CN100392790C - 等离子体显示板的保护膜以及它的制造方法 - Google Patents

等离子体显示板的保护膜以及它的制造方法 Download PDF

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CN100392790C
CN100392790C CNB2003101006308A CN200310100630A CN100392790C CN 100392790 C CN100392790 C CN 100392790C CN B2003101006308 A CNB2003101006308 A CN B2003101006308A CN 200310100630 A CN200310100630 A CN 200310100630A CN 100392790 C CN100392790 C CN 100392790C
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朴应彻
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    • H—ELECTRICITY
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    • H01J11/20—Constructional details
    • H01J11/34—Vessels, containers or parts thereof, e.g. substrates
    • H01J11/40—Layers for protecting or enhancing the electron emission, e.g. MgO layers
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    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
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    • G09G3/291—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using luminous gas-discharge panels, e.g. plasma panels using AC panels controlling the gas discharge to control a cell condition, e.g. by means of specific pulse shapes
    • G09G3/294—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using luminous gas-discharge panels, e.g. plasma panels using AC panels controlling the gas discharge to control a cell condition, e.g. by means of specific pulse shapes for lighting or sustain discharge
    • G09G3/2948—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using luminous gas-discharge panels, e.g. plasma panels using AC panels controlling the gas discharge to control a cell condition, e.g. by means of specific pulse shapes for lighting or sustain discharge by increasing the total sustaining time with respect to other times in the frame
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/12—AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided on both sides of the discharge space
