NL231278A - - Google Patents

Info

Publication number
NL231278A
NL231278A NL231278DA NL231278A NL 231278 A NL231278 A NL 231278A NL 231278D A NL231278D A NL 231278DA NL 231278 A NL231278 A NL 231278A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL231278A publication Critical patent/NL231278A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL231278D 1957-09-26 NL231278A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL28698A DE1058166B (de) 1957-09-26 1957-09-26 Elektronenmikroskop

Publications (1)

Publication Number Publication Date
NL231278A true NL231278A (de)

Family

ID=7264616

Family Applications (2)

Application Number Title Priority Date Filing Date
NL231278D NL231278A (de) 1957-09-26
NL113116D NL113116C (de) 1957-09-26

Family Applications After (1)

Application Number Title Priority Date Filing Date
NL113116D NL113116C (de) 1957-09-26

Country Status (4)

Country Link
CH (1) CH362156A (de)
DE (1) DE1058166B (de)
GB (1) GB899291A (de)
NL (2) NL113116C (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3166670A (en) * 1961-09-29 1965-01-19 Euratom Specimen analyzing system for use with an electron probe microanalyzer
GB1148646A (en) * 1967-02-16 1969-04-16 Cambridge Instr Co Ltd X-ray microanalysers
JPS5758300U (de) * 1980-09-22 1982-04-06
DE102009008063A1 (de) 2009-02-09 2010-08-19 Carl Zeiss Nts Gmbh Teilchenstrahlsystem
DE102009036701A1 (de) 2009-08-07 2011-03-03 Carl Zeiss Nts Gmbh Teilchenstrahlsystem und Untersuchungsverfahren hierzu

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE679330C (de) * 1932-03-16 1939-08-02 Fritz Houtermans Dr Elektronenmikroskop, bei dem Elektronen aussendende Substanzen in vergroessertem Massstabe abgebildet werden
DE940615C (de) * 1937-10-28 1956-03-22 Hellmut Dr Med Habil Anton Verfahren und Vorrichtung zur roentgenmikroskopischen Darstellung der Struktur mikroskopischer Objekte
DE917440C (de) * 1941-01-05 1954-09-02 Manfred Von Ardenne Elektronen-UEbermikroskop mit Vorrichtung zur Herstellung von Feinstrahl-Elektronenbeugungsdiagrammen
DE924522C (de) * 1941-05-12 1955-03-03 Manfred Von Ardenne Elektronen-UEbermikroskop mit Vorrichtung zur Herstellung von Feinstrahl-Elektronenbeugungsdiagrammen

Also Published As

Publication number Publication date
CH362156A (de) 1962-05-31
GB899291A (en) 1962-06-20
DE1058166B (de) 1959-05-27
NL113116C (de)

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