JPS54127879A - Sputtering method - Google Patents

Sputtering method

Info

Publication number
JPS54127879A
JPS54127879A JP3570378A JP3570378A JPS54127879A JP S54127879 A JPS54127879 A JP S54127879A JP 3570378 A JP3570378 A JP 3570378A JP 3570378 A JP3570378 A JP 3570378A JP S54127879 A JPS54127879 A JP S54127879A
Authority
JP
Japan
Prior art keywords
sputtering method
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3570378A
Other languages
Japanese (ja)
Inventor
Itaru Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP3570378A priority Critical patent/JPS54127879A/en
Publication of JPS54127879A publication Critical patent/JPS54127879A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3570378A 1978-03-28 1978-03-28 Sputtering method Pending JPS54127879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3570378A JPS54127879A (en) 1978-03-28 1978-03-28 Sputtering method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3570378A JPS54127879A (en) 1978-03-28 1978-03-28 Sputtering method

Publications (1)

Publication Number Publication Date
JPS54127879A true JPS54127879A (en) 1979-10-04

Family

ID=12449224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3570378A Pending JPS54127879A (en) 1978-03-28 1978-03-28 Sputtering method

Country Status (1)

Country Link
JP (1) JPS54127879A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141031A (en) * 1974-10-05 1976-04-06 Tomota Fukuda SETSUCHAKUZA ISOSEIBUTSU
JPS51121255A (en) * 1975-04-16 1976-10-23 Matsushita Electric Ind Co Ltd Production method for thin film with piezo-electric characteristics

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141031A (en) * 1974-10-05 1976-04-06 Tomota Fukuda SETSUCHAKUZA ISOSEIBUTSU
JPS51121255A (en) * 1975-04-16 1976-10-23 Matsushita Electric Ind Co Ltd Production method for thin film with piezo-electric characteristics

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