CA3025935C - Appareil et procede d'interferometrie photothermique - Google Patents
Appareil et procede d'interferometrie photothermique Download PDFInfo
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- CA3025935C CA3025935C CA3025935A CA3025935A CA3025935C CA 3025935 C CA3025935 C CA 3025935C CA 3025935 A CA3025935 A CA 3025935A CA 3025935 A CA3025935 A CA 3025935A CA 3025935 C CA3025935 C CA 3025935C
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- laser beam
- probe laser
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- 238000000034 method Methods 0.000 title claims description 26
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- 230000005284 excitation Effects 0.000 claims abstract description 111
- 239000011797 cavity material Substances 0.000 claims description 112
- 230000005540 biological transmission Effects 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000001094 photothermal spectroscopy Methods 0.000 claims description 14
- 206010001497 Agitation Diseases 0.000 claims description 6
- 208000002925 dental caries Diseases 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 39
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 30
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- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 3
- 229910001634 calcium fluoride Inorganic materials 0.000 description 3
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 230000005534 acoustic noise Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
- G01N2021/1712—Thermal lens, mirage effect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1725—Modulation of properties by light, e.g. photoreflectance
Abstract
L'invention concerne un appareil d'interférométrie photothermique (1) permettant de détecter une molécule dans un échantillon, en particulier un gaz à l'état de trace, ledit appareil comprenant : un interféromètre de Fabry-Perot (4) doté d'un premier miroir (5), d'un deuxième miroir (6) et d'une première cavité (7) servant à contenir l'échantillon situé entre le premier miroir (5) et le deuxième miroir (6); un agencement de laser sonde avec au moins un laser sonde (3) fournissant un premier faisceau laser de sonde (8a) et un second faisceau laser de sonde (8b); un laser d'excitation (2) servant à faire passer un faisceau laser d'excitation (2a) à travers la première cavité (7) de l'interféromètre de Fabry-Perot (4) pour exciter la molécule dans l'échantillon, l'interféromètre de Fabry-Perot (4) comprenant un troisième miroir (39), un quatrième miroir (40) et une seconde cavité (41) pour contenir l'échantillon situé entre le troisième miroir (39) et le quatrième miroir (40), la première cavité (7) et la seconde cavité (41) de l'interféromètre de Fabry-Perot (4) étant agencées de telle sorte que le premier faisceau laser de sonde (8a) croise le faisceau laser d'excitation (2a) dans la première cavité (7) et le second faisceau laser de sonde (8b) ne croise pas le faisceau laser d'excitation (2a) dans la seconde cavité; et une unité formant photodétecteur (9) comprenant un premier photodétecteur (44) pour détecter le premier faisceau laser de sonde transmis (8a) et un second photodétecteur (45) pour détecter le second faisceau laser de sonde transmis (8b).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA50624/2016 | 2016-07-13 | ||
| AT506242016 | 2016-07-13 | ||
| PCT/AT2017/060174 WO2018009953A1 (fr) | 2016-07-13 | 2017-07-12 | Appareil et procédé d'interférométrie photothermique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA3025935A1 CA3025935A1 (fr) | 2018-01-18 |
| CA3025935C true CA3025935C (fr) | 2021-03-09 |
Family
ID=59416504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3025935A Active CA3025935C (fr) | 2016-07-13 | 2017-07-12 | Appareil et procede d'interferometrie photothermique |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10732097B2 (fr) |
| EP (1) | EP3485254B1 (fr) |
| JP (1) | JP6786752B2 (fr) |
| CN (1) | CN109416318B (fr) |
| CA (1) | CA3025935C (fr) |
| RU (1) | RU2716146C1 (fr) |
| WO (1) | WO2018009953A1 (fr) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016117754B4 (de) * | 2016-09-21 | 2019-03-21 | Netzsch-Gerätebau GmbH | Verfahren zum Kalibrieren einer Vorrichtung zur thermischen Analyse von Proben |
| US10613067B2 (en) | 2018-04-25 | 2020-04-07 | King Fahd University Of Petroleum And Minerals | Method of measuring NO2 concentrations with a multimode laser beam |
| WO2019217499A1 (fr) * | 2018-05-11 | 2019-11-14 | Carrier Corporation | Système d'inspection comprenant un élément de décalage de longueur d'onde, et procédé correspondant |
