JPS54127879A - Sputtering method - Google Patents
Sputtering methodInfo
- Publication number
- JPS54127879A JPS54127879A JP3570378A JP3570378A JPS54127879A JP S54127879 A JPS54127879 A JP S54127879A JP 3570378 A JP3570378 A JP 3570378A JP 3570378 A JP3570378 A JP 3570378A JP S54127879 A JPS54127879 A JP S54127879A
- Authority
- JP
- Japan
- Prior art keywords
- sputtering method
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3570378A JPS54127879A (en) | 1978-03-28 | 1978-03-28 | Sputtering method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3570378A JPS54127879A (en) | 1978-03-28 | 1978-03-28 | Sputtering method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54127879A true JPS54127879A (en) | 1979-10-04 |
Family
ID=12449224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3570378A Pending JPS54127879A (en) | 1978-03-28 | 1978-03-28 | Sputtering method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54127879A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5141031A (en) * | 1974-10-05 | 1976-04-06 | Tomota Fukuda | SETSUCHAKUZA ISOSEIBUTSU |
JPS51121255A (en) * | 1975-04-16 | 1976-10-23 | Matsushita Electric Ind Co Ltd | Production method for thin film with piezo-electric characteristics |
-
1978
- 1978-03-28 JP JP3570378A patent/JPS54127879A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5141031A (en) * | 1974-10-05 | 1976-04-06 | Tomota Fukuda | SETSUCHAKUZA ISOSEIBUTSU |
JPS51121255A (en) * | 1975-04-16 | 1976-10-23 | Matsushita Electric Ind Co Ltd | Production method for thin film with piezo-electric characteristics |
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