    • H—ELECTRICITY
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    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/06—Details of flat display driving waveforms
    • G09G2310/066—Waveforms comprising a gently increasing or decreasing portion, e.g. ramp
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/28—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using luminous gas-discharge panels, e.g. plasma panels
    • G09G3/288—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using luminous gas-discharge panels, e.g. plasma panels using AC panels
    • G09G3/291—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using luminous gas-discharge panels, e.g. plasma panels using AC panels controlling the gas discharge to control a cell condition, e.g. by means of specific pulse shapes
    • G09G3/293—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using luminous gas-discharge panels, e.g. plasma panels using AC panels controlling the gas discharge to control a cell condition, e.g. by means of specific pulse shapes for address discharge

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Abstract

一种等离子体显示板的保护薄膜和它的制造方法，它适用于减少地址周期的抖动值。在保护薄膜和它的制造方法中，在等离子体显示板上形成了具有氧化镁(MgO)的主要成分和添加少于500ppm的硅(Si)的保护薄膜。

Description

等离子体显示板的保护膜以及它的制造方法
技术领域
本发明涉及等离子体显示板，特别涉及等离子体显示板的保护膜以及它的制造方法，该保护膜适于减少地址周期的抖动值。
背景技术
通常，等离子体显示板(PDP)利用根据惰性混合气体(比如He+Xe，Ne+Xe或He+Ne+Xe)放电产生的紫外射线激励和辐射磷材料，以便借此显示图画。这样的PDP易于被制造成薄膜和大尺寸的类型。而且，由于近来的技术发展，PDP提供了很优良的图画质量。
参考图1，常规三电极的放电单元，AC表面放电PDP包括：维持电极对，其具有设置在上层基片1上的扫描电极Y和维持电极Z，以及以垂直于维持电极对的方式在下层基片2上设置的地址电极X。
扫描电极Y和维持电极Z的每个包括透明电极和其上的金属总线电极。
在上层基片1上设置有扫描电极Y和维持电极Z，安置了上介电层6和MgO保护膜7。MgO保护膜7起到保护放电产生的微粒溅射的作用，以及增强二次电子的发射效应。
下电介质层4形成在下层基片2上，并以覆盖地址电极X的方式设置地址电极X。在下电介质层4的上面垂直的形成阻挡肋条3。磷材料5被涂层在下电介质层4和阻挡肋条3的表面上。
通过密封剂的装置(未显示)将上层基片1结合到下层基片。而诸如He+Xe，Ne+Xe或He+Ne+Xe之类的惰性混合气体被注入设置在上层基片1，下层基片2和阻挡肋条3中的放电空间中。
