CA2804059A1 - Method and apparatus for producing a nanostructured or smooth polymer article - Google Patents
Method and apparatus for producing a nanostructured or smooth polymer article Download PDFInfo
- Publication number
- CA2804059A1 CA2804059A1 CA2804059A CA2804059A CA2804059A1 CA 2804059 A1 CA2804059 A1 CA 2804059A1 CA 2804059 A CA2804059 A CA 2804059A CA 2804059 A CA2804059 A CA 2804059A CA 2804059 A1 CA2804059 A1 CA 2804059A1
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- Prior art keywords
- ceramic material
- polymer
- mold
- ductile
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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- 238000000034 method Methods 0.000 title claims abstract description 178
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- 238000001723 curing Methods 0.000 claims description 77
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- 229920003209 poly(hydridosilsesquioxane) Polymers 0.000 claims description 46
- 239000002904 solvent Substances 0.000 claims description 37
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- 238000004519 manufacturing process Methods 0.000 claims description 27
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- 239000000126 substance Substances 0.000 claims description 26
- 239000012700 ceramic precursor Substances 0.000 claims description 24
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- 238000001029 thermal curing Methods 0.000 claims description 19
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- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 claims description 10
- QRPMCZNLJXJVSG-UHFFFAOYSA-N trichloro(1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-henicosafluorodecyl)silane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)[Si](Cl)(Cl)Cl QRPMCZNLJXJVSG-UHFFFAOYSA-N 0.000 claims description 10
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- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 6
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 6
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- RZXDTJIXPSCHCI-UHFFFAOYSA-N hexa-1,5-diene-2,5-diol Chemical compound OC(=C)CCC(O)=C RZXDTJIXPSCHCI-UHFFFAOYSA-N 0.000 claims description 6
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 claims description 6
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- 239000004632 polycaprolactone Substances 0.000 claims description 6
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 claims description 6
- 229920001123 polycyclohexylenedimethylene terephthalate Polymers 0.000 claims description 6
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- AVXLXFZNRNUCRP-UHFFFAOYSA-N trichloro(1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-heptadecafluorooctyl)silane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)[Si](Cl)(Cl)Cl AVXLXFZNRNUCRP-UHFFFAOYSA-N 0.000 claims description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 5
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- 239000005062 Polybutadiene Substances 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 22
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
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- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 4
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C33/3878—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts used as masters for making successive impressions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
- B29C33/424—Moulding surfaces provided with means for marking or patterning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
- G02B1/005—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials made of photonic crystals or photonic band gap materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/1213—Constructional arrangements comprising photonic band-gap structures or photonic lattices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/1219—Polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DKPA201000581 | 2010-07-01 | ||
| DKPA-201000581 | 2010-07-01 | ||
