CH633160GA3 - - Google Patents

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Publication number
CH633160GA3
CH633160GA3 CH1240178A CH1240178A CH633160GA3 CH 633160G A3 CH633160G A3 CH 633160GA3 CH 1240178 A CH1240178 A CH 1240178A CH 1240178 A CH1240178 A CH 1240178A CH 633160G A3 CH633160G A3 CH 633160GA3
Authority
CH
Switzerland
Prior art keywords
vibrator
housing
leaf
vacuum
quartz crystal
Prior art date
Application number
CH1240178A
Other languages
French (fr)
Other versions
CH633160B (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Publication of CH633160B publication Critical patent/CH633160B/en
Application filed filed Critical
Publication of CH633160GA3 publication Critical patent/CH633160GA3/fr

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A quartz crystal oscillator package comprising a quartz crystal vibrator leaf enclosed in an evacuated housing. The vibrator leaf frame is sandwiched and sealed between a pair of housing elements formed by etching at one time the periphery of each housing element and at another time etching a concave portion in each housing element. Opposed concave portions provide the internal volume wherein the vibrator leaf is sealed under vacuum. Using heat and vacuum, a metal film deposited on the sealing surfaces of the housing elements fuses with a binder material to form a eutectic alloy seal. A flat package having small size, high structural strength, an excellent hermetic seal, and high internal vacuum is produced by this method.
CH1240178A 1977-12-05 1978-12-05 METHOD OF MANUFACTURING AN ULTRA THIN TYPE QUARTZ CRYSTAL OSCILLATOR AND AN ENCAPSULATED QUARTZ CRYSTAL OSCILLATOR RESULTING FROM THE PROCESS. CH633160B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14586477A JPS5478694A (en) 1977-12-05 1977-12-05 Crystal vibrator
JP14586377A JPS5478693A (en) 1977-12-05 1977-12-05 Crystal vibrator

Publications (2)

Publication Number Publication Date
CH633160B CH633160B (en)
CH633160GA3 true CH633160GA3 (en) 1982-11-30

Family

ID=26476878

Family Applications (2)

Application Number Title Priority Date Filing Date
CH1240178A CH633160B (en) 1977-12-05 1978-12-05 METHOD OF MANUFACTURING AN ULTRA THIN TYPE QUARTZ CRYSTAL OSCILLATOR AND AN ENCAPSULATED QUARTZ CRYSTAL OSCILLATOR RESULTING FROM THE PROCESS.
CH982A CH647642GA3 (en) 1977-12-05 1982-01-04

Family Applications After (1)

Application Number Title Priority Date Filing Date
CH982A CH647642GA3 (en) 1977-12-05 1982-01-04

Country Status (3)

Country Link
US (2) US4293986A (en)
JP (2) JPS5478694A (en)
CH (2) CH633160B (en)

