CN100476997C - 提高可伸缩性的磁电阻随机存取存储器 - Google Patents
提高可伸缩性的磁电阻随机存取存储器 Download PDFInfo
- Publication number
- CN100476997C CN100476997C CNB028228065A CN02822806A CN100476997C CN 100476997 C CN100476997 C CN 100476997C CN B028228065 A CNB028228065 A CN B028228065A CN 02822806 A CN02822806 A CN 02822806A CN 100476997 C CN100476997 C CN 100476997C
- Authority
- CN
- China
- Prior art keywords
- magnetic
- magneto
- resistor
- tunnel junction
- scalable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
- H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Semiconductor Memories (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
Abstract
Description
Claims (26)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/978,860 US6531723B1 (en) | 2001-10-16 | 2001-10-16 | Magnetoresistance random access memory for improved scalability |
US09/978,860 | 2001-10-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1589478A CN1589478A (zh) | 2005-03-02 |
CN100476997C true CN100476997C (zh) | 2009-04-08 |
Family
ID=25526460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028228065A Expired - Fee Related CN100476997C (zh) | 2001-10-16 | 2002-09-24 | 提高可伸缩性的磁电阻随机存取存储器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6531723B1 (zh) |
EP (1) | EP1449219A1 (zh) |
JP (1) | JP2005510048A (zh) |
KR (1) | KR100924443B1 (zh) |
CN (1) | CN100476997C (zh) |
TW (1) | TW574687B (zh) |
WO (1) | WO2003043018A1 (zh) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6979586B2 (en) | 2000-10-06 | 2005-12-27 | Headway Technologies, Inc. | Magnetic random access memory array with coupled soft adjacent magnetic layer |
US6545906B1 (en) * | 2001-10-16 | 2003-04-08 | Motorola, Inc. | Method of writing to scalable magnetoresistance random access memory element |
US7390584B2 (en) * | 2002-03-27 | 2008-06-24 | Nve Corporation | Spin dependent tunneling devices having reduced topological coupling |
US6826077B2 (en) * | 2002-05-15 | 2004-11-30 | Hewlett-Packard Development Company, L.P. | Magnetic random access memory with reduced parasitic currents |
US7095646B2 (en) * | 2002-07-17 | 2006-08-22 | Freescale Semiconductor, Inc. | Multi-state magnetoresistance random access cell with improved memory storage density |
US6714446B1 (en) * | 2003-05-13 | 2004-03-30 | Motorola, Inc. | Magnetoelectronics information device having a compound magnetic free layer |
US8471263B2 (en) * | 2003-06-24 | 2013-06-25 | Sang-Yun Lee | Information storage system which includes a bonded semiconductor structure |
US6956763B2 (en) * | 2003-06-27 | 2005-10-18 | Freescale Semiconductor, Inc. | MRAM element and methods for writing the MRAM element |
US6967366B2 (en) * | 2003-08-25 | 2005-11-22 | Freescale Semiconductor, Inc. | Magnetoresistive random access memory with reduced switching field variation |
US6842365B1 (en) | 2003-09-05 | 2005-01-11 | Freescale Semiconductor, Inc. | Write driver for a magnetoresistive memory |
JP2005129801A (ja) * | 2003-10-24 | 2005-05-19 | Sony Corp | 磁気記憶素子及び磁気メモリ |
KR101001742B1 (ko) * | 2003-10-24 | 2010-12-15 | 삼성전자주식회사 | 자기 램 및 그 제조방법 |
US6987691B2 (en) * | 2003-12-02 | 2006-01-17 | International Business Machines Corporation | Easy axis magnetic amplifier |
US7088608B2 (en) * | 2003-12-16 | 2006-08-08 | Freescale Semiconductor, Inc. | Reducing power consumption during MRAM writes using multiple current levels |
DE102005004126B4 (de) * | 2004-02-06 | 2008-05-08 | Qimonda Ag | MRAM-Speicherzelle mit schwacher intrinsisch anisotroper Speicherschicht |
US7436700B2 (en) * | 2004-02-06 | 2008-10-14 | Infineon Technologies Ag | MRAM memory cell having a weak intrinsic anisotropic storage layer and method of producing the same |
WO2005086170A1 (ja) * | 2004-03-05 | 2005-09-15 | Nec Corporation | トグル型磁気ランダムアクセスメモリ |
KR100541558B1 (ko) * | 2004-04-19 | 2006-01-11 | 삼성전자주식회사 | 양 단들에 구부러진 팁들을 구비하는 자기터널 접합구조체들, 이들을 채택하는 자기램 셀들 및 이들의 형성에사용되는 포토 마스크들 |