| PCT/DK2011/000075 WO2012000500A1 (en) | 2010-07-01 | 2011-06-29 | Method and apparatus for producing a nanostructured or smooth polymer article |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2804059A1 true CA2804059A1 (en) | 2012-01-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2804059A Abandoned CA2804059A1 (en) | 2010-07-01 | 2011-06-29 | Method and apparatus for producing a nanostructured or smooth polymer article |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20130101792A1 (enExample) |
| EP (1) | EP2588287A4 (enExample) |
| JP (1) | JP5865906B2 (enExample) |
| CN (1) | CN103209812B (enExample) |
| CA (1) | CA2804059A1 (enExample) |
| MX (1) | MX2013000106A (enExample) |
| WO (1) | WO2012000500A1 (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150197455A1 (en) * | 2011-12-08 | 2015-07-16 | Inmold Biosystems A/S | Spin-on-glass assisted polishing of rough substrates |
| US11497681B2 (en) | 2012-02-28 | 2022-11-15 | Corning Incorporated | Glass articles with low-friction coatings |
| US10737973B2 (en) | 2012-02-28 | 2020-08-11 | Corning Incorporated | Pharmaceutical glass coating for achieving particle reduction |
| SG10201806654PA (en) | 2012-02-28 | 2018-09-27 | Corning Inc | Glass articles with low-friction coatings |
| DK2823357T3 (en) * | 2012-03-09 | 2016-06-13 | Univ Danmarks Tekniske | PROCEDURE FOR MANUFACTURING A TOOL PART FOR A INJECTION CASTING PROCESS, A HOT PRINTING PROCESS, A NANO PRINTING PROCESS, OR AN EXTRUDING PROCESS |
| US10273048B2 (en) | 2012-06-07 | 2019-04-30 | Corning Incorporated | Delamination resistant glass containers with heat-tolerant coatings |
| US9034442B2 (en) | 2012-11-30 | 2015-05-19 | Corning Incorporated | Strengthened borosilicate glass containers with improved damage tolerance |
| US10117806B2 (en) | 2012-11-30 | 2018-11-06 | Corning Incorporated | Strengthened glass containers resistant to delamination and damage |
| WO2015144174A1 (en) * | 2014-03-24 | 2015-10-01 | Inmold A/S | Method and apparatus for producing a high aspect ratio nanostructured foil by extrusion coating or extrusion casting |
| CN107074628B (zh) | 2014-09-05 | 2020-05-19 | 康宁股份有限公司 | 玻璃制品和用于改善玻璃制品的可靠性的方法 |
| EP3206998B1 (en) | 2014-11-26 | 2021-09-08 | Corning Incorporated | Methods for producing strengthened and durable glass containers |
| WO2016092014A1 (en) | 2014-12-10 | 2016-06-16 | Inmold A/S | Method and apparatus for producing a nanostructured or microstructured foil by extrusion coating or extrusion casting |
| US10007052B2 (en) | 2015-02-04 | 2018-06-26 | Heptagon Micro Optics Pte. Ltd. | Method for manufacturing waveguide structures on wafer-level and corresponding waveguide structures |
| EP3150564B1 (en) | 2015-09-30 | 2018-12-05 | Corning Incorporated | Halogenated polyimide siloxane chemical compositions and glass articles with halogenated polylmide siloxane low-friction coatings |
| TWI672212B (zh) * | 2016-08-25 | 2019-09-21 | 國立成功大學 | 奈米壓印組合體及其壓印方法 |
| CN106750431A (zh) * | 2016-12-15 | 2017-05-31 | 大连理工大学 | 一种聚合物柔性薄膜的制备方法 |
| JP6380626B1 (ja) | 2017-07-19 | 2018-08-29 | オムロン株式会社 | 樹脂構造体の製造方法および樹脂構造体 |
| SG11202005275QA (en) * | 2017-12-06 | 2020-07-29 | Agency Science Tech & Res | An imprinted polymeric substrate |
| WO2020010524A1 (zh) * | 2018-07-10 | 2020-01-16 | 南方科技大学 | 表面具备功能性微纳结构的陶瓷涂层及其制备方法 |
| WO2020239873A1 (en) | 2019-05-28 | 2020-12-03 | Rel8 Aps | Method and apparatus for producing a barcode in a mouldable material |
| WO2021126153A1 (en) | 2019-12-16 | 2021-06-24 | Hewlett-Packard Development Company, L.P. | Three-dimensional printed polymer objects |
| US20230001609A1 (en) * | 2019-12-18 | 2023-01-05 | Basf Coatings Gmbh | Process for producing a structured and optionally coated article and article obtained from said process |
| LU101796B1 (de) * | 2020-05-14 | 2021-11-15 | Phoenix Contact Gmbh & Co | Laserbeschriftbares Kennzeichnungsschild |
| US20230295446A1 (en) | 2020-07-01 | 2023-09-21 | SiOx ApS | An anti-fouling treated heat exchanger and method for producing an anti-fouling treated heat exchanger |
| CN111960379A (zh) * | 2020-08-24 | 2020-11-20 | 哈尔滨工业大学 | 一种仿生可控吸附的制备方法 |
| CN116075288A (zh) | 2020-09-04 | 2023-05-05 | 康宁股份有限公司 | 阻挡紫外光的经涂覆的药物包装 |
| US11743923B1 (en) * | 2020-10-28 | 2023-08-29 | T-Mobile Innovations Llc | Dynamic radio resource provisioning based on network capability parameter |
| JP7303276B2 (ja) * | 2021-06-16 | 2023-07-04 | 長春石油化學股▲分▼有限公司 | エチレン－ビニルアルコール共重合体樹脂組成物 |
