CH625911A5 - - Google Patents

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Publication number
CH625911A5
CH625911A5 CH116078A CH116078A CH625911A5 CH 625911 A5 CH625911 A5 CH 625911A5 CH 116078 A CH116078 A CH 116078A CH 116078 A CH116078 A CH 116078A CH 625911 A5 CH625911 A5 CH 625911A5
Authority
CH
Switzerland
Prior art keywords
coating
crystalline
piezoelectric
zinc oxide
source material
Prior art date
Application number
CH116078A
Other languages
German (de)
English (en)
Inventor
Toshio Ogawa
Tasuku Mashio
Hiroshi Nishiyama
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of CH625911A5 publication Critical patent/CH625911A5/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/07Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CH116078A 1977-02-02 1978-02-02 CH625911A5 (ar)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1105977A JPS5396494A (en) 1977-02-02 1977-02-02 Piezooelectric crystal film of zinc oxide

Publications (1)

Publication Number Publication Date
CH625911A5 true CH625911A5 (ar) 1981-10-15

Family

ID=11767432

Family Applications (1)

Application Number Title Priority Date Filing Date
CH116078A CH625911A5 (ar) 1977-02-02 1978-02-02

Country Status (7)

Country Link
US (1) US4139678A (ar)
JP (1) JPS5396494A (ar)
CH (1) CH625911A5 (ar)
DE (1) DE2803999B2 (ar)
FR (1) FR2379495A1 (ar)
GB (1) GB1552755A (ar)
NL (1) NL183688C (ar)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4182793A (en) * 1977-06-09 1980-01-08 Murata Manufacturing Co., Ltd. Piezoelectric crystalline film of zinc oxide
JPS5831743B2 (ja) * 1977-09-17 1983-07-08 株式会社村田製作所 酸化亜鉛の圧電結晶膜
JPS54114484A (en) * 1978-02-27 1979-09-06 Toko Inc Production of piezoelectric thin layer
US5393444A (en) * 1992-09-08 1995-02-28 Ngk Insulators, Ltd. Piezoelectric semiconductor
JPH08105871A (ja) * 1994-10-04 1996-04-23 Ngk Insulators Ltd 音響電気効果型超音波送受信装置及び超音波送受信方法
CN100595319C (zh) * 2008-01-07 2010-03-24 桂林电子科技大学 ZnO:Bi光电薄膜及其制备方法
US9816318B2 (en) 2015-12-11 2017-11-14 David A. Johnson Powered ladder for large industrial vehicles

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3470100A (en) * 1966-01-25 1969-09-30 Bell Telephone Labor Inc Growth of piezoelectric bismuth oxide
US3766041A (en) * 1970-09-29 1973-10-16 Matsushita Electric Ind Co Ltd Method of producing piezoelectric thin films by cathodic sputtering
US3846649A (en) * 1973-06-18 1974-11-05 Rca Corp Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture
US3988232A (en) * 1974-06-25 1976-10-26 Matsushita Electric Industrial Co., Ltd. Method of making crystal films

Also Published As

Publication number Publication date
JPS5396494A (en) 1978-08-23
DE2803999C3 (ar) 1980-12-04
DE2803999A1 (de) 1978-08-03
GB1552755A (en) 1979-09-19
FR2379495A1 (fr) 1978-09-01
JPS572194B2 (ar) 1982-01-14
NL7801205A (nl) 1978-08-04
FR2379495B1 (ar) 1983-03-25
NL183688C (nl) 1988-12-16
NL183688B (nl) 1988-07-18
US4139678A (en) 1979-02-13
DE2803999B2 (de) 1980-04-10

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Legal Events

Date Code Title Description
PL Patent ceased