| DE102018115420B4 (de) * | 2018-06-27 | 2020-03-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum Nachweisen eines Stoffes |
| JP7121606B2 (ja) * | 2018-09-11 | 2022-08-18 | 浜松ホトニクス株式会社 | 光計測装置 |
| CN109613408A (zh) * | 2019-02-01 | 2019-04-12 | 深圳供电局有限公司 | 放电检测仪 |
| DE102019104481A1 (de) * | 2019-02-21 | 2020-08-27 | Laser-Laboratorium Göttingen e.V. | Verfahren und Vorrichtung zum Identifizieren von flüchtigen Substanzen mit resonatorverstärkter Raman-Spektroskopie bei reduziertem Druck |
| WO2021005179A1 (fr) * | 2019-07-10 | 2021-01-14 | Ams Ag | Détecteur de gaz photothermique comprenant un guide d'ondes optique intégré sur puce |
| CN110542839B (zh) * | 2019-09-09 | 2021-11-23 | 重庆大学 | 用于sf6气体绝缘设备的全光学绝缘故障监测系统 |
| CN112924386B (zh) * | 2019-12-06 | 2024-05-07 | 香港理工大学深圳研究院 | 一种流体浓度检测方法及系统 |
| CN111504945B (zh) * | 2020-06-08 | 2023-06-13 | 朗思传感科技(深圳)有限公司 | 一种光纤光热气体传感装置及方法 |
| CN113252573B (zh) * | 2021-05-25 | 2022-09-30 | 哈尔滨工业大学 | 一种基于腔增强的光热光谱痕量气体检测装置及方法 |
| AT525495B1 (de) | 2021-09-17 | 2023-12-15 | Univ Wien Tech | Ausgleichsdetektion mit ICAPS innerhalb einer optischen Kavität |
| US20240069261A1 (en) * | 2022-08-23 | 2024-02-29 | Photonic Inc. | Suppression of excitation field for quantum light emitters using optical interferometers |
| CN115356281B (zh) * | 2022-10-20 | 2023-02-07 | 中国科学院新疆理化技术研究所 | 一种基于红外宽带光源的混合气体多参量测量方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4666308A (en) * | 1984-10-30 | 1987-05-19 | Stanford University | Method and apparatus for non-destructive testing using acoustic-optic laser probe |
| GB8530809D0 (en) * | 1985-12-13 | 1986-01-22 | Gen Electric Co Plc | Sensor |
| DE4231214C2 (de) | 1992-09-18 | 1994-12-08 | Kernforschungsz Karlsruhe | Photothermischer Sensor |
| JPH08261922A (ja) * | 1995-03-17 | 1996-10-11 | Furukawa Electric Co Ltd:The | 微量気体検出方法 |
| US20020094580A1 (en) * | 2001-01-16 | 2002-07-18 | Jorgenson James W. | Photothermal absorbance detection apparatus and method of using same |
| JP3949600B2 (ja) * | 2003-03-28 | 2007-07-25 | 株式会社神戸製鋼所 | 光熱変換測定装置及びその方法 |
| US7673517B2 (en) * | 2005-11-10 | 2010-03-09 | The United States Of America As Represented By The Secretary Of The Navy | System and method for optical interrogation of micro-mechanical sensors using microcavity interferometry |
| GB0612348D0 (en) * | 2006-06-21 | 2006-08-02 | Imp Innovations Ltd | Method and apparatus for coherently combining laser emission |
| CN101939634A (zh) * | 2007-12-13 | 2011-01-05 | 维也纳大学 | 用于分析天然产品的老化和/或质量的基于干涉的指示装置 |
| WO2012031208A2 (fr) | 2010-09-02 | 2012-03-08 | University Of Delaware | Détection ultrasensible de vapeurs chimiques par spectroscopie photothermique à microcavités |
| JP5743715B2 (ja) * | 2011-05-26 | 2015-07-01 | キヤノン株式会社 | 音響信号受信装置 |
| CN102507499B (zh) * | 2011-11-17 | 2013-10-16 | 合肥工业大学 | 采用光热干涉测量大气气溶胶吸收系数的装置 |
| CN102590112B (zh) * | 2012-02-07 | 2013-12-04 | 重庆大学 | 表面微结构硅悬臂梁增强型光热光谱痕量气体探测方法及装置 |
| KR20150097764A (ko) * | 2012-12-21 | 2015-08-26 | 마이크로닉스 인코포레이티드. | 휴대형 형광 검출 시스템 및 미량분석 카트리지 |
| US9372114B2 (en) * | 2014-08-20 | 2016-06-21 | William N. Carr | Spectrophotometer comprising an integrated Fabry-Perot interferometer |
| WO2016063918A1 (fr) * | 2014-10-23 | 2016-04-28 | 国立研究開発法人理化学研究所 | Analyseur de gaz, procédé d'analyse de gaz, procédé d'analyse métabolomique, et base de données |
| US20160139038A1 (en) * | 2014-11-19 | 2016-05-19 | Nxp B.V. | Gas sensor |
| CN104897613B (zh) * | 2015-04-08 | 2019-05-17 | 中国科学院合肥物质科学研究院 | 利用赫里奥特池测量气溶胶吸收的光热干涉装置及方法 |
-
2017
- 2017-07-12 US US16/310,261 patent/US10732097B2/en active Active
- 2017-07-12 WO PCT/AT2017/060174 patent/WO2018009953A1/fr unknown
- 2017-07-12 CA CA3025935A patent/CA3025935C/fr active Active
- 2017-07-12 JP JP2018565006A patent/JP6786752B2/ja active Active
- 2017-07-12 EP EP17745238.0A patent/EP3485254B1/fr active Active
- 2017-07-12 RU RU2018144099A patent/RU2716146C1/ru active
- 2017-07-12 CN CN201780037113.0A patent/CN109416318B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US10732097B2 (en) | 2020-08-04 |
| JP6786752B2 (ja) | 2020-11-18 |
| EP3485254B1 (fr) | 2021-09-15 |
| WO2018009953A1 (fr) | 2018-01-18 |
| CA3025935A1 (fr) | 2018-01-18 |
| RU2716146C1 (ru) | 2020-03-06 |
| CN109416318A (zh) | 2019-03-01 |
| JP2019520570A (ja) | 2019-07-18 |
| EP3485254A1 (fr) | 2019-05-22 |
| CN109416318B (zh) | 2021-07-09 |
| US20190195781A1 (en) | 2019-06-27 |
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Legal Events
| Date | Code | Title | Description |
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| EEER | Examination request |
Effective date: 20190208 |