CN100396460C - 用于分割材料的装置 - Google Patents

用于分割材料的装置 Download PDF

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Publication number
CN100396460C
CN100396460C CNB018034896A CN01803489A CN100396460C CN 100396460 C CN100396460 C CN 100396460C CN B018034896 A CNB018034896 A CN B018034896A CN 01803489 A CN01803489 A CN 01803489A CN 100396460 C CN100396460 C CN 100396460C
Authority
CN
China
Prior art keywords
cutting
cooling lubricant
cutting disc
supply
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB018034896A
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English (en)
Chinese (zh)
Other versions
CN1394161A (zh
Inventor
拉尔夫·哈默
拉尔夫·格鲁斯兹恩斯基
安德烈·克莱恩维希特
提罗·弗拉德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Freiberger Compound Materials GmbH
Original Assignee
Freiberger Compound Materials GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freiberger Compound Materials GmbH filed Critical Freiberger Compound Materials GmbH
Publication of CN1394161A publication Critical patent/CN1394161A/zh
Application granted granted Critical
Publication of CN100396460C publication Critical patent/CN100396460C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CNB018034896A 2000-11-08 2001-10-17 用于分割材料的装置 Expired - Fee Related CN100396460C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10055286.2 2000-11-08
DE10055286A DE10055286A1 (de) 2000-11-08 2000-11-08 Vorrichtung und Verfahren zum Trennen von Werkstoffen

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNA2007101065817A Division CN101066616A (zh) 2000-11-08 2001-10-17 用于分割材料的装置和方法

Publications (2)

Publication Number Publication Date
CN1394161A CN1394161A (zh) 2003-01-29
CN100396460C true CN100396460C (zh) 2008-06-25

Family

ID=7662530

Family Applications (2)

Application Number Title Priority Date Filing Date
CNB018034896A Expired - Fee Related CN100396460C (zh) 2000-11-08 2001-10-17 用于分割材料的装置
CNA2007101065817A Pending CN101066616A (zh) 2000-11-08 2001-10-17 用于分割材料的装置和方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNA2007101065817A Pending CN101066616A (zh) 2000-11-08 2001-10-17 用于分割材料的装置和方法

Country Status (11)

Country Link
US (1) US20030005919A1 (enExample)
EP (1) EP1224067B1 (enExample)
JP (2) JP4302979B2 (enExample)
CN (2) CN100396460C (enExample)
AT (1) ATE271962T1 (enExample)
CZ (1) CZ301194B6 (enExample)
DE (2) DE10055286A1 (enExample)
RU (1) RU2271927C2 (enExample)
SK (1) SK286415B6 (enExample)
TW (1) TW590842B (enExample)
WO (1) WO2002038349A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581975A (zh) * 2011-01-12 2012-07-18 硅电子股份公司 用于在线切割过程中冷却半导体材料制成的工件的方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104980738B (zh) * 2010-09-30 2017-04-12 三星电子株式会社 通过使用平滑插值滤波器对图像进行插值的方法和装置
KR20120037576A (ko) * 2010-10-12 2012-04-20 주식회사 엘지실트론 단결정 잉곳 절단장치 및 단결정 잉곳 절단방법
JP6722917B2 (ja) * 2016-04-26 2020-07-15 三星ダイヤモンド工業株式会社 スクライブヘッドユニット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06328433A (ja) * 1993-05-20 1994-11-29 Tokyo Seimitsu Co Ltd スライシングマシン
JPH07304028A (ja) * 1994-05-13 1995-11-21 Nippon Steel Corp スライシングマシン
EP0897778A1 (en) * 1997-08-15 1999-02-24 Disco Corporation Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1301500A (fr) * 1960-08-19 1962-08-17 Hydrol Chemical Company Ltd Machine à meuler
SU404637A1 (ru) * 1971-12-24 1973-10-22 Способ резки необожженных металлизированных керамических пленок, спрессованнб1х в пакет
SU671992A1 (ru) * 1976-11-09 1979-07-05 Киевский технологический институт легкой промышленности Устройство дл охлаждени
FR2557000B1 (fr) * 1983-12-23 1987-08-07 Essilor Int Poste de meulage pour machine a meuler, notamment pour le biseautage ou le rainurage d'une lentille ophtalmique
SU1273237A1 (ru) * 1984-07-02 1986-11-30 Физико-технический институт АН БССР Способ охлаждени при алмазном шлифовании
DE3640645A1 (de) * 1986-11-28 1988-06-09 Wacker Chemitronic Verfahren zum zersaegen von kristallstaeben oder -bloecken vermittels innenlochsaege in duenne scheiben
JP2979870B2 (ja) * 1992-11-27 1999-11-15 信越半導体株式会社 半導体インゴットのコーン状端部切除方法
DE4309134C2 (de) * 1993-03-22 1999-03-04 Wilfried Wahl Verfahren zur Schmierung und Kühlung von Schneiden und/oder Werkstücken bei zerspanenden Arbeitsprozessen
DE10027086B4 (de) * 1999-06-01 2009-04-16 Hitachi Metals, Ltd. Magnetelement-Schneidverfahren und Magnetelement-Schneidvorrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06328433A (ja) * 1993-05-20 1994-11-29 Tokyo Seimitsu Co Ltd スライシングマシン
JPH07304028A (ja) * 1994-05-13 1995-11-21 Nippon Steel Corp スライシングマシン
EP0897778A1 (en) * 1997-08-15 1999-02-24 Disco Corporation Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581975A (zh) * 2011-01-12 2012-07-18 硅电子股份公司 用于在线切割过程中冷却半导体材料制成的工件的方法
CN102581975B (zh) * 2011-01-12 2014-12-17 硅电子股份公司 用于在线切割过程中冷却半导体材料制成的工件的方法
US8968054B2 (en) 2011-01-12 2015-03-03 Siltronic Ag Method for cooling a workpiece made of semiconductor material during wire sawing

Also Published As

Publication number Publication date
SK286415B6 (sk) 2008-09-05
US20030005919A1 (en) 2003-01-09
DE50102989D1 (de) 2004-09-02
EP1224067B1 (de) 2004-07-28
DE10055286A1 (de) 2002-05-23
SK9782002A3 (en) 2002-12-03
JP4302979B2 (ja) 2009-07-29
TW590842B (en) 2004-06-11
JP2004512989A (ja) 2004-04-30
WO2002038349A1 (de) 2002-05-16
ATE271962T1 (de) 2004-08-15
CN1394161A (zh) 2003-01-29
EP1224067A1 (de) 2002-07-24
RU2271927C2 (ru) 2006-03-20
CN101066616A (zh) 2007-11-07
RU2002118120A (ru) 2004-01-20
CZ20022365A3 (cs) 2002-10-16
CZ301194B6 (cs) 2009-12-02
JP2008135712A (ja) 2008-06-12

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C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080625

Termination date: 20091117