FR2535064B1 - Dispositif de controle automatique de specimens electroniques - Google Patents

Dispositif de controle automatique de specimens electroniques

Info

Publication number
FR2535064B1
FR2535064B1 FR8316748A FR8316748A FR2535064B1 FR 2535064 B1 FR2535064 B1 FR 2535064B1 FR 8316748 A FR8316748 A FR 8316748A FR 8316748 A FR8316748 A FR 8316748A FR 2535064 B1 FR2535064 B1 FR 2535064B1
Authority
FR
France
Prior art keywords
specimens
electronic
automatic control
automatic
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8316748A
Other languages
English (en)
Other versions
FR2535064A1 (fr
Inventor
Gustav Kruger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Feinmetall GmbH
Original Assignee
Feinmetall GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinmetall GmbH filed Critical Feinmetall GmbH
Publication of FR2535064A1 publication Critical patent/FR2535064A1/fr
Application granted granted Critical
Publication of FR2535064B1 publication Critical patent/FR2535064B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
FR8316748A 1982-10-21 1983-10-21 Dispositif de controle automatique de specimens electroniques Expired FR2535064B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3239001 1982-10-21
DE3300664 1983-01-11

Publications (2)

Publication Number Publication Date
FR2535064A1 FR2535064A1 (fr) 1984-04-27
FR2535064B1 true FR2535064B1 (fr) 1987-11-20

Family

ID=25805254

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8316748A Expired FR2535064B1 (fr) 1982-10-21 1983-10-21 Dispositif de controle automatique de specimens electroniques

Country Status (3)

Country Link
CH (1) CH661129A5 (fr)
FR (1) FR2535064B1 (fr)
NL (1) NL8303621A (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535536A (en) * 1983-11-03 1985-08-20 Augat Inc. Method of assembling adaptor for automatic testing equipment
US4609243A (en) * 1983-11-03 1986-09-02 Augat Inc. Adaptor for automatic testing equipment
US6528984B2 (en) * 1996-09-13 2003-03-04 Ibm Corporation Integrated compliant probe for wafer level test and burn-in
AU3603497A (en) * 1996-07-05 1998-02-02 Formfactor, Inc. Floating lateral support for ends of elongate interconnection elements
IT1290127B1 (it) * 1997-03-19 1998-10-19 Circuit Line Spa Ago rigido per il test elettrico di circuiti stampati
US7714235B1 (en) 1997-05-06 2010-05-11 Formfactor, Inc. Lithographically defined microelectronic contact structures
JP3378259B2 (ja) * 1997-05-15 2003-02-17 フォームファクター，インコーポレイテッド 接触構造体の作成方法
DE19748823B4 (de) * 1997-11-05 2005-09-08 Feinmetall Gmbh Servicefreundliche Kontaktiervorrichtung
ATE260470T1 (de) * 1997-11-05 2004-03-15 Feinmetall Gmbh Prüfkopf für mikrostrukturen mit schnittstelle
DE19811795C1 (de) * 1998-03-18 1999-09-02 Atg Test Systems Gmbh Nadel für einen Prüfadapter
IT1317517B1 (it) * 2000-05-11 2003-07-09 Technoprobe S R L Testa di misura per microstrutture
US7122760B2 (en) 2002-11-25 2006-10-17 Formfactor, Inc. Using electric discharge machining to manufacture probes
US6945827B2 (en) 2002-12-23 2005-09-20 Formfactor, Inc. Microelectronic contact structure
DE60312692T2 (de) 2003-10-13 2007-12-06 Technoprobe S.P.A, Cernusco Lombardone Prüfkopf mit vertikalen Prüfnadeln für integrierte Halbleitergeräte
JP2008536141A (ja) * 2005-04-12 2008-09-04 テクノプローブ ソチエタ ペル アツィオニ 半導体集積電子デバイス用の垂直プローブを有するテストヘッド
EP2060921A1 (fr) * 2007-11-16 2009-05-20 Technoprobe S.p.A Sonde de contact pour tête de test à sondes verticales et tête de test correspondante pour tester la performance électrique de microstructures
DE102008023761B9 (de) 2008-05-09 2012-11-08 Feinmetall Gmbh Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung
JP6832661B2 (ja) * 2016-09-28 2021-02-24 株式会社日本マイクロニクス プローブカード及び接触検査装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1790052B1 (de) * 1968-09-02 1972-01-13 Siemens Ag Kontaktvorrichtung zum abtasten von kontaktstellen
DE2839982C2 (de) * 1978-09-14 1984-01-05 Feinmetall Gmbh, 7033 Herrenberg Federnder Kontaktbaustein
FR2511197A1 (fr) * 1981-08-05 1983-02-11 Cii Honeywell Bull Connecteur electrique a contacts droits, notamment pour supports de circuits electroniques a forte densite de bornes de sortie

Also Published As

Publication number Publication date
NL8303621A (nl) 1984-05-16
CH661129A5 (de) 1987-06-30
FR2535064A1 (fr) 1984-04-27

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Legal Events

Date Code Title Description
ST Notification of lapse