CA2688245A1 - Procede de formation d'une connexion entre une electrode et un actionneur dans un ensemble de buses a jet d'encre - Google Patents
Procede de formation d'une connexion entre une electrode et un actionneur dans un ensemble de buses a jet d'encre Download PDFInfo
- Publication number
- CA2688245A1 CA2688245A1 CA002688245A CA2688245A CA2688245A1 CA 2688245 A1 CA2688245 A1 CA 2688245A1 CA 002688245 A CA002688245 A CA 002688245A CA 2688245 A CA2688245 A CA 2688245A CA 2688245 A1 CA2688245 A1 CA 2688245A1
- Authority
- CA
- Canada
- Prior art keywords
- actuator
- electrode
- connector post
- active beam
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract 24
- 239000004020 conductor Substances 0.000 claims abstract 5
- 239000011810 insulating material Substances 0.000 claims abstract 4
- 239000000758 substrate Substances 0.000 claims abstract 4
- 238000007772 electroless plating Methods 0.000 claims abstract 3
- 238000000151 deposition Methods 0.000 claims 6
- 239000000463 material Substances 0.000 claims 6
- 229910052751 metal Inorganic materials 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000003054 catalyst Substances 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
- B41J2002/14435—Moving nozzle made of thermal bend detached actuator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/18—Electrical connection established using vias
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA2795383A CA2795383C (fr) | 2007-06-15 | 2007-06-15 | Circuit integre de tete d'impression comprenant des dispositifs de buse avec tiges de connexion definies dans les parois laterales de la chambre |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/AU2007/000846 WO2008151351A1 (fr) | 2007-06-15 | 2007-06-15 | Procédé de formation d'une connexion entre une électrode et un actionneur dans un ensemble de buses à jet d'encre |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2795383A Division CA2795383C (fr) | 2007-06-15 | 2007-06-15 | Circuit integre de tete d'impression comprenant des dispositifs de buse avec tiges de connexion definies dans les parois laterales de la chambre |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2688245A1 true CA2688245A1 (fr) | 2008-12-18 |
| CA2688245C CA2688245C (fr) | 2012-12-18 |
Family
ID=40129117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2688245A Active CA2688245C (fr) | 2007-06-15 | 2007-06-15 | Procede de formation d'une connexion entre une electrode et un actionneur dans un ensemble de buses a jet d'encre |
Country Status (5)
| Country | Link |
|---|---|
| EP (2) | EP2527152B1 (fr) |
| KR (1) | KR101064043B1 (fr) |
| CA (1) | CA2688245C (fr) |
| TW (2) | TWI409175B (fr) |
| WO (1) | WO2008151351A1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI495570B (zh) * | 2009-07-27 | 2015-08-11 | Memjet Technology Ltd | 具背側電連接之噴墨列印頭組件 |
| JP6575097B2 (ja) * | 2015-03-24 | 2019-09-18 | セイコーエプソン株式会社 | ヘッドユニットおよび液体吐出装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3177897B2 (ja) | 1996-04-23 | 2001-06-18 | ザール テクノロジー リミテッド | 液滴デポジット装置 |
| JPH11320873A (ja) * | 1997-06-05 | 1999-11-24 | Ricoh Co Ltd | インクジェットヘッド |
| US6648453B2 (en) * | 1997-07-15 | 2003-11-18 | Silverbrook Research Pty Ltd | Ink jet printhead chip with predetermined micro-electromechanical systems height |
| US6416167B1 (en) | 1997-07-15 | 2002-07-09 | Silverbrook Research Pty Ltd | Thermally actuated ink jet printing mechanism having a series of thermal actuator units |
| US6682174B2 (en) * | 1998-03-25 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet nozzle arrangement configuration |
| US6260953B1 (en) | 1997-07-15 | 2001-07-17 | Silverbrook Research Pty Ltd | Surface bend actuator vented ink supply ink jet printing mechanism |
| US6416168B1 (en) * | 1997-07-15 | 2002-07-09 | Silverbrook Research Pty Ltd | Pump action refill ink jet printing mechanism |
| JP4296361B2 (ja) * | 1999-04-06 | 2009-07-15 | 富士フイルム株式会社 | インクジェットヘッド、インクジェットプリンタ、及び、インクジェットヘッドの製造方法 |
| US6265301B1 (en) * | 1999-05-12 | 2001-07-24 | Taiwan Semiconductor Manufacturing Company | Method of forming metal interconnect structures and metal via structures using photolithographic and electroplating or electro-less plating procedures |
| JP4288399B2 (ja) * | 2000-03-31 | 2009-07-01 | 富士フイルム株式会社 | マルチノズルインクジェットヘッド及びその製造方法 |
| WO2001089842A1 (fr) * | 2000-05-24 | 2001-11-29 | Silverbrook Research Pty. Ltd. | Joint etanche fluidique pour un assemblage de buse de jet d'encre |
| US6623101B1 (en) | 2000-10-20 | 2003-09-23 | Silverbrook Research Pty Ltd | Moving nozzle ink jet |
| KR100552660B1 (ko) * | 2001-08-09 | 2006-02-20 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드 |
| TW200500292A (en) * | 2002-11-20 | 2005-01-01 | Reveo Inc | Method of fabricating multi layer MENs and microfluidic devices |
| US6755509B2 (en) * | 2002-11-23 | 2004-06-29 | Silverbrook Research Pty Ltd | Thermal ink jet printhead with suspended beam heater |
| US7614727B2 (en) * | 2004-09-30 | 2009-11-10 | Fujifilm Corporation | Liquid ejection head, manufacturing method thereof, and image forming apparatus |
| JP5008844B2 (ja) | 2005-08-23 | 2012-08-22 | 株式会社リコー | 液滴吐出ヘッド、インクジェット記録装置、及び液滴吐出ヘッドの製造方法 |
-
2007
- 2007-06-15 KR KR1020097025354A patent/KR101064043B1/ko active IP Right Grant
- 2007-06-15 EP EP12174685.3A patent/EP2527152B1/fr active Active
- 2007-06-15 CA CA2688245A patent/CA2688245C/fr active Active
- 2007-06-15 WO PCT/AU2007/000846 patent/WO2008151351A1/fr active Application Filing
- 2007-06-15 EP EP07870177A patent/EP2160296B1/fr active Active
- 2007-10-09 TW TW096137839A patent/TWI409175B/zh active
- 2007-10-09 TW TW096137838A patent/TWI406772B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2527152B1 (fr) | 2013-12-11 |
| CA2688245C (fr) | 2012-12-18 |
| EP2160296A1 (fr) | 2010-03-10 |
| EP2160296B1 (fr) | 2012-08-15 |
| EP2160296A4 (fr) | 2010-09-08 |
| KR101064043B1 (ko) | 2011-09-08 |
| TW200848270A (en) | 2008-12-16 |
| WO2008151351A1 (fr) | 2008-12-18 |
| TWI409175B (zh) | 2013-09-21 |
| KR20100029187A (ko) | 2010-03-16 |
| TWI406772B (zh) | 2013-09-01 |
| EP2527152A1 (fr) | 2012-11-28 |
| TW200848271A (en) | 2008-12-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |