CH362156A - Device for examining objects, with an electron microscope - Google Patents

Device for examining objects, with an electron microscope

Info

Publication number
CH362156A
CH362156A CH362156DA CH362156A CH 362156 A CH362156 A CH 362156A CH 362156D A CH362156D A CH 362156DA CH 362156 A CH362156 A CH 362156A
Authority
CH
Switzerland
Prior art keywords
electron microscope
examining objects
examining
objects
microscope
Prior art date
Application number
Other languages
German (de)
Inventor
Nat Steinemann Samuel Dr Sc
Dinichert Paul Dr Phys
Original Assignee
Suisse Horlogerie Rech Lab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Horlogerie Rech Lab filed Critical Suisse Horlogerie Rech Lab
Publication of CH362156A publication Critical patent/CH362156A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
CH362156D 1957-09-26 1958-09-24 Device for examining objects, with an electron microscope CH362156A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL28698A DE1058166B (en) 1957-09-26 1957-09-26 electron microscope

Publications (1)

Publication Number Publication Date
CH362156A true CH362156A (en) 1962-05-31

Family

ID=7264616

Family Applications (1)

Application Number Title Priority Date Filing Date
CH362156D CH362156A (en) 1957-09-26 1958-09-24 Device for examining objects, with an electron microscope

Country Status (4)

Country Link
CH (1) CH362156A (en)
DE (1) DE1058166B (en)
GB (1) GB899291A (en)
NL (2) NL113116C (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3166670A (en) * 1961-09-29 1965-01-19 Euratom Specimen analyzing system for use with an electron probe microanalyzer
GB1148646A (en) * 1967-02-16 1969-04-16 Cambridge Instr Co Ltd X-ray microanalysers
JPS5758300U (en) * 1980-09-22 1982-04-06
DE102009008063A1 (en) 2009-02-09 2010-08-19 Carl Zeiss Nts Gmbh particle beam
DE102009036701A1 (en) 2009-08-07 2011-03-03 Carl Zeiss Nts Gmbh Particle beam system and investigation method for this purpose

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE679330C (en) * 1932-03-16 1939-08-02 Fritz Houtermans Dr Electron microscope, in which substances that emit electrons are shown on a larger scale
DE940615C (en) * 1937-10-28 1956-03-22 Hellmut Dr Med Habil Anton Method and device for the X-ray microscopic representation of the structure of microscopic objects
DE917440C (en) * 1941-01-05 1954-09-02 Manfred Von Ardenne Electron microscope with device for the production of fine-beam electron diffraction diagrams
DE924522C (en) * 1941-05-12 1955-03-03 Manfred Von Ardenne Electron microscope with device for the production of fine-beam electron diffraction diagrams

Also Published As

Publication number Publication date
GB899291A (en) 1962-06-20
DE1058166B (en) 1959-05-27
NL113116C (en)
NL231278A (en)

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