TW200500292A - Method of fabricating multi layer MENs and microfluidic devices - Google Patents

Method of fabricating multi layer MENs and microfluidic devices

Info

Publication number
TW200500292A
TW200500292A TW092132579A TW92132579A TW200500292A TW 200500292 A TW200500292 A TW 200500292A TW 092132579 A TW092132579 A TW 092132579A TW 92132579 A TW92132579 A TW 92132579A TW 200500292 A TW200500292 A TW 200500292A
Authority
TW
Taiwan
Prior art keywords
layers
multi layer
microfluidic devices
devices
microelectromechanical
Prior art date
Application number
TW092132579A
Other languages
Chinese (zh)
Inventor
Sadeg M Faris
Original Assignee
Reveo Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reveo Inc filed Critical Reveo Inc
Publication of TW200500292A publication Critical patent/TW200500292A/en

Links

Abstract

A method for fabricating multi layer microelectromechanical and microfluidic devices is disclosed. Multi layer microelectromechanical and microfluidic devices are fabricated on a substrate with layers of predetermined weak and strong bond regions where deconstructed layers of devices at or on the weak bond regions. The layers are then peeled and subsequently bonded to produce a multi layer microelectromechanical and microfluidic devices. An arbitrary number of layers can be bonded and stacked to create either microelectromechanical or microfluidic device or a hybrid type of device. Also disclosed are methods of creating edge interconnects and vias through the substrate to form interconnections between layers and devices thereon.
TW092132579A 2002-11-20 2003-11-20 Method of fabricating multi layer MENs and microfluidic devices TW200500292A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42812502P 2002-11-20 2002-11-20
US43923203P 2003-01-10 2003-01-10

Publications (1)

Publication Number Publication Date
TW200500292A true TW200500292A (en) 2005-01-01

Family

ID=57797933

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092132579A TW200500292A (en) 2002-11-20 2003-11-20 Method of fabricating multi layer MENs and microfluidic devices

Country Status (1)

Country Link
TW (1) TW200500292A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI409175B (en) * 2007-06-15 2013-09-21 Silverbrook Res Pty Ltd Printhead integrated circuit comprising inkjet nozzle assemblies having connector posts
TWI458641B (en) * 2010-05-27 2014-11-01 Hewlett Packard Development Co Printhead and related methods and systems
TWI567023B (en) * 2012-05-14 2017-01-21 羅伯特博斯奇股份有限公司 Sensor component
TWI742099B (en) * 2016-06-29 2021-10-11 美商通用電機股份有限公司 System and method for fault interruption with mems switches

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI409175B (en) * 2007-06-15 2013-09-21 Silverbrook Res Pty Ltd Printhead integrated circuit comprising inkjet nozzle assemblies having connector posts
TWI458641B (en) * 2010-05-27 2014-11-01 Hewlett Packard Development Co Printhead and related methods and systems
TWI567023B (en) * 2012-05-14 2017-01-21 羅伯特博斯奇股份有限公司 Sensor component
TWI742099B (en) * 2016-06-29 2021-10-11 美商通用電機股份有限公司 System and method for fault interruption with mems switches

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