CN100422789C - 具有故障诊断功能的微机电系统器件 - Google Patents

具有故障诊断功能的微机电系统器件 Download PDF

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Publication number
CN100422789C
CN100422789C CNB2006100738389A CN200610073838A CN100422789C CN 100422789 C CN100422789 C CN 100422789C CN B2006100738389 A CNB2006100738389 A CN B2006100738389A CN 200610073838 A CN200610073838 A CN 200610073838A CN 100422789 C CN100422789 C CN 100422789C
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CN
China
Prior art keywords
moving component
mems device
little vibration
amplitude
multifiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006100738389A
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English (en)
Chinese (zh)
Other versions
CN1841121A (zh
Inventor
吉田惠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
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Japan Aviation Electronics Industry Ltd
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Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Publication of CN1841121A publication Critical patent/CN1841121A/zh
Application granted granted Critical
Publication of CN100422789C publication Critical patent/CN100422789C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/359—Control or adjustment details, e.g. calibrating of the position of the moving element itself during switching, i.e. without monitoring the switched beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CNB2006100738389A 2005-03-31 2006-03-31 具有故障诊断功能的微机电系统器件 Expired - Fee Related CN100422789C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP102401/05 2005-03-31
JP2005102401A JP4056532B2 (ja) 2005-03-31 2005-03-31 故障診断機能付きｍｅｍｓデバイス

Publications (2)

Publication Number Publication Date
CN1841121A CN1841121A (zh) 2006-10-04
CN100422789C true CN100422789C (zh) 2008-10-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006100738389A Expired - Fee Related CN100422789C (zh) 2005-03-31 2006-03-31 具有故障诊断功能的微机电系统器件

Country Status (4)

Country Link
US (1) US7463798B2 (ja)
JP (1) JP4056532B2 (ja)
CN (1) CN100422789C (ja)
FR (1) FR2883859A1 (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009122739A1 (ja) 2008-04-04 2009-10-08 パナソニック株式会社 センサ装置
US8322214B2 (en) 2008-04-04 2012-12-04 Panasonic Corporation Sensor device
US7730782B2 (en) * 2008-04-04 2010-06-08 Panasonic Corporation Sensor device
US8131508B2 (en) * 2009-02-05 2012-03-06 Panasonic Corporation Sensor apparatus
JP4386143B1 (ja) * 2009-02-05 2009-12-16 パナソニック株式会社 センサ装置
JP4337952B1 (ja) 2009-02-05 2009-09-30 パナソニック株式会社 センサ装置
JP5135401B2 (ja) * 2010-09-10 2013-02-06 株式会社東芝 情報処理装置、故障予兆診断方法及びプログラム
JP5367925B1 (ja) * 2012-03-07 2013-12-11 パナソニック株式会社 Ｍｅｍｓ共振器を用いた圧力センサ
JP2014149218A (ja) * 2013-02-01 2014-08-21 Hitachi Automotive Systems Ltd 慣性力検出装置
JP6115519B2 (ja) * 2014-05-27 2017-04-19 セイコーエプソン株式会社 Ｍｅｍｓ駆動装置、電子機器、及びｍｅｍｓ駆動方法
JP6413422B2 (ja) * 2014-07-18 2018-10-31 シンフォニアテクノロジー株式会社 制振システム及び車両
DE102015217200A1 (de) * 2015-09-09 2017-03-09 Sauer Gmbh Verfahren und Vorrichtung zum Bestimmen einer Schwingungsamplitude eines Werkzeugs
JP6848197B2 (ja) 2016-03-31 2021-03-24 船井電機株式会社 光走査装置
JP6783134B2 (ja) 2016-12-13 2020-11-11 日本ルメンタム株式会社 光モジュール及び光モジュールの製造方法
JP6915315B2 (ja) * 2017-03-09 2021-08-04 株式会社リコー 光偏向システムおよび故障判定方法
US10788659B2 (en) 2018-10-24 2020-09-29 Infinean Technologies Ag Monitoring of MEMS mirror properties
WO2023157102A1 (ja) * 2022-02-16 2023-08-24 三菱電機株式会社 切替可否診断装置及び光スイッチ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004048187A (ja) * 2002-07-09 2004-02-12 Nec Corp 光スイッチサブシステム
US20040101233A1 (en) * 2002-10-24 2004-05-27 Wang-Joo Lee Method and apparatus for detecting optical switch fault by monitoring optical output transitions
JP2005037885A (ja) * 2003-07-02 2005-02-10 Japan Aviation Electronics Industry Ltd 光デバイス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385413A (ja) 1986-09-30 1988-04-15 Nec Corp 装置故障診断回路
JP2002159098A (ja) 2000-11-21 2002-05-31 Tokai Rika Co Ltd マイクロフォン装置
JP2003343449A (ja) 2002-05-28 2003-12-03 Tokico Ltd 往復動型圧縮機
US7302131B2 (en) * 2002-05-28 2007-11-27 Jds Uniphase Inc. Sunken electrode configuration for MEMs Micromirror

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004048187A (ja) * 2002-07-09 2004-02-12 Nec Corp 光スイッチサブシステム
US20040101233A1 (en) * 2002-10-24 2004-05-27 Wang-Joo Lee Method and apparatus for detecting optical switch fault by monitoring optical output transitions
JP2005037885A (ja) * 2003-07-02 2005-02-10 Japan Aviation Electronics Industry Ltd 光デバイス

Also Published As

Publication number Publication date
US20060222291A1 (en) 2006-10-05
US7463798B2 (en) 2008-12-09
CN1841121A (zh) 2006-10-04
FR2883859A1 (fr) 2006-10-06
JP2006284746A (ja) 2006-10-19
JP4056532B2 (ja) 2008-03-05

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