CA966591A - Method and apparatus for contouring the surface of thin elements - Google Patents

Method and apparatus for contouring the surface of thin elements

Info

Publication number
CA966591A
CA966591A CA162,721A CA162721A CA966591A CA 966591 A CA966591 A CA 966591A CA 162721 A CA162721 A CA 162721A CA 966591 A CA966591 A CA 966591A
Authority
CA
Canada
Prior art keywords
contouring
thin elements
thin
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA162,721A
Other languages
English (en)
Other versions
CA162721S (en
Inventor
Henri A. Khoury
Hans R. Rottmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA966591A publication Critical patent/CA966591A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S264/00—Plastic and nonmetallic article shaping or treating: processes
    • Y10S264/78—Processes of molding using vacuum

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CA162,721A 1972-02-02 1973-01-29 Method and apparatus for contouring the surface of thin elements Expired CA966591A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22368172A 1972-02-02 1972-02-02

Publications (1)

Publication Number Publication Date
CA966591A true CA966591A (en) 1975-04-22

Family

ID=22837573

Family Applications (1)

Application Number Title Priority Date Filing Date
CA162,721A Expired CA966591A (en) 1972-02-02 1973-01-29 Method and apparatus for contouring the surface of thin elements

Country Status (8)

Country Link
US (1) US3729966A (fr)
JP (1) JPS5723418B2 (fr)
CA (1) CA966591A (fr)
CH (1) CH542666A (fr)
FR (1) FR2170279B1 (fr)
GB (1) GB1371023A (fr)
IT (1) IT978352B (fr)
NL (1) NL7300924A (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3853313A (en) * 1972-11-24 1974-12-10 Ibm Wafer interlocking transport system
US3786660A (en) * 1972-11-24 1974-01-22 Ibm Wafer interlocking transport system
US4093378A (en) * 1976-11-01 1978-06-06 International Business Machines Corporation Alignment apparatus
JPS5647946Y2 (fr) * 1976-11-26 1981-11-10
JPS54146580A (en) * 1978-05-09 1979-11-15 Nippon Telegr & Teleph Corp <Ntt> Thin plate flattening correction mechanism
JPS5612725A (en) * 1979-07-11 1981-02-07 Hitachi Ltd Method and apparatus for setting position of wafer in projection aligner
DE2905635C2 (de) * 1979-02-14 1987-01-22 Perkin-Elmer Censor Anstalt, Vaduz Einrichtung zum Positionieren eines Werkstückes in Z-Richtung beim Projektionskopieren
JPS5772323A (en) * 1980-10-23 1982-05-06 Hitachi Ltd Thin plate flattening equipment
JPS56130738A (en) * 1980-03-19 1981-10-13 Hitachi Ltd Method and device for exposure
JPS5734336A (en) * 1980-08-11 1982-02-24 Hitachi Ltd Exposure device
US4344160A (en) * 1980-05-02 1982-08-10 The Perkin-Elmer Corporation Automatic wafer focusing and flattening system
JPS5732629A (en) * 1980-08-07 1982-02-22 Seiko Epson Corp Mask aligner
JPS6144429Y2 (fr) * 1980-08-13 1986-12-15
JPS5787129A (en) * 1980-11-19 1982-05-31 Nec Corp Exposure device
JPS57205728A (en) * 1981-06-15 1982-12-16 Fujitsu Ltd Exposure device
JPS5815237A (ja) * 1981-07-21 1983-01-28 Seiko Epson Corp 半導体製造装置
JPS5867026A (ja) * 1981-10-19 1983-04-21 Hitachi Ltd ステップアンドリピート方式の露光装置
JPS58156937A (ja) * 1982-03-12 1983-09-19 Hitachi Ltd 露光装置
US4505142A (en) * 1983-08-12 1985-03-19 Haskel, Inc. Flexible high pressure conduit and hydraulic tool for swaging
US4506184A (en) * 1984-01-10 1985-03-19 Varian Associates, Inc. Deformable chuck driven by piezoelectric means
US4607525A (en) * 1984-10-09 1986-08-26 General Signal Corporation Height measuring system
JPS611019A (ja) * 1985-05-13 1986-01-07 Hitachi Ltd 露光方法
JPS611020A (ja) * 1985-05-13 1986-01-07 Hitachi Ltd 露光装置
US5115545A (en) * 1989-03-28 1992-05-26 Matsushita Electric Industrial Co., Ltd. Apparatus for connecting semiconductor devices to wiring boards
US5319570A (en) * 1991-10-09 1994-06-07 International Business Machines Corporation Control of large scale topography on silicon wafers
KR100568032B1 (ko) * 2003-06-24 2006-04-05 동부아남반도체 주식회사 포토레지스트 코팅불량 감지방법 및 그 검출장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3180011A (en) * 1960-09-01 1965-04-27 Olin Mathieson Hollow article manufacture by fluid pressure
US3109264A (en) * 1961-07-06 1963-11-05 Western Electric Co Adjustable air gauge for controlling the operations of machines
US3244779A (en) * 1962-06-29 1966-04-05 Levey John Selective heating and drawing of plastics
US3496744A (en) * 1966-02-05 1970-02-24 Sumitomo Light Metal Ind Method and apparatus for controlling the contours of rolling mill rolls to obtain metal sheet or strip of superior flatness
FR1534439A (fr) * 1966-08-19 1968-07-26 Yawata Iron & Steel Co Appareil pour la mesure d'un déplacement sans pièce de contact
US3487133A (en) * 1967-02-20 1969-12-30 John Lindsay Method for making relief maps
BE704898A (fr) * 1967-10-10 1968-02-15
US3599288A (en) * 1969-01-23 1971-08-17 Lab For Electronics Inc Scan average memory control system
DE1953900A1 (de) * 1969-10-25 1971-05-27 Licentia Gmbh Vorrichtung zur zwischenzeitlichen Halterung von zu bearbeitenden Gegenstaenden unterschiedlicher Groesse

Also Published As

Publication number Publication date
JPS5723418B2 (fr) 1982-05-18
GB1371023A (en) 1974-10-23
DE2304489A1 (de) 1973-08-16
FR2170279A1 (fr) 1973-09-14
IT978352B (it) 1974-09-20
FR2170279B1 (fr) 1976-04-30
NL7300924A (fr) 1973-08-06
JPS4888871A (fr) 1973-11-21
DE2304489B2 (de) 1975-07-17
CH542666A (de) 1973-10-15
US3729966A (en) 1973-05-01

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