JPS6144429Y2 - - Google Patents

Info

Publication number
JPS6144429Y2
JPS6144429Y2 JP1980113854U JP11385480U JPS6144429Y2 JP S6144429 Y2 JPS6144429 Y2 JP S6144429Y2 JP 1980113854 U JP1980113854 U JP 1980113854U JP 11385480 U JP11385480 U JP 11385480U JP S6144429 Y2 JPS6144429 Y2 JP S6144429Y2
Authority
JP
Japan
Prior art keywords
wafer
moving block
mounting table
pivot shaft
fulcrum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980113854U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5737246U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980113854U priority Critical patent/JPS6144429Y2/ja
Publication of JPS5737246U publication Critical patent/JPS5737246U/ja
Application granted granted Critical
Publication of JPS6144429Y2 publication Critical patent/JPS6144429Y2/ja
Expired legal-status Critical Current

Links

JP1980113854U 1980-08-13 1980-08-13 Expired JPS6144429Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980113854U JPS6144429Y2 (fr) 1980-08-13 1980-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980113854U JPS6144429Y2 (fr) 1980-08-13 1980-08-13

Publications (2)

Publication Number Publication Date
JPS5737246U JPS5737246U (fr) 1982-02-27
JPS6144429Y2 true JPS6144429Y2 (fr) 1986-12-15

Family

ID=29474857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980113854U Expired JPS6144429Y2 (fr) 1980-08-13 1980-08-13

Country Status (1)

Country Link
JP (1) JPS6144429Y2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60109226A (ja) * 1983-11-18 1985-06-14 Canon Inc 平面位置合わせ装置
JPS64177U (fr) * 1987-06-16 1989-01-05

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888871A (fr) * 1972-02-02 1973-11-21
JPS4922868A (fr) * 1972-06-20 1974-02-28
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888871A (fr) * 1972-02-02 1973-11-21
JPS4922868A (fr) * 1972-06-20 1974-02-28
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method

Also Published As

Publication number Publication date
JPS5737246U (fr) 1982-02-27

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