JPS51121255A - Production method for thin film with piezo-electric characteristics - Google Patents
Production method for thin film with piezo-electric characteristicsInfo
- Publication number
- JPS51121255A JPS51121255A JP50046791A JP4679175A JPS51121255A JP S51121255 A JPS51121255 A JP S51121255A JP 50046791 A JP50046791 A JP 50046791A JP 4679175 A JP4679175 A JP 4679175A JP S51121255 A JPS51121255 A JP S51121255A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- production method
- piezo
- electric characteristics
- accurately
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE: To provide a production method for effective practical piezoelectric thin film in which the direction of its electrical axis is accurately and easily controlled by improving composition of the electrode during the sputtering process.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50046791A JPS5850419B2 (en) | 1975-04-16 | 1975-04-16 | Method for manufacturing piezoelectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50046791A JPS5850419B2 (en) | 1975-04-16 | 1975-04-16 | Method for manufacturing piezoelectric thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51121255A true JPS51121255A (en) | 1976-10-23 |
JPS5850419B2 JPS5850419B2 (en) | 1983-11-10 |
Family
ID=12757142
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50046791A Expired JPS5850419B2 (en) | 1975-04-16 | 1975-04-16 | Method for manufacturing piezoelectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5850419B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54127879A (en) * | 1978-03-28 | 1979-10-04 | Itaru Mori | Sputtering method |
JPS5810817A (en) * | 1981-07-13 | 1983-01-21 | Agency Of Ind Science & Technol | Growing method of amorphous semiconductor film |
JPS5916326A (en) * | 1982-07-19 | 1984-01-27 | Agency Of Ind Science & Technol | Manufacture of thin film |
JPS6281076A (en) * | 1985-10-03 | 1987-04-14 | Matsushita Electric Ind Co Ltd | Production of thin film |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4349972A3 (en) | 2016-02-22 | 2024-05-29 | Osaka University | Method for producing three-dimensional cell tissue |
WO2019039452A1 (en) | 2017-08-21 | 2019-02-28 | 凸版印刷株式会社 | Method for evaluating anti-cancer effect, and method for predicting effectiveness of cancer immunotherapy |
WO2019039457A1 (en) | 2017-08-21 | 2019-02-28 | 凸版印刷株式会社 | Primary culture method |
-
1975
- 1975-04-16 JP JP50046791A patent/JPS5850419B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54127879A (en) * | 1978-03-28 | 1979-10-04 | Itaru Mori | Sputtering method |
JPS5810817A (en) * | 1981-07-13 | 1983-01-21 | Agency Of Ind Science & Technol | Growing method of amorphous semiconductor film |
JPS5916326A (en) * | 1982-07-19 | 1984-01-27 | Agency Of Ind Science & Technol | Manufacture of thin film |
JPH0427689B2 (en) * | 1982-07-19 | 1992-05-12 | Kogyo Gijutsuin | |
JPS6281076A (en) * | 1985-10-03 | 1987-04-14 | Matsushita Electric Ind Co Ltd | Production of thin film |
Also Published As
Publication number | Publication date |
---|---|
JPS5850419B2 (en) | 1983-11-10 |
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