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US4627533A (en) * 1984-10-29 1986-12-09 Hughes Aircraft Company Ceramic package for compensated crystal oscillator
DE3520085A1 (en) * 1985-06-05 1986-12-11 Philips Patentverwaltung Gmbh, 2000 Hamburg METHOD FOR PRODUCING A HERMETICALLY CLOSED COMPONENT HOUSING, ESPECIALLY FOR SWING QUARTZ
US4639631A (en) * 1985-07-01 1987-01-27 Motorola, Inc. Electrostatically sealed piezoelectric device
DE3539504A1 (en) * 1985-11-07 1987-05-21 Schott Glaswerke FLAT HOUSING FOR THE HERMETIC ENCLOSURE OF PIEZOELECTRIC COMPONENTS
FR2592247A1 (en) * 1985-12-24 1987-06-26 Electronique Piezo Electr Cie IMPROVEMENT WITH PIEZOELECTRIC RESONATORS.
US5592130A (en) * 1987-02-27 1997-01-07 Seiko Epson Corporation Piezoelectric oscillator including a piezoelectric resonator with outer lead
US5325574A (en) * 1987-02-27 1994-07-05 Seiko Epson Corporation Method of forming a quartz oscillator temperature sensor
US5392006A (en) * 1987-02-27 1995-02-21 Seiko Epson Corporation Pressure seal type piezoelectric resonator
US5607236A (en) * 1987-02-27 1997-03-04 Seiko Epson Corporation Quartz oscillator temperature sensor
US5265316A (en) * 1987-02-27 1993-11-30 Seiko Epson Corporation Method of manufacturing a pressure seal type piezoelectric oscillator
GB8719498D0 (en) * 1987-08-18 1987-11-18 Ferranti Plc Seals
US4895291A (en) * 1989-05-04 1990-01-23 Eastman Kodak Company Method of making a hermetic seal in a solid-state device
JPH03121U (en) * 1989-05-23 1991-01-07
US5138214A (en) * 1989-12-27 1992-08-11 Matsushita Electric Industrial Co., Ltd. Piezoelectric transducer and method of adjusting oscillation frequency thereof
US5270491A (en) * 1990-10-09 1993-12-14 Eastman Kodak Company Hermetically sealed microelectronic package
JP2601016B2 (en) * 1990-11-17 1997-04-16 株式会社村田製作所 Manufacturing method of piezoelectric resonator
WO1992016095A1 (en) * 1991-03-04 1992-09-17 Motorola, Inc. Shielding apparatus for non-conductive electronic circuit package
US5668057A (en) * 1991-03-13 1997-09-16 Matsushita Electric Industrial Co., Ltd. Methods of manufacture for electronic components having high-frequency elements
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
GB2260642B (en) * 1991-10-19 1995-02-08 Northern Telecom Ltd Crystal resonator device
JPH06291587A (en) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd Piezoelectric vibrator
KR0158469B1 (en) * 1992-10-15 1999-03-20 모리시타 요이찌 Oscillator
EP0594117B1 (en) * 1992-10-20 1998-12-09 Matsushita Electric Industrial Co., Ltd. Piezoelectric filter and its production method
US5302879A (en) * 1992-12-31 1994-04-12 Halliburton Company Temperature/reference package, and method using the same for high pressure, high temperature oil or gas well
JPH06350376A (en) * 1993-01-25 1994-12-22 Matsushita Electric Ind Co Ltd Hermetically sealed piezoelectric device and hermetically sealed package
US5506463A (en) * 1993-08-23 1996-04-09 Rohm Co., Ltd. Packaged piezoelectric oscillator and method of making the same
EP0651449B1 (en) * 1993-11-01 2002-02-13 Matsushita Electric Industrial Co., Ltd. Electronic component and method for producing the same
DE69409215T2 (en) * 1993-12-06 1998-07-16 Matsushita Electric Ind Co Ltd Hybrid magnetic structure and its manufacturing process
US5406682A (en) * 1993-12-23 1995-04-18 Motorola, Inc. Method of compliantly mounting a piezoelectric device
JPH07226644A (en) * 1994-02-16 1995-08-22 Murata Mfg Co Ltd Energy confinement type piezoelectric resonator
US5552655A (en) * 1994-05-04 1996-09-03 Trw Inc. Low frequency mechanical resonator
US5514928A (en) * 1994-05-27 1996-05-07 Litton Systems, Inc. Apparatus having cascaded and interbonded microchannel plates and method of making
DE19548062A1 (en) * 1995-12-21 1997-06-26 Siemens Matsushita Components Electrical component, in particular component working with surface acoustic waves - SAW component - and a method for its production
US6242842B1 (en) 1996-12-16 2001-06-05 Siemens Matsushita Components Gmbh & Co. Kg Electrical component, in particular saw component operating with surface acoustic waves, and a method for its production
DE19548048C2 (en) * 1995-12-21 1998-01-15 Siemens Matsushita Components Electronic component, in particular component working with surface acoustic waves (SAW component)
