CH663844A5 - Thermischer massendurchflussmesser, insbesondere fuer gase. - Google Patents
Thermischer massendurchflussmesser, insbesondere fuer gase. Download PDFInfo
- Publication number
- CH663844A5 CH663844A5 CH6809/83A CH680983A CH663844A5 CH 663844 A5 CH663844 A5 CH 663844A5 CH 6809/83 A CH6809/83 A CH 6809/83A CH 680983 A CH680983 A CH 680983A CH 663844 A5 CH663844 A5 CH 663844A5
- Authority
- CH
- Switzerland
- Prior art keywords
- flow
- mass flow
- thermal mass
- measuring resistors
- flow meter
- Prior art date
Links
- 239000007789 gas Substances 0.000 title claims description 20
- 229910000679 solder Inorganic materials 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 23
- 239000000919 ceramic Substances 0.000 claims description 15
- 230000001419 dependent effect Effects 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 238000011156 evaluation Methods 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 239000005385 borate glass Substances 0.000 claims description 2
- ZPPSOOVFTBGHBI-UHFFFAOYSA-N lead(2+);oxido(oxo)borane Chemical compound [Pb+2].[O-]B=O.[O-]B=O ZPPSOOVFTBGHBI-UHFFFAOYSA-N 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000009736 wetting Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical compound [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Fluid Mechanics (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3302080A DE3302080A1 (de) | 1983-01-22 | 1983-01-22 | Thermischer massendurchflussmesser, insbesondere fuer gase |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH663844A5 true CH663844A5 (de) | 1988-01-15 |
Family
ID=6188944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH6809/83A CH663844A5 (de) | 1983-01-22 | 1983-12-21 | Thermischer massendurchflussmesser, insbesondere fuer gase. |
Country Status (7)
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3604202C2 (de) * | 1985-02-14 | 1997-01-09 | Nippon Denso Co | Direkt beheizte Strömungsmeßvorrichtung |
| DE3517240C2 (de) * | 1985-05-13 | 1993-11-04 | Rosemount Gmbh & Co | Vorrichtung zur messtechnischen auswertung von gasen mittels einer auf gasstroemungen ansprechenden messzelle |
| DE3542788A1 (de) * | 1985-12-04 | 1987-06-19 | Degussa | Vorrichtung zur thermischen massenstrommessung von gasen und fluessigkeiten |
| DE3606849A1 (de) * | 1986-03-03 | 1987-09-10 | Vdo Schindling | Anordnung zur messung der stroemungsgeschwindigkeit |
| US5081866A (en) * | 1990-05-30 | 1992-01-21 | Yamatake-Honeywell Co., Ltd. | Respiratory air flowmeter |
| US5582628A (en) * | 1991-05-29 | 1996-12-10 | Wood; Tony J. | Unit and system for sensing fluid velocity |
| US5417110A (en) * | 1991-05-29 | 1995-05-23 | Wood; Tony J. | Unit and system for sensing fluid velocity |
| US5511415A (en) * | 1994-01-18 | 1996-04-30 | Cambridge Aeroflow, Inc. | Gas flow and temperature probe and gas flow and temperature monitor system including one or more such probes |
| JP3423083B2 (ja) * | 1994-10-17 | 2003-07-07 | 神奈川県 | 流量計センサ |
| DE19512111C2 (de) * | 1995-04-03 | 1999-01-07 | Ifm Electronic Gmbh | Wärmeübergangskontroll- und/oder -meßgerät |
| DE19640773C2 (de) * | 1995-10-07 | 1999-06-10 | Hiss Eckart | Meßfühler |
| US7109842B1 (en) * | 1998-12-07 | 2006-09-19 | Honeywell International Inc. | Robust fluid flow and property microsensor made of optimal material |
| US6794981B2 (en) | 1998-12-07 | 2004-09-21 | Honeywell International Inc. | Integratable-fluid flow and property microsensor assembly |
| US6269692B1 (en) * | 1999-02-01 | 2001-08-07 | Dxl Usa Inc. | Mass flow measuring assembly having low pressure drop and fast response time |
| JP2002289407A (ja) * | 2001-03-23 | 2002-10-04 | Denso Corp | 温度センサおよびその製造方法 |
| EP1249691A1 (en) | 2001-04-11 | 2002-10-16 | Omron Corporation | Electronic clinical thermometer |
| US7106167B2 (en) * | 2002-06-28 | 2006-09-12 | Heetronix | Stable high temperature sensor system with tungsten on AlN |
| FR2856880B1 (fr) | 2003-06-27 | 2005-09-23 | Auxitrol Sa | Resistance chauffante notamment pour la chauffe d'une piece massive telle qu'une sonde de temperature et/ou de prise de pression |
