JPS5478690A - Crystal vibrator - Google Patents

Crystal vibrator

Info

Publication number
JPS5478690A
JPS5478690A JP14586077A JP14586077A JPS5478690A JP S5478690 A JPS5478690 A JP S5478690A JP 14586077 A JP14586077 A JP 14586077A JP 14586077 A JP14586077 A JP 14586077A JP S5478690 A JPS5478690 A JP S5478690A
Authority
JP
Japan
Prior art keywords
vacuum
metal
high vacuum
vibrator
lower cases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14586077A
Other languages
Japanese (ja)
Inventor
Masatoshi Kobayashi
Joji Shimakawa
Yukio Hara
Hiroyuki Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsushima Kogyo KK
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Matsushima Kogyo KK
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushima Kogyo KK, Seiko Epson Corp, Suwa Seikosha KK filed Critical Matsushima Kogyo KK
Priority to JP14586077A priority Critical patent/JPS5478690A/en
Publication of JPS5478690A publication Critical patent/JPS5478690A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain an extremely-thin vibrator which maintains a high vacuum, has Q-value characteristics, and is good in frequency stability, by forming a metal bank on a vacuum-sealing plane and by thermally pressure-fixing this and a metal film at the opposite side. CONSTITUTION:On vacuum-sealing surfaces 10a and 11a of upper and lower cases 10 and 11 in the same shape with concavities 10b and 11b at their centers, metal films are formed through vacuum vapor deposition, on which metal banks 12 of gold, silver, platinum, or the like are plated or vapor-deposited covering the entire surface to uniform thicknesses. Then, crystal vibrator 9, and upper and lower cases 10 and 11 are heated under high vacuum and then evacuated sufficiently and compressive force is applied to both upper and lower cases with crystal vibrator 9 sandwiched under high vacuum so as to make the surface of metal bank 12 in airtight contact with the electrode surface of Au, etc., formed at the frame part of oscillating reed 9 before vacuum sealing through thermal pressure-fixing. Consequently, an extremely-thin vibrator can be obtained which maintains a high vacuum, has high Q characteristics, and is excellent in frequency stability.
JP14586077A 1977-12-05 1977-12-05 Crystal vibrator Pending JPS5478690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14586077A JPS5478690A (en) 1977-12-05 1977-12-05 Crystal vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14586077A JPS5478690A (en) 1977-12-05 1977-12-05 Crystal vibrator

Publications (1)

Publication Number Publication Date
JPS5478690A true JPS5478690A (en) 1979-06-22

Family

ID=15394739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14586077A Pending JPS5478690A (en) 1977-12-05 1977-12-05 Crystal vibrator

Country Status (1)

Country Link
JP (1) JPS5478690A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH042116U (en) * 1990-04-21 1992-01-09
CN105958958A (en) * 2016-04-27 2016-09-21 北京无线电计量测试研究所 Quartz crystal resonator and its manufacturing method
CN105958961A (en) * 2016-04-27 2016-09-21 北京无线电计量测试研究所 Manufacturing method for quartz resonators
CN105978525A (en) * 2016-04-27 2016-09-28 北京无线电计量测试研究所 Quartz resonator
CN106100601A (en) * 2016-05-31 2016-11-09 中电科技德清华莹电子有限公司 A kind of FBAR using ultra-thin piezoelectric single crystal to make
US20170026027A1 (en) * 2014-04-24 2017-01-26 Murata Manufacturing Co., Ltd. Crystal-oscillating device and manufacturing method therefor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH042116U (en) * 1990-04-21 1992-01-09
US20170026027A1 (en) * 2014-04-24 2017-01-26 Murata Manufacturing Co., Ltd. Crystal-oscillating device and manufacturing method therefor
US10511282B2 (en) * 2014-04-24 2019-12-17 Murata Manufacturing Co., Ltd. Crystal-oscillating device and manufacturing method therefor
CN105958958A (en) * 2016-04-27 2016-09-21 北京无线电计量测试研究所 Quartz crystal resonator and its manufacturing method
CN105958961A (en) * 2016-04-27 2016-09-21 北京无线电计量测试研究所 Manufacturing method for quartz resonators
CN105978525A (en) * 2016-04-27 2016-09-28 北京无线电计量测试研究所 Quartz resonator
CN106100601A (en) * 2016-05-31 2016-11-09 中电科技德清华莹电子有限公司 A kind of FBAR using ultra-thin piezoelectric single crystal to make

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