FR2535064B1 - Dispositif de controle automatique de specimens electroniques - Google Patents
Dispositif de controle automatique de specimens electroniquesInfo
- Publication number
- FR2535064B1 FR2535064B1 FR8316748A FR8316748A FR2535064B1 FR 2535064 B1 FR2535064 B1 FR 2535064B1 FR 8316748 A FR8316748 A FR 8316748A FR 8316748 A FR8316748 A FR 8316748A FR 2535064 B1 FR2535064 B1 FR 2535064B1
- Authority
- FR
- France
- Prior art keywords
- specimens
- electronic
- automatic control
- automatic
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3239001 | 1982-10-21 | ||
DE3300664 | 1983-01-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2535064A1 FR2535064A1 (fr) | 1984-04-27 |
FR2535064B1 true FR2535064B1 (fr) | 1987-11-20 |
Family
ID=25805254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8316748A Expired FR2535064B1 (fr) | 1982-10-21 | 1983-10-21 | Dispositif de controle automatique de specimens electroniques |
Country Status (3)
Country | Link |
---|---|
CH (1) | CH661129A5 (fr) |
FR (1) | FR2535064B1 (fr) |
NL (1) | NL8303621A (fr) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4535536A (en) * | 1983-11-03 | 1985-08-20 | Augat Inc. | Method of assembling adaptor for automatic testing equipment |
US4609243A (en) * | 1983-11-03 | 1986-09-02 | Augat Inc. | Adaptor for automatic testing equipment |
US6528984B2 (en) * | 1996-09-13 | 2003-03-04 | Ibm Corporation | Integrated compliant probe for wafer level test and burn-in |
AU3603497A (en) * | 1996-07-05 | 1998-02-02 | Formfactor, Inc. | Floating lateral support for ends of elongate interconnection elements |
IT1290127B1 (it) * | 1997-03-19 | 1998-10-19 | Circuit Line Spa | Ago rigido per il test elettrico di circuiti stampati |
US7714235B1 (en) | 1997-05-06 | 2010-05-11 | Formfactor, Inc. | Lithographically defined microelectronic contact structures |
JP3378259B2 (ja) * | 1997-05-15 | 2003-02-17 | フォームファクター,インコーポレイテッド | 接触構造体の作成方法 |
DE19748823B4 (de) * | 1997-11-05 | 2005-09-08 | Feinmetall Gmbh | Servicefreundliche Kontaktiervorrichtung |
ATE260470T1 (de) * | 1997-11-05 | 2004-03-15 | Feinmetall Gmbh | Prüfkopf für mikrostrukturen mit schnittstelle |
DE19811795C1 (de) * | 1998-03-18 | 1999-09-02 | Atg Test Systems Gmbh | Nadel für einen Prüfadapter |
IT1317517B1 (it) * | 2000-05-11 | 2003-07-09 | Technoprobe S R L | Testa di misura per microstrutture |
US7122760B2 (en) | 2002-11-25 | 2006-10-17 | Formfactor, Inc. | Using electric discharge machining to manufacture probes |
US6945827B2 (en) | 2002-12-23 | 2005-09-20 | Formfactor, Inc. | Microelectronic contact structure |
DE60312692T2 (de) | 2003-10-13 | 2007-12-06 | Technoprobe S.P.A, Cernusco Lombardone | Prüfkopf mit vertikalen Prüfnadeln für integrierte Halbleitergeräte |
JP2008536141A (ja) * | 2005-04-12 | 2008-09-04 | テクノプローブ ソチエタ ペル アツィオニ | 半導体集積電子デバイス用の垂直プローブを有するテストヘッド |
EP2060921A1 (fr) * | 2007-11-16 | 2009-05-20 | Technoprobe S.p.A | Sonde de contact pour tête de test à sondes verticales et tête de test correspondante pour tester la performance électrique de microstructures |
DE102008023761B9 (de) | 2008-05-09 | 2012-11-08 | Feinmetall Gmbh | Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung |
JP6832661B2 (ja) * | 2016-09-28 | 2021-02-24 | 株式会社日本マイクロニクス | プローブカード及び接触検査装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1790052B1 (de) * | 1968-09-02 | 1972-01-13 | Siemens Ag | Kontaktvorrichtung zum abtasten von kontaktstellen |
DE2839982C2 (de) * | 1978-09-14 | 1984-01-05 | Feinmetall Gmbh, 7033 Herrenberg | Federnder Kontaktbaustein |
FR2511197A1 (fr) * | 1981-08-05 | 1983-02-11 | Cii Honeywell Bull | Connecteur electrique a contacts droits, notamment pour supports de circuits electroniques a forte densite de bornes de sortie |
-
1983
- 1983-10-18 CH CH566183A patent/CH661129A5/de not_active IP Right Cessation
- 1983-10-20 NL NL8303621A patent/NL8303621A/nl not_active Application Discontinuation
- 1983-10-21 FR FR8316748A patent/FR2535064B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL8303621A (nl) | 1984-05-16 |
CH661129A5 (de) | 1987-06-30 |
FR2535064A1 (fr) | 1984-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |