CN100415515C - 微滴发生器、微滴喷射装置和其制造方法 - Google Patents
微滴发生器、微滴喷射装置和其制造方法 Download PDFInfo
- Publication number
- CN100415515C CN100415515C CNB2004100905931A CN200410090593A CN100415515C CN 100415515 C CN100415515 C CN 100415515C CN B2004100905931 A CNB2004100905931 A CN B2004100905931A CN 200410090593 A CN200410090593 A CN 200410090593A CN 100415515 C CN100415515 C CN 100415515C
- Authority
- CN
- China
- Prior art keywords
- conformal
- droplet ejection
- ejection device
- contact area
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 18
- 239000010408 film Substances 0.000 claims description 43
- 241001310793 Podium Species 0.000 claims description 40
- 239000012528 membrane Substances 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 230000007261 regionalization Effects 0.000 claims description 13
- 238000007788 roughening Methods 0.000 claims description 6
- 238000003475 lamination Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000011324 bead Substances 0.000 claims 4
- 230000004927 fusion Effects 0.000 claims 3
- 239000010410 layer Substances 0.000 description 136
- 239000000976 ink Substances 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- -1 phenol aldehyde Chemical class 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 238000005480 shot peening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/702,247 US7048361B2 (en) | 2003-11-05 | 2003-11-05 | Ink jet apparatus |
| US10/702247 | 2003-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1613645A CN1613645A (zh) | 2005-05-11 |
| CN100415515C true CN100415515C (zh) | 2008-09-03 |
Family
ID=34435546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100905931A Expired - Fee Related CN100415515C (zh) | 2003-11-05 | 2004-11-05 | 微滴发生器、微滴喷射装置和其制造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7048361B2 (enExample) |
| EP (1) | EP1529642B1 (enExample) |
| JP (1) | JP4597633B2 (enExample) |
| CN (1) | CN100415515C (enExample) |
| BR (1) | BRPI0404831A (enExample) |
| CA (1) | CA2486454C (enExample) |
| DE (1) | DE602004002827T2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8853915B2 (en) * | 2008-09-18 | 2014-10-07 | Fujifilm Dimatix, Inc. | Bonding on silicon substrate having a groove |
| KR20100076083A (ko) * | 2008-12-17 | 2010-07-06 | 서울반도체 주식회사 | 복수개의 발광셀들을 갖는 발광 다이오드 및 그것을 제조하는 방법 |
| US9070851B2 (en) | 2010-09-24 | 2015-06-30 | Seoul Semiconductor Co., Ltd. | Wafer-level light emitting diode package and method of fabricating the same |
| US9315021B2 (en) | 2014-02-27 | 2016-04-19 | Xerox Corporation | Multiple thin film piezoelectric elements driving single jet ejection system |
| US9662880B2 (en) | 2015-09-11 | 2017-05-30 | Xerox Corporation | Integrated thin film piezoelectric printhead |
| CN205944139U (zh) | 2016-03-30 | 2017-02-08 | 首尔伟傲世有限公司 | 紫外线发光二极管封装件以及包含此的发光二极管模块 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4516140A (en) * | 1983-12-27 | 1985-05-07 | At&T Teletype Corporation | Print head actuator for an ink jet printer |
| US5394179A (en) * | 1992-03-20 | 1995-02-28 | Scitex Digital Printing, Inc. | Stimulator for continous ink print head |
| US6019457A (en) * | 1991-01-30 | 2000-02-01 | Canon Information Systems Research Australia Pty Ltd. | Ink jet print device and print head or print apparatus using the same |
| US6328432B1 (en) * | 1997-06-25 | 2001-12-11 | Nec Corporation | Ink jet recording head having mending layers between side walls and electrodes |
| US6532028B1 (en) * | 1996-06-26 | 2003-03-11 | Spectra, Inc. | Ink jet printer having a ceramic piezoelectric transducer |
| US6584660B1 (en) * | 1993-06-08 | 2003-07-01 | Ngk Indulators, Ltd | Method of manufacturing a piezoelectric device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586765A (en) * | 1978-12-23 | 1980-06-30 | Seiko Epson Corp | Electric wiring for ink jet head |
| US4680595A (en) * | 1985-11-06 | 1987-07-14 | Pitney Bowes Inc. | Impulse ink jet print head and method of making same |
| US4730197A (en) * | 1985-11-06 | 1988-03-08 | Pitney Bowes Inc. | Impulse ink jet system |
| US4703333A (en) * | 1986-01-30 | 1987-10-27 | Pitney Bowes Inc. | Impulse ink jet print head with inclined and stacked arrays |
| US4695854A (en) * | 1986-07-30 | 1987-09-22 | Pitney Bowes Inc. | External manifold for ink jet array |
| JPH1034919A (ja) * | 1996-07-23 | 1998-02-10 | Ricoh Co Ltd | インクジェットヘッド |
| US6955419B2 (en) * | 2003-11-05 | 2005-10-18 | Xerox Corporation | Ink jet apparatus |
-
2003
- 2003-11-05 US US10/702,247 patent/US7048361B2/en not_active Expired - Lifetime
-
2004
- 2004-11-01 CA CA002486454A patent/CA2486454C/en not_active Expired - Fee Related
- 2004-11-01 JP JP2004317451A patent/JP4597633B2/ja not_active Expired - Fee Related
- 2004-11-04 EP EP04026226A patent/EP1529642B1/en not_active Expired - Lifetime
- 2004-11-04 DE DE602004002827T patent/DE602004002827T2/de not_active Expired - Lifetime
- 2004-11-05 BR BR0404831-8A patent/BRPI0404831A/pt not_active IP Right Cessation
- 2004-11-05 CN CNB2004100905931A patent/CN100415515C/zh not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4516140A (en) * | 1983-12-27 | 1985-05-07 | At&T Teletype Corporation | Print head actuator for an ink jet printer |
| US6019457A (en) * | 1991-01-30 | 2000-02-01 | Canon Information Systems Research Australia Pty Ltd. | Ink jet print device and print head or print apparatus using the same |
| US5394179A (en) * | 1992-03-20 | 1995-02-28 | Scitex Digital Printing, Inc. | Stimulator for continous ink print head |
| US6584660B1 (en) * | 1993-06-08 | 2003-07-01 | Ngk Indulators, Ltd | Method of manufacturing a piezoelectric device |
| US6532028B1 (en) * | 1996-06-26 | 2003-03-11 | Spectra, Inc. | Ink jet printer having a ceramic piezoelectric transducer |
| US6328432B1 (en) * | 1997-06-25 | 2001-12-11 | Nec Corporation | Ink jet recording head having mending layers between side walls and electrodes |
Also Published As
| Publication number | Publication date |
|---|---|
| US20050093929A1 (en) | 2005-05-05 |
| BRPI0404831A (pt) | 2005-06-28 |
| JP2005138586A (ja) | 2005-06-02 |
| CA2486454A1 (en) | 2005-05-05 |
| JP4597633B2 (ja) | 2010-12-15 |
| DE602004002827T2 (de) | 2007-02-01 |
| CN1613645A (zh) | 2005-05-11 |
| DE602004002827D1 (de) | 2006-11-30 |
| EP1529642A1 (en) | 2005-05-11 |
| CA2486454C (en) | 2008-04-15 |
| US7048361B2 (en) | 2006-05-23 |
| EP1529642B1 (en) | 2006-10-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080903 Termination date: 20171105 |