GB2039962B - Sputtering system - Google Patents

Sputtering system

Info

Publication number
GB2039962B
GB2039962B GB7936617A GB7936617A GB2039962B GB 2039962 B GB2039962 B GB 2039962B GB 7936617 A GB7936617 A GB 7936617A GB 7936617 A GB7936617 A GB 7936617A GB 2039962 B GB2039962 B GB 2039962B
Authority
GB
United Kingdom
Prior art keywords
sputtering system
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7936617A
Other versions
GB2039962A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Ltd
Original Assignee
BOC Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Ltd filed Critical BOC Ltd
Priority to GB7936617A priority Critical patent/GB2039962B/en
Publication of GB2039962A publication Critical patent/GB2039962A/en
Application granted granted Critical
Publication of GB2039962B publication Critical patent/GB2039962B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB7936617A 1978-12-29 1979-10-22 Sputtering system Expired GB2039962B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7936617A GB2039962B (en) 1978-12-29 1979-10-22 Sputtering system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB7850369 1978-12-29
GB7936617A GB2039962B (en) 1978-12-29 1979-10-22 Sputtering system

Publications (2)

Publication Number Publication Date
GB2039962A GB2039962A (en) 1980-08-20
GB2039962B true GB2039962B (en) 1982-10-20

Family

ID=26270112

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7936617A Expired GB2039962B (en) 1978-12-29 1979-10-22 Sputtering system

Country Status (1)

Country Link
GB (1) GB2039962B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113755807B (en) * 2021-09-13 2024-02-09 苏州龙盛电子有限公司 Optical filter coating device and coating process

Also Published As

Publication number Publication date
GB2039962A (en) 1980-08-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee