CH661129A5 - Kontaktiervorrichtung. - Google Patents

Kontaktiervorrichtung. Download PDF

Info

Publication number
CH661129A5
CH661129A5 CH566183A CH566183A CH661129A5 CH 661129 A5 CH661129 A5 CH 661129A5 CH 566183 A CH566183 A CH 566183A CH 566183 A CH566183 A CH 566183A CH 661129 A5 CH661129 A5 CH 661129A5
Authority
CH
Switzerland
Prior art keywords
contacting device
contact pin
carrier
contact pins
contact
Prior art date
Application number
CH566183A
Other languages
German (de)
English (en)
Inventor
Gustav Dr Rer Nat Krueger
Original Assignee
Feinmetall Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinmetall Gmbh filed Critical Feinmetall Gmbh
Publication of CH661129A5 publication Critical patent/CH661129A5/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
CH566183A 1982-10-21 1983-10-18 Kontaktiervorrichtung. CH661129A5 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3239001 1982-10-21
DE3300664 1983-01-11

Publications (1)

Publication Number Publication Date
CH661129A5 true CH661129A5 (de) 1987-06-30

Family

ID=25805254

Family Applications (1)

Application Number Title Priority Date Filing Date
CH566183A CH661129A5 (de) 1982-10-21 1983-10-18 Kontaktiervorrichtung.

Country Status (3)

Country Link
CH (1) CH661129A5 (nl)
FR (1) FR2535064B1 (nl)
NL (1) NL8303621A (nl)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998001906A1 (en) * 1996-07-05 1998-01-15 Formfactor, Inc. Floating lateral support for ends of elongate interconnection elements
WO1998052224A1 (en) * 1997-05-15 1998-11-19 Formfactor, Inc. Lithographically defined microelectronic contact structures
DE19811795C1 (de) * 1998-03-18 1999-09-02 Atg Test Systems Gmbh Nadel für einen Prüfadapter
US6945827B2 (en) 2002-12-23 2005-09-20 Formfactor, Inc. Microelectronic contact structure
US7122760B2 (en) 2002-11-25 2006-10-17 Formfactor, Inc. Using electric discharge machining to manufacture probes
DE102008023761A1 (de) * 2008-05-09 2009-11-12 Feinmetall Gmbh Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung
US7714235B1 (en) 1997-05-06 2010-05-11 Formfactor, Inc. Lithographically defined microelectronic contact structures

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535536A (en) * 1983-11-03 1985-08-20 Augat Inc. Method of assembling adaptor for automatic testing equipment
US4609243A (en) * 1983-11-03 1986-09-02 Augat Inc. Adaptor for automatic testing equipment
JP2000502812A (ja) * 1996-09-13 2000-03-07 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン ウエハ・レベルのテストおよびバーンインのための集積化コンプライアント・プローブ
IT1290127B1 (it) * 1997-03-19 1998-10-19 Circuit Line Spa Ago rigido per il test elettrico di circuiti stampati
DE19748823B4 (de) * 1997-11-05 2005-09-08 Feinmetall Gmbh Servicefreundliche Kontaktiervorrichtung
EP0915344B1 (de) * 1997-11-05 2004-02-25 Feinmetall GmbH Prüfkopf für Mikrostrukturen mit Schnittstelle
IT1317517B1 (it) * 2000-05-11 2003-07-09 Technoprobe S R L Testa di misura per microstrutture
DE60312692T2 (de) 2003-10-13 2007-12-06 Technoprobe S.P.A, Cernusco Lombardone Prüfkopf mit vertikalen Prüfnadeln für integrierte Halbleitergeräte
CN101160531A (zh) * 2005-04-12 2008-04-09 科技探索有限公司 用于具有半导体集成电子装置用的垂直探针的测试头的接触探针
EP2060921A1 (en) * 2007-11-16 2009-05-20 Technoprobe S.p.A Contact probe for testing head having vertical probes and related testing head for testing microstructure electric performance
JP6832661B2 (ja) * 2016-09-28 2021-02-24 株式会社日本マイクロニクス プローブカード及び接触検査装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1790052B1 (de) * 1968-09-02 1972-01-13 Siemens Ag Kontaktvorrichtung zum abtasten von kontaktstellen
DE2839982C2 (de) * 1978-09-14 1984-01-05 Feinmetall Gmbh, 7033 Herrenberg Federnder Kontaktbaustein
FR2511197A1 (fr) * 1981-08-05 1983-02-11 Cii Honeywell Bull Connecteur electrique a contacts droits, notamment pour supports de circuits electroniques a forte densite de bornes de sortie

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998001906A1 (en) * 1996-07-05 1998-01-15 Formfactor, Inc. Floating lateral support for ends of elongate interconnection elements
US7714235B1 (en) 1997-05-06 2010-05-11 Formfactor, Inc. Lithographically defined microelectronic contact structures
WO1998052224A1 (en) * 1997-05-15 1998-11-19 Formfactor, Inc. Lithographically defined microelectronic contact structures
DE19811795C1 (de) * 1998-03-18 1999-09-02 Atg Test Systems Gmbh Nadel für einen Prüfadapter
US7122760B2 (en) 2002-11-25 2006-10-17 Formfactor, Inc. Using electric discharge machining to manufacture probes
US7488917B2 (en) 2002-11-25 2009-02-10 Formfactor, Inc. Electric discharge machining of a probe array
US6945827B2 (en) 2002-12-23 2005-09-20 Formfactor, Inc. Microelectronic contact structure
US7731546B2 (en) 2002-12-23 2010-06-08 Formfactor, Inc. Microelectronic contact structure
DE102008023761A1 (de) * 2008-05-09 2009-11-12 Feinmetall Gmbh Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung
US7850460B2 (en) 2008-05-09 2010-12-14 Feinmetall Gmbh Electrical contact element for contacting an electrical component under test and contacting apparatus
DE102008023761B4 (de) * 2008-05-09 2012-10-31 Feinmetall Gmbh Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung
DE102008023761B9 (de) * 2008-05-09 2012-11-08 Feinmetall Gmbh Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung

Also Published As

Publication number Publication date
FR2535064B1 (fr) 1987-11-20
FR2535064A1 (fr) 1984-04-27
NL8303621A (nl) 1984-05-16

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