CN100465329C - 功能性纤维板 - Google Patents

功能性纤维板 Download PDF

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CN100465329C
CN100465329C CNB038123126A CN03812312A CN100465329C CN 100465329 C CN100465329 C CN 100465329C CN B038123126 A CNB038123126 A CN B038123126A CN 03812312 A CN03812312 A CN 03812312A CN 100465329 C CN100465329 C CN 100465329C
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vapor deposition
fiberboard
physical vapor
oxide
oxides
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CN1656241A (zh
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铃木政幸
中岛英吾
铃木敏和
铃木隆启
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Sekisui Nano Coat Technology Co Ltd
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Suzutora Suzutora Corp K K
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Abstract

在涂有物理气相沉积膜的纤维板中,使气相沉积膜透明而使得纤维板上的颜色和图案变得可见,而且,赋予气相沉积膜电导性,并且提高了气相沉积的产率,此外,可以选择性的阻断红外和紫外辐射。在含有合成纤维的纤维板中,其一面或者双面被涂覆含有金属氧化物的物理气相沉积膜,其中,上述金属氧化物含有普通氧化物作为主要成分和少量具有低于普通氧化物的化合价的氧化物作为次要成分的混合物,较低化合价氧化物的量为金属氧化物的总量的0.1-20重量%,所述物理气相沉积膜的厚度为5-500nm。