US7129098B2 (en) * | 2004-11-24 | 2006-10-31 | Freescale Semiconductor, Inc. | Reduced power magnetoresistive random access memory elements |
US7200033B2 (en) * | 2004-11-30 | 2007-04-03 | Altis Semiconductor | MRAM with coil for creating offset field |
US7088611B2 (en) * | 2004-11-30 | 2006-08-08 | Infineon Technologies Ag | MRAM with switchable ferromagnetic offset layer |
CN100438115C (zh) * | 2004-12-02 | 2008-11-26 | 北京科技大学 | 一种具有高磁电阻效应的磁性隧道结 |
US20060171197A1 (en) * | 2005-01-31 | 2006-08-03 | Ulrich Klostermann | Magnetoresistive memory element having a stacked structure |
US7154771B2 (en) * | 2005-02-09 | 2006-12-26 | Infineon Technologies Ag | Method of switching an MRAM cell comprising bidirectional current generation |
US7099186B1 (en) * | 2005-02-10 | 2006-08-29 | Infineon Technologies Ag | Double-decker MRAM cells with scissor-state angled reference layer magnetic anisotropy and method for fabricating |
US7180113B2 (en) * | 2005-02-10 | 2007-02-20 | Infineon Technologies Ag | Double-decker MRAM cell with rotated reference layer magnetizations |
US7298597B2 (en) * | 2005-03-29 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetoresistive sensor based on spin accumulation effect with free layer stabilized by in-stack orthogonal magnetic coupling |
US7205596B2 (en) * | 2005-04-29 | 2007-04-17 | Infineon Technologies, Ag | Adiabatic rotational switching memory element including a ferromagnetic decoupling layer |
JP2006332527A (ja) * | 2005-05-30 | 2006-12-07 | Renesas Technology Corp | 磁気記憶素子 |
US7313043B2 (en) * | 2005-11-29 | 2007-12-25 | Altis Semiconductor Snc | Magnetic Memory Array |
US7280389B2 (en) * | 2006-02-08 | 2007-10-09 | Magic Technologies, Inc. | Synthetic anti-ferromagnetic structure with non-magnetic spacer for MRAM applications |
US20080055792A1 (en) * | 2006-03-07 | 2008-03-06 | Agency For Science, Technology And Research | Memory cells and devices having magnetoresistive tunnel junction with guided magnetic moment switching and method |
JP5003109B2 (ja) * | 2006-11-14 | 2012-08-15 | 富士通株式会社 | 強磁性トンネル接合素子、その製造方法、及びそれを用いた磁気ヘッド、磁気メモリ |
US7539047B2 (en) * | 2007-05-08 | 2009-05-26 | Honeywell International, Inc. | MRAM cell with multiple storage elements |
US20090034321A1 (en) | 2007-08-01 | 2009-02-05 | Honeywell International Inc. | Magnetoresistive Element with a Biasing Layer |
KR101446334B1 (ko) | 2008-05-07 | 2014-10-01 | 삼성전자주식회사 | 자기 저항 소자 |
US7880209B2 (en) * | 2008-10-09 | 2011-02-01 | Seagate Technology Llc | MRAM cells including coupled free ferromagnetic layers for stabilization |
GB2465370A (en) * | 2008-11-13 | 2010-05-19 | Ingenia Holdings | Magnetic data storage comprising a synthetic anti-ferromagnetic stack arranged to maintain solitons |
GB201015497D0 (en) | 2010-09-16 | 2010-10-27 | Cambridge Entpr Ltd | Magnetic data storage |
GB201020727D0 (en) | 2010-12-07 | 2011-01-19 | Cambridge Entpr Ltd | Magnetic structure |
US8339843B2 (en) | 2010-12-17 | 2012-12-25 | Honeywell International Inc. | Generating a temperature-compensated write current for a magnetic memory cell |
CN102074266A (zh) * | 2010-12-17 | 2011-05-25 | 电子科技大学 | 一种稳定剩磁态的自旋阀存储单元 |
US9281168B2 (en) * | 2014-06-06 | 2016-03-08 | Everspin Technologies, Inc. | Reducing switching variation in magnetoresistive devices |
WO2016198886A1 (en) | 2015-06-10 | 2016-12-15 | The University Of Nottingham | Magnetic storage devices and methods |
EP3563377A1 (en) * | 2016-12-27 | 2019-11-06 | Everspin Technologies, Inc. | Data storage in synthetic antiferromagnets included in magnetic tunnel junctions |
EP4362650A1 (en) * | 2022-10-31 | 2024-05-01 | Commissariat à l'énergie atomique et aux énergies alternatives | Magnetic tunnel junction, array of magnetic tunnel junctions, and associated fabrication method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1312943A (zh) * | 1998-08-12 | 2001-09-12 | 因芬尼昂技术股份公司 | 存储单元阵列及其制法 |
CN1317141A (zh) * | 1998-09-07 | 2001-10-10 | 因芬尼昂技术股份公司 | 磁致电阻元件及其在存储单元装置中作为存储元件的应用 |
