by side along throughput direction (direction resets) respectively, between each guide rail 54,74 (inboard), is arranged with snap bolt 56,76 in parallel with specific length.Use a pair of support section (diagram omit) to implement to support near the two ends of snap bolt 56,76 respectively, at its upstream the top of (perhaps also can be the downstream) be separately installed with can positive and negative rotation engine 50,70.
On the other hand, on the substantial middle, be equipped with the cylindrical component (diagram is omitted) that inside has ridge along throughput direction (direction resets) one below base plate 42,62, snap bolt 56,76 is inserted with the state that screws togather and is led on this cylindrical component.Therefore, by the positive and negative rotation driving of engine 50,70, straight line moving body 40,60 can be moved (can interlock) in clutch to the throughput direction and the direction that resets along the speed (when exposing, being 30mm/s for example) of guide rail 54,74 with regulation.Also have, above-mentioned engine 50,70 can utilize the drive pulse signal by not shown conveying control section output to be rotated driving independently, and this conveying control section is connected with above-mentioned controller.In addition, the mechanism that straight line moving body 40,60 is moved is not limited to illustrated snap bolt 56,76 etc., also can move it with linear motor etc.
In addition, as shown in the figure, straight line moving body the 40, the 60th makes it move along throughput direction and the direction that resets under objective table member 20, the 30 opposed states that make suspension strut, and as mentioned above, the Width length of objective table main body 22,32 is than the Width length of base plate 42,62 long (extend to the inside mutually, the objective table main body 22,32 of each objective table member 20,30 will move in roughly the same zone when overlooking).Therefore, when each straight line moving body 40,60 was staggered, in order to make 22,32 mutually noninterferes of objective table main body, objective table member 20,30 position and lower position up staggered and moves.
Promptly, when objective table member 20,30 carries out the localization process finished by ccd video camera 182 and during the exposure-processed finished by photohead 100, on loading surface 22A, 32A, be mounted with baseplate material 200, therefore move to throughput direction the position up, and by extracting position when " loaded " position is carried out reset movement, owing to remove baseplate material 200 from loading surface 22A, 32A, move to the direction that resets at lower position.Like this, each objective table member 20,30 just can be avoided interfering with each other by moving up and down, thereby has the advantage of horizontal (can reduce the space is set) that can constitute laser explosure device 10 compactly.
In addition, if as mentioned above, after objective table member 20,30 rises to the top position, position processing with ccd video camera 182 again, then can be when measuring with this ccd video camera 182, the dislocation of proofreading and correct the baseplate material 200 when objective table member 20,30 is risen.Therefore, can carry out hi-Fix to description region 204.
In addition, owing to treat to carry out exposure-processed with photohead 100 after objective table member 20,30 rises to the top position, can regulate the face that is exposed 202 of this baseplate material 200 and the focal length of photohead 100 according to the thickness of baseplate material 200.Promptly, no matter how much thickness of baseplate material 200 is, can be by regulating the lifting amount of objective table member 20,30, make the distance of the face that is exposed 202 of baseplate material 200 and photohead 100 constant, thereby needn't all carry out the focus adjustment that purpose is to change the setting height(from bottom) of photohead 100 each baseplate material 200 of different-thickness.In addition, because objective table member 20,30 often moves with straight line moving body 40,60 one, therefore can stably finish this and move with high accuracy.
[operation of exposure device]
Following main reference Fig. 1, Fig. 4, Fig. 5 illustrate a series of operation in the laser explosure device 10 with aforesaid structure.At first, stopped by not shown brake and position by supplying with baseplate material 200A that conveyer belt 86 supplies with successively, its four jiaos adsorption elements 82 that are loaded machine 80 are adsorbed afterwards.Guide plate 84 supports this adsorption element 82, and it can be moved to the throughput direction and the direction that resets, and sends baseplate material 200A here from supplying with conveyer belt 86, and it is loaded in standby on the loading surface 22A of the objective table member 20 of initial position (" loaded " position).
At this moment, owing to utilize vacuum pump etc. to provide negative pressure to objective table member 20 by cable bearer, thus can be by a plurality of aperture 22B suction airs that are located on the loading surface 22A, and according to this effect baseplate material 200A is fixed on the loading surface 22A with closed state.Then, make objective table member 20 rise to assigned position.At this moment top position can suitably be regulated according to the thickness of baseplate material 200A.
On the loading surface 22A that baseplate material 200A is adsorbed remain on objective table member 20 by above operation, and after remaining on the top position, engine 50 can make snap bolt 56 rotations according to driving from the drive pulse signal of carrying control section.So, straight line moving body 40 can move to throughput direction along the speed of guide rail with regulation, at first, utilization is installed in the alignment mark that the ccd video camera 182 on the sideboard 18 is taken on four jiaos that are arranged on baseplate material 200A, thereby detects the position of the description region 204 of baseplate material 200A.