这种PDP进行一个帧的时分驱动，该帧被分成具有不同的发射频率和采用寻址显示分离(ADS)系统的各种子场，其中一个寻址被分离显示，以便实现图画的灰度等级。每个子场再被分成用于初始化全部场的复位周期，用于选择扫描线和从选择的扫描线中选择单元的地址周期，和用于根据放电频率表示灰度的维持周期。复位周期被分成提供上升斜坡波形的建立(set-up)间隔，和提供下降斜坡波形的关闭(set-down)间隔。
例如，当它打算显示256灰度的图画时，一帧等于1/60秒(也就是16.67msec)的间隔被分成SF1-SF8的8个子场，如图2所示。8个子场SF1-SF8的每个被分成复位周期，地址周期和维持周期，如上所述。这里，对于每个子场，每个子场的复位周期和地址周期是相同的，而维持周期和分配到它的维持脉冲数在每个子场上随2n的比率增加(其中n＝0，1，2，3，4，5，6和7)。
图3和4显示了图1所示的PDP的驱动波形。
参考图3，该PDP被分成用于它的驱动的复位周期，地址周期和维持周期。
在复位周期中，将上升斜坡波形Ramp-up(斜坡上升)施加到建立间隔SU中的所有扫描电极Y。在上升斜坡波形Ramp-up的帮助下，在全部场的单元内产生放电。通过这种建立放电，正墙壁电荷被累积在地址电极X和维持电极Z上，同时负墙壁电荷被累积在扫描电极Y上。
在建立放电之后，从低于上升斜坡波形Ramp-up的峰值电压的正电压下降的下降斜坡波形Ramp-down(斜坡下落)被同时施加到扫描电极Y。下降斜坡波形Ramp-down引起单元内的弱消除放电以消除过多形成的墙壁电荷部分。借助于关闭放电，足以产生稳定地址放电的墙壁电荷被均匀地留在单元内。
在地址周期中，负扫描脉冲扫描被顺序的施加到扫描电极Y，并且，与此同时，与扫描脉冲扫描同步，正数据脉冲data(数据)被施加到地址电极X。扫描脉冲scan(扫描)和数据脉冲data(数据)之间的电压差被加到复位周期中产生的墙壁电压上，借此产生提供了数据脉冲数据的单元内的地址放电。当施加的维持电压通过地址放电在选择的单元内形成时，墙壁电荷足以引起放电。
同时，在整个关闭间隔和地址周期过程中，将正直流电压Zdc施加到维持电极Z。直流电压Zdc引起维持电极Z和扫描电极Y之间的关闭放电，并建立维持电极Z和扫描电极Y之间的或者维持电极Z和地址电极X之间的电压差，以便在地址周期中在扫描电极Y和维持电极Z之间不进行强放电。
在维持周期中，维持脉冲sus被交替的施加到扫描电极Y和维持电极Z。接着，由地址放电选择的单元内的墙壁电压被累加到维持脉冲sus，借此产生维持放电，也就是无论何时施加维持脉冲sus的扫描电极Y和维持电极Z之间的显示放电。
仅在维持放电被完成之后，具有小脉冲宽度的矩形波形ers1和ers2以及具有低电压电平的斜坡波形ers3被施加到维持电极Z作为消除信号，用于消除单元内的电荷。如果该消除信号ers1，ers2和ers3被施加在单元内，则出现消除放电，以便借此消除由维持放电产生的和留下的墙壁电荷。
图4所示的驱动波形不同于图3所示的驱动波形，其中，在复位周期中施加的初始化波形应该是交替的施加到扫描电极Y和维持电极Z的矩形波rst1，rst2和rst3和上升斜坡波形Ramp-up。此外，在地址周期和维持周期中施加到每个电极X，Y和Z的信号实质上等同于图3所示的信号。
为了实现高图画质量，这种PDP需要高清晰度，高亮度，高对比率和低轮廓(contour)噪声等等。此外，为了实现高图画质量，PDP确保ADS驱动系统中的适当的地址周期。由于被扫描的线数随着PDP开发成较高的清晰度/较高的分辨率而增加，地址周期被加长和维持周期的保证变为困难。例如，当存在480扫描线时；需要每条线3μs的扫描时间；单个扫描系统，其中从第一扫描线开始，扫描线被顺序的扫描，直到采用最后的线；并且作出驱动，把一帧分成八个子场，一帧内需要的地址周期变为多于480×3μs×8＝13ms。这样，一帧内维持周期中分配的时间变为(16.67ms-13ms)，这是绝对不够充分的。必须减少扫描时间以便分配一个时间多于该不充分的维持周期，但是它难于减少地址周期，因为根据地址放电考虑到抖动，扫描脉冲的宽度被基本上定义了。该抖动是基于地址放电产生的放电延迟时间。对于每个子场该抖动具有一些差别并根据驱动具有确定的范围。由于扫描脉冲包括这样的抖动值，扫描脉冲宽度的脉冲变为较长。因此，由于随着抖动值变长，该地址周期也变长，难于实现高图画质量。
抖动值易于随着温度或PDP的附近温度的降低而大大增加。这就迫使PDP在低温上做出不稳定的地址放电。因此，由于出现误写引起的单元选择失败而在显示的画面上出现黑噪声，损坏了环境对照能力。