Description

功能性纤维板
技术领域
本发明涉及涂覆含钛氧化物和其他金属氧化物的物理气相沉积膜的功能性纤维板。
背景技术
众所周知,在含有例如编织物、针织品、无纺织物的合成纤维的纤维板表面上利用如真空气相沉积、离子束法、溅镀法等物理气相沉积的方法形成金属或者金属氧化物薄膜,可以赋予纤维板各种功能,例如,电导性、防热性、热保留性、防尘性、抗菌性、除臭性等。然而,当在纤维板表面涂覆金属例如不锈钢、钛、铬或者铜等的气相沉积膜时,纤维板上的颜色、图案等就会被气相沉积膜遮蔽并呈现金属色彩,从时尚的观点看存在缺乏多样性的问题。一方面,当形成含有例如钛氧化物等金属氧化物的气相沉积膜时,由于所述的氧化物包括含有负2价氧的普通氧化物,因此,有可能通过调整膜的厚度至该气相沉积膜成为透明,从而使得纤维板的颜色和图案等可以看见;另一方面,还存在与金属气相沉积膜相比电导性较差、防热性也较差、生产率降低的问题。
此外,气相沉积膜的结构是已知的,其具有包括TiO2、Ag和TiO2三层的多层结构,气相沉积膜选择性地阻断紫外线和红外线照射以增大可见光的透光率;然而,由于该气相沉积膜在反复洗涤时容易剥落,因此,这样的结构是不实用的,而且,还存在使用过程中金属被氧化、变质的问题。
本发明涉及在通过利用物理气相沉积膜涂覆纤维板而获得的功能性纤维板中,通过改变该物理气相沉积膜的组成使气相沉积膜变得透明,从而可以看见纤维板上的颜色和图案,而且,本发明能够向气相沉积膜提供例如电导性、红外线照射阻断、紫外线照射阻断等功能,此外,还可以在气相沉积时提高产率。
发明内容
与本发明有关的纤维板是包含纤维板的一种功能性纤维板,该纤维板包括合成纤维,其一面或者双面被涂覆含有金属氧化物的物理气相沉积膜,上述金属氧化物的特征在于:包含普通氧化物作为主要成分、并含有少量具有低于普通氧化物化合价的氧化物的混合物。
本发明中使用的合成纤维包括用于通常的编织和针织应用的热塑性合成纤维,例如,聚酯纤维、尼龙纤维、丙烯酸类纤维(acrylic fiber)和聚酰亚胺纤维等。特别是从低含水量、容易进行金属和金属氧化物的物理气相沉积以及优异的气相沉积膜耐用性的观点来看,其优选为聚酯纤维。该合成纤维可以是人造短纤维或长丝形式的;在无纺织物的制造中不经过改性而使用化学短纤维或长丝;但是,当作为用于编织物(woven goods)或者针织物(knit goods)的结构纱而使用时,优选例如单丝纱和复丝纱等长丝纱。
在本发明中,利用例如真空气相沉积、离子束法、溅镀法等物理气相沉积的方法,优选溅镀法,在上述纤维板的一面或者两面上形成含有金属氧化物例如钛氧化物的薄膜。上述金属氧化物包括含有负2价氧的普通氧化物作为主要物质,并且其中混和少量具有低于普通氧化物的化合价的氧化物作为次要成分(下文称为的较低价氧化物)。例如,在钛的氧化物中,四价氧化物TiO2被认为是普通氧化物,二价氧化物TiO和三价氧化物Ti2O3被认为是较低价氧化物。所以,钛氧化物的气相沉积膜是通过上述普通化合价的氧化物(四价氧化物)和较低化合价的氧化物(二价或三价氧化物)的混合物而形成的。
在如溅镀等物理气相沉积中,当在含有微量氩气的密闭反应室中溅射蒸发金属时,金属被供应至室中的少量氧气所氧化,并被吸附在纤维板上,但是,当所供应的氧气的量达到生产普通氧化物所需的足够量时,只生成普通氧化物,同时,目标金属的表面被氧化,从而大幅减少蒸发的金属量,产率降低。
相反,当所供应的氧气量低于普通氧化物生产所需的量时,上述较低价氧化物与普通氧化物同时生成,这些较低价氧化物以混合物的形式吸附在纤维板上,此外,由于目标表面没有被氧化,蒸发的金属量没有降低,从而防止产率的降低。所以,通过形成含有上述混合物的气相沉积膜、调整气相沉积膜的厚度可以向气相沉积膜提供电导性、防热性以及其他功能并保持透明性。而且,在上述溅射的情况下,通过向氩气和氧气中混合微量的氮气,可以将产率提高至更好的水平。
