CH362772A - Elektronenmikroskop zur direkten Abbildung von Oberflächen - Google Patents
Elektronenmikroskop zur direkten Abbildung von OberflächenInfo
- Publication number
- CH362772A CH362772A CH6376258A CH6376258A CH362772A CH 362772 A CH362772 A CH 362772A CH 6376258 A CH6376258 A CH 6376258A CH 6376258 A CH6376258 A CH 6376258A CH 362772 A CH362772 A CH 362772A
- Authority
- CH
- Switzerland
- Prior art keywords
- electron microscope
- direct imaging
- imaging
- direct
- microscope
- Prior art date
Links
- 238000003384 imaging method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEL28560A DE1133841B (de) | 1957-09-11 | 1957-09-11 | Elektronenmikroskop zur direkten Abbildung von Oberflaechen durch Sekundaerelektronen, Verfahren zur Untersuchung von Nichtleitern oder Halbleitern und Anordnung zur Durchfuehrung des Verfahrens |
Publications (1)
Publication Number | Publication Date |
---|---|
CH362772A true CH362772A (de) | 1962-06-30 |
Family
ID=7264571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH6376258A CH362772A (de) | 1957-09-11 | 1958-09-09 | Elektronenmikroskop zur direkten Abbildung von Oberflächen |
Country Status (4)
Country | Link |
---|---|
US (1) | US2928943A (de) |
CH (1) | CH362772A (de) |
DE (1) | DE1133841B (de) |
FR (1) | FR1227224A (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3023343A (en) * | 1960-01-11 | 1962-02-27 | Ibm | Information recording and display apparatus |
GB918297A (en) * | 1960-04-07 | 1963-02-13 | William Charles Nixon | Improvements in electron microscopes |
US3129353A (en) * | 1960-05-17 | 1964-04-14 | Mrs Jennings | Multiple radiation source microscope |
CH391912A (de) * | 1961-11-09 | 1965-05-15 | Trueb Taeuber & Co Ag | Verfahren zur Sichtbarmachung und Aufnahme von elektronenoptischen Bildern |
US3221133A (en) * | 1963-04-02 | 1965-11-30 | Japan Electron Optics Lab Co L | Electron microscope with means for treating and observing specimens |
DE1299498B (de) * | 1964-07-24 | 1969-07-17 | Steigerwald Strahltech | Vorrichtung zur UEberwachung des Strahlauftreffbereichs in Korpuskularstrahl-Bearbeitungsgeraeten |
US3467057A (en) * | 1966-07-27 | 1969-09-16 | Hitachi Ltd | Electron beam evaporator |
US3472997A (en) * | 1966-08-26 | 1969-10-14 | Us Navy | Secondary electron collection system |
US3463900A (en) * | 1967-07-10 | 1969-08-26 | Gen Electric | Electron beam welding apparatus |
US3525013A (en) * | 1968-07-26 | 1970-08-18 | Ibm | Metallic ion source including plurality of electron guns |
US3731095A (en) * | 1971-04-01 | 1973-05-01 | Hitachi Ltd | Electron gun device of field emission type |
DE2223367C3 (de) * | 1972-05-12 | 1978-11-30 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Mikrostrahlsonde zur quantitativen Erfassung von geladenen Sekundärteilchen |
US5063293A (en) * | 1987-11-09 | 1991-11-05 | The University Of Michigan | Positron microscopy |
US4864131A (en) * | 1987-11-09 | 1989-09-05 | The University Of Michigan | Positron microscopy |
US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
US5362964A (en) * | 1993-07-30 | 1994-11-08 | Electroscan Corporation | Environmental scanning electron microscope |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE679330C (de) * | 1932-03-16 | 1939-08-02 | Fritz Houtermans Dr | Elektronenmikroskop, bei dem Elektronen aussendende Substanzen in vergroessertem Massstabe abgebildet werden |
DE929744C (de) * | 1939-07-13 | 1955-07-04 | Siemens Ag | Einschleusvorrichtung fuer Korpuskularstrahlapparate |
US2510349A (en) * | 1948-11-01 | 1950-06-06 | Rca Corp | Rod-type specimen stage for electron optical instruments |
US2499019A (en) * | 1949-01-29 | 1950-02-28 | Rca Corp | Adjustable specimen support for electron-optical instruments |
DE1006983B (de) * | 1955-02-01 | 1957-04-25 | Leitz Ernst Gmbh | Verfahren und Vorrichtung zur uebermikroskopischen Abbildung mittels eines Jonenmikroskops |
-
1957
- 1957-09-11 DE DEL28560A patent/DE1133841B/de active Pending
-
1958
- 1958-09-05 US US759162A patent/US2928943A/en not_active Expired - Lifetime
- 1958-09-09 CH CH6376258A patent/CH362772A/de unknown
- 1958-09-09 FR FR774088A patent/FR1227224A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR1227224A (fr) | 1960-08-19 |
DE1133841B (de) | 1962-07-26 |
US2928943A (en) | 1960-03-15 |
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