CA951341A - Semiconductor wafer set feeding system - Google Patents
Semiconductor wafer set feeding systemInfo
- Publication number
- CA951341A CA951341A CA060,846,A CA60846A CA951341A CA 951341 A CA951341 A CA 951341A CA 60846 A CA60846 A CA 60846A CA 951341 A CA951341 A CA 951341A
- Authority
- CA
- Canada
- Prior art keywords
- semiconductor wafer
- feeding system
- wafer set
- set feeding
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G59/00—De-stacking of articles
- B65G59/06—De-stacking from the bottom of the stack
- B65G59/061—De-stacking from the bottom of the stack articles being separated substantially along the axis of the stack
- B65G59/062—De-stacking from the bottom of the stack articles being separated substantially along the axis of the stack by means of reciprocating or oscillating escapement-like mechanisms
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- De-Stacking Of Articles (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76289668A | 1968-09-26 | 1968-09-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA951341A true CA951341A (en) | 1974-07-16 |
Family
ID=25066319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA060,846,A Expired CA951341A (en) | 1968-09-26 | 1969-09-02 | Semiconductor wafer set feeding system |
Country Status (6)
Country | Link |
---|---|
US (1) | US3625384A (en) |
JP (1) | JPS4936151B1 (en) |
CA (1) | CA951341A (en) |
DE (1) | DE1948425C3 (en) |
FR (1) | FR2018893A1 (en) |
GB (1) | GB1265345A (en) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6076652A (en) | 1971-04-16 | 2000-06-20 | Texas Instruments Incorporated | Assembly line system and apparatus controlling transfer of a workpiece |
US3776405A (en) * | 1972-01-24 | 1973-12-04 | Eastman Kodak Co | Apparatus for unloading cartridges from trays |
US3920152A (en) * | 1974-05-31 | 1975-11-18 | Walter A Shields | Receptacle unstacking and transporting device |
CA1044379A (en) * | 1974-12-28 | 1978-12-12 | Sony Corporation | Wafer transfer device |
US3976208A (en) * | 1975-02-03 | 1976-08-24 | The Quaker Oats Company | Apparatus for providing endless succession of compartmented trays |
GB2028283B (en) * | 1978-07-03 | 1982-08-11 | Honeywell Inf Systems | Assembling apparatus for sheet like articles |
US4647266A (en) * | 1979-12-21 | 1987-03-03 | Varian Associates, Inc. | Wafer coating system |
US5024747A (en) * | 1979-12-21 | 1991-06-18 | Varian Associates, Inc. | Wafer coating system |
US4756815A (en) * | 1979-12-21 | 1988-07-12 | Varian Associates, Inc. | Wafer coating system |
US4599026A (en) * | 1985-02-26 | 1986-07-08 | Amp Incorporated | Apparatus for providing a continuous supply of workpieces |
US4817556A (en) * | 1987-05-04 | 1989-04-04 | Varian Associates, Inc. | Apparatus for retaining wafers |
US5040484A (en) * | 1987-05-04 | 1991-08-20 | Varian Associates, Inc. | Apparatus for retaining wafers |
DE3723564A1 (en) * | 1987-07-16 | 1989-01-26 | Somar Corp | PALLET STORAGE DEVICE FOR PRINTER |
DE4443552C2 (en) * | 1994-12-07 | 1998-04-09 | P & P Materialflussysteme Gmbh | Order picking system |
DE19513179C2 (en) * | 1995-03-31 | 1997-02-13 | Bellheimer Metallwerk Gmbh | Storage rack |
WO1997022521A1 (en) * | 1995-12-15 | 1997-06-26 | Sig Pack Systems Ag | Device for forming groups of stacked disc-like products |
US6417484B1 (en) * | 1998-12-21 | 2002-07-09 | Micron Electronics, Inc. | Laser marking system for dice carried in trays and method of operation |
US6262388B1 (en) | 1998-12-21 | 2001-07-17 | Micron Electronics, Inc. | Laser marking station with enclosure and method of operation |
US7066708B1 (en) * | 1999-10-19 | 2006-06-27 | Micron Technology, Inc. | Methods and apparatus for retaining a tray stack having a plurality of trays for carrying microelectric devices |
DE19953965C1 (en) * | 1999-11-09 | 2001-06-13 | Asys Gmbh & Co Kg | Device to magazine pallets, especially process modules for work centres; has height-adjustable cassette with rests for pallets, gripper arranged between pallets and supports at fixed height |
