CN100364052C - 晶格调谐半导体衬底的形成 - Google Patents
晶格调谐半导体衬底的形成 Download PDFInfo
- Publication number
- CN100364052C CN100364052C CNB038209543A CN03820954A CN100364052C CN 100364052 C CN100364052 C CN 100364052C CN B038209543 A CNB038209543 A CN B038209543A CN 03820954 A CN03820954 A CN 03820954A CN 100364052 C CN100364052 C CN 100364052C
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- sige layer
- layer
- insulating mechanism
- sige
- parallel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02647—Lateral overgrowth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02441—Group 14 semiconducting materials
- H01L21/0245—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/933—Germanium or silicon or Ge-Si on III-V
Abstract
Description
Claims (32)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0220438.6A GB0220438D0 (en) | 2002-09-03 | 2002-09-03 | Formation of lattice-turning semiconductor substrates |
GB0220438.6 | 2002-09-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1714427A CN1714427A (zh) | 2005-12-28 |
CN100364052C true CN100364052C (zh) | 2008-01-23 |
Family
ID=9943412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038209543A Expired - Fee Related CN100364052C (zh) | 2002-09-03 | 2003-08-12 | 晶格调谐半导体衬底的形成 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7179727B2 (zh) |
EP (1) | EP1540715A1 (zh) |
JP (1) | JP2005537672A (zh) |
KR (1) | KR20050038037A (zh) |
CN (1) | CN100364052C (zh) |
AU (1) | AU2003251376A1 (zh) |
GB (1) | GB0220438D0 (zh) |
WO (1) | WO2004023536A1 (zh) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006011107A1 (en) * | 2004-07-22 | 2006-02-02 | Koninklijke Philips Electronics N.V. | Method of manufacturing a semiconductor device and semiconductor device obtained with such a method |
GB2418531A (en) * | 2004-09-22 | 2006-03-29 | Univ Warwick | Formation of lattice-tuning semiconductor substrates |
US8324660B2 (en) | 2005-05-17 | 2012-12-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US9153645B2 (en) | 2005-05-17 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US7777250B2 (en) * | 2006-03-24 | 2010-08-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures and related methods for device fabrication |
US7476606B2 (en) * | 2006-03-28 | 2009-01-13 | Northrop Grumman Corporation | Eutectic bonding of ultrathin semiconductors |
US8173551B2 (en) | 2006-09-07 | 2012-05-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Defect reduction using aspect ratio trapping |
WO2008039534A2 (en) | 2006-09-27 | 2008-04-03 | Amberwave Systems Corporation | Quantum tunneling devices and circuits with lattice- mismatched semiconductor structures |
US8502263B2 (en) * | 2006-10-19 | 2013-08-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Light-emitter-based devices with lattice-mismatched semiconductor structures |
US8304805B2 (en) * | 2009-01-09 | 2012-11-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor diodes fabricated by aspect ratio trapping with coalesced films |
US9508890B2 (en) | 2007-04-09 | 2016-11-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photovoltaics on silicon |
US7825328B2 (en) | 2007-04-09 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Nitride-based multi-junction solar cell modules and methods for making the same |
US8237151B2 (en) | 2009-01-09 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diode-based devices and methods for making the same |
US8329541B2 (en) | 2007-06-15 | 2012-12-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | InP-based transistor fabrication |
WO2009035746A2 (en) | 2007-09-07 | 2009-03-19 | Amberwave Systems Corporation | Multi-junction solar cells |
JP5543711B2 (ja) * | 2007-12-28 | 2014-07-09 | 住友化学株式会社 | 半導体基板、半導体基板の製造方法および電子デバイス |
