CN100378948C - 用于形成半导体装置和其上结构的方法 - Google Patents

用于形成半导体装置和其上结构的方法 Download PDF

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Publication number
CN100378948C
CN100378948C CNB038256878A CN03825687A CN100378948C CN 100378948 C CN100378948 C CN 100378948C CN B038256878 A CNB038256878 A CN B038256878A CN 03825687 A CN03825687 A CN 03825687A CN 100378948 C CN100378948 C CN 100378948C
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China
Prior art keywords
dummy
dielectric layer
conductive
region
forming
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Expired - Lifetime
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CNB038256878A
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English (en)
Chinese (zh)
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CN1820365A (zh
Inventor
辛迪·K·高尔德伯格
斯坦雷·M·菲利皮亚克
约翰·C·弗雷克
李勇杰
布莱德雷·P·史密斯
尤瑞·E·索罗门特塞弗
泰瑞·G·斯巴克斯
克尔克·J·斯特罗塞伍斯基
凯瑟琳·C·于
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NXP USA Inc
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Freescale Semiconductor Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H01L21/76844—Bottomless liners
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H01L21/76849—Barrier, adhesion or liner layers formed in openings in a dielectric the layer being positioned on top of the main fill metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
    • H01L21/76874—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroless plating

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
CNB038256878A 2002-12-20 2003-09-23 用于形成半导体装置和其上结构的方法 Expired - Lifetime CN100378948C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/327,403 2002-12-20
US10/327,403 US6838354B2 (en) 2002-12-20 2002-12-20 Method for forming a passivation layer for air gap formation

Publications (2)

Publication Number Publication Date
CN1820365A CN1820365A (zh) 2006-08-16
CN100378948C true CN100378948C (zh) 2008-04-02

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CNB038256878A Expired - Lifetime CN100378948C (zh) 2002-12-20 2003-09-23 用于形成半导体装置和其上结构的方法

Country Status (8)

Country Link
US (1) US6838354B2 (enExample)
EP (1) EP1579497A3 (enExample)
JP (2) JP4799868B2 (enExample)
KR (1) KR20050085833A (enExample)
CN (1) CN100378948C (enExample)
AU (1) AU2003279030A1 (enExample)
TW (1) TWI367543B (enExample)
WO (1) WO2004061948A2 (enExample)

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CN105308736A (zh) * 2014-04-18 2016-02-03 索尼公司 场效应晶体管、场效应晶体管制造方法和射频器件
CN108028224A (zh) * 2015-10-16 2018-05-11 索尼公司 半导体装置以及半导体装置的制造方法