为了将供应的氧气量调整至低于生产普通氧化物所需的量,最好在蒸发的金属通过溅射时产生等离子体时,测定由蒸发金属发出的光特有的亮度,例如,发光度,并调节供应的氧气量使发光度维持在恒定的水平。例如,在金属为钛的情况时,当钛经过溅射蒸发生成等离子体时发出波长为453nm的可见光,在缺乏氧气的情况下,蒸发速度达到最大,亮度最强;当供应过量的氧气时,蒸发速度达到最小,亮度也降低。因此,根据发光度调节氧气的供应量可以控制较低价氧化物的数量。而且,还可以利用任何理想的与发光度相关的强度指标来替代发光度本身。
具有低于上述普通氧化物的化合价的氧化物,换句话说,较低价氧化物的混合含量优选为全部氧化物的0.1-20重量%;当混合物含量低于0.1重量%时,不能获得功能例如电导性和防热性,而且,产率显著降低;相反,当含量大于20重量%时,金属颜色很明显,而且,可见光的透明度不够,纤维板的特性丧失。此外,上述物理溅镀膜的厚度优选为5-500nm,特别地为30-300nm;当厚度低于5nm时,不能获得例如电导性、防热性、红外照射阻断、紫外照射阻断等功能,当厚度大于500nm时,就不能看见纤维板的结构纤维、颜色、图案等,从成本的观点来看,也很难达到实际运用。
而且,对于可见光在波长550nm的透光率,上述物理气相沉积膜的透光率优选为30%以上,当低于30%时,纤维板表面的颜色和图案[和]纤维不再是可见的,纤维板的特性丧失。
此外,红外线照射和紫外线照射的透光率是通过较低价的氧化物的混合物含量而确定的,但是,当目标包括阻断红外线照射时,优选将上述混合物含量设定在较高水平并将波长1000nm的红外辐射透光率抑制到70%以下。另外,当目标包括阻断紫外线照射时,优选将上述混合含量设定在较低水平,并将波长400nm的紫外辐射透光率抑制到50%或更少。
附图说明
图1是涉及工作实施例1的溅射装置的截面图。
图2是表示气相沉积膜的透光率的曲线图。
图3是表示气相沉积膜的光反射率的曲线图。
具体实施方式
发明实施例
实施例1
作为纤维板,利用使用聚酯纤维复丝纱作为经线和纬线的编织织物,通过溅射在纤维板表面形成厚度为5-50nm、优选为30-300nm的钛氧化物的透明涂层。
图1表示溅射装置的一个例子,可密闭的室10被水平分隔物11分成位于下面的溅射室12和位于上面的织物室13,在下面的溅射室12的中间,含有钛的平板靶14被固定于半空的靶源15上,利用经过该靶源15的冷水从底部冷却靶14。将阳极16水平地固定在靶14的右上方和左上方,在该阳极16和靶14之间,利用直流电源17,施加200-1000V的直流电压。
将水冷的圆筒18水平地固定在上述阳极13的上方并自由旋转,在其左上方和右上方分别水平地固定纤维板传送轴19和纤维板F卷绕轴20,而且,这些轴可以自由旋转。因此,缠绕于传送轴19的预处理纤维板F被拉出,并通过在左上方的导轮21缠绕于上述水冷圆筒18,通过在右上方的导轮22而缠绕在卷绕轴20上。另外,将真空泵23、供应氩气的钢瓶24和供应氧气的钢瓶25分别连接于上述室10。
在上述装置中,转动传送轴19、卷绕轴20和水冷圆筒18,织物F在水冷圆筒14上冷却的同时,以固定的速度沿逆时针方向传送,将织物F的表面温度维持在60℃以下。另一方面,驱动真空泵23降低室10的内压力至约1.3×10-3Pa,接着,分别从供应氩气的钢瓶24和供应氧气的钢瓶25输入氩气和氧气以调节室10的内压力至大约1×10-2Pa,然后进行溅射,从靶14发出的钛与氧气反应而形成钛氧化物,氧化物粘附在上述纤维板F上形成透明的物理气相沉积膜。
