CN100446992C - 激光转写设备及使用该设备制造有机发光显示器的方法 - Google Patents
激光转写设备及使用该设备制造有机发光显示器的方法 Download PDFInfo
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- CN100446992C CN100446992C CNB2005101127693A CN200510112769A CN100446992C CN 100446992 C CN100446992 C CN 100446992C CN B2005101127693 A CNB2005101127693 A CN B2005101127693A CN 200510112769 A CN200510112769 A CN 200510112769A CN 100446992 C CN100446992 C CN 100446992C
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 238000012546 transfer Methods 0.000 title description 9
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 239000012044 organic layer Substances 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 41
- 239000010410 layer Substances 0.000 claims description 47
- 238000013518 transcription Methods 0.000 claims description 13
- 230000035897 transcription Effects 0.000 claims description 13
- 229910010272 inorganic material Inorganic materials 0.000 claims description 12
- 239000011147 inorganic material Substances 0.000 claims description 12
- 238000010030 laminating Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 239000011368 organic material Substances 0.000 claims description 7
- 239000002131 composite material Substances 0.000 claims description 6
- GVFOJDIFWSDNOY-UHFFFAOYSA-N antimony tin Chemical compound [Sn].[Sb] GVFOJDIFWSDNOY-UHFFFAOYSA-N 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 229920000767 polyaniline Polymers 0.000 claims description 4
- 229920000123 polythiophene Polymers 0.000 claims description 4
- 238000004528 spin coating Methods 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 239000002322 conducting polymer Substances 0.000 claims description 3
- 229920001940 conductive polymer Polymers 0.000 claims description 3
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229920000128 polypyrrole Polymers 0.000 claims description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 3
- 239000011787 zinc oxide Substances 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 claims description 2
- YMMGRPLNZPTZBS-UHFFFAOYSA-N 2,3-dihydrothieno[2,3-b][1,4]dioxine Chemical compound O1CCOC2=C1C=CS2 YMMGRPLNZPTZBS-UHFFFAOYSA-N 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 230000005525 hole transport Effects 0.000 claims 1
- 230000003068 static effect Effects 0.000 abstract description 11
- 238000001931 thermography Methods 0.000 abstract description 3
- 230000005611 electricity Effects 0.000 abstract 1
- 238000000059 patterning Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000009466 transformation Effects 0.000 description 6
- 238000003475 lamination Methods 0.000 description 5
- 229920002521 macromolecule Polymers 0.000 description 5
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 230000032798 delamination Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- GKWLILHTTGWKLQ-UHFFFAOYSA-N 2,3-dihydrothieno[3,4-b][1,4]dioxine Chemical compound O1CCOC2=CSC=C21 GKWLILHTTGWKLQ-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000027756 respiratory electron transport chain Effects 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040082724A KR20060033554A (ko) | 2004-10-15 | 2004-10-15 | 레이저 열전사 장치 및 이를 이용한 유기전계 발광 소자의제조 방법 |
KR1020040082724 | 2004-10-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1789006A CN1789006A (zh) | 2006-06-21 |
CN100446992C true CN100446992C (zh) | 2008-12-31 |
Family
ID=36180307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101127693A Active CN100446992C (zh) | 2004-10-15 | 2005-10-12 | 激光转写设备及使用该设备制造有机发光显示器的方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7837822B2 (zh) |
JP (1) | JP4489682B2 (zh) |
KR (1) | KR20060033554A (zh) |
CN (1) | CN100446992C (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7994021B2 (en) | 2006-07-28 | 2011-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
CN100505335C (zh) * | 2007-01-08 | 2009-06-24 | 李毅 | 太阳能电池激光标刻设备 |
US7534544B2 (en) * | 2007-10-19 | 2009-05-19 | E.I. Du Pont De Nemours And Company | Method of separating an exposed thermal transfer assemblage |
KR20090052656A (ko) * | 2007-11-21 | 2009-05-26 | 삼성전자주식회사 | 도너 기판 및 이를 이용한 표시 장치의 제조방법 |
KR100959111B1 (ko) * | 2008-03-27 | 2010-05-25 | 삼성모바일디스플레이주식회사 | 유기전계발광소자의 제조장치 및 제조방법 |
KR101639786B1 (ko) * | 2009-01-14 | 2016-07-15 | 코닌클리케 필립스 엔.브이. | 기판 상에 적어도 하나의 전기 전도성 막을 퇴적하는 방법 |
KR101156433B1 (ko) | 2009-12-15 | 2012-06-18 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
US20110209749A1 (en) * | 2010-01-07 | 2011-09-01 | Korea Advanced Institute Of Science And Technology | Pattern transfer method and apparatus, flexible display panel, flexible solar cell, electronic book, thin film transistor, electromagnetic-shielding sheet, and flexible printed circuit board applying thereof |