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US7361991B2 (en) * 2003-09-19 2008-04-22 International Business Machines Corporation Closed air gap interconnect structure
US7071532B2 (en) * 2003-09-30 2006-07-04 International Business Machines Corporation Adjustable self-aligned air gap dielectric for low capacitance wiring
US20050147746A1 (en) * 2003-12-30 2005-07-07 Dubin Valery M. Nanotube growth and device formation
US7405147B2 (en) 2004-01-30 2008-07-29 International Business Machines Corporation Device and methodology for reducing effective dielectric constant in semiconductor devices
JP2006031875A (ja) * 2004-07-20 2006-02-02 Fujitsu Ltd 記録媒体基板および記録媒体
US20060038293A1 (en) * 2004-08-23 2006-02-23 Rueger Neal R Inter-metal dielectric fill
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US7396757B2 (en) * 2006-07-11 2008-07-08 International Business Machines Corporation Interconnect structure with dielectric air gaps
DE102007001523A1 (de) * 2007-01-10 2008-07-17 Infineon Technologies Ag Halbleiterschaltungsanordnung und Verfahren zu deren Herstellung
JP5650878B2 (ja) * 2007-06-20 2015-01-07 ピーエスフォー ルクスコ エスエイアールエルＰＳ４ Ｌｕｘｃｏ Ｓ．ａ．ｒ．ｌ． ダミーパターンの設計方法、露光マスク、半導体装置、半導体装置の製造方法およびダミーパターンの設計プログラム
US7879683B2 (en) 2007-10-09 2011-02-01 Applied Materials, Inc. Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay
JP2009094378A (ja) * 2007-10-11 2009-04-30 Panasonic Corp 半導体装置及びその製造方法
JP4856107B2 (ja) * 2008-02-14 2012-01-18 パナソニック株式会社 半導体装置の製造方法及び半導体装置
KR101382564B1 (ko) * 2008-05-28 2014-04-10 삼성전자주식회사 에어갭을 갖는 층간 절연막의 형성 방법
US8108820B2 (en) * 2008-09-11 2012-01-31 International Business Machines Corporation Enhanced conductivity in an airgapped integrated circuit
DE102008059650B4 (de) * 2008-11-28 2018-06-21 Globalfoundries Inc. Verfahren zur Herstellung einer Mikrostruktur mit einer Metallisierungsstruktur mit selbstjustierten Luftspalten zwischen dichtliegenden Metallleitungen
US8497203B2 (en) 2010-08-13 2013-07-30 International Business Machines Corporation Semiconductor structures and methods of manufacture
US8530347B2 (en) * 2010-10-05 2013-09-10 Freescale Semiconductor, Inc. Electronic device including interconnects with a cavity therebetween and a process of forming the same
CN107104092B (zh) 2011-12-29 2020-02-21 英特尔公司 具有罩层的气隙互连以及形成的方法
JP5696679B2 (ja) * 2012-03-23 2015-04-08 富士通株式会社 半導体装置
KR102003881B1 (ko) * 2013-02-13 2019-10-17 삼성전자주식회사 반도체 소자 및 그 제조 방법
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KR102154112B1 (ko) * 2013-08-01 2020-09-09 삼성전자주식회사 금속 배선들을 포함하는 반도체 장치 및 그 제조 방법
US10177032B2 (en) * 2014-06-18 2019-01-08 Taiwan Semiconductor Manufacturing Company, Ltd. Devices, packaging devices, and methods of packaging semiconductor devices
US9831214B2 (en) * 2014-06-18 2017-11-28 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device packages, packaging methods, and packaged semiconductor devices
US9583380B2 (en) 2014-07-17 2017-02-28 Globalfoundries Inc. Anisotropic material damage process for etching low-K dielectric materials
US9443956B2 (en) 2014-12-08 2016-09-13 Globalfoundries Inc. Method for forming air gap structure using carbon-containing spacer
CN107112277B (zh) * 2014-12-24 2021-03-12 英特尔公司 将过孔与密集间距金属互连层的顶和底自对准的结构和方法
US9768058B2 (en) 2015-08-10 2017-09-19 Globalfoundries Inc. Methods of forming air gaps in metallization layers on integrated circuit products
US9922940B2 (en) * 2016-02-22 2018-03-20 Toshiba Memory Corporation Semiconductor device including air gaps between interconnects and method of manufacturing the same
KR102645957B1 (ko) 2016-03-22 2024-03-08 삼성전자주식회사 반도체 장치 및 그의 제조 방법
US10020260B1 (en) * 2016-12-22 2018-07-10 Globalfoundries Inc. Corrosion and/or etch protection layer for contacts and interconnect metallization integration
TW202445617A (zh) * 2023-01-12 2024-11-16 美商阿特拉斯磁性公司 利用無電電鍍技術增加非磁性複合材料之集膚深度並減少其渦流之方法及裝置

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Cited By (9)

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Publication number Priority date Publication date Assignee Title
CN105308736A (zh) * 2014-04-18 2016-02-03 索尼公司 场效应晶体管、场效应晶体管制造方法和射频器件
US10535607B2 (en) 2014-04-18 2020-01-14 Sony Corporation Field-effect transistor, method of manufacturing the same, and radio-frequency device
US10847466B2 (en) 2014-04-18 2020-11-24 Sony Corporation Field-effect transistor, method of manufacturing the same, and radio-frequency device
CN105308736B (zh) * 2014-04-18 2021-10-19 索尼公司 场效应晶体管、场效应晶体管制造方法和射频器件
CN113972278A (zh) * 2014-04-18 2022-01-25 索尼公司 场效应晶体管
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CN108028224A (zh) * 2015-10-16 2018-05-11 索尼公司 半导体装置以及半导体装置的制造方法
CN108028224B (zh) * 2015-10-16 2022-08-16 索尼公司 半导体装置以及半导体装置的制造方法

Also Published As

Publication number Publication date
US6838354B2 (en) 2005-01-04
WO2004061948A2 (en) 2004-07-22
JP2006324689A (ja) 2006-11-30
JP2006511955A (ja) 2006-04-06
JP4799868B2 (ja) 2011-10-26
TWI367543B (en) 2012-07-01
AU2003279030A1 (en) 2004-07-29
CN1820365A (zh) 2006-08-16
WO2004061948A3 (en) 2005-10-13
US20040119134A1 (en) 2004-06-24
JP4794389B2 (ja) 2011-10-19
TW200414414A (en) 2004-08-01
EP1579497A3 (en) 2005-12-07
EP1579497A2 (en) 2005-09-28
KR20050085833A (ko) 2005-08-29

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