JPS56100512A - Elastic surface wave element and its production - Google Patents

Elastic surface wave element and its production

Info

Publication number
JPS56100512A
JPS56100512A JP306580A JP306580A JPS56100512A JP S56100512 A JPS56100512 A JP S56100512A JP 306580 A JP306580 A JP 306580A JP 306580 A JP306580 A JP 306580A JP S56100512 A JPS56100512 A JP S56100512A
Authority
JP
Japan
Prior art keywords
thin film
surface wave
elastic surface
wave element
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP306580A
Other languages
Japanese (ja)
Inventor
Kozo Machida
Masanobu Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP306580A priority Critical patent/JPS56100512A/en
Publication of JPS56100512A publication Critical patent/JPS56100512A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Abstract

PURPOSE:To prevent lowering of the characteristic due to the influence of the undesired wave, by inclining the end part of the thin film, which is formed in the electrode part of the elastic surface wave element, into a taper form. CONSTITUTION:After forming comb line electrodes 21 on substrate 20, piezoelectric thin film 23 having taper-shaped inclined part 23' is formed at the end part. In case of formation of this piezoelectric thin film 23, the mask which has thickness (t) to satisfy relation 0.01<=h/t<=0.05 for thickness (h) of this film 23 to be formed and has little thermal expansion and contraction is arranged on substrate 20, and thin film 23 is vapor-deposited through this mask in the degree of evacuation of approximately 1-10X10<-4> Torrs.
JP306580A 1980-01-17 1980-01-17 Elastic surface wave element and its production Pending JPS56100512A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP306580A JPS56100512A (en) 1980-01-17 1980-01-17 Elastic surface wave element and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP306580A JPS56100512A (en) 1980-01-17 1980-01-17 Elastic surface wave element and its production

Publications (1)

Publication Number Publication Date
JPS56100512A true JPS56100512A (en) 1981-08-12

Family

ID=11546922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP306580A Pending JPS56100512A (en) 1980-01-17 1980-01-17 Elastic surface wave element and its production

Country Status (1)

Country Link
JP (1) JPS56100512A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210521U (en) * 1985-07-03 1987-01-22
JPH0346233U (en) * 1989-09-12 1991-04-30
WO2012127793A1 (en) * 2011-03-22 2012-09-27 パナソニック株式会社 Elastic wave element

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131967A (en) * 1972-11-24 1974-12-18
JPS5087794A (en) * 1973-12-08 1975-07-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131967A (en) * 1972-11-24 1974-12-18
JPS5087794A (en) * 1973-12-08 1975-07-15

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210521U (en) * 1985-07-03 1987-01-22
JPH0346233U (en) * 1989-09-12 1991-04-30
WO2012127793A1 (en) * 2011-03-22 2012-09-27 パナソニック株式会社 Elastic wave element
JPWO2012127793A1 (en) * 2011-03-22 2014-07-24 パナソニック株式会社 Elastic wave element
US9136458B2 (en) 2011-03-22 2015-09-15 Skyworks Panasonic Filter Solutions Japan Co., Ltd. Elastic wave element
US9748924B2 (en) 2011-03-22 2017-08-29 Skyworks Filter Solutions Japan Co., Ltd. Elastic wave element with interdigital transducer electrode

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