US5696422A (en) * 1996-03-01 1997-12-09 Piezo Crystal Company Crystal package
DE69718693T2 (en) * 1996-03-08 2003-11-27 Matsushita Electric Industrial Co., Ltd. Electronic component and manufacturing process
DE19649332C1 (en) * 1996-11-28 1998-01-22 Tele Quarz Gmbh Crystal oscillator formed as surface-mounted-device (SMD)
JP3042431B2 (en) * 1996-12-03 2000-05-15 株式会社村田製作所 Electronic component sealing structure and sealing method
US6976295B2 (en) * 1997-07-29 2005-12-20 Seiko Epson Corporation Method of manufacturing a piezoelectric device
US6960870B2 (en) * 1997-07-29 2005-11-01 Seiko Epson Corporation Piezo-electric resonator and manufacturing method thereof
US6114800A (en) * 1997-10-01 2000-09-05 Murata Manufacturing Co., Ltd Piezoelectric component
JP3989663B2 (en) * 2000-02-17 2007-10-10 セイコーインスツル株式会社 Piezoelectric vibrator and method of manufacturing the piezoelectric vibrator
US6628048B2 (en) * 2000-11-29 2003-09-30 Samsung Electro-Mechanics Co., Ltd. Crystal oscillator with improved shock resistance
JP3974346B2 (en) * 2001-03-30 2007-09-12 富士通メディアデバイス株式会社 Surface acoustic wave device
US6548943B2 (en) * 2001-04-12 2003-04-15 Nokia Mobile Phones Ltd. Method of producing thin-film bulk acoustic wave devices
US6528875B1 (en) * 2001-04-20 2003-03-04 Amkor Technology, Inc. Vacuum sealed package for semiconductor chip
JP2003318699A (en) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk Crystal unit and its manufacturing method
JP3905041B2 (en) * 2003-01-07 2007-04-18 株式会社日立製作所 Electronic device and manufacturing method thereof
US8092734B2 (en) * 2004-05-13 2012-01-10 Aptina Imaging Corporation Covers for microelectronic imagers and methods for wafer-level packaging of microelectronics imagers
JP4451219B2 (en) * 2004-06-03 2010-04-14 日本電波工業株式会社 Crystal oscillator
US7061086B2 (en) * 2004-09-01 2006-06-13 Bliley Technologies Inc. Silicon package for piezoelectric device
JP2006229295A (en) * 2005-02-15 2006-08-31 Kyocera Kinseki Corp Vibrator package
JP4690146B2 (en) * 2005-08-26 2011-06-01 セイコーインスツル株式会社 Quartz crystal oscillator, oscillator and electronic equipment
JP2007251766A (en) * 2006-03-17 2007-09-27 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting
US7564177B2 (en) * 2006-12-26 2009-07-21 Nihon Dempa Kogyo Co., Ltd. Crystal unit having stacked structure
US8069549B2 (en) 2007-03-22 2011-12-06 Seiko Epson Corporation Method for sealing a quartz crystal device
JP5078512B2 (en) * 2007-09-06 2012-11-21 日本電波工業株式会社 Crystal device
JP5048471B2 (en) * 2007-12-05 2012-10-17 セイコーインスツル株式会社 Package manufacturing method, package, electronic device, piezoelectric vibrator, oscillator, electronic device, and radio timepiece
JP4988799B2 (en) * 2009-09-16 2012-08-01 日本電波工業株式会社 Piezoelectric vibration device and method for manufacturing piezoelectric vibration device
JP2011142374A (en) * 2010-01-05 2011-07-21 Seiko Epson Corp Piezoelectric device and method for manufacturing the same
JP5129284B2 (en) * 2010-03-09 2013-01-30 日本電波工業株式会社 Piezoelectric vibrator and method for manufacturing the piezoelectric vibrator
WO2015162958A1 (en) * 2014-04-24 2015-10-29 株式会社村田製作所 Crystal-oscillating device and method for manufacturing same

Family Cites Families (7)

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US261402A (en) * 1882-07-18 sprague
US378423A (en) * 1888-02-28 Method of etching on one
US3421962A (en) * 1965-04-05 1969-01-14 Int Rectifier Corp Apparatus for dicing semiconductor wafers
US3888708A (en) * 1972-02-17 1975-06-10 Kensall D Wise Method for forming regions of predetermined thickness in silicon
US3857161A (en) * 1973-02-09 1974-12-31 T Hutchins Method of making a ductile hermetic indium seal
FR2338607A1 (en) * 1976-01-16 1977-08-12 France Etat QUARTZ RESONATOR WITH NON-ADHERENT CRYSTAL ELECTRODES
US4077558A (en) * 1976-12-06 1978-03-07 International Business Machines Corporation Diffusion bonding of crystals

Also Published As

Publication number Publication date
JPS5478694A (en) 1979-06-22
CH633160B (en)
US4293986A (en) 1981-10-13
JPS6119137B2 (en) 1986-05-15
CH647642GA3 (en) 1985-02-15
US4288284A (en) 1981-09-08
JPS5478693A (en) 1979-06-22

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