EP1109168B1 (en) * | 1999-12-17 | 2004-08-18 | Motorola, Inc. | Magnetic dual element with dual magnetic states and fabricating method thereof |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000090418A (ja) * | 1998-09-16 | 2000-03-31 | Toshiba Corp | 磁気抵抗効果素子および磁気記録装置 |
DE19830343C1 (de) * | 1998-07-07 | 2000-04-06 | Siemens Ag | Verfahren zur Herstellung eines Schichtaufbaus umfassend ein AAF-System sowie magnetoresistive Sensorsysteme |
US6205052B1 (en) * | 1999-10-21 | 2001-03-20 | Motorola, Inc. | Magnetic element with improved field response and fabricating method thereof |
-
2001
- 2001-10-16 US US09/978,860 patent/US6531723B1/en not_active Expired - Fee Related
-
2002
- 2002-09-24 JP JP2003544760A patent/JP2005510048A/ja active Pending
- 2002-09-24 EP EP02773722A patent/EP1449219A1/en not_active Withdrawn
- 2002-09-24 CN CNB028228065A patent/CN100476997C/zh not_active Expired - Fee Related
- 2002-09-24 KR KR1020047006283A patent/KR100924443B1/ko not_active IP Right Cessation
- 2002-09-24 WO PCT/US2002/031946 patent/WO2003043018A1/en active Application Filing
- 2002-10-08 TW TW91123191A patent/TW574687B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1312943A (zh) * | 1998-08-12 | 2001-09-12 | 因芬尼昂技术股份公司 | 存储单元阵列及其制法 |
CN1317141A (zh) * | 1998-09-07 | 2001-10-10 | 因芬尼昂技术股份公司 | 磁致电阻元件及其在存储单元装置中作为存储元件的应用 |
EP1109168B1 (en) * | 1999-12-17 | 2004-08-18 | Motorola, Inc. | Magnetic dual element with dual magnetic states and fabricating method thereof |
Also Published As
Publication number | Publication date |
---|---|
TW574687B (en) | 2004-02-01 |
JP2005510048A (ja) | 2005-04-14 |
CN1589478A (zh) | 2005-03-02 |
WO2003043018A1 (en) | 2003-05-22 |
US6531723B1 (en) | 2003-03-11 |
KR20040058245A (ko) | 2004-07-03 |
KR100924443B1 (ko) | 2009-11-02 |
EP1449219A1 (en) | 2004-08-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100476997C (zh) | 提高可伸缩性的磁电阻随机存取存储器 | |
US8760915B2 (en) | High speed low power magnetic devices based on current induced spin-momentum transfer | |
EP2220651B1 (en) | High speed low power magnetic devices based on current induced spin-momentum transfer | |
US7307876B2 (en) | High speed low power annular magnetic devices based on current induced spin-momentum transfer | |
US10460786B2 (en) | Systems and methods for reducing write error rate in magnetoelectric random access memory through pulse sharpening and reverse pulse schemes | |
US6958927B1 (en) | Magnetic element utilizing spin-transfer and half-metals and an MRAM device using the magnetic element | |
CN100565701C (zh) | 磁电阻随机存取存储器 | |
EP2419933B1 (en) | Magnetic tunnel junction (mtj) and method for forming the same | |
US7622784B2 (en) | MRAM device with improved stack structure and offset field for low-power toggle mode writing | |
US20050259463A1 (en) | Multi-bit magnetic random access memory device | |
CN100461419C (zh) | 磁随机存取存储器 | |
US20090303779A1 (en) | Spin Torque Transfer MTJ Devices with High Thermal Stability and Low Write Currents | |
US11316099B2 (en) | Skyrmion stack memory device | |
WO2007047311A2 (en) | Spin transfer based magnetic storage cells utilizing granular free layers and magnetic memories using such cells | |
JP2012533189A (ja) | 直交磁化配向方向を伴う基準層を有する磁気スタック | |
US20190206464A1 (en) | Multi-Layer Magnetic Memory Devices | |
EP1265249B1 (en) | Magneto-resistance effect film and memory using it |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: EVERSPIN TECHNOLOGIES, INC. Free format text: FORMER OWNER: FREEDOM SEMICONDUCTORS CO. Effective date: 20090508 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090508 Address after: Arizona USA Patentee after: EVERSPIN TECHNOLOGIES, Inc. Address before: Texas in the United States Patentee before: FreeScale Semiconductor |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090408 Termination date: 20140924 |
|
EXPY | Termination of patent right or utility model |