| CN120991766B (zh) * | 2025-10-21 | 2026-01-27 | 常州灵动芯光科技有限公司 | 一种基于纳米压印技术的光波导形貌测量方法 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60257207A (ja) * | 1984-06-01 | 1985-12-19 | Tanazawa Hatsukoushiya:Kk | 樹脂成形用型並びに、その作製方法 |
| JP2522683B2 (ja) * | 1987-12-28 | 1996-08-07 | 呉羽化学工業株式会社 | ポリアリ―レンスルフィド樹脂シ―トおよびその製造方法 |
| JP3147439B2 (ja) * | 1991-10-31 | 2001-03-19 | 株式会社イノアックコーポレーション | ポリウレタン成形用の型とその製造方法 |
| JP3382281B2 (ja) * | 1993-01-22 | 2003-03-04 | 株式会社太洋工作所 | 熱可塑性樹脂射出成形用金型 |
| DE4307869C2 (de) * | 1993-03-12 | 1996-04-04 | Microparts Gmbh | Mikrostrukturkörper und Verfahren zu deren Herstellung |
| US5632925A (en) * | 1995-01-10 | 1997-05-27 | Logic Tools L.L.C. | Ceramic or Modified silicone filled molding tools for high temperature processing |
| US20080217813A1 (en) * | 1995-11-15 | 2008-09-11 | Chou Stephen Y | Release surfaces, particularly for use in nanoimprint lithography |
| US5658506A (en) * | 1995-12-27 | 1997-08-19 | Ford Global Technologies, Inc. | Methods of making spray formed rapid tools |
| JP3938253B2 (ja) * | 1997-12-26 | 2007-06-27 | 日本板硝子株式会社 | 樹脂正立等倍レンズアレイおよびその製造方法 |
| US6174481B1 (en) * | 1998-09-10 | 2001-01-16 | Lear Automotive Dearborn, Inc. | Method for forming cast tooling for polymer molding |
| JP4208447B2 (ja) * | 2001-09-26 | 2009-01-14 | 独立行政法人科学技術振興機構 | Ｓｏｇを用いた室温ナノ−インプリント−リソグラフィー |
| JP2003251634A (ja) * | 2002-03-04 | 2003-09-09 | Mitsubishi Rayon Co Ltd | フライアイレンズシート製造用型およびその製造方法 |
| US6820677B2 (en) * | 2002-08-20 | 2004-11-23 | Ford Motor Company | Method of making a spray formed article |
| US6810939B2 (en) * | 2003-02-04 | 2004-11-02 | Ford Motor Company | Spray formed articles made of boron steel and method for making the same |
| JP4317375B2 (ja) * | 2003-03-20 | 2009-08-19 | 株式会社日立製作所 | ナノプリント装置、及び微細構造転写方法 |
| WO2006093963A1 (en) * | 2005-03-02 | 2006-09-08 | The Trustees Of Boston College | Structures and methods of replicating the same |
| GB0505294D0 (en) * | 2005-03-15 | 2005-04-20 | Riso Nat Lab | Transferring materials to polymer surfaces |
| DE102005013974A1 (de) * | 2005-03-26 | 2006-09-28 | Krauss-Maffei Kunststofftechnik Gmbh | Verfahren und Vorrichtung zur Herstellung mikro- bzw. nanostrukturierter Bauteile |
| EP1922283A2 (en) * | 2005-08-23 | 2008-05-21 | Koninklijke Philips Electronics N.V. | Method for manufacturing a component having a three-dimensional structure in a surface region and a ceramic component |
| JP4058445B2 (ja) * | 2005-11-25 | 2008-03-12 | Ｔｄｋ株式会社 | スタンパー、インプリント方法および情報記録媒体製造方法 |
| US7517211B2 (en) * | 2005-12-21 | 2009-04-14 | Asml Netherlands B.V. | Imprint lithography |
| WO2007094848A2 (en) * | 2006-02-13 | 2007-08-23 | Dow Corning Corporation | Antireflective coating material |
| JP2008053666A (ja) * | 2006-08-28 | 2008-03-06 | Meisho Kiko Kk | パターン形成方法およびパターン形成体 |
| KR100831046B1 (ko) * | 2006-09-13 | 2008-05-21 | 삼성전자주식회사 | 나노 임프린트용 몰드 및 그 제조 방법 |
| US8027086B2 (en) * | 2007-04-10 | 2011-09-27 | The Regents Of The University Of Michigan | Roll to roll nanoimprint lithography |
| DE102007020655A1 (de) * | 2007-04-30 | 2008-11-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen dünner Schichten und entsprechende Schicht |
| US8293354B2 (en) * | 2008-04-09 | 2012-10-23 | The Regents Of The University Of Michigan | UV curable silsesquioxane resins for nanoprint lithography |
| JP5215833B2 (ja) * | 2008-12-11 | 2013-06-19 | 株式会社日立ハイテクノロジーズ | 微細パターン転写用スタンパ及びその製造方法 |
-
2011
- 2011-06-29 MX MX2013000106A patent/MX2013000106A/es unknown
- 2011-06-29 JP JP2013517017A patent/JP5865906B2/ja not_active Expired - Fee Related
- 2011-06-29 WO PCT/DK2011/000075 patent/WO2012000500A1/en not_active Ceased
- 2011-06-29 CN CN201180042279.4A patent/CN103209812B/zh not_active Expired - Fee Related
- 2011-06-29 CA CA2804059A patent/CA2804059A1/en not_active Abandoned
- 2011-06-29 US US13/806,518 patent/US20130101792A1/en not_active Abandoned
- 2011-06-29 EP EP11800209.6A patent/EP2588287A4/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP2588287A1 (en) | 2013-05-08 |
| CN103209812B (zh) | 2016-06-15 |
| US20130101792A1 (en) | 2013-04-25 |
| EP2588287A4 (en) | 2018-01-17 |
| JP2013534880A (ja) | 2013-09-09 |
| MX2013000106A (es) | 2013-06-03 |
| WO2012000500A1 (en) | 2012-01-05 |
| JP5865906B2 (ja) | 2016-02-17 |
| CN103209812A (zh) | 2013-07-17 |
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| FZDE | Discontinued |
Effective date: 20170629 |