KR20120119089A (ko) | 2011-04-20 | 2012-10-30 | 삼성디스플레이 주식회사 | 유기발광표시장치 제조방법 |
JP6055705B2 (ja) * | 2013-03-28 | 2016-12-27 | 株式会社Screenホールディングス | 転写装置および転写方法 |
US9692019B2 (en) * | 2013-03-29 | 2017-06-27 | Dai Nippon Printing Co., Ltd. | Element manufacturing method and element manufacturing apparatus utilizing differential pressure for covering a substrate |
KR102440560B1 (ko) | 2015-11-03 | 2022-09-06 | 삼성디스플레이 주식회사 | 레이저 결정화 장치 |
Citations (7)
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CN1233929A (zh) * | 1998-02-23 | 1999-11-03 | 剑桥显示技术有限公司 | 显示装置 |
US5998085A (en) * | 1996-07-23 | 1999-12-07 | 3M Innovative Properties | Process for preparing high resolution emissive arrays and corresponding articles |
US6214520B1 (en) * | 1999-01-15 | 2001-04-10 | 3M Innovative Properties Company | Thermal transfer element for forming multilayer devices |
CN1089655C (zh) * | 1996-12-27 | 2002-08-28 | 欧姆龙株式会社 | 利用激光束作标记的方法 |
CN1474639A (zh) * | 2002-06-20 | 2004-02-11 | ����Sdi��ʽ���� | 采用磷光材料作为发光物质的有机电致发光器件 |
WO2004080725A1 (en) * | 2003-03-13 | 2004-09-23 | Koninklijke Philips Electronics N.V. | Marking method and market object |
CN1535823A (zh) * | 2003-04-07 | 2004-10-13 | 精工爱普生株式会社 | 工作台装置、成膜装置、光学元件、半导体元件及电子设备 |
Family Cites Families (15)
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JP3269678B2 (ja) * | 1992-11-30 | 2002-03-25 | 株式会社東芝 | 静電チャック装置および静電チャック方法 |
US6399143B1 (en) * | 1996-04-09 | 2002-06-04 | Delsys Pharmaceutical Corporation | Method for clamping and electrostatically coating a substrate |
US6709720B2 (en) * | 1997-03-21 | 2004-03-23 | Kabushiki Kaisha Yaskawa Denki | Marking method and marking material |
TW486806B (en) * | 1998-10-30 | 2002-05-11 | Hitachi Ltd | Semiconductor integrated circuit apparatus and IC card |
US6114085A (en) | 1998-11-18 | 2000-09-05 | Clariant Finance (Bvi) Limited | Antireflective composition for a deep ultraviolet photoresist |
KR100825691B1 (ko) | 1999-07-26 | 2008-04-29 | 가부시키가이샤 니콘 | 기판지지장치 및 기판처리장치 |
JP4590663B2 (ja) | 1999-10-29 | 2010-12-01 | セイコーエプソン株式会社 | カラーフィルタの製造方法 |
JP2001310490A (ja) | 2000-04-27 | 2001-11-06 | Fuji Photo Film Co Ltd | 画像形成方法 |
KR100342653B1 (ko) | 2000-08-24 | 2002-07-03 | 김순택 | 유기 전계발광소자의 제조 방법 |
JP2002086939A (ja) | 2000-09-20 | 2002-03-26 | Fuji Photo Film Co Ltd | 画像形成方法 |
JP3997738B2 (ja) | 2001-03-14 | 2007-10-24 | 株式会社日立製作所 | 液晶表示素子の製造方法及びその製造装置 |
JP2003320466A (ja) * | 2002-05-07 | 2003-11-11 | Disco Abrasive Syst Ltd | レーザビームを使用した加工機 |
US6695030B1 (en) | 2002-08-20 | 2004-02-24 | Eastman Kodak Company | Apparatus for permitting transfer of organic material from a donor web to form a layer in an OLED device |
JP2004200598A (ja) * | 2002-12-20 | 2004-07-15 | Renesas Technology Corp | 半導体記憶装置および半導体装置 |
KR100623694B1 (ko) * | 2004-08-30 | 2006-09-19 | 삼성에스디아이 주식회사 | 레이저 전사용 도너 기판 및 그 기판을 사용하여 제조되는유기 전계 발광 소자의 제조 방법 |
-
2004
- 2004-10-15 KR KR1020040082724A patent/KR20060033554A/ko active Search and Examination
-
2005
- 2005-10-11 US US11/246,254 patent/US7837822B2/en active Active
- 2005-10-12 CN CNB2005101127693A patent/CN100446992C/zh active Active
- 2005-10-17 JP JP2005301366A patent/JP4489682B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5998085A (en) * | 1996-07-23 | 1999-12-07 | 3M Innovative Properties | Process for preparing high resolution emissive arrays and corresponding articles |
CN1089655C (zh) * | 1996-12-27 | 2002-08-28 | 欧姆龙株式会社 | 利用激光束作标记的方法 |
CN1233929A (zh) * | 1998-02-23 | 1999-11-03 | 剑桥显示技术有限公司 | 显示装置 |
US6214520B1 (en) * | 1999-01-15 | 2001-04-10 | 3M Innovative Properties Company | Thermal transfer element for forming multilayer devices |
CN1474639A (zh) * | 2002-06-20 | 2004-02-11 | ����Sdi��ʽ���� | 采用磷光材料作为发光物质的有机电致发光器件 |
WO2004080725A1 (en) * | 2003-03-13 | 2004-09-23 | Koninklijke Philips Electronics N.V. | Marking method and market object |
CN1535823A (zh) * | 2003-04-07 | 2004-10-13 | 精工爱普生株式会社 | 工作台装置、成膜装置、光学元件、半导体元件及电子设备 |
Also Published As
Publication number | Publication date |
---|---|
KR20060033554A (ko) | 2006-04-19 |
JP2006114506A (ja) | 2006-04-27 |
US7837822B2 (en) | 2010-11-23 |
US20060082640A1 (en) | 2006-04-20 |
JP4489682B2 (ja) | 2010-06-23 |
CN1789006A (zh) | 2006-06-21 |
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Effective date of registration: 20090116 Address after: Gyeonggi Do, South Korea Patentee after: Samsung Mobile Display Co., Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung SDI Co., Ltd. |
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Address after: Gyeonggi Do, South Korea Patentee after: Samsung Display Co., Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Mobile Display Co., Ltd. |