CH620387A5 - - Google Patents
Download PDFInfo
- Publication number
- CH620387A5 CH620387A5 CH256177A CH256177A CH620387A5 CH 620387 A5 CH620387 A5 CH 620387A5 CH 256177 A CH256177 A CH 256177A CH 256177 A CH256177 A CH 256177A CH 620387 A5 CH620387 A5 CH 620387A5
- Authority
- CH
- Switzerland
- Prior art keywords
- pins
- block
- base plate
- ball
- pair
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/662,738 US4027093A (en) | 1976-03-01 | 1976-03-01 | Ingot gripper assembly |
Publications (1)
Publication Number | Publication Date |
---|---|
CH620387A5 true CH620387A5 (pl) | 1980-11-28 |
Family
ID=24658993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH256177A CH620387A5 (pl) | 1976-03-01 | 1977-03-01 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4027093A (pl) |
CA (1) | CA1090557A (pl) |
CH (1) | CH620387A5 (pl) |
DE (1) | DE2708662C2 (pl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5905753A (en) * | 1997-06-23 | 1999-05-18 | The Boc Group, Inc. | Free-standing rotational rod-fed source |
CN106868457B (zh) * | 2017-03-22 | 2019-03-12 | 合肥鑫晟光电科技有限公司 | 一种蒸镀组件及蒸镀设备 |
CN108163558A (zh) * | 2017-12-27 | 2018-06-15 | 株洲火炬工业炉有限责任公司 | 一种金属锭夹具 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3215974A (en) * | 1963-01-22 | 1965-11-02 | Consarc Corp | Electrode stub clamp |
US3293347A (en) * | 1965-10-24 | 1966-12-20 | Consarc Corp | Electrode stub clamp |
US3619840A (en) * | 1969-07-10 | 1971-11-16 | Optical Coating Laboratory Inc | Electron beam evaporation source |
ZA7173B (en) * | 1970-01-09 | 1971-10-27 | Knapsack Ag | Safety device for preventing the return movement of electrodes in electric furnaces of similar apparatuses |
-
1976
- 1976-03-01 US US05/662,738 patent/US4027093A/en not_active Expired - Lifetime
-
1977
- 1977-02-28 DE DE2708662A patent/DE2708662C2/de not_active Expired
- 1977-02-28 CA CA272,788A patent/CA1090557A/en not_active Expired
- 1977-03-01 CH CH256177A patent/CH620387A5/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE2708662C2 (de) | 1987-02-26 |
CA1090557A (en) | 1980-12-02 |
DE2708662A1 (de) | 1977-09-15 |
US4027093A (en) | 1977-05-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |