CA951341A - Semiconductor wafer set feeding system - Google Patents

Semiconductor wafer set feeding system

Info

Publication number
CA951341A
CA951341A CA060,846,A CA60846A CA951341A CA 951341 A CA951341 A CA 951341A CA 60846 A CA60846 A CA 60846A CA 951341 A CA951341 A CA 951341A
Authority
CA
Canada
Prior art keywords
semiconductor wafer
feeding system
wafer set
set feeding
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA060,846,A
Other languages
English (en)
Inventor
Frank E. Boerger
Carlo Nuccio
Charles A. Rosboschil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA951341A publication Critical patent/CA951341A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G59/00—De-stacking of articles
    • B65G59/06—De-stacking from the bottom of the stack
    • B65G59/061—De-stacking from the bottom of the stack articles being separated substantially along the axis of the stack
    • B65G59/062—De-stacking from the bottom of the stack articles being separated substantially along the axis of the stack by means of reciprocating or oscillating escapement-like mechanisms

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • De-Stacking Of Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
CA060,846,A 1968-09-26 1969-09-02 Semiconductor wafer set feeding system Expired CA951341A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US76289668A 1968-09-26 1968-09-26

Publications (1)

Publication Number Publication Date
CA951341A true CA951341A (en) 1974-07-16

Family

ID=25066319

Family Applications (1)

Application Number Title Priority Date Filing Date
CA060,846,A Expired CA951341A (en) 1968-09-26 1969-09-02 Semiconductor wafer set feeding system

Country Status (6)