此时,当观察到通过靶14上方的等离子体的蒸发的钛的亮度时,进行溅射;在这期间,通过调节从供应氧气的钢瓶25输送至室10的氧气的量,将上述蒸发钛的发光度或者任何理想的与发光度相关的强度指标控制在上述试验测得的固定的水平;用这种方法,钛的氧化物包括普通氧化物和较低价氧化物[的混合物],形成较低价氧化物的数量占金属氧化物的总量为0.1-20重量%的混合物吸附在纤维板F上。此外,调节纤维板F的移动速度,从而使含有上述钛氧化物的物理气相沉积膜的厚度为5-500nm。
在上述工作实施例中,当供应至室10的氧气量被设定得更高,并且,当发光度被设定得更低时,普通氧化物增加,较低价氧化物减少,物理气相沉积膜的透明度增加。另一方面,当供应的氧气量被设定得更低,并且,当发光度(强度)被设定得更高时,普通氧化物减少,较低价氧化物增加,物理气相沉积膜的透明度降低,金属颜色变得更强烈。而且,通过上述的发光度的调节,可以将可见光的透光率维持在20%或更高,而将红外射线的透光率或者紫外射线的透光率抑制在70%或更低。
通过使用含有聚酯纤维复丝纱的经编针织物(warp-knitfabric)作为上述纤维板,除此之外,通过按照上面的描述进行溅射而获得具有导电性和防热性纤维板,此外,其被赋予经编针织物的特性,并具有30%或更高的可见光透光率、70%或更低的红外射线透光率或紫外射线透光率。
另外,通过使用含有聚酯长丝的纺丝粘合无纺织物作为上述纤维板,除此之外,通过按照上面的描述进行溅射,从而获得具有导电性和防热性纤维板,其被赋予纺丝粘合的无纺织物特性,并具有30%或更高的可见光透光率、70%或更低的红外射线透光率或紫外射线透光率。
实施例2
利用图1中的溅射装置,在含有编织物、针织品或者无纺织物等的纤维板的一个表面上进行溅射,从而形成上述物理气相沉积膜,之后,暂时移开上述纤维板,然后,倒转正反面并重新连接至溅射装置,接着,与上述同样地在另一面上进行溅射,从而制得纤维板,该纤维板在正反面上具有上述物理气相沉积膜,并具有30%以上的可见光透光率、70%以下的红外线透光率或者紫外线透光率,而且,其被赋予纤维板的特性以及可见的颜色和图案,而没有金属颜色。
实施例3
在上述密闭的室内,成排安装2套气相沉积装置,在正面和背面上连续地进行溅射以形成上述物理气相沉积膜。例如,1号水冷圆筒和2号水冷圆筒平行地安装在密闭反应室内中心的左右两边,位于左边的1号水冷圆筒沿逆时针方向与位于右边的2号水冷圆筒沿着顺时针方向分别旋转;溅射是通过从左边缠绕纤维板进行以至纤维板的背面与1号水冷圆筒的下半部分接触,接着,[板]引向2号水冷圆筒的右上方,溅射通过从右边缠绕纤维板开始以使纤维板的正面与2号水冷圆筒的下半部分接触而进行。
作为工作实施例1中的纤维板F,使用将聚酯复丝用于经线和纬纱的190支的塔夫绸(taddeta),通过溅射在其中一个表面上形成钛氧化物的透明物理气相沉积膜。使用“双磁控管阴极等离子发射探测器”(“von Alden”,Germany)控制氧气供应量;利用准直管(collimator)取出对金属钛特有的单色光(波长453nm)而测定发光度,上述发光度表示为强度,其中,氧气供应为零时的发光度为100,氧气供应过量时的发光度为10;当强度设定为50时,获得试样A。当强度设定为30时,获得试样B。
利用X射线光电子分光光度法分析试样A和试样B的物理气相沉积膜的组成。SSX-100型X射线光电子分光光度计(SSI Co.)用作分析装置。用单色的AlKα(100W)作为x射线发射源而进行分析,在强度为50的试样A中,在四价的普通氧化物中大约存在5%的三价的较低价氧化物Ti2O3。而且,在强度为30的试样B中,几乎全部用四价普通氧化物TiO2形成气相沉积膜。气相沉积膜中的钛和氧的比例在试样A中为1/2.15,在试样B中为1/2.39。此外,比较上述试样A和试样B的外观,该比较结果与上述分析结果示于表1.
表1
 
