CA971832A - Method of developing a dielectric pattern on a semiconductor surface using a two-component developer - Google Patents

Method of developing a dielectric pattern on a semiconductor surface using a two-component developer

Info

Publication number
CA971832A
CA971832A CA152,813A CA152813A CA971832A CA 971832 A CA971832 A CA 971832A CA 152813 A CA152813 A CA 152813A CA 971832 A CA971832 A CA 971832A
Authority
CA
Canada
Prior art keywords
developing
component developer
semiconductor surface
dielectric pattern
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA152,813A
Other versions
CA152813S (en
Inventor
Alwin S. Clements
Kenneth A. Metcalfe
Clive W. Wilson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth of Australia
Original Assignee
Commonwealth of Australia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth of Australia filed Critical Commonwealth of Australia
Application granted granted Critical
Publication of CA971832A publication Critical patent/CA971832A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G13/00Electrographic processes using a charge pattern
    • G03G13/06Developing
    • G03G13/10Developing using a liquid developer, e.g. liquid suspension
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G13/00Electrographic processes using a charge pattern
    • G03G13/06Developing
    • G03G13/08Developing using a solid developer, e.g. powder developer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Wet Developing In Electrophotography (AREA)
  • Dry Development In Electrophotography (AREA)
CA152,813A 1971-09-30 1972-09-28 Method of developing a dielectric pattern on a semiconductor surface using a two-component developer Expired CA971832A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU648071 1971-09-30

Publications (1)

Publication Number Publication Date
CA971832A true CA971832A (en) 1975-07-29

Family

ID=3697021

Family Applications (1)

Application Number Title Priority Date Filing Date
CA152,813A Expired CA971832A (en) 1971-09-30 1972-09-28 Method of developing a dielectric pattern on a semiconductor surface using a two-component developer

Country Status (8)

Country Link
JP (1) JPS4858837A (en)
BE (1) BE789561A (en)
CA (1) CA971832A (en)
DE (1) DE2248252A1 (en)
FR (1) FR2250446A5 (en)
GB (1) GB1401642A (en)
IT (1) IT975134B (en)
SE (1) SE376493B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137345A (en) * 1978-04-18 1979-10-25 Ricoh Co Ltd Development for dichronic zerography
JPS55124156A (en) * 1979-03-19 1980-09-25 Ricoh Co Ltd Two-color developing method

Also Published As

Publication number Publication date
DE2248252A1 (en) 1973-05-30
JPS4858837A (en) 1973-08-17
IT975134B (en) 1974-07-20
GB1401642A (en) 1975-07-16
FR2250446A5 (en) 1975-05-30
SE376493B (en) 1975-05-26
BE789561A (en) 1973-01-15

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