CA935364A - Method of etching a polyimide surface - Google Patents

Method of etching a polyimide surface

Info

Publication number
CA935364A
CA935364A CA132034A CA132034A CA935364A CA 935364 A CA935364 A CA 935364A CA 132034 A CA132034 A CA 132034A CA 132034 A CA132034 A CA 132034A CA 935364 A CA935364 A CA 935364A
Authority
CA
Canada
Prior art keywords
etching
polyimide surface
polyimide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA132034A
Other versions
CA132034S (en
Inventor
A. Deangelo Michael
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA935364A publication Critical patent/CA935364A/en
Expired legal-status Critical Current

Links

CA132034A 1971-06-14 1972-01-10 Method of etching a polyimide surface Expired CA935364A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15279271A 1971-06-14 1971-06-14

Publications (1)

Publication Number Publication Date
CA935364A true CA935364A (en) 1973-10-16

Family

ID=22544464

Family Applications (1)

Application Number Title Priority Date Filing Date
CA132034A Expired CA935364A (en) 1971-06-14 1972-01-10 Method of etching a polyimide surface

Country Status (1)

Country Link
CA (1) CA935364A (en)

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