试样A 试样B
强度气相沉积膜的厚度(μm)外观钛/氧(原子比例)低价氧化物含量 5050无色透明1/2.155% 3050无色透明1/2.390%
在厚度为50μm的含有聚对苯二甲酸乙二醇酯(polyethyleneterephthalate)的透明薄膜上形成上述钛氧化物的气相沉积膜,从而测量上述气相沉积膜的电导性和透光率。此时,通过分6个步骤改变强度70,60,50,40,30,20而制备试样1-6.然后,分别对这些试样1-6测定电导性、波长400-1000nm的透光率和光反射率。电导性示于表2,透光率示于图2,光反射率示于图3。
表2
 
试样编号 1 2 3 4 5 6
强度 70 60 50 40 30 20
电导率(Ω/cm) 8×10<sup>3</sup> 1×10<sup>4</sup> 7×10<sup>4</sup> 4×10<sup>7</sup> - -
如上述表2所示,当以电阻值比较电导率时,强度为70、含有最低价氧化物的试样1具有最低的电阻值;随着较低价氧化物的量减少时,电阻值按照强度为60的试样2、强度为50的试样3、强度为40的试样4的次序降低;强度为30的试样5和强度为20的试样6的电阻值不能测量,其电导率基本为零。
此外,关于如图2所示的透光率,低强度的试样4-6具有高透光率,透明性增加,相反,高强度的试样1-3的透明度降低,外观表现出金属颜色的倾向。而且,强度为20的试样6,在包括从波长400nm至1000nm的紫外线至红外线整个范围内的透光率为60%或更高。在强度为30的试样5中,波长400nm的紫外线透光率小于50%,但是,对于剩余的可见光和红外线,其透光率为50-70%。强度为40的试样4中,红外线透光率小于70%,虽然表现出稍类似于试样3的趋势。
另外,强度为50的试样3中,波长550nm的可见光透光率约为50%,400nm的紫外线透光率约为45%,波长1000nm红外线透光率约为43%。此外,强度为60的试样2中,从波长400nm的紫外线至波长700nm的可见光范围内,观察到大致相等的在40-45%的范围内的透光率;波长超过700nm时,透光率逐渐降低,在红外线波长1000nm的透光率约为35%。另外,强度为70的试样1中,从波长400nm的紫外线至波长1000nm的红外线,透光率从37%逐渐降低至30%,而且上述膜在波长400nm处的透光率约为85%,在波长550nm处的透光率约为88%,在波长1000nm处的透光率约为89%;向右存在非常微弱的上升趋势。
另一方面,如图3所示,在低强度的试样4-6中,光反射率向右具有稍微的下降趋势,在高强度的试样1-3中,向右表现出稍微升高的趋势。然而,强度为20的试样6在可见光范围内的波长500-600nm,表现出约28%的最高反射率,在紫外线一侧上存在突然下降的拐点,而红外线一侧是逐渐下降的,曲线呈现出山的形状。并且,在强度为30的试样5和强度为40的试样4中,向右的下降趋势差不多相同,波长400nm的反射率约为33%,波长1000nm的反射率为17-19%。
此外,强度为50的试样3,在可见光范围内的波长500-600nm表现出约19%的最低反射率,波长400nm和1000nm的反射率逐渐增加至22%~23%。另外,强度为60的试样2,在波长550nm以下,表现出大致相同的16-17%的光反射率,波长1000nm的光反射率逐渐上升至26%。另外,强度为70的试样1中,光反射率大致与波长呈线性地增长,在波长400nm处约为18%,在波长1000nm处约为37%。而且,膜本身的光反射率,在400-1000nm的整个波长范围内,表现出约11%的定值。
如上所述,由于在本发明涉及的功能性纤维板中,构成物理气相沉积膜的金属氧化物不但含有普通氧化物,还含有少量较低价氧化物,通过在混合物的量中设置较低价氧化物的量,可以保持气相沉积膜的透明性,而使得纤维板的颜色和图案变得可见,并保留了纤维板的流行性和特性,同时,利用气相沉积膜还提供了例如电导性、防热性、红外线阻断、紫外线阻断、防尘、抗菌和耐蚀等功能。而且,产率令人满意,并具有优异的洗涤性和抗剥落性。因此,上述功能性纤维板非常适合于用作工业材料,例如,网筛和过滤器等,昆虫网、房屋涂层材料以及户外帐篷、雨伞、室内装饰壁板材料、天花板材料和内部材料等,其具有优异的耐蚀性和洗涤性等,且能够满足流行性和各种功能性。
虽然上文描述了本发明的3个实施例,但是,应当理解为:在没有背离附后的权利要求书中体现的本发明的涵义和范围的条件下,可以对本发明进行改变和修正。

