JPS5410665A - Sealing method of sealing tube for semiconductor heat treatment - Google Patents
Sealing method of sealing tube for semiconductor heat treatmentInfo
- Publication number
- JPS5410665A JPS5410665A JP7556577A JP7556577A JPS5410665A JP S5410665 A JPS5410665 A JP S5410665A JP 7556577 A JP7556577 A JP 7556577A JP 7556577 A JP7556577 A JP 7556577A JP S5410665 A JPS5410665 A JP S5410665A
- Authority
- JP
- Japan
- Prior art keywords
- sealing
- heat treatment
- tube
- semiconductor heat
- sealing tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To prevent the deformation of a glass sealing tube at the heat treatment by putting the inside of an ampoule tube under exhausted and reduced pressure condition, closing its sample inserting port and making the temperature resing portion at the time, of gas sealing small in relation to the entire aprt of the ampoule tube.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7556577A JPS5410665A (en) | 1977-06-27 | 1977-06-27 | Sealing method of sealing tube for semiconductor heat treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7556577A JPS5410665A (en) | 1977-06-27 | 1977-06-27 | Sealing method of sealing tube for semiconductor heat treatment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5410665A true JPS5410665A (en) | 1979-01-26 |
Family
ID=13579822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7556577A Pending JPS5410665A (en) | 1977-06-27 | 1977-06-27 | Sealing method of sealing tube for semiconductor heat treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5410665A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5128424A (en) * | 1991-07-18 | 1992-07-07 | Japan Synthetic Rubber Co., Ltd. | Epoxy resin, mercato curing agent and polysulfide adduct |
-
1977
- 1977-06-27 JP JP7556577A patent/JPS5410665A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5128424A (en) * | 1991-07-18 | 1992-07-07 | Japan Synthetic Rubber Co., Ltd. | Epoxy resin, mercato curing agent and polysulfide adduct |
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