CH362156A - Einrichtung zur Untersuchung von Objekten, mit einem Elektronenmikroskop - Google Patents
Einrichtung zur Untersuchung von Objekten, mit einem ElektronenmikroskopInfo
- Publication number
- CH362156A CH362156A CH362156DA CH362156A CH 362156 A CH362156 A CH 362156A CH 362156D A CH362156D A CH 362156DA CH 362156 A CH362156 A CH 362156A
- Authority
- CH
- Switzerland
- Prior art keywords
- electron microscope
- examining objects
- examining
- objects
- microscope
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEL28698A DE1058166B (de) | 1957-09-26 | 1957-09-26 | Elektronenmikroskop |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH362156A true CH362156A (de) | 1962-05-31 |
Family
ID=7264616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH362156D CH362156A (de) | 1957-09-26 | 1958-09-24 | Einrichtung zur Untersuchung von Objekten, mit einem Elektronenmikroskop |
Country Status (4)
| Country | Link |
|---|---|
| CH (1) | CH362156A (de) |
| DE (1) | DE1058166B (de) |
| GB (1) | GB899291A (de) |
| NL (2) | NL231278A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3166670A (en) * | 1961-09-29 | 1965-01-19 | Euratom | Specimen analyzing system for use with an electron probe microanalyzer |
| GB1148646A (en) * | 1967-02-16 | 1969-04-16 | Cambridge Instr Co Ltd | X-ray microanalysers |
| JPS5758300U (de) * | 1980-09-22 | 1982-04-06 | ||
| DE102009008063A1 (de) | 2009-02-09 | 2010-08-19 | Carl Zeiss Nts Gmbh | Teilchenstrahlsystem |
| DE102009036701A1 (de) | 2009-08-07 | 2011-03-03 | Carl Zeiss Nts Gmbh | Teilchenstrahlsystem und Untersuchungsverfahren hierzu |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE679330C (de) * | 1932-03-16 | 1939-08-02 | Fritz Houtermans Dr | Elektronenmikroskop, bei dem Elektronen aussendende Substanzen in vergroessertem Massstabe abgebildet werden |
| DE940615C (de) * | 1937-10-28 | 1956-03-22 | Hellmut Dr Med Habil Anton | Verfahren und Vorrichtung zur roentgenmikroskopischen Darstellung der Struktur mikroskopischer Objekte |
| DE917440C (de) * | 1941-01-05 | 1954-09-02 | Manfred Von Ardenne | Elektronen-UEbermikroskop mit Vorrichtung zur Herstellung von Feinstrahl-Elektronenbeugungsdiagrammen |
| DE924522C (de) * | 1941-05-12 | 1955-03-03 | Manfred Von Ardenne | Elektronen-UEbermikroskop mit Vorrichtung zur Herstellung von Feinstrahl-Elektronenbeugungsdiagrammen |
-
0
- NL NL113116D patent/NL113116C/xx active
- NL NL231278D patent/NL231278A/xx unknown
-
1957
- 1957-09-26 DE DEL28698A patent/DE1058166B/de active Pending
-
1958
- 1958-09-24 CH CH362156D patent/CH362156A/de unknown
- 1958-09-26 GB GB3084258A patent/GB899291A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL231278A (de) | |
| DE1058166B (de) | 1959-05-27 |
| NL113116C (de) | |
| GB899291A (en) | 1962-06-20 |
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