JPS51121255A - Production method for thin film with piezo-electric characteristics - Google Patents

Production method for thin film with piezo-electric characteristics

Info

Publication number
JPS51121255A
JPS51121255A JP50046791A JP4679175A JPS51121255A JP S51121255 A JPS51121255 A JP S51121255A JP 50046791 A JP50046791 A JP 50046791A JP 4679175 A JP4679175 A JP 4679175A JP S51121255 A JPS51121255 A JP S51121255A
Authority
JP
Japan
Prior art keywords
thin film
production method
piezo
electric characteristics
accurately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50046791A
Other languages
Japanese (ja)
Other versions
JPS5850419B2 (en
Inventor
Takao Toda
Kiyotaka Wasa
Kenzo Ochi
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50046791A priority Critical patent/JPS5850419B2/en
Publication of JPS51121255A publication Critical patent/JPS51121255A/en
Publication of JPS5850419B2 publication Critical patent/JPS5850419B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To provide a production method for effective practical piezoelectric thin film in which the direction of its electrical axis is accurately and easily controlled by improving composition of the electrode during the sputtering process.
COPYRIGHT: (C)1976,JPO&Japio
JP50046791A 1975-04-16 1975-04-16 Method for manufacturing piezoelectric thin film Expired JPS5850419B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50046791A JPS5850419B2 (en) 1975-04-16 1975-04-16 Method for manufacturing piezoelectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50046791A JPS5850419B2 (en) 1975-04-16 1975-04-16 Method for manufacturing piezoelectric thin film

Publications (2)

Publication Number Publication Date
JPS51121255A true JPS51121255A (en) 1976-10-23
JPS5850419B2 JPS5850419B2 (en) 1983-11-10

Family

ID=12757142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50046791A Expired JPS5850419B2 (en) 1975-04-16 1975-04-16 Method for manufacturing piezoelectric thin film

Country Status (1)

Country Link
JP (1) JPS5850419B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54127879A (en) * 1978-03-28 1979-10-04 Itaru Mori Sputtering method
JPS5810817A (en) * 1981-07-13 1983-01-21 Agency Of Ind Science & Technol Growing method of amorphous semiconductor film
JPS5916326A (en) * 1982-07-19 1984-01-27 Agency Of Ind Science & Technol Manufacture of thin film
JPS6281076A (en) * 1985-10-03 1987-04-14 Matsushita Electric Ind Co Ltd Production of thin film

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4349972A3 (en) 2016-02-22 2024-05-29 Osaka University Method for producing three-dimensional cell tissue
WO2019039452A1 (en) 2017-08-21 2019-02-28 凸版印刷株式会社 Method for evaluating anti-cancer effect, and method for predicting effectiveness of cancer immunotherapy
WO2019039457A1 (en) 2017-08-21 2019-02-28 凸版印刷株式会社 Primary culture method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54127879A (en) * 1978-03-28 1979-10-04 Itaru Mori Sputtering method
JPS5810817A (en) * 1981-07-13 1983-01-21 Agency Of Ind Science & Technol Growing method of amorphous semiconductor film
JPS5916326A (en) * 1982-07-19 1984-01-27 Agency Of Ind Science & Technol Manufacture of thin film
JPH0427689B2 (en) * 1982-07-19 1992-05-12 Kogyo Gijutsuin
JPS6281076A (en) * 1985-10-03 1987-04-14 Matsushita Electric Ind Co Ltd Production of thin film

Also Published As

Publication number Publication date
JPS5850419B2 (en) 1983-11-10

Similar Documents

Publication Publication Date Title
JPS5267295A (en) Driving method of electron optical display body
JPS5279794A (en) Piezo-vibrator unit
JPS5223001A (en) Process for elimination of formyl group
JPS51149008A (en) Magnetic recording medium manufacturing method
JPS51121255A (en) Production method for thin film with piezo-electric characteristics
JPS5380966A (en) Manufacture of electrode fdr semiconductor device
JPS528839A (en) Observation method regarding phase structural body
JPS5213364A (en) Watch cover glass
JPS5242281A (en) Production method of adhesive wire
JPS51126384A (en) A method of forming a thin film by sputtering
JPS5219975A (en) Semiconductor device
JPS5222798A (en) Polarizing method of piezoelectric porcelain
JPS5258896A (en) Production of dielectric thin film
JPS5212593A (en) Production method of shot key barrier type solid element
JPS51130205A (en) A process for producing a magnetic recording material
JPS5367396A (en) Fabrication method of piezoelectric crystal for elastic surface waveelement
JPS5361097A (en) Piezoelectric porcelain composition
JPS5313200A (en) Production method of piezo-electric thin film
JPS5226847A (en) Layer forming method for liquid crystal molecule orientation and devic e therefor
JPS5258897A (en) Production of dielectric thin film
JPS528797A (en) Liquid crystal indication unit
JPS5249796A (en) Method for manufacture of thin film tunnel element
JPS51141583A (en) Method for producing an electrode for use semiconductor units
JPS524498A (en) Method for the production of chromium oxide
JPS52119204A (en) Magnetic disc production