Country Link
US (1) US3625384A (fr)
JP (1) JPS4936151B1 (fr)
CA (1) CA951341A (fr)
DE (1) DE1948425C3 (fr)
FR (1) FR2018893A1 (fr)
GB (1) GB1265345A (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6076652A (en) 1971-04-16 2000-06-20 Texas Instruments Incorporated Assembly line system and apparatus controlling transfer of a workpiece
US3776405A (en) * 1972-01-24 1973-12-04 Eastman Kodak Co Apparatus for unloading cartridges from trays
US3920152A (en) * 1974-05-31 1975-11-18 Walter A Shields Receptacle unstacking and transporting device
CA1044379A (fr) * 1974-12-28 1978-12-12 Sony Corporation Dispositif de deplacement de pastilles
US3976208A (en) * 1975-02-03 1976-08-24 The Quaker Oats Company Apparatus for providing endless succession of compartmented trays
GB2028283B (en) * 1978-07-03 1982-08-11 Honeywell Inf Systems Assembling apparatus for sheet like articles
US5024747A (en) * 1979-12-21 1991-06-18 Varian Associates, Inc. Wafer coating system
US4756815A (en) * 1979-12-21 1988-07-12 Varian Associates, Inc. Wafer coating system
US4647266A (en) * 1979-12-21 1987-03-03 Varian Associates, Inc. Wafer coating system
US4599026A (en) * 1985-02-26 1986-07-08 Amp Incorporated Apparatus for providing a continuous supply of workpieces
US5040484A (en) * 1987-05-04 1991-08-20 Varian Associates, Inc. Apparatus for retaining wafers
US4817556A (en) * 1987-05-04 1989-04-04 Varian Associates, Inc. Apparatus for retaining wafers
GB2207124B (en) * 1987-07-16 1991-11-20 Somar Corp Pallet stocker system.
DE4443552C2 (de) * 1994-12-07 1998-04-09 P & P Materialflussysteme Gmbh Kommissionieranlage
DE19513179C2 (de) * 1995-03-31 1997-02-13 Bellheimer Metallwerk Gmbh Lagerregal
WO1997022521A1 (fr) * 1995-12-15 1997-06-26 Sig Pack Systems Ag Dispositif pour la formation de groupes de produits en forme de disques empiles
US6417484B1 (en) 1998-12-21 2002-07-09 Micron Electronics, Inc. Laser marking system for dice carried in trays and method of operation
US6262388B1 (en) 1998-12-21 2001-07-17 Micron Electronics, Inc. Laser marking station with enclosure and method of operation
US7066708B1 (en) * 1999-10-19 2006-06-27 Micron Technology, Inc. Methods and apparatus for retaining a tray stack having a plurality of trays for carrying microelectric devices
DE19953965C1 (de) * 1999-11-09 2001-06-13 Asys Gmbh & Co Kg Vorrichtung zum Magazinieren von Teileträgern für Mikrosysteme
US6528760B1 (en) 2000-07-14 2003-03-04 Micron Technology, Inc. Apparatus and method using rotational indexing for laser marking IC packages carried in trays
US6524881B1 (en) 2000-08-25 2003-02-25 Micron Technology, Inc. Method and apparatus for marking a bare semiconductor die
US7169685B2 (en) 2002-02-25 2007-01-30 Micron Technology, Inc. Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive
DE102005023618B3 (de) * 2005-05-21 2006-12-07 Aci-Ecotec Gmbh & Co.Kg Einrichtung zum Vereinzeln von Silizium-Wafern von einem Stapel
US20070054115A1 (en) * 2005-09-08 2007-03-08 International Business Machines Corporation Method for cleaning particulate foreign matter from the surfaces of semiconductor wafers
CN104813129B (zh) * 2012-10-16 2017-01-18 拉泽尔安诺德科技股份公司 炭素焙烧炉
CN104607993B (zh) * 2015-01-28 2017-04-26 昆山市佰奥自动化设备科技有限公司 料盘式自动上料收盘设备
CN104647451B (zh) * 2015-01-30 2016-06-15 无锡惠发特精密机械有限公司 汽车充气减震器用压缩/复原阀阀片切出装置
CN109132479A (zh) * 2018-07-06 2019-01-04 合肥格骄电子科技有限公司 一种自动卸料装置
WO2022236918A1 (fr) * 2021-05-08 2022-11-17 南京驭逡通信科技有限公司 Système multipistes de distribution de matériau et son procédé de distribution de matériau
CN113895907A (zh) * 2021-10-09 2022-01-07 温州圣嘉工艺品有限公司 一种防渗水不透气型中国结包板材料用皮壳机
CN114955574B (zh) * 2021-12-13 2023-04-18 昆明理工大学 一种可调式托盘库
CN114985294B (zh) * 2022-05-31 2023-07-21 东莞广达智能科技有限公司 一种芯片全自动检测设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1940867A (en) * 1930-05-31 1933-12-26 Westinghouse Electric & Mfg Co Circuitous elevator
DE712332C (de) * 1936-11-17 1941-10-16 Erna Freund Auswahlselbstverkaeufer
US2333097A (en) * 1941-07-14 1943-11-02 Hamilton Mfg Co Storage cabinet, and more particularly printer's form storage cabinet
US2762489A (en) * 1950-03-16 1956-09-11 O'sullivan Eugene Apparatus for the transporting and storing of goods
US2617700A (en) * 1950-06-07 1952-11-11 Cornelius W Christie Cabinet having movable storage container
US2701065A (en) * 1950-09-06 1955-02-01 Charles A Bertel Apparatus for storing and handling containers
US3038078A (en) * 1959-02-13 1962-06-05 Walter P Kern Automatic control for programming sample changing in radiation detecting system
US2978125A (en) * 1959-02-20 1961-04-04 Sylvania Electric Prod Grid loading device
DE1259237B (de) * 1961-05-27 1968-01-18 Niepmann & Co Maschf Fr Vorrichtung zum Entleeren von Zigarettenbehaeltern
DE1179866B (de) * 1961-09-09 1964-10-15 Demag Zug Gmbh Hublader
US3308977A (en) * 1965-10-04 1967-03-14 Ibm Automatic tray handler
US3420392A (en) * 1966-02-01 1969-01-07 Fmc Corp Tray filling and handling system
US3447697A (en) * 1966-04-04 1969-06-03 Whiting Corp Article handling apparatus

Also Published As

Publication number Publication date
FR2018893A1 (fr) 1970-06-26
US3625384A (en) 1971-12-07
DE1948425B2 (de) 1980-06-19
GB1265345A (fr) 1972-03-01
DE1948425C3 (de) 1981-02-26
JPS4936151B1 (fr) 1974-09-27
DE1948425A1 (de) 1970-04-02

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