| US8235592B2 (en) | 2009-10-07 | 2012-08-07 | Wika Alexander Wiegand Se & Co. Kg | Gauge on a pipe section |
| DE102010015813A1 (de) * | 2010-04-20 | 2011-10-20 | Krohne Messtechnik Gmbh | Sensoranordnung für ein kalorimetrisches Massedurchflussmessgerät |
| MX336937B (es) * | 2012-05-17 | 2016-02-08 | Micro Motion Inc | Alimentacion pasante, electrica. ignifuga. |
| DE102012111058A1 (de) * | 2012-11-16 | 2014-05-22 | Endress + Hauser Flowtec Ag | Sensor und Durchflussmessgerät |
| JP2014119257A (ja) * | 2012-12-13 | 2014-06-30 | Mitsubishi Materials Corp | 気流センサ |
| JP6096070B2 (ja) * | 2013-06-20 | 2017-03-15 | 日立オートモティブシステムズ株式会社 | 熱式流量計の製造方法 |
| DE102015223910A1 (de) * | 2015-12-01 | 2017-06-01 | Brose Fahrzeugteile GmbH & Co. Kommanditgesellschaft, Würzburg | System aus einem ersten Bauteil mit einem Leiter und einem Trennwandelement und ein Verfahren zur Herstellung des Systems |
| DE202016107242U1 (de) * | 2016-12-21 | 2018-03-22 | Nordson Corp. | Sensoreinrichtung zur Bestimmung eines Massenstroms eines flüssigen Heißschmelzklebstoffes |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE295475C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1916-07-24 | |||
| US2802925A (en) * | 1954-03-13 | 1957-08-13 | Degussa | Resistance thermometer |
| US2947938A (en) * | 1954-04-09 | 1960-08-02 | Victory Engineering Corp | Electrothermal measuring apparatus and method for the calibration thereof |
| DE1256909B (de) * | 1961-09-14 | 1967-12-21 | Reactor Centrum Nederland | Kalorischer Massenstrommesser |
| US3333470A (en) * | 1964-06-01 | 1967-08-01 | Thermo Systems Inc | Method and apparatus for sensing fluid properties |
| US3363462A (en) * | 1964-09-30 | 1968-01-16 | Cullen M. Sabin | Fluid anemometer system |
| US3525853A (en) * | 1968-08-16 | 1970-08-25 | Ford Motor Co | Automotive electric quick heat system |
| US3900819A (en) * | 1973-02-07 | 1975-08-19 | Environmental Instruments | Thermal directional fluid flow transducer |
| GB1454816A (en) * | 1974-02-19 | 1976-11-03 | Rosemount Eng Co Ltd | Resistance thermometer sensors |
| US4024761A (en) * | 1976-06-11 | 1977-05-24 | Kyma Corporation | Directional hot film anemometer transducer |
| DE2804850C2 (de) * | 1978-02-04 | 1983-11-17 | Degussa Ag, 6000 Frankfurt | Vorrichtung zur Messung der Strömungsgeschwindigkeit von Gasen |
| FR2417086A1 (fr) * | 1978-02-10 | 1979-09-07 | Charbonnages Ste Chimique | Detecteur de debit d'un fluide sous tres haute pression |
| JPS54145166A (en) * | 1978-04-10 | 1979-11-13 | Hitachi Ltd | Measuring apparatus of suction air flow rates |
| DE2827766C2 (de) * | 1978-06-24 | 1983-10-13 | Degussa Ag, 6000 Frankfurt | Hitzdrahtanemometer zur Messung der Strömungsgeschwindigkeit von Gasen und Flüssigkeiten |
| DE8003431U1 (de) * | 1980-02-09 | 1980-05-14 | Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt | Messwiderstand fuer widerstandsthermometer |
| DE3006584A1 (de) * | 1980-02-22 | 1981-09-03 | Degussa Ag, 6000 Frankfurt | Thermischer durchflussmesser |
-
1983
- 1983-01-22 DE DE3302080A patent/DE3302080A1/de not_active Ceased
- 1983-12-21 CH CH6809/83A patent/CH663844A5/de not_active IP Right Cessation
-
1984
- 1984-01-03 NL NL8400012A patent/NL8400012A/nl not_active Application Discontinuation
- 1984-01-11 GB GB08400675A patent/GB2134266B/en not_active Expired
- 1984-01-18 JP JP59005848A patent/JPS59182315A/ja active Granted
- 1984-01-20 FR FR8400918A patent/FR2539869B1/fr not_active Expired
-
1989
- 1989-06-22 US US07/370,397 patent/US4972708A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB8400675D0 (en) | 1984-02-15 |
| JPH0368325B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-28 |
| DE3302080A1 (de) | 1984-07-26 |
| GB2134266A (en) | 1984-08-08 |
| GB2134266B (en) | 1986-09-17 |
| NL8400012A (nl) | 1984-08-16 |
| FR2539869A1 (fr) | 1984-07-27 |
| US4972708A (en) | 1990-11-27 |
| JPS59182315A (ja) | 1984-10-17 |
| FR2539869B1 (fr) | 1987-01-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PFA | Name/firm changed |
Owner name: LEYBOLD AKTIENGESELLSCHAFT |
|
| PUE | Assignment |
Owner name: ROSEMOUNT GMBH & CO. |
|
| PL | Patent ceased |