Claims (6)

1、一种功能性纤维板,其包含合成纤维,其一面或者双面被涂覆含有金属氧化物的物理气相沉积膜,其中,所述金属氧化物包括含-2价氧的主要氧化物作为主要成分和少量具有低于主要氧化物的化合价的氧化物作为次要成分的混合物,且所述具有低于主要氧化物的化合价的氧化物的量为金属氧化物总量的0.1-20重量%。
2、根据权利要求1所述的功能性纤维板,其中,所述物理气相沉积膜的厚度为5-500nm。
3、根据权利要求1或2所述的功能性纤维板,其中,所述金属氧化物为钛氧化物,其主要氧化物为四价的氧化物,所述较低化合价的氧化物为二价或三价的氧化物。
4、根据权利要求1所述的功能性纤维板,其中,合成纤维包括用于通常的针织和编织的合成纤维。
5、根据权利要求1所述的功能性纤维板,其中,合成纤维包括聚酯纤维、尼龙纤维、聚丙烯腈纤维或者聚酰亚胺纤维。
6、一种制造根据权利要求1所述的功能性纤维板的方法,由下列步骤构成:
通过物理气相沉积法在纤维板上形成金属氧化物的物理气相沉积膜;
在物理气相沉积过程中通过增加供应的氧气量形成含有-2价氧的主要氧化物作为物理气相沉积膜的金属氧化物的主要成分;
在物理气相沉积过程中通过降低供应的氧气量,形成少量具有低于主要氧化物的化合价的氧化物作为金属氧化物的次要成分,且使得所述具有低于主要氧化物的化合价的氧化物的量为金属氧化物总量的0.1-20重量%。
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WO2006030254A1 (en) * 2004-09-15 2006-03-23 Kabushiki Kaisha Suzutora (Suzutora Corporation) Metal-coated textile
US8795718B2 (en) * 2008-05-22 2014-08-05 Honeywell International, Inc. Functional nano-layered hemostatic material/device
US20140221495A1 (en) * 2013-02-06 2014-08-07 The Government of the United States of America, as reperesented by the Secretary of the Navy Electrospun polymer nanofibers with surface active quaternary ammonium salt antimicrobials
US20140338297A1 (en) * 2013-05-17 2014-11-20 U.S. Environmental Protection Agency Artifact free inert filter medium for collection of organic particles
WO2019031589A1 (ja) * 2017-08-09 2019-02-14 積水化学工業株式会社 積層シート、コーティング繊維、コーティング繊維束及び繊維強化プラスチック
CN111819245A (zh) * 2017-12-28 2020-10-23 3M创新有限公司 包含阻燃聚合物的陶瓷涂覆的纤维以及制备非织造结构的方法
CN111712383A (zh) 2018-02-22 2020-09-25 积水化学工业株式会社 叠层片
CN114318231A (zh) * 2021-12-27 2022-04-12 丹阳市科达镀膜材料有限公司 一种具有纳米抗菌功能的光学真空镀膜及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001017301A (ja) * 1999-07-05 2001-01-23 Suzutora:Kk 帯電防止カーペット
US6296895B1 (en) * 1994-08-04 2001-10-02 Balzers Und Leybold Deutschland Holding Ag Process for the application of a transparent metal oxide layer on a film
US6322875B1 (en) * 1997-04-15 2001-11-27 Polymatech Co., Ltd. Transparent decoration key top and its manufacturing method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4422917A (en) * 1980-09-10 1983-12-27 Imi Marston Limited Electrode material, electrode and electrochemical cell
NL8401721A (nl) * 1984-05-29 1985-12-16 Leer Koninklijke Emballage Werkwijze en stelsel voor het produceren van een reactief gesputterde geleidende transparante metaaloxidefilm op een doorlopende materiaalbaan.
JP3004760B2 (ja) * 1991-04-03 2000-01-31 日新製鋼株式会社 チタン酸化物青色膜
JP3097312B2 (ja) 1992-06-05 2000-10-10 東レ株式会社 積層フィルム
WO1998005413A1 (fr) * 1996-08-05 1998-02-12 Nippon Sheet Glass Co., Ltd. Photocatalyseur et procede de preparation associe
SE509933C2 (sv) * 1996-09-16 1999-03-22 Scandinavian Solar Ab Sätt och anordning att framställa ett spektralselektivt absorberande skikt till solkollektorer samt framställt skikt
JPH10323933A (ja) 1997-03-21 1998-12-08 Toppan Printing Co Ltd 酸化アルミニウム蒸着フィルム
US6106676A (en) * 1998-04-16 2000-08-22 The Boc Group, Inc. Method and apparatus for reactive sputtering employing two control loops
US6143405A (en) * 1998-06-30 2000-11-07 3M Innovative Properties Company Light colored, electrically conductive coated particles and composites made therefrom
JP2001253007A (ja) 2000-03-08 2001-09-18 Toto Ltd 機能性薄膜がコーティングされた製品の製造方法、及び機能性薄膜がコーティングされた製品

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6296895B1 (en) * 1994-08-04 2001-10-02 Balzers Und Leybold Deutschland Holding Ag Process for the application of a transparent metal oxide layer on a film
US6322875B1 (en) * 1997-04-15 2001-11-27 Polymatech Co., Ltd. Transparent decoration key top and its manufacturing method
JP2001017301A (ja) * 1999-07-05 2001-01-23 Suzutora:Kk 帯電防止カーペット

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US20050221707A1 (en) 2005-10-06
US7579290B2 (en) 2009-08-25
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AU2003222620A1 (en) 2003-11-10
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