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Application filed by Landis & Gyr AgfiledCriticalLandis & Gyr Ag
Priority to CH4337/86ApriorityCriticalpatent/CH671653A5/de
Priority to DE19873721929prioritypatent/DE3721929A1/de
Publication of CH671653A5publicationCriticalpatent/CH671653A5/de
Verfahren zur Herstellung von Isolationsschichten zwischen mehrschichtig übereinander angeordneten metallischen Leitungsverbindungen für eine Halbleiteranordnung