US8183667B2 (en) | 2008-06-03 | 2012-05-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial growth of crystalline material |
US8274097B2 (en) | 2008-07-01 | 2012-09-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reduction of edge effects from aspect ratio trapping |
US8981427B2 (en) | 2008-07-15 | 2015-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Polishing of small composite semiconductor materials |
US20100072515A1 (en) * | 2008-09-19 | 2010-03-25 | Amberwave Systems Corporation | Fabrication and structures of crystalline material |
EP2335273A4 (en) | 2008-09-19 | 2012-01-25 | Taiwan Semiconductor Mfg | FORMATION OF EQUIPMENT BY EXCESSIVE GROWTH OF THE EPITAXIAL LAYER |
US8253211B2 (en) | 2008-09-24 | 2012-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor sensor structures with reduced dislocation defect densities |
TW201019377A (en) * | 2008-10-02 | 2010-05-16 | Sumitomo Chemical Co | Wafer for a semiconductor device, semiconductor device apparatus, design system, manufacturing method, and design method |
WO2010114956A1 (en) | 2009-04-02 | 2010-10-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Devices formed from a non-polar plane of a crystalline material and method of making the same |
WO2010134334A1 (ja) | 2009-05-22 | 2010-11-25 | 住友化学株式会社 | 半導体基板、電子デバイス、半導体基板の製造方法及び電子デバイスの製造方法 |
JP6706414B2 (ja) * | 2015-11-27 | 2020-06-10 | 国立研究開発法人情報通信研究機構 | Ge単結晶薄膜の製造方法及び光デバイス |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2215514A (en) * | 1988-03-04 | 1989-09-20 | Plessey Co Plc | Terminating dislocations in semiconductor epitaxial layers |
US5108947A (en) * | 1989-01-31 | 1992-04-28 | Agfa-Gevaert N.V. | Integration of gaas on si substrates |
US5158907A (en) * | 1990-08-02 | 1992-10-27 | At&T Bell Laboratories | Method for making semiconductor devices with low dislocation defects |
US5238869A (en) * | 1988-07-25 | 1993-08-24 | Texas Instruments Incorporated | Method of forming an epitaxial layer on a heterointerface |
US5272105A (en) * | 1988-02-11 | 1993-12-21 | Gte Laboratories Incorporated | Method of manufacturing an heteroepitaxial semiconductor structure |
US5410167A (en) * | 1992-07-10 | 1995-04-25 | Fujitsu Limited | Semiconductor device with reduced side gate effect |
US5442205A (en) * | 1991-04-24 | 1995-08-15 | At&T Corp. | Semiconductor heterostructure devices with strained semiconductor layers |
US6039803A (en) * | 1996-06-28 | 2000-03-21 | Massachusetts Institute Of Technology | Utilization of miscut substrates to improve relaxed graded silicon-germanium and germanium layers on silicon |
EP1052684A1 (en) * | 1999-05-10 | 2000-11-15 | Toyoda Gosei Co., Ltd. | A method for manufacturing group III nitride compound semiconductor and a light-emitting device using group III nitride compound semiconductor |
WO2001001465A1 (en) * | 1999-06-25 | 2001-01-04 | Massachusetts Institute Of Technology | Cyclic thermal anneal for dislocation reduction |
CN1336684A (zh) * | 2000-08-01 | 2002-02-20 | 三菱麻铁里亚尔株式会社 | 半导体衬底、场效应晶体管、锗化硅层形成方法及其制造方法 |
CN1364309A (zh) * | 2000-03-27 | 2002-08-14 | 松下电器产业株式会社 | 半导体晶片及其制造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04315419A (ja) * | 1991-04-12 | 1992-11-06 | Nec Corp | 元素半導体基板上の絶縁膜/化合物半導体積層構造 |
JPH06260427A (ja) * | 1993-03-05 | 1994-09-16 | Nec Corp | 半導体膜の選択成長方法 |
EP1036412A1 (en) | 1997-09-16 | 2000-09-20 | Massachusetts Institute Of Technology | CO-PLANAR Si AND Ge COMPOSITE SUBSTRATE AND METHOD OF PRODUCING SAME |
DE19802977A1 (de) | 1998-01-27 | 1999-07-29 | Forschungszentrum Juelich Gmbh | Verfahren zur Herstellung einer einkristallinen Schicht auf einem nicht gitterangepaßten Substrat, sowie eine oder mehrere solcher Schichten enthaltendes Bauelement |
