CN100371763C - 一种投影显示器及用于投影显示器的封装微镜片阵列 - Google Patents

一种投影显示器及用于投影显示器的封装微镜片阵列 Download PDF

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Publication number
CN100371763C
CN100371763C CNB2004100546591A CN200410054659A CN100371763C CN 100371763 C CN100371763 C CN 100371763C CN B2004100546591 A CNB2004100546591 A CN B2004100546591A CN 200410054659 A CN200410054659 A CN 200410054659A CN 100371763 C CN100371763 C CN 100371763C
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CN
China
Prior art keywords
micromirror
projection display
array
packaged
micromirror array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100546591A
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English (en)
Chinese (zh)
Other versions
CN1567020A (zh
Inventor
A·G·胡伊博斯
F·伊尔科夫
S·帕特尔
P·W·理查兹
J·斯托克顿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reflectivity Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/631,536 external-priority patent/US6529310B1/en
Priority claimed from US09/732,445 external-priority patent/US6523961B2/en
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of CN1567020A publication Critical patent/CN1567020A/zh
Application granted granted Critical
Publication of CN100371763C publication Critical patent/CN100371763C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Projection Apparatus (AREA)
  • Micromachines (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Led Device Packages (AREA)
  • Prostheses (AREA)
  • Hybrid Cells (AREA)
CNB2004100546591A 2000-08-03 2001-08-03 一种投影显示器及用于投影显示器的封装微镜片阵列 Expired - Fee Related CN100371763C (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US09/631,536 US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element
US09/631,536 2000-08-03
US22924600P 2000-08-30 2000-08-30
US60/229,246 2000-08-30
US09/732,445 US6523961B2 (en) 2000-08-30 2000-12-07 Projection system and mirror elements for improved contrast ratio in spatial light modulators
US09/732,445 2000-12-07

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB018136087A Division CN100392467C (zh) 2000-08-03 2001-08-03 将图像投射到目标物上的方法和系统

Publications (2)

Publication Number Publication Date
CN1567020A CN1567020A (zh) 2005-01-19
CN100371763C true CN100371763C (zh) 2008-02-27

Family

ID=27397927

Family Applications (5)

Application Number Title Priority Date Filing Date
CNB2004100546591A Expired - Fee Related CN100371763C (zh) 2000-08-03 2001-08-03 一种投影显示器及用于投影显示器的封装微镜片阵列
CNB2004100546572A Expired - Fee Related CN100412602C (zh) 2000-08-03 2001-08-03 一种具有微镜片阵列的小片
CNB2004100546587A Expired - Fee Related CN100412603C (zh) 2000-08-03 2001-08-03 一种具有改进的微镜片阵列的投影电视
CNB018136087A Expired - Fee Related CN100392467C (zh) 2000-08-03 2001-08-03 将图像投射到目标物上的方法和系统
CNB2004100546604A Expired - Fee Related CN100412604C (zh) 2000-08-03 2001-08-03 一种用于投影电视的微镜片阵列

Family Applications After (4)

Application Number Title Priority Date Filing Date
CNB2004100546572A Expired - Fee Related CN100412602C (zh) 2000-08-03 2001-08-03 一种具有微镜片阵列的小片
CNB2004100546587A Expired - Fee Related CN100412603C (zh) 2000-08-03 2001-08-03 一种具有改进的微镜片阵列的投影电视
CNB018136087A Expired - Fee Related CN100392467C (zh) 2000-08-03 2001-08-03 将图像投射到目标物上的方法和系统
CNB2004100546604A Expired - Fee Related CN100412604C (zh) 2000-08-03 2001-08-03 一种用于投影电视的微镜片阵列

Country Status (8)

Country Link
EP (1) EP1315993A4 (https=)
JP (5) JP3889705B2 (https=)
KR (1) KR100724081B1 (https=)
CN (5) CN100371763C (https=)
AT (1) ATE354814T1 (https=)
AU (1) AU2001281019A1 (https=)
DE (10) DE20122615U1 (https=)
WO (1) WO2002012925A2 (https=)

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US7023606B2 (en) 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
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US7042622B2 (en) 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7397517B2 (en) 2003-05-30 2008-07-08 Kazuhiro Ohara Display system and signal processing using diamond-shaped DMDs
US7012669B2 (en) 2003-08-18 2006-03-14 Evans & Sutherland Computer Corporation Reflection barrier for panoramic display
US7334902B2 (en) 2003-08-18 2008-02-26 Evans & Sutherland Computer Corporation Wide angle scanner for panoramic display
US6871958B2 (en) 2003-08-18 2005-03-29 Evans & Sutherland Computer Corporation Wide angle scanner for panoramic display
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US6995830B2 (en) * 2003-12-22 2006-02-07 Asml Netherlands B.V. Lithographic projection apparatus and device manufacturing method
US7057794B2 (en) * 2004-05-19 2006-06-06 Taiwan Semiconductor Manufacturing Company, Ltd. Micromirror for MEMS device
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KR102211618B1 (ko) * 2019-07-26 2021-02-02 인하대학교 산학협력단 3차원 플로팅 이미지 구현 장치용 역반사 마이크로 미러 어레이
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JPH08304924A (ja) * 1995-05-10 1996-11-22 Nikon Corp プロジェクター装置
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JPH11344680A (ja) * 1998-04-10 1999-12-14 Samsung Electronics Co Ltd 画像表示装置用マイクロミラ―デバイス

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Also Published As

Publication number Publication date
JP2005122146A (ja) 2005-05-12
JP3889759B2 (ja) 2007-03-07
WO2002012925A3 (en) 2002-09-06
DE20122615U1 (de) 2006-09-14
CN100412603C (zh) 2008-08-20
EP1315993A2 (en) 2003-06-04
DE20122614U1 (de) 2006-09-14
CN1567018A (zh) 2005-01-19
CN1567020A (zh) 2005-01-19
DE60126849D1 (de) 2007-04-05
DE20122618U1 (de) 2006-11-23
JP3889705B2 (ja) 2007-03-07
DE20122372U1 (de) 2005-05-19
CN1567019A (zh) 2005-01-19
CN100412602C (zh) 2008-08-20
JP2004506230A (ja) 2004-02-26
DE20122616U1 (de) 2006-09-14
JP2005099793A (ja) 2005-04-14
WO2002012925A2 (en) 2002-02-14
KR20030036665A (ko) 2003-05-09
CN100392467C (zh) 2008-06-04
JP2006178447A (ja) 2006-07-06
ATE354814T1 (de) 2007-03-15
AU2001281019A1 (en) 2002-02-18
JP2005122145A (ja) 2005-05-12
DE60126849T2 (de) 2007-11-08
EP1315993A4 (en) 2005-07-13
DE20122617U1 (de) 2006-09-14
DE20122371U1 (de) 2005-05-19
DE20122373U1 (de) 2005-05-19
JP3768514B2 (ja) 2006-04-19
DE20122370U1 (de) 2005-05-19
KR100724081B1 (ko) 2007-06-04
CN100412604C (zh) 2008-08-20
JP3889757B2 (ja) 2007-03-07
CN1567021A (zh) 2005-01-19
CN1444738A (zh) 2003-09-24

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Granted publication date: 20080227