That is, the alignment mark one of baseplate material 200A arrives the camera site (read-out position) of ccd video camera 182, will make photoflash lamp luminous, thereby available ccd video camera 182 is taken the shooting area that comprises the alignment mark in the face of being exposed 202.Then, the photographing information that is obtained by ccd video camera 182 is output to the positioning control part.Positioning control partly is transformed to photographing information the positional information corresponding to the scanning direction and the position on the Width of alignment mark, and this positional information is delivered to controller.
Controller is according to the positional information from positioning control alignment mark partly, the position of the alignment mark that judgement is provided with according to description region 204, and by judging the scanning direction of description region 204 and the position on the Width respectively and with respect to the tilt quantity of the scanning direction of description region 204 in the position of this alignment mark.That is, in the position of the baseplate material 200A of controller on judging objective table member 20,, judge the position of each alignment mark among the baseplate material 200A, and judge its description region 204 according to image information.
Then, controller is calculated beginning time for exposure with respect to description region 204 according to the position on the scanning direction of description region 204, simultaneously according to the position on the Width of description region 204 with respect to the tilt quantity of scanning direction, image information corresponding to wiring pattern is carried out conversion process, and the image information that conversion process is crossed is deposited in the frame memory.
As the content of conversion process, comprise with the origin of coordinates being that coordinate transform processing, the edge that the center makes the image information rotation makes the parallel mobile coordinate transform processing of image information corresponding to the reference axis of Width here.In addition as required, the controller conversion process that makes the image information expansion or shrink according to the Width of description region 204 and the expansion amount on the scanning direction and amount of contraction.
Positional information by image information after the above conversion process that obtains and description region 204 is stored in the frame memory of the controller relevant with objective table member 20 temporarily, when being transported to by objective table member 20 (by laser explosure device 10), baseplate material 200A is used for after the not shown conveying device that subsequent processing is carried, being deleted from frame memory.Also have, the localization process time in the present embodiment was 15 seconds.
Afterwards, the baseplate material 200A of the alignment mark that has been taken by objective table member 20 (straight line moving body 40) to the moving of throughput direction, be provided on the exposure position of the photohead 100 that is vertically set on the sideboard 16.Then, speed (for example 30mm/s) with regulation moves on one side, serve as position probing was partly carried out on the basis with positioning control description region 204 to shooting on one side with ccd video camera 182, according to exposing, thereby on the description region 204 of baseplate material 200A, form latent image (image) such as wiring pattern with the wiring pattern corresponding image information.Promptly, by baseplate material 200A is moved to throughput direction with objective table member 20, make photohead 100 relatively carry out subscan, thereby can on baseplate material 200A, on each photohead 100, form banded exposure successively and finish zone 206 (with reference to figure 7, Fig. 8) to the direction that resets.
Here, this exposure-processed operation is specifically described.At first, controller is judged the position of the baseplate material 200A on the objective table member 20, and according to the positional information that deposits the description region 204 in frame memory in, judges that the top of description region 204 arrives the time of exposure position.Then, when arriving exposure position, the top with this description region 204 partly exports the exposure commencing signal to Image Information Processing.Thus, the Image Information Processing part serves as that portion is read the image information that is stored in the frame memory successively with many lines, and generates control signal according to the image information of reading in each photohead 100.Then, the mirror drive control section is controlled to be ON state or OFF state with each minitype reflector 110 of DMD106 according to the control signal of this generation in each photohead 100.
By more than, after the minitype reflector 110 of DMD106 is controlled to be ONOFF, by fiber alignment light source 112 to the DMD106 irradiating laser, imaging on laser light reflected on the minitype reflector 110 of ON state will the be exposed face 202 of scioptics system 122,124 at baseplate material 200A.That is, implemented ONOFF by fiber alignment light source 112 emitted laser by each pixel, the description region 204 of baseplate material 200A exposes with the pixel unit (exposure region) with the roughly the same quantity of use number of picture elements of DMD106.Also have, said here image information is the data that each PEL (picture element) density of composing images is represented with 2 systems (having or not of round dot record), and the exposure-processed time of photohead 100 was 15 seconds in the present embodiment.
On the other hand, objective table member 30 the baseplate material 200A on the objective table member 20 is positioned handle and the beginning exposure-processed before during in, carry out homing action.That is, objective table member 30 drops to lower position, and straight line moving body 60 is moved to " loaded " position by extracting position along the speed of guide rail 74 with regulation.Then, in the exposure-processed process of objective table member 20, on " loaded " position, next baseplate material 200B is delivered on its loading surface 32A, to finish loading from supplying with conveyer belt 86 with loading machine.At this moment, same as described above, baseplate material 200B is because the suction function that produced by the aperture 32B suction air of objective table member 30, is adsorbed to remain on its loading surface 32A.
