JPS57118415A - Vacuum sealing method of quartz oscillator - Google Patents

Vacuum sealing method of quartz oscillator

Info

Publication number
JPS57118415A
JPS57118415A JP485481A JP485481A JPS57118415A JP S57118415 A JPS57118415 A JP S57118415A JP 485481 A JP485481 A JP 485481A JP 485481 A JP485481 A JP 485481A JP S57118415 A JPS57118415 A JP S57118415A
Authority
JP
Japan
Prior art keywords
container
quartz oscillator
hole
ceramic
sealing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP485481A
Other languages
Japanese (ja)
Inventor
Kazuhiko Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP485481A priority Critical patent/JPS57118415A/en
Publication of JPS57118415A publication Critical patent/JPS57118415A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To increase the vacuum degree within a ceramic or glass container, by evacuating a vacuum the inside of the container through a pierced hole which is drilled previously after sealing a quartz oscillator into the container. CONSTITUTION:A concave container 1 is formed by giving a drawing process and a sintering process to a ceramic green sheet. A quartz oscillator 3 is stored in the container 1, and a ceramic or glass cover 2 is joined to the container 1 in terms of a plane. A pierced hole 4 is previously drilled to the container 1 to evacuate the inside of the container 1. Then evacuation is performed in the inside of the container 1 through the hole 4 after adhering the container 1 and the cover 2 close to each other. After this, the hole 4 is sealed up with solder or indium, etc. A high vacuum degree is kept in the inside of the container 1 since a soft metal produces an extremely small amount of gas.
JP485481A 1981-01-16 1981-01-16 Vacuum sealing method of quartz oscillator Pending JPS57118415A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP485481A JPS57118415A (en) 1981-01-16 1981-01-16 Vacuum sealing method of quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP485481A JPS57118415A (en) 1981-01-16 1981-01-16 Vacuum sealing method of quartz oscillator

Publications (1)

Publication Number Publication Date
JPS57118415A true JPS57118415A (en) 1982-07-23

Family

ID=11595257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP485481A Pending JPS57118415A (en) 1981-01-16 1981-01-16 Vacuum sealing method of quartz oscillator

Country Status (1)

Country Link
JP (1) JPS57118415A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6960870B2 (en) 1997-07-29 2005-11-01 Seiko Epson Corporation Piezo-electric resonator and manufacturing method thereof
US6976295B2 (en) 1997-07-29 2005-12-20 Seiko Epson Corporation Method of manufacturing a piezoelectric device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6960870B2 (en) 1997-07-29 2005-11-01 Seiko Epson Corporation Piezo-electric resonator and manufacturing method thereof
US6976295B2 (en) 1997-07-29 2005-12-20 Seiko Epson Corporation Method of manufacturing a piezoelectric device

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