US6528760B1 (en) | 2000-07-14 | 2003-03-04 | Micron Technology, Inc. | Apparatus and method using rotational indexing for laser marking IC packages carried in trays |
US6524881B1 (en) | 2000-08-25 | 2003-02-25 | Micron Technology, Inc. | Method and apparatus for marking a bare semiconductor die |
US7169685B2 (en) | 2002-02-25 | 2007-01-30 | Micron Technology, Inc. | Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive |
DE102005023618B3 (en) * | 2005-05-21 | 2006-12-07 | Aci-Ecotec Gmbh & Co.Kg | Device for separating silicon wafers from a stack |
US20070054115A1 (en) * | 2005-09-08 | 2007-03-08 | International Business Machines Corporation | Method for cleaning particulate foreign matter from the surfaces of semiconductor wafers |
CN104813129B (en) * | 2012-10-16 | 2017-01-18 | 拉泽尔安诺德科技股份公司 | Carbon baking furnace |
CN104607993B (en) * | 2015-01-28 | 2017-04-26 | 昆山市佰奥自动化设备科技有限公司 | Tray type automatic feeding and collecting equipment |
CN104647451B (en) * | 2015-01-30 | 2016-06-15 | 无锡惠发特精密机械有限公司 | Automobile inflating amortisseur compression/rebuilt valve valve block cuts out device |
CN109132479A (en) * | 2018-07-06 | 2019-01-04 | 合肥格骄电子科技有限公司 | A kind of automatic discharge unit |
WO2022236918A1 (en) * | 2021-05-08 | 2022-11-17 | 南京驭逡通信科技有限公司 | Multi-track material distributing system and material distributing method thereof |
CN113895907A (en) * | 2021-10-09 | 2022-01-07 | 温州圣嘉工艺品有限公司 | Anti-seepage and air-tight type Chinese knot wrapper-sheet machine |
CN114955574B (en) * | 2021-12-13 | 2023-04-18 | 昆明理工大学 | Adjustable tray warehouse |
CN114803321B (en) * | 2022-04-26 | 2024-05-17 | 安徽理工大学 | Mining conveyor belt for coal mining |
CN114985294B (en) * | 2022-05-31 | 2023-07-21 | 东莞广达智能科技有限公司 | Full-automatic chip detection equipment |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1940867A (en) * | 1930-05-31 | 1933-12-26 | Westinghouse Electric & Mfg Co | Circuitous elevator |
DE712332C (en) * | 1936-11-17 | 1941-10-16 | Erna Freund | Selective self-seller |
US2333097A (en) * | 1941-07-14 | 1943-11-02 | Hamilton Mfg Co | Storage cabinet, and more particularly printer's form storage cabinet |
US2762489A (en) * | 1950-03-16 | 1956-09-11 | O'sullivan Eugene | Apparatus for the transporting and storing of goods |
US2617700A (en) * | 1950-06-07 | 1952-11-11 | Cornelius W Christie | Cabinet having movable storage container |
US2701065A (en) * | 1950-09-06 | 1955-02-01 | Charles A Bertel | Apparatus for storing and handling containers |
US3038078A (en) * | 1959-02-13 | 1962-06-05 | Walter P Kern | Automatic control for programming sample changing in radiation detecting system |
US2978125A (en) * | 1959-02-20 | 1961-04-04 | Sylvania Electric Prod | Grid loading device |
DE1259237B (en) * | 1961-05-27 | 1968-01-18 | Niepmann & Co Maschf Fr | Device for emptying cigarette containers |
DE1179866B (en) * | 1961-09-09 | 1964-10-15 | Demag Zug Gmbh | Lift truck |
US3308977A (en) * | 1965-10-04 | 1967-03-14 | Ibm | Automatic tray handler |
US3420392A (en) * | 1966-02-01 | 1969-01-07 | Fmc Corp | Tray filling and handling system |
US3447697A (en) * | 1966-04-04 | 1969-06-03 | Whiting Corp | Article handling apparatus |
-
1968
- 1968-09-26 US US762896A patent/US3625384A/en not_active Expired - Lifetime
-
1969
- 1969-08-19 FR FR6928458A patent/FR2018893A1/fr not_active Withdrawn
- 1969-09-02 CA CA060,846,A patent/CA951341A/en not_active Expired
- 1969-09-18 JP JP44073648A patent/JPS4936151B1/ja active Pending
- 1969-09-24 GB GB1265345D patent/GB1265345A/en not_active Expired
- 1969-09-25 DE DE1948425A patent/DE1948425C3/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2018893A1 (en) | 1970-06-26 |
JPS4936151B1 (en) | 1974-09-27 |
DE1948425C3 (en) | 1981-02-26 |
GB1265345A (en) | 1972-03-01 |
DE1948425A1 (en) | 1970-04-02 |
US3625384A (en) | 1971-12-07 |
DE1948425B2 (en) | 1980-06-19 |
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