Behind above mounting substrate material 200B, objective table member 30 rises on the position upward, and engine 70 makes snap bolt 76 rotations according to driving from the drive pulse signal of carrying control section.So, straight line moving body 60 moves to throughput direction along the speed of guide rail 74 with regulation, and, take the alignment mark on four jiaos that are arranged on baseplate material 200B, thereby detect the position of the description region 204 of baseplate material 200B with the ccd video camera 182 that is installed on the sideboard 18.That is, by beginning to expose in 15 seconds that finish exposure, roughly finish to objective table member 30 mounting substrate material 200B up to above-mentioned operation at objective table member 20.
On the other hand, behind the end exposure of baseplate material 200A, objective table member 20 drops to lower position, and removes the negative pressure by generations such as vacuum pumps, takes out baseplate material (printed circuit board) 200A with unloader 90 from loading surface 22A simultaneously.That is, the adsorption element 92 of usefulness unloader 90 adsorbs four jiaos of baseplate material 200A, and is delivered on the discharge conveyer belt 96 along guide rail 94 from objective table member 20.Then, this baseplate material (printed circuit board) 200A is delivered to subsequent processing by not shown conveying device.
In addition, utilize engine 50 that snap bolt 56 opposite direction rotation when carrying is driven, make objective table member 20 (the straight line moving body 40) reset movement of having taken off baseplate material 200A thus to original " loaded " position (initial position).Then, with loading machine 80 next baseplate material 200A is loaded on its loading surface 22A.Also have, at this moment, on objective table member 30, load the alignment mark of baseplate material 200B thereon and taken by ccd video camera 182, detect the position of its description region 204, and begin exposure.That is, controller with identical to the situation of this description region 204, according to image information and the positional information through conversion process, exposes to the description region 204 of next baseplate material 200B after the exposure that finishes the description region 204 of baseplate material 200A.
Then, be adsorbed exposure one end of the baseplate material 200B that remains on the objective table member 30, objective table member 30 just drops to lower position, and removes the negative pressure by generations such as vacuum pumps, takes off baseplate material (printed circuit board) 200B with unloader 90 from loading surface 32A simultaneously.This state has been shown among Fig. 4.Then, the objective table member 20 that has loaded new baseplate material 200A in " loaded " position repeats aforesaid operations, the objective table member 30 (straight line moving body 60) that has taken off baseplate material also carries out reset operation with the operation identical with objective table member 20, next baseplate material (diagram is omitted) is loaded on its loading surface 32A, repeats aforesaid operations.
Like this, this laser explosure device 10 will constantly (not vacated the time interval) and carried out exposure-processed, thereby the running rate of photohead 100 is improved.Therefore, can improve the manufacturing efficient of printed circuit board.Also have, 1 objective table member carries out in the laser explosure device in the past of exposure-processed when equal height position (on one side) moves back and forth (moving horizontally), its manufacturing intermittently is 30 seconds, and with regard to the staggered laser explosure device of the present invention 10 that carries out exposure-processed when moving that circulates of 2 objective table members, it is made intermittently can shorten to 24 seconds.That is, the manufacturing of printed circuit board intermittently can be reduced in the past 4/5.
Also have, in Fig. 4, be provided with loading machine 80 and unloader 90, and the " loaded " position of baseplate material 200 is positioned at different positions with extracting position, but also loading machine 80 and unloader 90 can be set in roughly the same position, perhaps as shown in Figure 6, can be integrated and constitute input/output unit 88 both, make the loading of baseplate material 200 and take out and on roughly the same position, carry out.If become such structure, then can reduce and be equivalent to the space that is provided with that unloader 90 (perhaps loading machine 80) taken up space, carry out the loading of baseplate material 200 with manual mode simultaneously and when taking out, can be finished by an operator, operating can be very convenient.
In addition, each straight line moving body 40,60 respectively by track 52,72 with transportable state respectively by separately guide rail 54,74 support, so that on roughly the same track, make each objective table member 20,30 loading surface 22A, 32A does to circulate to move and (makes loading surface 22A, 32A moves in roughly the same zone), and because each objective table member 20,30 and each straight line moving body 40,60 are configured to be respectively in the face of claiming, so the balance of laser explosure device 10 on Width (left and right directions) is good, each objective table member 20,30 can pass through straight line moving body 40,60 is stable and finish mobile accurately.
In addition, since each straight line moving body 40,60 have with loading surface 22A, 32A parallel direction on make the base plate 42,62 that each objective table member 20,30 moves and make its guide wall 44,64 that moves in vertical direction, so can support objective table member 20,30 well.In addition, because can be with carrying control section to control the engine 50,70 that is used to drive each straight line moving body 40,60 respectively independently, so even a side breaks down, the opposing party can be not influenced yet.That is,, the opposing party is turned round, so can carry out exposure-processed to baseplate material 100 continuously even a side breaks down.
Also have, owing to be set up in parallel the base plate 42,62 of each straight line moving body 40,60, and objective table member 20,30 is configured to overlaid in its loading surface 22A, the 32A vertical view on two base plates 42,62 (move) in roughly the same zone, thereby can make laser explosure device 10 self miniaturization.That is, the space that can save Width aspect the laser explosure device 10 especially is being set.
Also having, can constitute so yet, that is, is not to interfere with each other by making objective table member 20,30 move up and down to avoid, but moves by it being moved in the horizontal direction finish circulation.That is to say, when objective table member 20,30 carries out reset movement, also can make it to finish mobile by route around sidewall 14 outsides.At this moment, owing to need prolong pedestal 12 is set, and lays its guide rail that centers on usefulness etc. at the Width of laser explosure device 10, thus on Width, need to be provided with the space morely, but can reduce the space that is provided with on above-below direction.
In a word in the above-described embodiment, an example as the image processing system among the present invention, the laser explosure device 10 that baseplate material 200 as the raw material of printed circuit board is exposed is described, but the image processing system among the present invention is not limited to be used for the laser explosure device 10 of exposure base material 200, also goes for exposure device that photosensitive materials such as photosensitive printing version, sensitive paper such as PS version, CT galley are exposed etc.In addition, as the light beam that these are exposed, except laser beam, also can use luminous ray, X ray etc.In addition, the image processing system among the present invention also goes for the image processing system and the display manufacturing apparatus of ink-jetting style.

Claims (9)

1. image processing system, be on the " loaded " position behind objective table member loaded recording medium, make this objective table member pass through image forming portion on one side, on this recording medium, form image on one side, and take off the image processing system that forms the record images medium from this objective table member at extracting position, it is characterized in that, can be set side by side with to clutch two moving bodys that move to above-mentioned extracting position by above-mentioned " loaded " position, above-mentioned objective table member is installed on each moving body, and make its outer stretching in outside this moving body, be provided with the avoidance mechanism that makes the mutually noninterfere when staggered of this objective table member simultaneously.
2. image processing system as claimed in claim 1 is characterized in that, above-mentioned avoidance mechanism be make above-mentioned objective table member near or away from the travel mechanism of image forming portion.
3. as claim 1 or 2 described image processing systems, it is characterized in that no matter how much thickness of recording medium is,, make the recording surface of recording medium and the distance between the image forming portion keep certain value by regulating the amount of movement of above-mentioned objective table member.
4. as any one described image processing system among the claim 1-3, it is characterized in that, above-mentioned " loaded " position and above-mentioned extracting position are set in roughly the same position.
5. an image processing system is characterized in that possessing: the image forming portion that is used for forming image on recording medium; Load aforementioned recording medium and it is delivered to two objective table members of above-mentioned image forming portion with being used to; And be arranged on above-mentioned each objective table member and form the position and take out from above-mentioned objective table member between the extracting position of aforementioned recording medium, two moving structures that the loading table top of above-mentioned each objective table member is moved with roughly the same orbital cycle at the image that aforementioned recording medium is loaded into " loaded " position on the above-mentioned objective table member, form by above-mentioned image forming portion; And above-mentioned each moving structure has the mobile guide rail of using respectively.
6. image processing system as claimed in claim 5 is characterized in that, has the control section of above-mentioned two moving structures of independent control.
7. as claim 5 or 6 described image processing systems, it is characterized in that above-mentioned two objective table members and above-mentioned two moving structures are configured to face one another respectively title.
8. as any one described image processing system among the claim 5-7, it is characterized in that above-mentioned moving structure has makes above-mentioned objective table member along the direction parallel with its loading table top parallel movable part that moves and the vertical moving part that above-mentioned objective table member is moved along the direction vertical with its loading table top.
9. image processing system as claimed in claim 8, it is characterized in that, be set up in parallel each above-mentioned parallel movable part of above-mentioned moving structure, and above-mentioned objective table member when being configured to above-mentioned loading table top and observing from overlooking direction with two above-mentioned parallel movable part overlaids.
CNA2004100621520A 2003-07-03 2004-07-05 Image forming device Pending CN1578595A (en)

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CN109143797A (en) * 2018-11-06 2019-01-04 苏州源卓光电科技有限公司 A kind of dual stage face write-through exposure machine and its exposure method

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KR100739421B1 (en) 2007-07-13
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US7280183B2 (en) 2007-10-09
TW200513109A (en) 2005-04-01

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