CH620387A5 - - Google Patents

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Publication number
CH620387A5
CH620387A5 CH256177A CH256177A CH620387A5 CH 620387 A5 CH620387 A5 CH 620387A5 CH 256177 A CH256177 A CH 256177A CH 256177 A CH256177 A CH 256177A CH 620387 A5 CH620387 A5 CH 620387A5
Authority
CH
Switzerland
Prior art keywords
pins
block
base plate
ball
pair
Prior art date
Application number
CH256177A
Other languages
German (de)
English (en)
Inventor
Frank M Kibbisch
Original Assignee
Optical Coating Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Coating Laboratory Inc filed Critical Optical Coating Laboratory Inc
Publication of CH620387A5 publication Critical patent/CH620387A5/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH256177A 1976-03-01 1977-03-01 CH620387A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/662,738 US4027093A (en) 1976-03-01 1976-03-01 Ingot gripper assembly

Publications (1)

Publication Number Publication Date
CH620387A5 true CH620387A5 (xx) 1980-11-28

Family

ID=24658993

Family Applications (1)

Application Number Title Priority Date Filing Date
CH256177A CH620387A5 (xx) 1976-03-01 1977-03-01

Country Status (4)

Country Link
US (1) US4027093A (xx)
CA (1) CA1090557A (xx)
CH (1) CH620387A5 (xx)
DE (1) DE2708662A1 (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5905753A (en) * 1997-06-23 1999-05-18 The Boc Group, Inc. Free-standing rotational rod-fed source
CN106868457B (zh) * 2017-03-22 2019-03-12 合肥鑫晟光电科技有限公司 一种蒸镀组件及蒸镀设备
CN108163558A (zh) * 2017-12-27 2018-06-15 株洲火炬工业炉有限责任公司 一种金属锭夹具

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3215974A (en) * 1963-01-22 1965-11-02 Consarc Corp Electrode stub clamp
US3293347A (en) * 1965-10-24 1966-12-20 Consarc Corp Electrode stub clamp
US3619840A (en) * 1969-07-10 1971-11-16 Optical Coating Laboratory Inc Electron beam evaporation source
ZA7173B (en) * 1970-01-09 1971-10-27 Knapsack Ag Safety device for preventing the return movement of electrodes in electric furnaces of similar apparatuses

Also Published As

Publication number Publication date
CA1090557A (en) 1980-12-02
DE2708662A1 (de) 1977-09-15
DE2708662C2 (xx) 1987-02-26
US4027093A (en) 1977-05-31

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Legal Events

Date Code Title Description
PL Patent ceased