在这期间，日本专利公开GazetteNo.2001-135238已经建议了一种PDP，其中PDP内密封的放电气体中的Xe的含量被增加成多于5％，借此相对于常规的低密度Xe显示板来说，允许较高的驱动电压和更高的亮度。然而，随着Xe的含量变高，高密度Xe显示板具有较高的地址周期的抖动值。因此，由于该地址周期的抖动值就难于实现高密度Xe显示板。
另外，日本专利公开JP10-297955和JP11-029857公开了一种等离子显示薄膜中的硅含量小于等于200ppm的技术方案。
对地址周期的抖动值有最大影响的一个因素是保护薄膜7的二次电子发射特性。由于随着保护薄膜7的二次电子发射效率的变高，抖动被大大减小，并因此通过减少的抖动值来减少扫描脉冲的脉冲宽度，它能够缩短地址周期。
发明内容
因此，本发明的一个目的是提供等离子体显示板的保护薄膜和它的制造方法，从而适用于减少地址周期的抖动值。
为了实现发明的这些和其他的目的，根据本发明一个方面的等离子体显示板的保护薄膜包括：氧化镁(MgO)的主要成分和添加的硅(Si)，其中将300ppm至小于500ppm的硅添加到该主要成分中，来生成所述保护薄膜。
该保护薄膜进一步包括：添加少于50ppm的钙(Ca)，少于50ppm的铁(Fe)，少于250ppm的铝(Al)，少于5ppm的镍(Ni)，少于5ppm的钠(Na)和少于5ppm的钾(K)。
这里，包含多于5％的氙(Xe)的放电气体被密封在等离子体显示板内。
根据本发明另一个方面的等离子体显示板的保护薄膜的制造方法，该方法包括步骤，形成具有氧化镁(MgO)的主要成分和添加硅(Si)的保护薄膜，其中将300ppm至小于500ppm的硅添加到该主要成分中，来生成所述保护薄膜。
在该方法中，通过真空沉淀处理，保护薄膜被形成在等离子体显示板上。
另外，通过化学汽相淀积(CVD)，电子束处理，离子镀和溅射的任何一种处理，在等离子体显示板上形成保护薄膜。
该保护薄膜进一步包括：添加少于50ppm的钙(Ca)，少于50ppm的铁(Fe)，少于250ppm的铝(Al)，少于5ppm的镍(Ni)，少于5ppm的钠(Na)和少于5ppm的钾(K)。
该方法进一步包括步骤，将包含多于5％的氙(Xe)的放电气体密封在等离子体显示板内。
附图说明
结合参考附图，根据下面详细描述的本发明的实施例，本发明的这些和其他的目的将显而易见，其中：
图1是透视图，显示了常规的三电极，AC表面放电等离子体显示板(PDP)的放电单元结构；
图2示例了用于实现256灰度的具有8-比特缺省代码的帧结构；
图3是用于驱动常规PDP的驱动信号的波形图；
图4是用于驱动常规PDP的驱动信号的另一个例子的波形图；
图5显示了按照本发明实施例的根据PDP保护薄膜中的硅(Si)含量的抖动值的变化图；
图6显示了按照本发明实施例的根据PDP保护薄膜中的氙(Xe)和硅(Si)含量的抖动值的变化图。
具体实施方式
参考图5，按照本发明的实施例的PDP的保护薄膜具有MgO的主成分，并包括浓度被设置在抖动最小化的范围内的少量的Si。在图5中，垂直轴表示抖动值(μs)，和水平轴表示Si的含量(Wt.ppm)。
按照本发明实施例的保护薄膜通过真空沉淀技术形成在上层基片上，比如化学汽相淀积(CVD)，离子镀和溅射等等。
当按照本发明实施例的保护薄膜使用真空沉淀技术时，具有添加少量Si的各种方法。可以通过单个源通过添加少量Si到源材料和目标上等等(此后称作“源材料”)用于真空沉淀来沉淀保护薄膜。可替换的，硅(Si)可以通过使用现存的MgO和Si作为源被添加到保护薄膜。在此情况下，通过调整施加到硅源的功率可以控制Si的含量。这里，通过海水或未加工的镁来准备源材料，其中MgO的成分多于99.5wt％。在此情况下，少于300ppm的钙(Ca)、少于500ppm的铁(Fe)、少于250ppm的铝(Al)、少于5ppm的镍(Ni)、少于5ppm的钠(Na)和少于5ppm的钾(K)能被包含成杂质。此外，增加少于5000ppm的硅(Si)，如下表1所示。换句话说，用于提高保护薄膜的二次电子发射特性的少量的硅(Si)被包括在源材料中，如下表1所示。
表1
  MgO   99.5wt％-99.99999wt％
  Si   低于5000ppm
通过这样的保护薄膜沉淀方法，MgO保护薄膜被沉淀在设置有维持电极对Y和Z以及电介质层的PDP的上层基片上。通过这样的沉淀处理在PDP上层基片上形成保护薄膜，并添加了少量的Si，稍微包含接近100wt％的氧化镁(MgO)和少于500ppm的硅(Si)，用于提高保护薄膜的二次电子发射特性，如下表2所示。
表2
  MgO   99.5wt％-99.99999wt％
  Si   低于500ppm