JP4345244B2 (ja) * | 2001-05-31 | 2009-10-14 | 株式会社Sumco | SiGe層の形成方法及びこれを用いた歪みSi層の形成方法と電界効果型トランジスタの製造方法 |
JP2004055943A (ja) * | 2002-07-23 | 2004-02-19 | Matsushita Electric Ind Co Ltd | 半導体装置とその製造方法 |
-
2002
- 2002-09-03 GB GBGB0220438.6A patent/GB0220438D0/en not_active Ceased
-
2003
- 2003-08-12 AU AU2003251376A patent/AU2003251376A1/en not_active Abandoned
- 2003-08-12 EP EP03793846A patent/EP1540715A1/en not_active Withdrawn
- 2003-08-12 KR KR1020057003640A patent/KR20050038037A/ko not_active Application Discontinuation
- 2003-08-12 US US10/525,987 patent/US7179727B2/en not_active Expired - Fee Related
- 2003-08-12 CN CNB038209543A patent/CN100364052C/zh not_active Expired - Fee Related
- 2003-08-12 WO PCT/GB2003/003514 patent/WO2004023536A1/en active Application Filing
- 2003-08-12 JP JP2004533596A patent/JP2005537672A/ja active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5272105A (en) * | 1988-02-11 | 1993-12-21 | Gte Laboratories Incorporated | Method of manufacturing an heteroepitaxial semiconductor structure |
GB2215514A (en) * | 1988-03-04 | 1989-09-20 | Plessey Co Plc | Terminating dislocations in semiconductor epitaxial layers |
US5238869A (en) * | 1988-07-25 | 1993-08-24 | Texas Instruments Incorporated | Method of forming an epitaxial layer on a heterointerface |
US5108947A (en) * | 1989-01-31 | 1992-04-28 | Agfa-Gevaert N.V. | Integration of gaas on si substrates |
US5158907A (en) * | 1990-08-02 | 1992-10-27 | At&T Bell Laboratories | Method for making semiconductor devices with low dislocation defects |
US5442205A (en) * | 1991-04-24 | 1995-08-15 | At&T Corp. | Semiconductor heterostructure devices with strained semiconductor layers |
US5410167A (en) * | 1992-07-10 | 1995-04-25 | Fujitsu Limited | Semiconductor device with reduced side gate effect |
US6039803A (en) * | 1996-06-28 | 2000-03-21 | Massachusetts Institute Of Technology | Utilization of miscut substrates to improve relaxed graded silicon-germanium and germanium layers on silicon |
EP1052684A1 (en) * | 1999-05-10 | 2000-11-15 | Toyoda Gosei Co., Ltd. | A method for manufacturing group III nitride compound semiconductor and a light-emitting device using group III nitride compound semiconductor |
WO2001001465A1 (en) * | 1999-06-25 | 2001-01-04 | Massachusetts Institute Of Technology | Cyclic thermal anneal for dislocation reduction |
CN1364309A (zh) * | 2000-03-27 | 2002-08-14 | 松下电器产业株式会社 | 半导体晶片及其制造方法 |
CN1336684A (zh) * | 2000-08-01 | 2002-02-20 | 三菱麻铁里亚尔株式会社 | 半导体衬底、场效应晶体管、锗化硅层形成方法及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2005537672A (ja) | 2005-12-08 |
US7179727B2 (en) | 2007-02-20 |
KR20050038037A (ko) | 2005-04-25 |
WO2004023536A1 (en) | 2004-03-18 |
EP1540715A1 (en) | 2005-06-15 |
US20050245055A1 (en) | 2005-11-03 |
GB0220438D0 (en) | 2002-10-09 |
AU2003251376A1 (en) | 2004-03-29 |
CN1714427A (zh) | 2005-12-28 |
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Owner name: ADVANCESIS LTD Free format text: FORMER OWNER: UNIV WARWICK Effective date: 20061020 |
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Effective date of registration: 20061020 Address after: coventry Applicant after: Advancesis Ltd. Address before: Warwick County of Coventry city in Britain Applicant before: Univ Warwick |
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Correction item: Description Correct: Reprint the correct instruction sheet, page 7-8 False: Incorrect instructions, page 7-8 Number: 4 Volume: 24 |
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Free format text: CORRECT: DESCRIPTION; FROM: FALSE INSTRUCTIONS PAGE 7-8 TO: REPUBLISH PAGES 7-8 OF THE CORRECT SPECIFICATION |
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Granted publication date: 20080123 Termination date: 20120812 |