可替换的，PDP上形成的保护薄膜可以包含添加少于50ppm的钙(Ca)、少于50ppm的铁(Fe)、少于250ppm的铝(Al)、少于5ppm的镍(Ni)、少于5ppm的钠(Na)和少于5ppm的钾(K)。
在上面的表1和2中，实际形成在PDP上的保护薄膜中的源材料的含量和硅(Si)的含量的减少导致根据沉淀处理来控制处理参数。例如，如果沉淀设备内的压力被提高或者PDP的基片和源材料之间的距离被增加，则相对于源材料来说，形成在PDP的基片上的保护薄膜的硅含量被大大减少。
硅(Si)被少量的加到氧化镁(MgO)中，借此起到补偿MgO结晶中氧气真空缺陷的作用和补偿由于杂质造成的保护薄膜的二次电子发射效率的恶化。换句话说，当通过真空沉淀形成保护薄膜时，跟随着处理过程中所需要的结晶缺陷和杂质，比如钙(Ca)、铁(Fe)、铝(Al)、镍(Ni)、钠(Na)和钾(K)，从源材料输入而作为引起电子发射特性恶化的因素。而硅(Si)补偿了由于结晶缺陷和杂质引起的二次电子发射特性的恶化，借此减少了地址周期的抖动值。
从图5能看到，这种添加的硅(Si)能减少地址周期的抖动值。然而，如果硅(Si)的含量被增加超过确定的值，则抖动易于被增加。因此，期望硅(Si)具有一定范围的含量，应该是被加到保护薄膜中而能够最小化抖动。为此，硅(Si)的含量应能根据其它杂质的含量和沉淀条件等等来改变，但被加到保护薄膜中的硅(Si)的最佳含量优选的是大约20ppm-300ppm。
图5所示的抖动特性已经通过把驱动波形提供给PDP而获得，并然后根据寻址单个单元来测量产生的光波形。已经使用了以此实验把线图形的低灰度当作一种测量图形，以便最小化激发(priming)效应。
根据实验，该实验单独进行了几十次，同时改变PDP内密封的放电气体的类型，该膜添加了硅(Si)的保护薄具有改进的二次电子发射特性，而与放电气体的类型无关。
图6显示了保护薄膜的抖动特性的实验结果，在PDP中对保护薄膜添加硅(Si)，用高密度Xe放电气体密封，该气体包含多于5％的氙(Xe)。
从图6能看到，当其中密封了高密度Xe的放电气体的PDP的保护薄膜具有氧化镁(MgO)的主要成分和添加少于300ppm的硅(Si)时，则地址周期的抖动值显示很低的程度，接近小于0.6μs。
因此，如果将按照本发明的保护薄膜应用于高密度Xe显示板，则变为能够获得高亮度和高速驱动以及实现高分辨率，并提高对外部温度的对抗能力。
如上所述，按照本发明，硅被添加到保护薄膜以提高保护薄膜的二次电子发射特性，借此减少地址周期的抖动。作为结果，在短时间内作出PDP中的稳定的地址操作，以便能够获得稳定的和有效的地址操作，即使是在低温环境中。而且，按照本发明，通过减少地址周期确保了足够的维持周期，并且能够增加子场数以便减少轮廓噪声，从而变为能够实现高图画质量。
尽管通过上述的附图所示的实施例已经解释了本发明，但应该明白，对于本领域技术人员来说并不限于这些实施例，在不脱离本发明的精神情况下可以作出各种改变和修改。因此，只有通过所附权利要求和它们的等效物来确定本发明的范围。

Claims (8)

1.一种等离子体显示板的保护薄膜，包括：
氧化镁(MgO)的主要成分；和
添加的硅(Si)，其中将300ppm至小于500ppm的硅添加到该主要成分中，来生成所述保护薄膜。
2.如权利要求1所述的保护薄膜，其中所述保护薄膜进一步包括添加少于50ppm的钙(Ca)、少于50ppm的铁(Fe)、少于250ppm的铝(Al)，少于5ppm的镍(Ni)，少于5ppm的钠(Na)和少于5ppm的钾(K)。
3.如权利要求1所述的保护薄膜，其中将包含多于5％的氙(Xe)的放电气体密封在等离子体显示板内。
4.一种制造等离子体显示板的保护薄膜的方法，该方法包括步骤：
形成具有氧化镁(MgO)的主要成分和添加的硅(Si)的保护薄膜，其中将300ppm至小于500ppm的硅添加到该主要成分中，来生成所述保护薄膜。
5.如权利要求4所述的方法，其中所述保护薄膜通过真空沉淀处理形成在等离子体显示板上。
6.如权利要求4所述的方法，其中通过化学汽相淀积(CVD)，电子束处理，离子镀和溅射中的一种处理，在等离子体显示板上形成保护薄膜。
7.如权利要求4所述的方法，其中所述保护薄膜进一步包括添加少于50ppm的钙(Ca)、少于50ppm的铁(Fe)、少于250ppm的铝(Al)、少于5ppm的镍(Ni)、少于5ppm的钠(Na)和少于5ppm的钾(K)。
8.如权利要求4所述的方法，进一步包括步骤，在等离子体显示板内密封包含多于5％的氙(Xe)的放电气体。
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